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Pulsed laser-assisted direct fabrication of Mo_(x)W_(1-x)S_(2) alloy-based flexible strain sensors with superior performance for high-temperature applications
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作者 Kexin Wang Hanxin Wang +7 位作者 Xiaoshan Zhang Yingzhe Li Yilin Zhou Manzhang Xu Weiwei Li Lu Zheng Xuewen Wang Wei Huang 《Microsystems & Nanoengineering》 2025年第4期351-362,共12页
Flexible strain sensors with high sensitivity and stability at high temperatures are significantly desirable for their accurate and long-term signal detection in wearable devices,environment monitoring,and aerospace e... Flexible strain sensors with high sensitivity and stability at high temperatures are significantly desirable for their accurate and long-term signal detection in wearable devices,environment monitoring,and aerospace electronics.Despite the considerable efforts in materials development and structural design,it remains a challenge to develop highly sensitive,flexible strain sensors operating at high temperatures due to the trade-off between sensitivity and stability for the representative sensing materials.Herein,we develop a high-temperature flexible sensor using Mo_(x)W_(1-x)S_(2) alloy films.A pulsed laser is introduced to directly synthesize Mo_(x)W_(1-x)S_(2) patterns with controllable compositions and physical parameters,enabling the realization of flexible sensors without photolithography or transfer procedures.The resultant flexible sensors exhibit a high gauge factor of 97.4,a low strain detection of 4.9με,and strong tolerance to a temperature of 500℃.Owing to its superior performance,we develop a wireless acoustic recognition system to distinguish tiny strain signals of tuning forks with a vibration frequency up to 128 Hz under extreme temperature conditions.The laser method for the direct fabrication of Mo_(x)W_(1-x)S_(2) alloy-based flexible sensors holds great potential in the precise detection of strain signals from complex structures at high temperatures. 展开更多
关键词 structural designit direct fabrication strain sensors MoxW xS alloy materials development pulsed laser flexible strain sensors wearable devicesenvironment monitoringand
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