The origin of the piezoelectric effect of GaAs is discussed in some detail.TheGa atoms are negatively charged and As atoms positively charged.The piezoelectric con-stant tensors for arbitrarily oriented GaAs have been...The origin of the piezoelectric effect of GaAs is discussed in some detail.TheGa atoms are negatively charged and As atoms positively charged.The piezoelectric con-stant tensors for arbitrarily oriented GaAs have been obtained.It is verified that for nor-mal stress when the GaAs samples are oriented in the 〈111〉 direction the maximumpiezoelectric effect occurs.As far as the piezoelectric properties and fabrication technologyare concerned,〈100〉 oriented GaAs substratcs are fit for the force sensors.展开更多
文摘The origin of the piezoelectric effect of GaAs is discussed in some detail.TheGa atoms are negatively charged and As atoms positively charged.The piezoelectric con-stant tensors for arbitrarily oriented GaAs have been obtained.It is verified that for nor-mal stress when the GaAs samples are oriented in the 〈111〉 direction the maximumpiezoelectric effect occurs.As far as the piezoelectric properties and fabrication technologyare concerned,〈100〉 oriented GaAs substratcs are fit for the force sensors.
