The piezoelectric effect is used in sensing applications such as in force and displacement sensors.However,the brittleness and low performance of piezoceramic lead zirconate titanate(PZT) often impede its applicabilit...The piezoelectric effect is used in sensing applications such as in force and displacement sensors.However,the brittleness and low performance of piezoceramic lead zirconate titanate(PZT) often impede its applicability in civil structures which are subjected to large loads.The concept of a piezocomposite electricity generating element(PCGE) has been proposed for improving the electricity generation performance and overcoming the brittleness of piezoceramic wafers.The post-curing residual stress in the PZT layer constitutes a main reason for the PCGE's enhanced performance,and the outer epoxy-based composites protect the brittle PZT layer.A d33-mode PCGE designed for bridge monitoring application was inserted in a bridge bearing to provide a permanent and simple weigh-in-motion system.The designed PCGEs were tested through a series of tests including fatigue and dynamic tests to verify their applicability for monitoring purposes in a bridge structure.A simple beam example was presented to show the applicability of the proposed bridge bearing equipped with the PCGE for adequately measuring the traffic loads.展开更多
为了克服表面叉指电极d33模式微机电系统（MEMS）悬臂梁振动俘能器中存在的压电材料极化不完全、存在弯曲电场等问题,提出了一种电极贯穿于整个压电层的全d33模式MEMS悬臂梁振动俘能器。根据机电耦合模型,分析了电极尺寸与材料厚度对压...为了克服表面叉指电极d33模式微机电系统（MEMS）悬臂梁振动俘能器中存在的压电材料极化不完全、存在弯曲电场等问题,提出了一种电极贯穿于整个压电层的全d33模式MEMS悬臂梁振动俘能器。根据机电耦合模型,分析了电极尺寸与材料厚度对压电俘能器输出功率的影响。优化结果表明：当硅基底厚度为20μm、电极宽度1μm时,电极间距最优范围为25~75μm,PZT材料最优厚度为7μm,归一化后得到功率密度为34.5 m Wcm-3g-2n。通过在表面叉指电极d33模式俘能器的基础上增加电镀电极工艺,设计了不锈钢基底的全d33模式MEMS俘能器的工艺流程,完成了部分单元工艺。展开更多
基金Project supported by Konkuk University,Korea,in 2014
文摘The piezoelectric effect is used in sensing applications such as in force and displacement sensors.However,the brittleness and low performance of piezoceramic lead zirconate titanate(PZT) often impede its applicability in civil structures which are subjected to large loads.The concept of a piezocomposite electricity generating element(PCGE) has been proposed for improving the electricity generation performance and overcoming the brittleness of piezoceramic wafers.The post-curing residual stress in the PZT layer constitutes a main reason for the PCGE's enhanced performance,and the outer epoxy-based composites protect the brittle PZT layer.A d33-mode PCGE designed for bridge monitoring application was inserted in a bridge bearing to provide a permanent and simple weigh-in-motion system.The designed PCGEs were tested through a series of tests including fatigue and dynamic tests to verify their applicability for monitoring purposes in a bridge structure.A simple beam example was presented to show the applicability of the proposed bridge bearing equipped with the PCGE for adequately measuring the traffic loads.
文摘为了克服表面叉指电极d33模式微机电系统（MEMS）悬臂梁振动俘能器中存在的压电材料极化不完全、存在弯曲电场等问题,提出了一种电极贯穿于整个压电层的全d33模式MEMS悬臂梁振动俘能器。根据机电耦合模型,分析了电极尺寸与材料厚度对压电俘能器输出功率的影响。优化结果表明：当硅基底厚度为20μm、电极宽度1μm时,电极间距最优范围为25~75μm,PZT材料最优厚度为7μm,归一化后得到功率密度为34.5 m Wcm-3g-2n。通过在表面叉指电极d33模式俘能器的基础上增加电镀电极工艺,设计了不锈钢基底的全d33模式MEMS俘能器的工艺流程,完成了部分单元工艺。
