Magnetically levitated stages（MLS） have potentials to obtain good motion performances in high vacuum environment. Yet the electromagnetic forces/torques corresponding to six degrees of freedom（DOF） motions have co...Magnetically levitated stages（MLS） have potentials to obtain good motion performances in high vacuum environment. Yet the electromagnetic forces/torques corresponding to six degrees of freedom（DOF） motions have coupling relationship with each current of coil array, and this coupling is still associated with the relative positions between the mover and the stator of the stage. So it is quite difficult to control the 6-DOF motions of the stage. By reasonable commutation of coil array, this complicated coupling relationship can be decoupled. The analytical force/torque-decomposing model of the stage is established first. Then the initial currents of coil array are commutated based on the pseudo inverse of the analytical force/torque-decomposing model matrix. And then the coil array currents are commutated again with different current bounds given to the initial currents as well as in the sense of minimum 2-norm of currents vector. Using the long stroke magnetically levitated stage with moving coils under investigation as examples, the currents of coil array are commutated with different current bounds adopting the proposed commutation method, the determination of current bound and the current bounds＇ influences on the heat-losses in coil array are analyzed, and the effectiveness of implementation algorithm of proposed commutation method is discussed. Simulation, analysis and discussion results indicate that the currents of coil array within the given current bound can be solved analytically by proposed commutation method, and the implementation algorithm does not need any searching or iteration. By the current-bounded commutation method proposed, the amplitude of coil array currents can be limited within an appropriate current bound（This is very beneficial to the improvement of the reliability and motion performance of the stage）, as well as these currents can also generate the desired forces and torques.展开更多
基金supported by National Basic Research Program of China(973 Program, Grant No. 2009CB724205)National Hi-tech Research and Development Program of China(863 Program, Grant No. 2009AA04Z148)Independent Research Program of the State Key Laboratory of Tribology of China(Grant No. SKLT08B04)
文摘Magnetically levitated stages（MLS） have potentials to obtain good motion performances in high vacuum environment. Yet the electromagnetic forces/torques corresponding to six degrees of freedom（DOF） motions have coupling relationship with each current of coil array, and this coupling is still associated with the relative positions between the mover and the stator of the stage. So it is quite difficult to control the 6-DOF motions of the stage. By reasonable commutation of coil array, this complicated coupling relationship can be decoupled. The analytical force/torque-decomposing model of the stage is established first. Then the initial currents of coil array are commutated based on the pseudo inverse of the analytical force/torque-decomposing model matrix. And then the coil array currents are commutated again with different current bounds given to the initial currents as well as in the sense of minimum 2-norm of currents vector. Using the long stroke magnetically levitated stage with moving coils under investigation as examples, the currents of coil array are commutated with different current bounds adopting the proposed commutation method, the determination of current bound and the current bounds＇ influences on the heat-losses in coil array are analyzed, and the effectiveness of implementation algorithm of proposed commutation method is discussed. Simulation, analysis and discussion results indicate that the currents of coil array within the given current bound can be solved analytically by proposed commutation method, and the implementation algorithm does not need any searching or iteration. By the current-bounded commutation method proposed, the amplitude of coil array currents can be limited within an appropriate current bound（This is very beneficial to the improvement of the reliability and motion performance of the stage）, as well as these currents can also generate the desired forces and torques.
