The widely used Shack-Hartmann wavefront sensor(SHWFS)is a wavefront measurement system.Its measurement accuracy is limited by the reference wavefront used for calibration and also by various residual errors of the se...The widely used Shack-Hartmann wavefront sensor(SHWFS)is a wavefront measurement system.Its measurement accuracy is limited by the reference wavefront used for calibration and also by various residual errors of the sensor itself.In this study,based on the principle of spherical wavefront calibration,a pinhole with a diameter of 1μm was used to generate spherical wavefronts with extremely small wavefront errors,with residual aberrations of 1.0×10^(−4)λRMS,providing a high-accuracy reference wavefront.In the first step of SHWFS calibration,we demonstrated a modified method to solve for three important parameters(f,the focal length of the microlens array(MLA),p,the sub-aperture size of the MLA,and s,the pixel size of the photodetector)to scale the measured SHWFS results.With only three iterations in the calculation,these parameters can be determined as exact values,with convergence to an acceptable accuracy.For a simple SHWFS with an MLA of 128×128 sub-apertures in a square configuration and a focal length of 2.8 mm,a measurement accuracy of 5.0×10^(−3)λRMS was achieved across the full pupil diameter of 13.8 mm with the proposed spherical wavefront calibration.The accuracy was dependent on the residual errors induced in manufacturing and assembly of the SHWFS.After removing these residual errors in the measured wavefront results,the accuracy of the SHWFS increased to 1.0×10^(−3)λRMS,with measured wavefronts in the range ofλ/4.Mid-term stability of wavefront measurements was confirmed,with residual deviations of 8.04×10^(−5)λPV and 7.94×10^(−5)λRMS.This study demonstrates that the modified calibration method for a high-accuracy spherical wavefront generated from a micrometer-scale pinhole can effectively improve the accuracy of an SHWFS.Further accuracy improvement was verified with correction of residual errors,making the method suitable for challenging wavefront measurements such as in lithography lenses,astronomical telescope systems,and adaptive optics.展开更多
The Shack-Hartmann wavefront sensor(SHWS)is widely used for high-speed,precise,and stable wavefront measurements.However,conventional SHWSs encounter a limitation in that the focused spot from each microlens is restri...The Shack-Hartmann wavefront sensor(SHWS)is widely used for high-speed,precise,and stable wavefront measurements.However,conventional SHWSs encounter a limitation in that the focused spot from each microlens is restricted to a single microlens,leading to a limited dynamic range.Herein,we propose an adaptive spot matching(ASM)-based SHWS to extend the dynamic range.This approach involves seeking an incident wavefront that best matches the detected spot distribution by employing a Hausdorff-distance-based nearest-distance matching strategy.The ASM-SHWS enables comprehensive spot matching across the entire imaging plane without requiring initial spot correspondences.Furthermore,due to its global matching capability,ASM-SHWS can maintain its capacity even if a portion of the spots are missing.Experiments showed that the ASM-SHWS could measure a high-curvature spherical wavefront with a local slope of 204.97 mrad,despite a 12.5%absence of spots.This value exceeds that of the conventional SHWS by a factor of 14.81.展开更多
Compressed sensing leverages the sparsity of signals to reduce the amount of measurements required for its reconstruction. The Shack-Hartmann wavefront sensor meanwhile is a flexible sensor where its sensitivity and d...Compressed sensing leverages the sparsity of signals to reduce the amount of measurements required for its reconstruction. The Shack-Hartmann wavefront sensor meanwhile is a flexible sensor where its sensitivity and dynamic range can be adjusted based on applications. An investigation is done by using compressed sensing in surface measurements with the Shack-Hartmann wavefront sensor. The results show that compressed sensing paired with the Shack-Hartmann wavefront sensor can reliably measure surfaces accurately. The performance of compressed sensing is compared with those of the iterative modal-based wavefront reconstruction and Fourier demodulation of Shack-Hartmann spot images. Compressed sensing performs comparably to the modal based iterative wavefront reconstruction in both simulation and experiment while performing better than the Fourier demodulation in simulation.展开更多
基金supported by the National Key Research and Development Program of China(2021YFF0700700)the National Natural Science Foundation of China(62075235)+2 种基金the Youth Innovation Promotion Association of the Chinese Academy of Sciences(2019320)Entrepreneurship and Innovation Talents in Jiangsu Province(Innovation of Scientific Research Institutes)the Jiangsu Provincial Key Research and Development Program(BE2019682).
文摘The widely used Shack-Hartmann wavefront sensor(SHWFS)is a wavefront measurement system.Its measurement accuracy is limited by the reference wavefront used for calibration and also by various residual errors of the sensor itself.In this study,based on the principle of spherical wavefront calibration,a pinhole with a diameter of 1μm was used to generate spherical wavefronts with extremely small wavefront errors,with residual aberrations of 1.0×10^(−4)λRMS,providing a high-accuracy reference wavefront.In the first step of SHWFS calibration,we demonstrated a modified method to solve for three important parameters(f,the focal length of the microlens array(MLA),p,the sub-aperture size of the MLA,and s,the pixel size of the photodetector)to scale the measured SHWFS results.With only three iterations in the calculation,these parameters can be determined as exact values,with convergence to an acceptable accuracy.For a simple SHWFS with an MLA of 128×128 sub-apertures in a square configuration and a focal length of 2.8 mm,a measurement accuracy of 5.0×10^(−3)λRMS was achieved across the full pupil diameter of 13.8 mm with the proposed spherical wavefront calibration.The accuracy was dependent on the residual errors induced in manufacturing and assembly of the SHWFS.After removing these residual errors in the measured wavefront results,the accuracy of the SHWFS increased to 1.0×10^(−3)λRMS,with measured wavefronts in the range ofλ/4.Mid-term stability of wavefront measurements was confirmed,with residual deviations of 8.04×10^(−5)λPV and 7.94×10^(−5)λRMS.This study demonstrates that the modified calibration method for a high-accuracy spherical wavefront generated from a micrometer-scale pinhole can effectively improve the accuracy of an SHWFS.Further accuracy improvement was verified with correction of residual errors,making the method suitable for challenging wavefront measurements such as in lithography lenses,astronomical telescope systems,and adaptive optics.
基金supported by the Fundamental Research Funds for the Central Universities of Shanghai Jiao Tong University and the Shanghai Jiao Tong University 2030 Initiative(No.WH510363001-10)the Oceanic Interdisciplinary Program of Shanghai Jiao Tong University(No.SL2022ZD205)+1 种基金the Science Foundation of the Donghai Laboratory(No.DH-2022KF01001)National Natural Science Foundation of China(No.62205189).
文摘The Shack-Hartmann wavefront sensor(SHWS)is widely used for high-speed,precise,and stable wavefront measurements.However,conventional SHWSs encounter a limitation in that the focused spot from each microlens is restricted to a single microlens,leading to a limited dynamic range.Herein,we propose an adaptive spot matching(ASM)-based SHWS to extend the dynamic range.This approach involves seeking an incident wavefront that best matches the detected spot distribution by employing a Hausdorff-distance-based nearest-distance matching strategy.The ASM-SHWS enables comprehensive spot matching across the entire imaging plane without requiring initial spot correspondences.Furthermore,due to its global matching capability,ASM-SHWS can maintain its capacity even if a portion of the spots are missing.Experiments showed that the ASM-SHWS could measure a high-curvature spherical wavefront with a local slope of 204.97 mrad,despite a 12.5%absence of spots.This value exceeds that of the conventional SHWS by a factor of 14.81.
文摘Compressed sensing leverages the sparsity of signals to reduce the amount of measurements required for its reconstruction. The Shack-Hartmann wavefront sensor meanwhile is a flexible sensor where its sensitivity and dynamic range can be adjusted based on applications. An investigation is done by using compressed sensing in surface measurements with the Shack-Hartmann wavefront sensor. The results show that compressed sensing paired with the Shack-Hartmann wavefront sensor can reliably measure surfaces accurately. The performance of compressed sensing is compared with those of the iterative modal-based wavefront reconstruction and Fourier demodulation of Shack-Hartmann spot images. Compressed sensing performs comparably to the modal based iterative wavefront reconstruction in both simulation and experiment while performing better than the Fourier demodulation in simulation.
