One-dimensional nano-grating standard(ODNGS)is widely recognized as a crucial nanometric standard for metrological technology.However,achieving the ultratiny size of ODNGS with high consistent uniformity and low rough...One-dimensional nano-grating standard(ODNGS)is widely recognized as a crucial nanometric standard for metrological technology.However,achieving the ultratiny size of ODNGS with high consistent uniformity and low roughness by conventional processes such as the inductively coupled plasma(ICP)etching methodpresents a significant challenge in obtaining accurate calibration values.In this work,a 50-nm ODNGS with a conformal buffer layer(Al_(2)O_(3))is successfully obtained,indicating outstanding stability and abrasion resistance.Remarkably,the introduction of hydrogen silsesquioxane(HSQ)and amorphous Al_(2)O_(3)simultaneously guarantees an incredibly small expanded uncertainty(0.5 nm)and repeatability of the standard uniformity(less than 0.3 nm)in the grating dimensions.TheⅠ-Ⅴcurves of ODNGS with an Al_(2)O_(3)buffer layer at room temperature(RT)and200℃are depicted respectively to showcase the sustained favorable insulation properties.Notably,the nanostructure fluctuation,line edge roughness(LER)and line width roughness(LWR)of the standard can be decreased obviously by 64.1%,63%and 70%,respectively.Our results suggest that the ODNGS with Al_(2)O_(3)exhibits exceptional precision and robust calibration reliability for calibrating nanoscale measuring instruments.It holds tremendous potential for manufacturing high-precision nanostructures and grating arrays with precisely controllable dimensions,which will play a pivotal role in the fabrication of microfluidics chips,metasurface and photodetectors in the future.展开更多
Implantable hydrogel-based bioelectronics(IHB)can precisely monitor human health and diagnose diseases.However,achieving biodegradability,biocompatibility,and high conformality with soft tissues poses significant chal...Implantable hydrogel-based bioelectronics(IHB)can precisely monitor human health and diagnose diseases.However,achieving biodegradability,biocompatibility,and high conformality with soft tissues poses significant challenges for IHB.Gelatin is the most suitable candidate for IHB since it is a collagen hydrolysate and a substantial part of the extracellular matrix found naturally in most tissues.This study used 3D printing ultrafine fiber networks with metamaterial design to embed into ultra-low elastic modulus hydrogel to create a novel gelatin-based conductive film(GCF)with mechanical programmability.The regulation of GCF nearly covers soft tissue mechanics,an elastic modulus from 20 to 420 kPa,and a Poisson’s ratio from-0.25 to 0.52.The negative Poisson’s ratio promotes conformality with soft tissues to improve the efficiency of biological interfaces.The GCF can monitor heartbeat signals and respiratory rate by determining cardiac deformation due to its high conformability.Notably,the gelatin characteristics of the biodegradable GCF enable the sensor to monitor and support tissue restoration.The GCF metamaterial design offers a unique idea for bioelectronics to develop implantable sensors that integrate monitoring and tissue repair and a customized method for endowing implanted sensors to be highly conformal with soft tissues.展开更多
In this study,the design,analysis,manufacturing,and testing of a 3D-printed conformal microstrip array antenna for high-temperature environments is presented.3D printing technology is used to fabricate a curved cerami...In this study,the design,analysis,manufacturing,and testing of a 3D-printed conformal microstrip array antenna for high-temperature environments is presented.3D printing technology is used to fabricate a curved ceramic substrate,and laser sintering and microdroplet spraying processes are used to add the conductive metal on the curved substrate.The problems of gain loss,bandwidth reduction,and frequency shift caused by high temperatures are addressed by using a proper antenna design,with parasitic patches,slots,and metal resonant cavities.The antenna prototype is characterized by the curved substrates and the conductive metals for the power dividers,the patch,and the ground plane;its performance is examined up to a temperature of 600℃in a muffle furnace and compared with the results from the numerical analysis.The results show that the antenna can effectively function at 600℃and even higher temperatures.展开更多
基金financially supported by the National Natural Science Foundation of China(No.52175434)the National Key Research and Development Program of China(No.2022YFB3204801)
文摘One-dimensional nano-grating standard(ODNGS)is widely recognized as a crucial nanometric standard for metrological technology.However,achieving the ultratiny size of ODNGS with high consistent uniformity and low roughness by conventional processes such as the inductively coupled plasma(ICP)etching methodpresents a significant challenge in obtaining accurate calibration values.In this work,a 50-nm ODNGS with a conformal buffer layer(Al_(2)O_(3))is successfully obtained,indicating outstanding stability and abrasion resistance.Remarkably,the introduction of hydrogen silsesquioxane(HSQ)and amorphous Al_(2)O_(3)simultaneously guarantees an incredibly small expanded uncertainty(0.5 nm)and repeatability of the standard uniformity(less than 0.3 nm)in the grating dimensions.TheⅠ-Ⅴcurves of ODNGS with an Al_(2)O_(3)buffer layer at room temperature(RT)and200℃are depicted respectively to showcase the sustained favorable insulation properties.Notably,the nanostructure fluctuation,line edge roughness(LER)and line width roughness(LWR)of the standard can be decreased obviously by 64.1%,63%and 70%,respectively.Our results suggest that the ODNGS with Al_(2)O_(3)exhibits exceptional precision and robust calibration reliability for calibrating nanoscale measuring instruments.It holds tremendous potential for manufacturing high-precision nanostructures and grating arrays with precisely controllable dimensions,which will play a pivotal role in the fabrication of microfluidics chips,metasurface and photodetectors in the future.
基金This work was sponsored by the National Natural Science Foundation of China(No.52235007,52325504)the Science Fund for Creative Research Groups of the National Natural Science Foundation of China(No.T2121004).
文摘Implantable hydrogel-based bioelectronics(IHB)can precisely monitor human health and diagnose diseases.However,achieving biodegradability,biocompatibility,and high conformality with soft tissues poses significant challenges for IHB.Gelatin is the most suitable candidate for IHB since it is a collagen hydrolysate and a substantial part of the extracellular matrix found naturally in most tissues.This study used 3D printing ultrafine fiber networks with metamaterial design to embed into ultra-low elastic modulus hydrogel to create a novel gelatin-based conductive film(GCF)with mechanical programmability.The regulation of GCF nearly covers soft tissue mechanics,an elastic modulus from 20 to 420 kPa,and a Poisson’s ratio from-0.25 to 0.52.The negative Poisson’s ratio promotes conformality with soft tissues to improve the efficiency of biological interfaces.The GCF can monitor heartbeat signals and respiratory rate by determining cardiac deformation due to its high conformability.Notably,the gelatin characteristics of the biodegradable GCF enable the sensor to monitor and support tissue restoration.The GCF metamaterial design offers a unique idea for bioelectronics to develop implantable sensors that integrate monitoring and tissue repair and a customized method for endowing implanted sensors to be highly conformal with soft tissues.
基金National Natural Science Foundation of China(No.U2241205)the Natural Science Basic Research Program of Shaanxi(Nos.2022JC-33,2023-GHZD-35,and 2024JC-ZDXM-25)+1 种基金the Fundamental Research Funds for the Central Universitiesthe National 111 Project to provide fund for conducting experiments。
文摘In this study,the design,analysis,manufacturing,and testing of a 3D-printed conformal microstrip array antenna for high-temperature environments is presented.3D printing technology is used to fabricate a curved ceramic substrate,and laser sintering and microdroplet spraying processes are used to add the conductive metal on the curved substrate.The problems of gain loss,bandwidth reduction,and frequency shift caused by high temperatures are addressed by using a proper antenna design,with parasitic patches,slots,and metal resonant cavities.The antenna prototype is characterized by the curved substrates and the conductive metals for the power dividers,the patch,and the ground plane;its performance is examined up to a temperature of 600℃in a muffle furnace and compared with the results from the numerical analysis.The results show that the antenna can effectively function at 600℃and even higher temperatures.
