Conformal thin-film sensors enable precise monitoring of the operating conditions of components in extreme environments.However,the development of these sensors encounters major challenges,especially in uniformly appl...Conformal thin-film sensors enable precise monitoring of the operating conditions of components in extreme environments.However,the development of these sensors encounters major challenges,especially in uniformly applying multiple film layers on complex metallic surfaces and accurately capturing diverse operational parameters.This work reports a multi-sensor design and multi-layer additive manufacturing process targeting spherical metallic substrates.The proposed high-temperature dip-coating and self-leveling fabrication process achieves high-temperature thin-film coatings with excellent uniformity,high-temperature electrical insulation,and adhesion properties.The fabricated Ag/Pt thin film thermocouple arrays and a heat flux sensor exhibit a maximum temperature resistance of up to 960℃,with thermoelectric potential outputs and hightemperature resistance closely mirroring those of wire-based Ag/Pt thermocouples.Harsh environmental testing was conducted using high-power lasers and a flame gun.The results show that the array of thin-film conformal thermocouples more accurately reflected temperature changes at different points on a spherical surface.The heat flux sensors achieve responses within 95 ms and with-stand environments with heat fluxes over 1.2 MW/m^(2).The proposed multi-sensor design and fabrication method offers promising monitoring applications in harsh environments,including aerospace and nuclear power.展开更多
Dynamic dimension assessments of tumor tissues have broad relevance in clinical diagnosis and treatments of patients.Current technologies for such purpose include quasi-static measurements that lack microscale resolut...Dynamic dimension assessments of tumor tissues have broad relevance in clinical diagnosis and treatments of patients.Current technologies for such purpose include quasi-static measurements that lack microscale resolution and sensing sites,with limited capabilities for time-dependent,three-dimensional profiling of tumors particularly at early growth stage.Here,we report the conformal Hall-sensor-based systems for continuous monitoring of tumor morphological features such as growth rates and volumes.Such platforms incorporate ultrathin crystalline-silicon nanomembranes(200 nm thick)as basis for displacement sensing via magnetic flux detection,in an array design that yields spatiotemporal information of tumor geometries at high sensitivity.Evaluation involves real-time measurements on a living mouse model with tumor tissues at various pathological conditions,where the integration with deep learning algorithms can further enable the system for large-scale tumor profile reconstruction across tissue surfaces.These microsystems provide the potential for monitoring of tumor progression and treatment guidance in patients.展开更多
基金supported by the National Key Research and Development Program of China(No.2022YFB3203900)。
文摘Conformal thin-film sensors enable precise monitoring of the operating conditions of components in extreme environments.However,the development of these sensors encounters major challenges,especially in uniformly applying multiple film layers on complex metallic surfaces and accurately capturing diverse operational parameters.This work reports a multi-sensor design and multi-layer additive manufacturing process targeting spherical metallic substrates.The proposed high-temperature dip-coating and self-leveling fabrication process achieves high-temperature thin-film coatings with excellent uniformity,high-temperature electrical insulation,and adhesion properties.The fabricated Ag/Pt thin film thermocouple arrays and a heat flux sensor exhibit a maximum temperature resistance of up to 960℃,with thermoelectric potential outputs and hightemperature resistance closely mirroring those of wire-based Ag/Pt thermocouples.Harsh environmental testing was conducted using high-power lasers and a flame gun.The results show that the array of thin-film conformal thermocouples more accurately reflected temperature changes at different points on a spherical surface.The heat flux sensors achieve responses within 95 ms and with-stand environments with heat fluxes over 1.2 MW/m^(2).The proposed multi-sensor design and fabrication method offers promising monitoring applications in harsh environments,including aerospace and nuclear power.
基金supported by the STI 2030-Major Project(2022ZD0209900)the National Natural Science Foundation of China(62204057,62304044,82304124,12425204)+9 种基金Science and Technology Commission of Shanghai Municipality(22ZR1406400)State Key Laboratory of Integrated Chips and Systems(SKLICS-Z202306)National Key R&D Program of China(2022YFB3204800)CAS Project for Young Scientists in Basic Research(YSBR-081)Strategic Priority Research Program of the Chinese Academy of Sciences(XDB0670000)We also appreciate the support by Shanghai Municipal Science and Technology Major Project(2018SHZDZX01)ZJ Lab,Shanghai Center for Brain Science and Brain-Inspired Technologythe young scientist project of MOE innovation platformthe China Postdoctoral Science Foundation(2023M730712)Part of the experimental work was carried out in Fudan Nanofabrication Laboratory.
文摘Dynamic dimension assessments of tumor tissues have broad relevance in clinical diagnosis and treatments of patients.Current technologies for such purpose include quasi-static measurements that lack microscale resolution and sensing sites,with limited capabilities for time-dependent,three-dimensional profiling of tumors particularly at early growth stage.Here,we report the conformal Hall-sensor-based systems for continuous monitoring of tumor morphological features such as growth rates and volumes.Such platforms incorporate ultrathin crystalline-silicon nanomembranes(200 nm thick)as basis for displacement sensing via magnetic flux detection,in an array design that yields spatiotemporal information of tumor geometries at high sensitivity.Evaluation involves real-time measurements on a living mouse model with tumor tissues at various pathological conditions,where the integration with deep learning algorithms can further enable the system for large-scale tumor profile reconstruction across tissue surfaces.These microsystems provide the potential for monitoring of tumor progression and treatment guidance in patients.
