Lithography is a Key enabling technique in modern micro/nano scale technology.Achieving the optimal trade-off between resolution,throughput,and cost remains a central focus in the ongoing development.However,current l...Lithography is a Key enabling technique in modern micro/nano scale technology.Achieving the optimal trade-off between resolution,throughput,and cost remains a central focus in the ongoing development.However,current lithographic techniques such as direct-write,projection,and extreme ultraviolet lithography achieve higher resolution at the expense of increased complexity in optical systems or the use of shorter-wavelength light sources,thus raising the overall cost of production.Here,we present a cost-effective and wafer-level perfect conformal contact lithography at the diffraction limit.By leveraging a transferable photoresist,the technique ensures optimal contact between the mask and photoresist with zero-gap,facilitating the transfer of patterns at the diffraction limit while maintaining high fidelity and uniformity across large wafers.This technique applies to a wide range of complex surfaces,including non-conductive glass surfaces,flexible substrates,and curved surfaces.The proposed technique expands the potential of contact photolithography for novel device architectures and practic al manufacturing processes.展开更多
Long-term epidermal monitoring with wearable electronics is often hindered on hairy skin due to hair regrowth,which disrupts the skin-device interface and can damage the device.Here,we introduce a high-precision micro...Long-term epidermal monitoring with wearable electronics is often hindered on hairy skin due to hair regrowth,which disrupts the skin-device interface and can damage the device.Here,we introduce a high-precision microfiber epidermal thermometer(MET)designed for deformation-insensitive,durable,reliable performance on hairy skin.MET utilizes a stretchable fiber(~340µm diameter),smaller than average hair follicle spacing,enabling conformal contact without interference from growing hair.Localized nanofiber reinforcement on a microfiber and temperature-sensing layer on localized region create a strain-engineered architecture,allowing MET to achieve strain-insensitive temperature detection.MET demonstrates stable operation under repeated strains(up to 55%)and delivers exceptional precision,with a temperature resolution of 0.01℃,even during body movements.It accurately tracks physiological temperature fluctuations and provides consistent measurements over 26 days of continuous wear,remaining unaffected by hair regrowth or motion.These results highlight MET as a robust platform for long-term temperature monitoring on hairy skin.展开更多
Solid-state batteries(SSBs)represent one of the most promising routes to realize higher energy density and safety compared to traditional lithium-ion batteries with liquid electrolytes,particularly when paired with li...Solid-state batteries(SSBs)represent one of the most promising routes to realize higher energy density and safety compared to traditional lithium-ion batteries with liquid electrolytes,particularly when paired with lithium(Li)metal anode[1,2].Polymer electrolytes(PEs)play a pivotal role in SSBs due to their flexibility,processability,and ability to form conformal contact with electrodes[3,4].Despite these advantages,issues related to high interfacial resistance,Li dendrite growth,inactive"dead"Li,and parasitic side reactions(especially when pairing with high-voltage cathodes)severely limit the application of PE-based SSBs[5].展开更多
基金supported by the National Key Research and Development Program of China (2022YFB4602600)National Natural Science Foundation of China (Grant Nos. 52425508 & 52221001)the Hunan Provincial Natural Science Foundation of China (2025JJ60286)。
文摘Lithography is a Key enabling technique in modern micro/nano scale technology.Achieving the optimal trade-off between resolution,throughput,and cost remains a central focus in the ongoing development.However,current lithographic techniques such as direct-write,projection,and extreme ultraviolet lithography achieve higher resolution at the expense of increased complexity in optical systems or the use of shorter-wavelength light sources,thus raising the overall cost of production.Here,we present a cost-effective and wafer-level perfect conformal contact lithography at the diffraction limit.By leveraging a transferable photoresist,the technique ensures optimal contact between the mask and photoresist with zero-gap,facilitating the transfer of patterns at the diffraction limit while maintaining high fidelity and uniformity across large wafers.This technique applies to a wide range of complex surfaces,including non-conductive glass surfaces,flexible substrates,and curved surfaces.The proposed technique expands the potential of contact photolithography for novel device architectures and practic al manufacturing processes.
基金support by the National Research Foundation of Korea(NRF)grant funded by the Korea government(MSIT)(Grant No.RS-2023-00208702)support from the National Research Foundation of Korea(NRF)funded by the Korean government(MIST)(RS-2024-00338686)。
文摘Long-term epidermal monitoring with wearable electronics is often hindered on hairy skin due to hair regrowth,which disrupts the skin-device interface and can damage the device.Here,we introduce a high-precision microfiber epidermal thermometer(MET)designed for deformation-insensitive,durable,reliable performance on hairy skin.MET utilizes a stretchable fiber(~340µm diameter),smaller than average hair follicle spacing,enabling conformal contact without interference from growing hair.Localized nanofiber reinforcement on a microfiber and temperature-sensing layer on localized region create a strain-engineered architecture,allowing MET to achieve strain-insensitive temperature detection.MET demonstrates stable operation under repeated strains(up to 55%)and delivers exceptional precision,with a temperature resolution of 0.01℃,even during body movements.It accurately tracks physiological temperature fluctuations and provides consistent measurements over 26 days of continuous wear,remaining unaffected by hair regrowth or motion.These results highlight MET as a robust platform for long-term temperature monitoring on hairy skin.
文摘Solid-state batteries(SSBs)represent one of the most promising routes to realize higher energy density and safety compared to traditional lithium-ion batteries with liquid electrolytes,particularly when paired with lithium(Li)metal anode[1,2].Polymer electrolytes(PEs)play a pivotal role in SSBs due to their flexibility,processability,and ability to form conformal contact with electrodes[3,4].Despite these advantages,issues related to high interfacial resistance,Li dendrite growth,inactive"dead"Li,and parasitic side reactions(especially when pairing with high-voltage cathodes)severely limit the application of PE-based SSBs[5].
