Compositional-gradient BaTi_(1-x)Sn_(x)O_(3)thin films on Pt(100)/Ti/SiO_(2)/Si substrates are fabricated with sol-gel using spin coating.All of the structures of the prepared thin films are of single-phase crystallin...Compositional-gradient BaTi_(1-x)Sn_(x)O_(3)thin films on Pt(100)/Ti/SiO_(2)/Si substrates are fabricated with sol-gel using spin coating.All of the structures of the prepared thin films are of single-phase crystalline perovskite with a dense and crack-free surface mor-phology.BTS10/15/20 thin film exhibits enhanced temperature stability in its dielectric behavior.The temperature coefficient of capacitance TCC_(20-150)in the temperature range from 20°C to 150°C is−0.9×10^(−4)/°C and that of TCC20-(-95)in the temperature range from 20°C to−95°C is−3.8×10^(−4)/°C.Furthermore,the thin films show low leakage current density and dielectric loss.High and stable dielectric tunable performances are found in BTS10/15/20 thin films:the dielectric tunability of the thin films is around 20.1%under a bias voltage of 8 V at 1 MHz and the corresponding dielectric constant is in the range between 89 and 111,which is beneficial for impedance matching in circuits.Dielectric tunability can be obtained under a low tuning voltage,which helps ensure safety.The simulated resonant frequency of the compositional-gradient BTS thin films depends on the bias electric field,showing compositional-gradient BTS thin films could be used in electrically tunable components and devices.These prop-erties make compositional-gradient BTS thin films a promising candidate for dielectric tuning.展开更多
基金This work was supported by the Joint Fund of the Ministry of Education of China under the grant number 6141A02022433.
文摘Compositional-gradient BaTi_(1-x)Sn_(x)O_(3)thin films on Pt(100)/Ti/SiO_(2)/Si substrates are fabricated with sol-gel using spin coating.All of the structures of the prepared thin films are of single-phase crystalline perovskite with a dense and crack-free surface mor-phology.BTS10/15/20 thin film exhibits enhanced temperature stability in its dielectric behavior.The temperature coefficient of capacitance TCC_(20-150)in the temperature range from 20°C to 150°C is−0.9×10^(−4)/°C and that of TCC20-(-95)in the temperature range from 20°C to−95°C is−3.8×10^(−4)/°C.Furthermore,the thin films show low leakage current density and dielectric loss.High and stable dielectric tunable performances are found in BTS10/15/20 thin films:the dielectric tunability of the thin films is around 20.1%under a bias voltage of 8 V at 1 MHz and the corresponding dielectric constant is in the range between 89 and 111,which is beneficial for impedance matching in circuits.Dielectric tunability can be obtained under a low tuning voltage,which helps ensure safety.The simulated resonant frequency of the compositional-gradient BTS thin films depends on the bias electric field,showing compositional-gradient BTS thin films could be used in electrically tunable components and devices.These prop-erties make compositional-gradient BTS thin films a promising candidate for dielectric tuning.
