We present a unified electromagnetic modeling of coherence scanning interferometry,confocal microscopy,and focus variation microscopy as the most common techniques for surface topography inspection with micro-and nano...We present a unified electromagnetic modeling of coherence scanning interferometry,confocal microscopy,and focus variation microscopy as the most common techniques for surface topography inspection with micro-and nanometer resolution.The model aims at analyzing the instrument response and predicting systematic deviations.Since the main focus lies on the modeling of the microscopes,the light–surface interaction is considered,based on the Kirchhoff approximation extended to vectorial imaging theory.However,it can be replaced by rigorous methods without changing the microscope model.We demonstrate that all of the measuring instruments mentioned above can be modeled using the same theory with some adaption to the respective instrument.For validation,simulated results are confirmed by comparison with measurement results.展开更多
To improve the lateral resolution in microscopic imaging,microspheres are placed close to the object’s surface in order to support the imaging process by optical near-field information.Although microsphere-assisted m...To improve the lateral resolution in microscopic imaging,microspheres are placed close to the object’s surface in order to support the imaging process by optical near-field information.Although microsphere-assisted measurements are part of various recent studies,no generally accepted explanation for the effect of microspheres exists.Photonic nanojets,enhancement of the numerical aperture,whispering-gallery modes and evanescent waves are usually named reasons in context with microspheres,though none of these effects is proven to be decisive for the resolution enhancement.We present a simulation model of the complete microscopic imaging process of microsphere-enhanced interference microscopy including a rigorous treatment of the light scattering process at the surface of the specimen.The model consideres objective lenses of high numerical aperture providing 3D conical illumination and imaging.The enhanced resolution and magnification by the microsphere is analyzed with respect to the numerical aperture of the objective lenses.Further,we give a criterion for the achievable resolution and demonstrate that a local enhancement of the numerical aperture is the most likely reason for the resolution enhancement.展开更多
基金support of the following research Projects (Nos.GZ:LE 992/14-3 and LE 992/18-1)by the Deutsche Forschungsgemeinschaft and the EMPIR program (project TracOptic,20IND07)co-financed by the European Union’s Horizon 2020 Research and Innovation Program.
文摘We present a unified electromagnetic modeling of coherence scanning interferometry,confocal microscopy,and focus variation microscopy as the most common techniques for surface topography inspection with micro-and nanometer resolution.The model aims at analyzing the instrument response and predicting systematic deviations.Since the main focus lies on the modeling of the microscopes,the light–surface interaction is considered,based on the Kirchhoff approximation extended to vectorial imaging theory.However,it can be replaced by rigorous methods without changing the microscope model.We demonstrate that all of the measuring instruments mentioned above can be modeled using the same theory with some adaption to the respective instrument.For validation,simulated results are confirmed by comparison with measurement results.
基金support of this research work by the DFG(German Research Foundation)[Grant no.LE 992/14-1,LE 992/15-1].
文摘To improve the lateral resolution in microscopic imaging,microspheres are placed close to the object’s surface in order to support the imaging process by optical near-field information.Although microsphere-assisted measurements are part of various recent studies,no generally accepted explanation for the effect of microspheres exists.Photonic nanojets,enhancement of the numerical aperture,whispering-gallery modes and evanescent waves are usually named reasons in context with microspheres,though none of these effects is proven to be decisive for the resolution enhancement.We present a simulation model of the complete microscopic imaging process of microsphere-enhanced interference microscopy including a rigorous treatment of the light scattering process at the surface of the specimen.The model consideres objective lenses of high numerical aperture providing 3D conical illumination and imaging.The enhanced resolution and magnification by the microsphere is analyzed with respect to the numerical aperture of the objective lenses.Further,we give a criterion for the achievable resolution and demonstrate that a local enhancement of the numerical aperture is the most likely reason for the resolution enhancement.
