This paper presents a three-stage CMOS operational amplifier （opamp） that combines accuracy with stability for a wide range of capacitive loads. A so-called quenching capacitor is added to a multipath nested Miller ...This paper presents a three-stage CMOS operational amplifier （opamp） that combines accuracy with stability for a wide range of capacitive loads. A so-called quenching capacitor is added to a multipath nested Miller compensation （MNMC） topology to obtain stability for a wide range of capacitive loads. Theoretical analysis and mathematical formulas are provided to prove the improvement in stability. A prototype of this frequency compen- sation scheme is implemented in a 0.7μm CMOS process. Measurement′s show that the amplifier can drive capaci- tive loads ranging from 100pF to 100/μF with a gain of 90dB and a minimum phase margin of 26°. The amplifier has a unity-gain bandwidth of 1MHz for a 100pF capacitive load. It employs a quenching capacitance of 18pF.展开更多
In the novel prototype of micro-gyroscope structure,the new configured capacitance sensing scheme for the micro gyroscope was analyzed and the virtual instrument based detection scheme was implemented.The digital lock...In the novel prototype of micro-gyroscope structure,the new configured capacitance sensing scheme for the micro gyroscope was analyzed and the virtual instrument based detection scheme was implemented.The digital lock-in amplifier was employed in the capacitance detection to restrain the noise interference.The capacitance analysis shows that 1 fF capacitance variation corresponds to 0.1 degree of the turn angle.The differential capacitance bridge and the charge integral amplifier were used as the front signal input interface.In the implementation of digital lock-in amplifier,a new routine which warranted the exactly matching of the reference phase to signal phase was proposed.The result of the experiment shows that digital lock-in amplifier can greatly eliminate the noise in the output signal.The non linearity of the turn angle output is 2.3% and the minimum resolution of turn angle is 0.04 degrees.The application of the software demodulation in the signal detection of micro-electro-mechanical-system(MEMS)device is a new attempt,and it shows the prospective for a high-performance application.展开更多
This work presents a high-gain broadband inverter-based cascode transimpedance amplifier fabricated in a 65-nm CMOS process.Multiple bandwidth enhancement techniques,including input bonding wire,input series on-chip i...This work presents a high-gain broadband inverter-based cascode transimpedance amplifier fabricated in a 65-nm CMOS process.Multiple bandwidth enhancement techniques,including input bonding wire,input series on-chip inductive peak-ing and negative capacitance compensation,are adopted to overcome the large off-chip photodiode capacitive loading and the miller capacitance of the input device,achieving an overall bandwidth enhancement ratio of 8.5.The electrical measure-ment shows TIA achieves 58 dBΩup to 12.7 GHz with a 180-fF off-chip photodetector.The optical measurement demonstrates a clear open eye of 20 Gb/s.The TIA dissipates 4 mW from a 1.2-V supply voltage.展开更多
A kind of signal acquisition circuit and the related signal processing method of the capacitanceelectromagnetic flowmeter (EMF) were introduced. The circuit can eliminate the influence of distributed capacitanceon the...A kind of signal acquisition circuit and the related signal processing method of the capacitanceelectromagnetic flowmeter (EMF) were introduced. The circuit can eliminate the influence of distributed capacitanceon the input impedance of the operational amplifier, and greatly improve the input impedance of the detection circuitto overcome the disadvantage of high signal source impedance. The rotating capacitor filter is a signal processingmethod based on the phase-sensitive detection technology. It can extract the weak signal from the strong and widebandbackground noise, so it is very suitable for the processing of capacitive electromagnetic flow signals. Throughthe comparison of the signal amplitude obtained at different flow rates and the comparison of signal spectrumcomponents before and after the filter, the effectiveness of the bootstrap signal acquisition circuit and rotatingcapacitor filtering method is verified.展开更多
With the development of micro-electr o-mechanical system(MEMS) technolog y,the MEMS-based capacitive sensor has been widely applied in the field of ele ctron components.However,the capacitance of the micromachined sen...With the development of micro-electr o-mechanical system(MEMS) technolog y,the MEMS-based capacitive sensor has been widely applied in the field of ele ctron components.However,the capacitance of the micromachined sensor is so sma ll that the detection of the smaller value change of the capacitance is a great challenge.Based on the principle of charging and discharging of the capacitor,a kind of pulse width modulated differential circuit is introduced in this paper.For subsequent amplification,a modified amplifier is presented.The different ial circuit converts the weak capacitance change to the change of the pulse widt h of the output voltage,and the linear relationship can be obtained.And the mo dified amplifier implements the processes of amplification and filtering synchro nously,and a large DC output voltage can be obtained by the lo w-pass filter.T he designed circuits have advantages as simplified circuit,high voltage stabili ty,perfect linearity and resolution.Besides,it is feasible to be integrated w ith the sensor to largely reduce the transmission error and interference.展开更多
文摘This paper presents a three-stage CMOS operational amplifier （opamp） that combines accuracy with stability for a wide range of capacitive loads. A so-called quenching capacitor is added to a multipath nested Miller compensation （MNMC） topology to obtain stability for a wide range of capacitive loads. Theoretical analysis and mathematical formulas are provided to prove the improvement in stability. A prototype of this frequency compen- sation scheme is implemented in a 0.7μm CMOS process. Measurement′s show that the amplifier can drive capaci- tive loads ranging from 100pF to 100/μF with a gain of 90dB and a minimum phase margin of 26°. The amplifier has a unity-gain bandwidth of 1MHz for a 100pF capacitive load. It employs a quenching capacitance of 18pF.
基金The National Natural Science Foundation ofChina(No.60402003)The National High Technology Research and Development Pro-gram of China(863Program)(No.2002AA745120)
文摘In the novel prototype of micro-gyroscope structure,the new configured capacitance sensing scheme for the micro gyroscope was analyzed and the virtual instrument based detection scheme was implemented.The digital lock-in amplifier was employed in the capacitance detection to restrain the noise interference.The capacitance analysis shows that 1 fF capacitance variation corresponds to 0.1 degree of the turn angle.The differential capacitance bridge and the charge integral amplifier were used as the front signal input interface.In the implementation of digital lock-in amplifier,a new routine which warranted the exactly matching of the reference phase to signal phase was proposed.The result of the experiment shows that digital lock-in amplifier can greatly eliminate the noise in the output signal.The non linearity of the turn angle output is 2.3% and the minimum resolution of turn angle is 0.04 degrees.The application of the software demodulation in the signal detection of micro-electro-mechanical-system(MEMS)device is a new attempt,and it shows the prospective for a high-performance application.
基金supported in part by the National NaturalScience Foundation of China under Grant 62074074in part by Natural Science Foundation of Guangdong Province under Grant 2021A1515011266in part by the Science and Technology Plan of Shenzhen under Grants JCYJ20190809142017428 and JCYJ20200109141225025。
文摘This work presents a high-gain broadband inverter-based cascode transimpedance amplifier fabricated in a 65-nm CMOS process.Multiple bandwidth enhancement techniques,including input bonding wire,input series on-chip inductive peak-ing and negative capacitance compensation,are adopted to overcome the large off-chip photodiode capacitive loading and the miller capacitance of the input device,achieving an overall bandwidth enhancement ratio of 8.5.The electrical measure-ment shows TIA achieves 58 dBΩup to 12.7 GHz with a 180-fF off-chip photodetector.The optical measurement demonstrates a clear open eye of 20 Gb/s.The TIA dissipates 4 mW from a 1.2-V supply voltage.
文摘A kind of signal acquisition circuit and the related signal processing method of the capacitanceelectromagnetic flowmeter (EMF) were introduced. The circuit can eliminate the influence of distributed capacitanceon the input impedance of the operational amplifier, and greatly improve the input impedance of the detection circuitto overcome the disadvantage of high signal source impedance. The rotating capacitor filter is a signal processingmethod based on the phase-sensitive detection technology. It can extract the weak signal from the strong and widebandbackground noise, so it is very suitable for the processing of capacitive electromagnetic flow signals. Throughthe comparison of the signal amplitude obtained at different flow rates and the comparison of signal spectrumcomponents before and after the filter, the effectiveness of the bootstrap signal acquisition circuit and rotatingcapacitor filtering method is verified.
基金National High Technology Research and Development Program of China ("863"Program) (No.2011AA040404)National Natural Science Foundation of China(No.61127008)
文摘With the development of micro-electr o-mechanical system(MEMS) technolog y,the MEMS-based capacitive sensor has been widely applied in the field of ele ctron components.However,the capacitance of the micromachined sensor is so sma ll that the detection of the smaller value change of the capacitance is a great challenge.Based on the principle of charging and discharging of the capacitor,a kind of pulse width modulated differential circuit is introduced in this paper.For subsequent amplification,a modified amplifier is presented.The different ial circuit converts the weak capacitance change to the change of the pulse widt h of the output voltage,and the linear relationship can be obtained.And the mo dified amplifier implements the processes of amplification and filtering synchro nously,and a large DC output voltage can be obtained by the lo w-pass filter.T he designed circuits have advantages as simplified circuit,high voltage stabili ty,perfect linearity and resolution.Besides,it is feasible to be integrated w ith the sensor to largely reduce the transmission error and interference.
