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Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO_2 composite films 被引量:2
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作者 刘晓为 赵振刚 +1 位作者 李拓 王鑫 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第3期66-70,共5页
A novel capacitance-type relative humidity(RH) sensor based on multi-wall carbon nanotube/SiO(MWCNTs/SiO) composite film is reported.Details of the fabrication process,possible sensing mechanism and sensing characteri... A novel capacitance-type relative humidity(RH) sensor based on multi-wall carbon nanotube/SiO(MWCNTs/SiO) composite film is reported.Details of the fabrication process,possible sensing mechanism and sensing characteristics,such as linearity and sensitivity,are described.The capacitance of the MWCNTs/SiOcomposite film shows typical concentration percolation behavior with increasing MWCNT loading.At loadings below the percolation threshold(1.842wt%),the sensor capacitance increases obviously with increasing MWCNTs. The water condensed in the MWCNTs/SiOlayer can lower the percolation threshold and increase the sensor capacitance.The sensor with MWCNT concentration of 1wt%has the best properties.The sensor has a humidity sensitivity of about 673 pF/%RH and a linearity correlation of 0.98428.The response time of the sensor to RH is about 40 s and the recovery time is about 2 s. 展开更多
关键词 carbon nanotubes humidity sensor percolation threshold capacitance-type
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