A dynamic solution is presented for the propagation of waves in an electric-magneto-elastic plate composed of piezoelectric, piezomagnetic materials and elastic matrix. The electric-magneto-elastic plate is polarized ...A dynamic solution is presented for the propagation of waves in an electric-magneto-elastic plate composed of piezoelectric, piezomagnetic materials and elastic matrix. The electric-magneto-elastic plate is polarized along the thickness direction. The generalized displacements are expressed as the sum of the gradient of a scalar (dilatation wave) and the curl of a vector (shear wave). With the help of dynamic equilibrium equations and geometric equations, we can obtain dynamic equations of the dilatation wave and the shear wave. The conclusion that the types of the dilatation waves and the shear waves remain unchanged after being reflected by the boundary can be obtained through the analysis of these kinetic equations. The dispersion properties and phase velocity surface of the dilatation and shear wave can be obtained by solutions of dynamic equilibrium equations. Influences of the piezoelectric and piezomagnetic parameters on wave characteristics are discussed.展开更多
Based on cavity resonance and sandwich composite plate （3D） theoretical model for frequency dispersion characterization theory, this paper presents a universal three-dimensional and displacement profile shapes of th...Based on cavity resonance and sandwich composite plate （3D） theoretical model for frequency dispersion characterization theory, this paper presents a universal three-dimensional and displacement profile shapes of the film bulk acoustic resonator （FBARs）. This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke （MBVD） model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.展开更多
Air–sea exchange plays a vital role in the development and maintenance of tropical cyclones（TCs）. Although studies have suggested the dependence of air–sea fluxes on surface waves and sea spray, how these processe...Air–sea exchange plays a vital role in the development and maintenance of tropical cyclones（TCs）. Although studies have suggested the dependence of air–sea fluxes on surface waves and sea spray, how these processes modify those fluxes under TC conditions have not been sufficiently investigated based on in-situ observations.Using continuous meteorological and surface wave data from a moored buoy in the northern South China Sea,this study examines the effects of surface waves and sea spray on air–sea fluxes during the passage of Typhoon Hagupit. The mooring was within about 40 km of the center of Hagupit. Surface waves could increase momentum flux to the ocean by about 15%, and sea spray enhanced both sensible and latent heat fluxes to the atmosphere,causing Hagupit to absorb 500 W/m^2 more heat flux from the ocean. These results have powerful implications for understanding TC–ocean interaction and improving TC intensity forecasting.展开更多
This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes ...This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.展开更多
Tunable and switchable Ba 0.5 Sr 0.5 TiO 3 film bulk acoustic resonators（FBARs） based on SiO 2 /Mo Bragg reflectors are explored,which can withstand high temperature for the deposition of Ba x Sr 1 x TiO 3（BST） fi...Tunable and switchable Ba 0.5 Sr 0.5 TiO 3 film bulk acoustic resonators（FBARs） based on SiO 2 /Mo Bragg reflectors are explored,which can withstand high temperature for the deposition of Ba x Sr 1 x TiO 3（BST） films at 800 C.The dc bias-dependent resonance may be attributed to the piezoelectricity of the BST film induced by an electrostrictive effect.The series resonant frequency is strongly dc bias-dependent and shifts downwards with dc bias increasing,while the parallel resonant frequency is only weakly dc bias-dependent and slightly shifts upwards at low dc bias（ 45 V） while downwards at higher dc bias.The calculated relative tunability of shifts at series resonance frequency is around 2.3% and the electromechanical coupling coefficient is up to approximately 8.09% at 60-V dc bias,which can be comparable to AlN FBARs.This suggests that a high-quality tunable BST FBAR device can be achieved through the use of molybdenum（Mo） as the high acoustic impedance layer in a Bragg reflector,which not only provides excellent acoustic isolation from the substrate,but also improves the crystallinity of BST films withstanding higher deposition temperature.展开更多
Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets,making it universally applicabl...Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets,making it universally applicable to almost all biological systems.Thin-film bulk acoustic wave(BAW)resonators operating at gigahertz(GHz)frequencies have been demonstrated to generate localized high-speed microvortices through acoustic streaming effects.Benefitting from the strong drag forces of the high-speed vortices,BAW-enabled GHz acoustic streaming tweezers(AST)have been applied to the trapping and enrichment of particles ranging in size from micrometers to less than 100 nm.However,the behavior of particles in such 3D microvortex systems is still largely unknown.In this work,the particle behavior(trapping,enrichment,and separation)in GHz AST is studied by theoretical analyses,3D simulations,and microparticle tracking experiments.It is found that the particle motion in the vortices is determined mainly by the balance between the acoustic streaming drag force and the acoustic radiation force.This work can provide basic design principles for AST-based lab-on-a-chip systems for a variety of applications.展开更多
The blood–brain barrier(BBB)is a structural and functional barrier necessary for brain homeostasis,and it plays an important role in the realization of neural function and in protecting the brain from damage by circu...The blood–brain barrier(BBB)is a structural and functional barrier necessary for brain homeostasis,and it plays an important role in the realization of neural function and in protecting the brain from damage by circulating toxins and pathogens.However,the extremely dense BBB also severely limits the transport of molecules across it,which is a great hindrance to the diagnosis and treatment of central nervous system(CNS)diseases.This paper reports a new method for controllable opening of the BBB,based on the gigahertz acoustic streaming(AS)generated by a bulk acoustic wave resonant device.By adjusting the input power and working distance of the device,AS with tunable flow rate can be generated to disrupt tight junction proteins(TJs)between endothelial cells.The results obtained with this method show that the gigahertz AS promotes the penetration of dextran molecules with different molecular weights across the BBB.This work provides a new platform for studying the mechanical regulation of BBB by fluid shear forces and a new method for improving the efficiency of drug delivery.展开更多
In this work, bulk acoustic wave propagation properties of langasite single crystal excited by lateral electric field have been investigated. Three important crystal cuts have been identified for different operational...In this work, bulk acoustic wave propagation properties of langasite single crystal excited by lateral electric field have been investigated. Three important crystal cuts have been identified for different operational modes of lateral field excitation （LFE） on langasite substrate, namely the （yxl）65° （pure-LFE mode）, （yxl）45° （quasi-LFE mode）, and （yxl）0° （pseudo-LFE mode）. Devices on langasite substrate with the above cuts were fabricated and tested, and the experimental results agree well with the theoretical analysis. It is found that a pure thickness shear mode exists in the （yxl）65° langasite LFE device with the bare side facing liquid, and no spurious mode is found due to its moderately large piezoelectric coupling factor. In addition, （yxl）0° langasite LFE device is also found suitable for liquid phase sensing applications.展开更多
Bulk Acoustic Wave(BAW)filters find applications in radio frequency(RF)communication systems for Wi-Fi,3G,4G,and 5G networks.In the beyond-5G(potential 6G)era,high-frequency bands(>8 GHz)are expected to require res...Bulk Acoustic Wave(BAW)filters find applications in radio frequency(RF)communication systems for Wi-Fi,3G,4G,and 5G networks.In the beyond-5G(potential 6G)era,high-frequency bands(>8 GHz)are expected to require resonators with high-quality factor(Q)and electromechanical coupling(k_(t)^(2))to form filters with low insertion loss and high selectivity.However,both the Q and k_(t)^(2)of resonator devices formed in traditional uniform polarization piezoelectric films of aluminum nitride(AlN)and aluminum scandium nitride(AlScN)decrease when scaled beyond 8 GHz.In this work,we utilized 4-layer AlScN periodically poled piezoelectric films(P3F)to construct high-frequency(~17–18 GHz)resonators and filters.The resonator performance is studied over a range of device geometries,with the best resonator achieving a k_(t)^(2)of 11.8%and a Qp of 236.6 at the parallel resonance frequency(f_(p))of 17.9 GHz.These resulting figures-of-merit are(FoM_(1)=k_(t)^(2)Qp and FoM_(2)=f_(p)FoM_(1)×10^(-9))27.9 and 500,respectively.These and the k_(t)^(2)are significantly higher than previously reported AlN/AlScN-based resonators operating at similar frequencies.Fabricated 3-element and 6-element filters formed from these resonators demonstrated low insertion losses(IL)of 1.86 and 3.25 dB,and−3 dB bandwidths(BW)of 680 MHz(fractional BW of 3.9%)and 590 MHz(fractional BW of 3.3%)at a~17.4 GHz center frequency.The 3-element and 6-element filters achieved excellent linearity with in-band input third-order intercept point(IIP3)values of+36 and+40 dBm,respectively,which are significantly higher than previously reported acoustic filters operating at similar frequencies.展开更多
Bulk acoustic wave resonators with piezoelectric films have been widely explored for the small size and high quality factor （Q） at GHz. This paper describes a high overtone bulk acoustic resonator （HBAR） based on ...Bulk acoustic wave resonators with piezoelectric films have been widely explored for the small size and high quality factor （Q） at GHz. This paper describes a high overtone bulk acoustic resonator （HBAR） based on AI/ZnO/AI sandwich layers and c-axis sapphire substrate. ZnO film with high quality c-axis orientation has been obtained using DC magnetron sputtering. The fabricated HBAR presents high Q at the multiple resonances from a 0.5-4.0 GHz wide band with a total size （including the contact pads） of 0.6 mm×0.3 mm×0.4 mm, The device exhibits the best acoustic coupling at around 2.4 GHz, which agrees with the simulation results based on the one-dimensional Mason equivalent circuit model. The HBAR also demonstrates Q values of 30 000, 25 000, and 6500 at 1.49, 2.43, and 3.40 GHz, respectively. It is indicated that the HBAR has potential applications for the low phase noise high frequency oscillator or microwave signal source.展开更多
文摘A dynamic solution is presented for the propagation of waves in an electric-magneto-elastic plate composed of piezoelectric, piezomagnetic materials and elastic matrix. The electric-magneto-elastic plate is polarized along the thickness direction. The generalized displacements are expressed as the sum of the gradient of a scalar (dilatation wave) and the curl of a vector (shear wave). With the help of dynamic equilibrium equations and geometric equations, we can obtain dynamic equations of the dilatation wave and the shear wave. The conclusion that the types of the dilatation waves and the shear waves remain unchanged after being reflected by the boundary can be obtained through the analysis of these kinetic equations. The dispersion properties and phase velocity surface of the dilatation and shear wave can be obtained by solutions of dynamic equilibrium equations. Influences of the piezoelectric and piezomagnetic parameters on wave characteristics are discussed.
基金supported by the National Natural Science Foundation of China(Grant No.61275081)
文摘Based on cavity resonance and sandwich composite plate （3D） theoretical model for frequency dispersion characterization theory, this paper presents a universal three-dimensional and displacement profile shapes of the film bulk acoustic resonator （FBARs）. This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke （MBVD） model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.
基金Zhejiang Provincial Natural Science Foundation of China under contract No.LR15D060001the National Program on Global Change and Air-Sea Interactions under contract No.GASI-IPOVAI-04the National Natural Science Foundation of China under contract Nos 41476021,41706034 and 41321004
文摘Air–sea exchange plays a vital role in the development and maintenance of tropical cyclones（TCs）. Although studies have suggested the dependence of air–sea fluxes on surface waves and sea spray, how these processes modify those fluxes under TC conditions have not been sufficiently investigated based on in-situ observations.Using continuous meteorological and surface wave data from a moored buoy in the northern South China Sea,this study examines the effects of surface waves and sea spray on air–sea fluxes during the passage of Typhoon Hagupit. The mooring was within about 40 km of the center of Hagupit. Surface waves could increase momentum flux to the ocean by about 15%, and sea spray enhanced both sensible and latent heat fluxes to the atmosphere,causing Hagupit to absorb 500 W/m^2 more heat flux from the ocean. These results have powerful implications for understanding TC–ocean interaction and improving TC intensity forecasting.
基金the Special New Century Excellent Talents Support Program of Ministry of Education(No.NCET-10-0583)the National Key Laboratory of Science and Technology on Nano/Micro Fabrication(No.9140C790405110C7904)+2 种基金Preresearch Fund(No.9140A09010312JW03104)Fund(No.2013ZC57003)the Graduate Innovation Program of Shanghai Jiao Tong University(No.Z-340-014)
文摘This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 60871049 and 50972024)
文摘Tunable and switchable Ba 0.5 Sr 0.5 TiO 3 film bulk acoustic resonators（FBARs） based on SiO 2 /Mo Bragg reflectors are explored,which can withstand high temperature for the deposition of Ba x Sr 1 x TiO 3（BST） films at 800 C.The dc bias-dependent resonance may be attributed to the piezoelectricity of the BST film induced by an electrostrictive effect.The series resonant frequency is strongly dc bias-dependent and shifts downwards with dc bias increasing,while the parallel resonant frequency is only weakly dc bias-dependent and slightly shifts upwards at low dc bias（ 45 V） while downwards at higher dc bias.The calculated relative tunability of shifts at series resonance frequency is around 2.3% and the electromechanical coupling coefficient is up to approximately 8.09% at 60-V dc bias,which can be comparable to AlN FBARs.This suggests that a high-quality tunable BST FBAR device can be achieved through the use of molybdenum（Mo） as the high acoustic impedance layer in a Bragg reflector,which not only provides excellent acoustic isolation from the substrate,but also improves the crystallinity of BST films withstanding higher deposition temperature.
基金The authors gratefully acknowledge financial support from the National Key R&D Program of China(2018YFE0118700)the Natural Science Foundation of China(NSFC No.62174119)+1 种基金Tianjin Applied Basic Research and Advanced Technology(17JCJQJC43600)the 111 Project(B07014).
文摘Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets,making it universally applicable to almost all biological systems.Thin-film bulk acoustic wave(BAW)resonators operating at gigahertz(GHz)frequencies have been demonstrated to generate localized high-speed microvortices through acoustic streaming effects.Benefitting from the strong drag forces of the high-speed vortices,BAW-enabled GHz acoustic streaming tweezers(AST)have been applied to the trapping and enrichment of particles ranging in size from micrometers to less than 100 nm.However,the behavior of particles in such 3D microvortex systems is still largely unknown.In this work,the particle behavior(trapping,enrichment,and separation)in GHz AST is studied by theoretical analyses,3D simulations,and microparticle tracking experiments.It is found that the particle motion in the vortices is determined mainly by the balance between the acoustic streaming drag force and the acoustic radiation force.This work can provide basic design principles for AST-based lab-on-a-chip systems for a variety of applications.
基金financial support from the National Natural Science Foundation of China(Grant No.61971302)。
文摘The blood–brain barrier(BBB)is a structural and functional barrier necessary for brain homeostasis,and it plays an important role in the realization of neural function and in protecting the brain from damage by circulating toxins and pathogens.However,the extremely dense BBB also severely limits the transport of molecules across it,which is a great hindrance to the diagnosis and treatment of central nervous system(CNS)diseases.This paper reports a new method for controllable opening of the BBB,based on the gigahertz acoustic streaming(AS)generated by a bulk acoustic wave resonant device.By adjusting the input power and working distance of the device,AS with tunable flow rate can be generated to disrupt tight junction proteins(TJs)between endothelial cells.The results obtained with this method show that the gigahertz AS promotes the penetration of dextran molecules with different molecular weights across the BBB.This work provides a new platform for studying the mechanical regulation of BBB by fluid shear forces and a new method for improving the efficiency of drug delivery.
基金Project supported by the National Natural Science Foundation of China(Grant No.60571014)
文摘In this work, bulk acoustic wave propagation properties of langasite single crystal excited by lateral electric field have been investigated. Three important crystal cuts have been identified for different operational modes of lateral field excitation （LFE） on langasite substrate, namely the （yxl）65° （pure-LFE mode）, （yxl）45° （quasi-LFE mode）, and （yxl）0° （pseudo-LFE mode）. Devices on langasite substrate with the above cuts were fabricated and tested, and the experimental results agree well with the theoretical analysis. It is found that a pure thickness shear mode exists in the （yxl）65° langasite LFE device with the bare side facing liquid, and no spurious mode is found due to its moderately large piezoelectric coupling factor. In addition, （yxl）0° langasite LFE device is also found suitable for liquid phase sensing applications.
文摘Bulk Acoustic Wave(BAW)filters find applications in radio frequency(RF)communication systems for Wi-Fi,3G,4G,and 5G networks.In the beyond-5G(potential 6G)era,high-frequency bands(>8 GHz)are expected to require resonators with high-quality factor(Q)and electromechanical coupling(k_(t)^(2))to form filters with low insertion loss and high selectivity.However,both the Q and k_(t)^(2)of resonator devices formed in traditional uniform polarization piezoelectric films of aluminum nitride(AlN)and aluminum scandium nitride(AlScN)decrease when scaled beyond 8 GHz.In this work,we utilized 4-layer AlScN periodically poled piezoelectric films(P3F)to construct high-frequency(~17–18 GHz)resonators and filters.The resonator performance is studied over a range of device geometries,with the best resonator achieving a k_(t)^(2)of 11.8%and a Qp of 236.6 at the parallel resonance frequency(f_(p))of 17.9 GHz.These resulting figures-of-merit are(FoM_(1)=k_(t)^(2)Qp and FoM_(2)=f_(p)FoM_(1)×10^(-9))27.9 and 500,respectively.These and the k_(t)^(2)are significantly higher than previously reported AlN/AlScN-based resonators operating at similar frequencies.Fabricated 3-element and 6-element filters formed from these resonators demonstrated low insertion losses(IL)of 1.86 and 3.25 dB,and−3 dB bandwidths(BW)of 680 MHz(fractional BW of 3.9%)and 590 MHz(fractional BW of 3.3%)at a~17.4 GHz center frequency.The 3-element and 6-element filters achieved excellent linearity with in-band input third-order intercept point(IIP3)values of+36 and+40 dBm,respectively,which are significantly higher than previously reported acoustic filters operating at similar frequencies.
基金Project (Nos. 11074274 and 11174319) supported by the National Natural Science Foundation of China
文摘Bulk acoustic wave resonators with piezoelectric films have been widely explored for the small size and high quality factor （Q） at GHz. This paper describes a high overtone bulk acoustic resonator （HBAR） based on AI/ZnO/AI sandwich layers and c-axis sapphire substrate. ZnO film with high quality c-axis orientation has been obtained using DC magnetron sputtering. The fabricated HBAR presents high Q at the multiple resonances from a 0.5-4.0 GHz wide band with a total size （including the contact pads） of 0.6 mm×0.3 mm×0.4 mm, The device exhibits the best acoustic coupling at around 2.4 GHz, which agrees with the simulation results based on the one-dimensional Mason equivalent circuit model. The HBAR also demonstrates Q values of 30 000, 25 000, and 6500 at 1.49, 2.43, and 3.40 GHz, respectively. It is indicated that the HBAR has potential applications for the low phase noise high frequency oscillator or microwave signal source.
