The double-sided lapping process is extensively employed in the manufacturing of wafers,optical windows,and seal rings due to its high efficiency and ability to achieve precise flatness.However,limited research has ex...The double-sided lapping process is extensively employed in the manufacturing of wafers,optical windows,and seal rings due to its high efficiency and ability to achieve precise flatness.However,limited research has explored the thickness uniformity among different workpieces after double-sided lapping,and the underlying mechanism remains unclear.To address the demand for higher precision,this paper first analyzed the relative kinematic model between the workpiece and the lapping plate to clarify the causes of thickness variations among workpieces after double-sided lapping.Subsequently,a finite element method(FEM)model was developed to account for the pressure distribution on the workpiece surfaces at the initial stage of the process.The results indicate that the number of workpieces influences the final thickness variation.Then,various sets of thin copper plates with different thicknesses were lapped,and the findings revealed that five copper plates processed simultaneously exhibited more uniform thickness compared to the three plates.The experimental results align well with the theoretical analysis.Ultimately,a thickness variation of less than 6μm was achieved on five copper plates measuringΦ100×2.9 mm.This study presents a comprehensive analysis of the mechanisms influencing thickness uniformity in the double-sided lapping process and provides practical guidelines for optimizing the process to achieve stringent precision standards in industrial applications.展开更多
Friction stir lap welding of AA2195 Al-Li alloy and Ti alloy was conducted to investigate the formation,microstructure,and mechanical properties of the joints.Results show that under different welding parameters,with ...Friction stir lap welding of AA2195 Al-Li alloy and Ti alloy was conducted to investigate the formation,microstructure,and mechanical properties of the joints.Results show that under different welding parameters,with the decrease in welding heat input,the weld surface is smoother.The Ti/Al joint interface is flat without obvious Ti and Al mixed structure,and the hook structure is not formed under optimal parameters.Due to the enhanced breaking effect of the stirring head,the hook structural defects and intermetallic compounds are more likely to form at the Ti/Al interface at high rotational speed of 1000 r/min,thereby deteriorating the mechanical properties of joints.Decreasing the heat input is beneficial to hardness enhancement of the aluminum alloy in the weld nugget zone.Under the optimal parameters of rotation speed of 800 r/min and welding speed of 120 mm/min,the maximum tensile shear strength of joint is 289 N/mm.展开更多
The composite structures/components made by friction stir lap welding(FSLW)of Mg alloy sheet and Al alloy sheet are of wide application potentials in the manufacturing sector of transportation vehicles.To further impr...The composite structures/components made by friction stir lap welding(FSLW)of Mg alloy sheet and Al alloy sheet are of wide application potentials in the manufacturing sector of transportation vehicles.To further improve the joint quality,the ultrasonic vibration(UV)is exerted in FSLW,and the UV enhanced FSLW(UVeFSLW)was developed for making Mg-to-Al dissimilar joints.The numerical analysis and experimental investigation were combined to study the process mechanism in Mg/Al UVeFSLW.An equation related to the temperature and strain rate was derived to calculate the grain size at different locations of the weld nugget zone,and the effect of grain size distribution on the threshold thermal stress was included,so that the prediction accuracy of flow stress was further improved.With such modified constitutive equation,the numerical simulation was conducted to compare the heat generation,temperature profiles and material flow behaviors in Mg/Al UVeFSLW/FSLW processes.It was found that the exerted UV decreased the temperature at two checking points on the tool/workpiece interface from 707/671 K in FSLW to 689/660 K in UVeFSLW,which suppressed the IMCs thickness at Mg-Al interface from 1.7μm in FSLW to 1.1μm in UVeFSLW.The exerted UV increased the horizontal materials flow ability,and decreased the upward flow ability,which resulted in the increase of effective sheet thickness/effective lap width from 2.01/3.70 mm in FSLW to 2.04/4.84 mm in UVeFSLW.Therefore,the ultrasonic vibration improved the tensile shear strength of Mg-to-Al lap joints by 18%.展开更多
Pinless friction stir spot welding(P-FSSW)was performed to manufacture Mg/steel lap joints.Orthogonal tests for P-FSSW of Mg/steel were investigated,and the main factors affecting the properties of Mg/steel lap joints...Pinless friction stir spot welding(P-FSSW)was performed to manufacture Mg/steel lap joints.Orthogonal tests for P-FSSW of Mg/steel were investigated,and the main factors affecting the properties of Mg/steel lap joints were derived.The shear force of the Mg/steel lap joints gradually increased and then decreased as the welding time increased.Maximum shear force was 5.3 kN.Fe-Al intermetallic compound(IMC)was formed at the Mg/steel interface near the steel side,and Mg-Al IMCs were formed at the Mg/steel interface near the Mg alloy side.Mg/steel lap joint was transformed from an initial solid-state welding to fusion-brazing welding as the welding time increased.No hole defects were formed in Mg/steel solid-state welding joints,whereas hole defects appeared in Mg/steel fusion-brazing welding joints.The temperature field of Mg/steel lap joints was simulated to analyze hole defects generated during the welding process.Hole defects can be eliminated by changing the spindle deflection angle,and the shear force decreased.Excessive spindle deflection can also lead to failure to form a stable joint.Hole defects were removed because the spindle deflection angle reduced the interfacial reaction temperature,and a solid-state welding joint was formed,which resulted in an absence of fusion-brazing welding hole formation.展开更多
The effects of tungsten inert gas arc-assisted friction stir welding(TIG-FSW)on the microstructure,tensile properties and corrosion resistance of AA6016 and AA2519 alloys lap joints were investigated by means of optic...The effects of tungsten inert gas arc-assisted friction stir welding(TIG-FSW)on the microstructure,tensile properties and corrosion resistance of AA6016 and AA2519 alloys lap joints were investigated by means of optical microscope,scanning electron microscope,tensile test at room temperature,corrosion immersion tests and electrochemical measurements.The results show that the introduction of TIG arc during FSW process results in a more uniform microstructure of the joint with no tunnel hole defects.Furthermore,it enhances tensile strength and elongation of the joint with increased rates of 11.5%and 50.0%,respectively;meanwhile,the corrosion current density and largest corrosion depth are decreased with reduction rates of 78.2%and 45.7%,respectively.TIG-FSW can promote flow,contact and diffusion of materials,thus improving microstructure of the joint.Additionally,it reduces the size and number of secondary phase particles.Consequently,these factors contribute to the higher tensile properties and corrosion resistance of the joints.展开更多
It is common for the rotating pin largely plunging into lower sheet to break up lap interface of Friction Stir Lap Welding(FSLW)joint,but the unavoidable up-bending morphology of hook outside Nugget Zone(NZ)largely re...It is common for the rotating pin largely plunging into lower sheet to break up lap interface of Friction Stir Lap Welding(FSLW)joint,but the unavoidable up-bending morphology of hook outside Nugget Zone(NZ)largely reduces the joint bearing ability.Based on the novel Opposite-directions Flowing FSLW(OF-FSLW)by the self-developed rotating tool with an Xshaped right-left thread pin,the 2024 aluminum alloys lap joint was successfully welded in this study.The migration law of lap interface during welding was investigated by the experimental and numerical methods,and then how the rotating pin and its rotating velocity affect the formation and strength of OF-FSLW joint was further analyzed.The results show that the Material Concentrated Zone(MCZ)which formed above the original lap interface made the hook bend downward,the NZ greatly enlarged and the beginning part of cold lap compressed and thickened,thereby heightening the joint bearing ability.For the OF-FSLW joint,its maximum tensile strength was403 MPa,and the corresponding joint efficiency of 90.8%was an incredible and superb value for the 2000 series heat-treatment strengthened aluminum alloys friction stir welded joint.The OF-FSLW technology by the rotating tool with an X-shaped right-left thread pin is proven to be a greatly effective approach for manufacturing the aluminum alloys lap joint with superb strength.展开更多
CdZnTe wafers were machined by lapping and mechanical polishing processes,and their surface and subsurface damages were investigated.The surface damages are mainly induced by three-body abrasive wear and embedded abra...CdZnTe wafers were machined by lapping and mechanical polishing processes,and their surface and subsurface damages were investigated.The surface damages are mainly induced by three-body abrasive wear and embedded abrasive wear during lapping process.A new damage type,which is induced by the indentation of embedded abrasives,is found in the subsurface.When a floss pad is used to replace the lapping plate during machining,the surface damage is mainly induced by two-body abrasive and three-body abrasive wear,and the effect of embedded abrasives on the surface is greatly weakened.Moreover,this new damage type nearly disappears on the subsurface.展开更多
Cylindrical rollers are important elements of bearings,and their machining accuracy and consistency affect the bearing quality.Using a GCr15 cylindrical roller ofФ11×12 as the processing object in this study,the...Cylindrical rollers are important elements of bearings,and their machining accuracy and consistency affect the bearing quality.Using a GCr15 cylindrical roller ofФ11×12 as the processing object in this study,the effects of loading pressure,abrasive concentration,and speed combination on cylindrical roller machining precision were investigated using the orthogonal experimental design method on a double-side eccentric pendulum lapping and polishing machine.The machining parameters of the lapping stage were optimized,and the lapping optimal process parameters were determined by S/N response analysis and analysis of variance(ANOVA).The results show that when the experiment was optimized using loading pressure of 10 N/roller,abrasive concentrationof 20.0 wt%,and rotational speed combination,the material removal rate(MRR)of cylindrical roller reached 0.0896μm/min;the average roughness of the batch decreased from 0.056μm to 0.027μm,51.8%lower than the original batch average roughness,and the deviation decreased from the initial 0.022μm to 0.014μm;the batch average roundness error decreased from 0.47μm to 0.28μm,40.4%lower than the original batch average roundness error,and the deviation decreased from the initial 0.19μm to 0.038μm;and the batch average diameter variation decreased from 4.5μm to about 3.6μm,20%lower than the original batch average diameter variation.The double-side eccentric lapping of cylinder rollers does not only lead to improvement in the surface quality and shape accuracy of rollers,but also improvement in the batch consistency.展开更多
The prediction of indentation depth of abrasive grain in hydrophilic fixed-abrasive(FA)lapping is crucial for controlling material removal rate and surface quality of the work-piece being machined.By applying the theo...The prediction of indentation depth of abrasive grain in hydrophilic fixed-abrasive(FA)lapping is crucial for controlling material removal rate and surface quality of the work-piece being machined.By applying the theory of contact mechanics,a theoretical model of the indentation depth of abrasive grain was developed and the relationships between indentation depth and properties of contact pairs and abrasive back-off were studied.Also,the average surface roughness(Ra)of lapped wafer was approximately calculated according to the obtained indentation depth.To verify the rationality of the proposed model,a series of lapping experiments on lithium niobate(LN)wafers were carried out,whose average surface roughness Ra was measured by atomic force microscope(AFM).The experimental results were coincided with the theoretical predictions,verifying the rationality of the proposed model.It is concluded that the indentation depth of the fixed abrasive was primarily affected by the applied load,wafer micro hardness and pad Young′s modulus and so on.Moreover,the larger the applied load,the more significant the back-off of the abrasive grain.The model established in this paper is helpful to the design of FA pad and its machining parameters,and the prediction of Ra as well.展开更多
A minitype precise spindle system which can machine precisely and stably in the process of diamond lapping and polishing is designed. In such minitype spindle system, the brushless DC spindle motor is used to drive th...A minitype precise spindle system which can machine precisely and stably in the process of diamond lapping and polishing is designed. In such minitype spindle system, the brushless DC spindle motor is used to drive the lapping finish table, which is built with fluid dynamic bearings. Some measures have been taken to make the lapping system dynamic balance, and a servo controller which can adjust the speed of motor from 1200 r/min to 5400 r/min is designed. Experiments show that the spindle system is reliable and stable for diamond polishing, and the detection results by atomic force microscope（AFM） show that the surfaces of diamond edge＇s Ra is 6.725 nm and whole diamond average Ra is 3.25 nm.展开更多
An experimental investigation is carried out to machine SiC ceramic material through the method of high speed plane lapping with solid(fixed) abrasives after the critical condition of brittle-ductile transition is the...An experimental investigation is carried out to machine SiC ceramic material through the method of high speed plane lapping with solid(fixed) abrasives after the critical condition of brittle-ductile transition is theoretically analyzed. The results show that the material removal mechanism and the surface roughness are chiefly related to the granularity of abrasives for brittle materials such as SiC ceramic. It is easily realized to machine SiC ceramic in the ductile mode using W3.5 grit and a high efficiency, low cost and smooth surface with a surface roughness of R_a 2.4?nm can be achieved.展开更多
The subsurface damage(SSD)layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology.Three ways such as ice-fixed abrasiv...The subsurface damage(SSD)layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology.Three ways such as ice-fixed abrasive,thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline germanium wafers.The SSD depth was measured by a nanoindenter,and the morphology of SSD layer was observed by an atomic force microscopy(AFM).The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer.Compared with thermosetting fixed abrasive and free abrasive lappings,the SSD depth lapped with ice-fixed abrasive is shallower.Moreover,the SSD morphology of monocrystalline germanium wafer lapped with ice-fixed abrasive is superior to those of two other processing ways.展开更多
Double-sided lapping is an precision machining method capable of obtaining high-precision surface.However,during the lapping process of thin pure copper substrate,the workpiece will be warped due to the influence of r...Double-sided lapping is an precision machining method capable of obtaining high-precision surface.However,during the lapping process of thin pure copper substrate,the workpiece will be warped due to the influence of residual stress,including the machining stress and initial residual stress,which will deteriorate the flatness of the workpiece and ultimately affect the performance of components.In this study,finite element method(FEM)was adopted to study the effect of residual stress-related on the deformation of pure copper substrate during double-sided lapping.Considering the initial residual stress of the workpiece,the stress caused by the lapping and their distribution characteristics,a prediction model was proposed for simulating workpiece machining deformation in lapping process by measuring the material removal rate of the upper and lower surfaces of the workpiece under the corresponding parameters.The results showed that the primary cause of the warping deformation of the workpiece in the doublesided lapping is the redistribution of initial residual stress caused by uneven material removal on the both surfaces.The finite element simulation results were in good agreement with the experimental results.展开更多
Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapp...Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapping time on material removal rate(MRR)and surface roughness was investigated.The results showed that the best process parameters were 3N,100r/min and 15 min.The surface quality of sapphire improved significantly after lapping.The coating after lapping adhered well and did not show any peeling.The innovative micro-diamond coated tool was feasible and suitable for the lapping of the single crystal sapphire wafer.展开更多
Silicon wafers are the most widely used substrates for semiconductors. The falling price of silicon wafers has created tremendous pressure on silicon wafer manufacturers to develop cost-effective manufacturing process...Silicon wafers are the most widely used substrates for semiconductors. The falling price of silicon wafers has created tremendous pressure on silicon wafer manufacturers to develop cost-effective manufacturing processes. A critical issue in wafer production is the waviness induced by wire sawing. If this waviness is not removed, it will affect wafer flatness and semiconductor performance. In practice, both lapping and grinding have been used to flatten wire-sawn wafers. Although grinding is not as effective as lapping in removing waviness, it has many other advantages over lapping (such as higher throughput, fully automatic, and more benign to environment) and has great potential to reduce manufacturing cost of silicon wafers. This paper presents a finite element analysis (FEA) study on grinding and lapping of wire-sawn silicon wafers. An FEA model is first developed to simulate the waviness deformation of wire-sawn wafers in grinding and lapping processes. It is then used to explain how the waviness is removed or reduced by lapping and grinding and why the effectiveness of grinding in removing waviness is different from that of lapping. Furthermore, the model is used to study the effects of various parameters including active-grinding-zone orientation, grinding force, waviness wavelength, and waviness height on the reduction and elimination of waviness. Finally, the results of pilot experiments to verify the model are discussed.展开更多
During aircraft,ship,and automobile manufacturing,lap structures are frequently produced among Al alloy skins,wall panels,and stiffeners.The occurrence of welding defects severely decreases mechanical properties durin...During aircraft,ship,and automobile manufacturing,lap structures are frequently produced among Al alloy skins,wall panels,and stiffeners.The occurrence of welding defects severely decreases mechanical properties during friction stir lap welding(FSLW).This study focuses on investigating the effects of rotation rate,multipass welding,and cooling methods on lap defect formation,microstructural evolution,and mechanical properties.Hook defects were eliminated by decreasing welding speed,applying two-pass FLSW with a small welding tool,and introducing additional water cooling,thus leading to a remarkable increase in effective sheet thickness and lap width.This above strategy yielded defect-free joints with an ultrafine-grained microstructure and increased tensile shear force from 298 to 551 N/mm.The fracture behavior of FSLW joints was systematically studied,and a fracture factor of lap joints was proposed to predict their fracture mode.By reducing the rotation rate,using two-pass welding,and employing additional water cooling strategies,an enlarged,strengthened,and defect-free lap zone with refined ultrafine grains was achieved with a quality comparable to that of lap welds based on 7xxx Al alloys.Importantly,this study provides a valuable FSLW method for eliminating hook defects and improving joint performance.展开更多
The contact model of lapping and polishing for magnetic disk substrate is presented. Based on elastic contact theory, pressure distribution for this model are analyzed. Further, the effects of various parameters, such...The contact model of lapping and polishing for magnetic disk substrate is presented. Based on elastic contact theory, pressure distribution for this model are analyzed. Further, the effects of various parameters, such as the material properties of the PVA(polyvinyl acetate),grinding stone, the polishing pad and the base plate, the thickness of the pad or the stone on the pressure distribution have been discussed.展开更多
基金Supported by the Liaoning Provincial Natural Science Foundation(Grant No.2023-MSBA-008)Unveiling and Commanding Program of Liaoning Province(Grant No.2022JH1/10800080)the Fundamental Research Funds for the Central Universities(Grant No.DUT24MS008).
文摘The double-sided lapping process is extensively employed in the manufacturing of wafers,optical windows,and seal rings due to its high efficiency and ability to achieve precise flatness.However,limited research has explored the thickness uniformity among different workpieces after double-sided lapping,and the underlying mechanism remains unclear.To address the demand for higher precision,this paper first analyzed the relative kinematic model between the workpiece and the lapping plate to clarify the causes of thickness variations among workpieces after double-sided lapping.Subsequently,a finite element method(FEM)model was developed to account for the pressure distribution on the workpiece surfaces at the initial stage of the process.The results indicate that the number of workpieces influences the final thickness variation.Then,various sets of thin copper plates with different thicknesses were lapped,and the findings revealed that five copper plates processed simultaneously exhibited more uniform thickness compared to the three plates.The experimental results align well with the theoretical analysis.Ultimately,a thickness variation of less than 6μm was achieved on five copper plates measuringΦ100×2.9 mm.This study presents a comprehensive analysis of the mechanisms influencing thickness uniformity in the double-sided lapping process and provides practical guidelines for optimizing the process to achieve stringent precision standards in industrial applications.
基金National Natural Science Foundation of China(52275349)Key Research and Development Program of Shandong Province(2021ZLGX01)。
文摘Friction stir lap welding of AA2195 Al-Li alloy and Ti alloy was conducted to investigate the formation,microstructure,and mechanical properties of the joints.Results show that under different welding parameters,with the decrease in welding heat input,the weld surface is smoother.The Ti/Al joint interface is flat without obvious Ti and Al mixed structure,and the hook structure is not formed under optimal parameters.Due to the enhanced breaking effect of the stirring head,the hook structural defects and intermetallic compounds are more likely to form at the Ti/Al interface at high rotational speed of 1000 r/min,thereby deteriorating the mechanical properties of joints.Decreasing the heat input is beneficial to hardness enhancement of the aluminum alloy in the weld nugget zone.Under the optimal parameters of rotation speed of 800 r/min and welding speed of 120 mm/min,the maximum tensile shear strength of joint is 289 N/mm.
基金supported by the National Natural Science Foundation of China(Grant No.52035005)the Key R&D Program of Shandong Province in China(Grant No.2021ZLGX01).
文摘The composite structures/components made by friction stir lap welding(FSLW)of Mg alloy sheet and Al alloy sheet are of wide application potentials in the manufacturing sector of transportation vehicles.To further improve the joint quality,the ultrasonic vibration(UV)is exerted in FSLW,and the UV enhanced FSLW(UVeFSLW)was developed for making Mg-to-Al dissimilar joints.The numerical analysis and experimental investigation were combined to study the process mechanism in Mg/Al UVeFSLW.An equation related to the temperature and strain rate was derived to calculate the grain size at different locations of the weld nugget zone,and the effect of grain size distribution on the threshold thermal stress was included,so that the prediction accuracy of flow stress was further improved.With such modified constitutive equation,the numerical simulation was conducted to compare the heat generation,temperature profiles and material flow behaviors in Mg/Al UVeFSLW/FSLW processes.It was found that the exerted UV decreased the temperature at two checking points on the tool/workpiece interface from 707/671 K in FSLW to 689/660 K in UVeFSLW,which suppressed the IMCs thickness at Mg-Al interface from 1.7μm in FSLW to 1.1μm in UVeFSLW.The exerted UV increased the horizontal materials flow ability,and decreased the upward flow ability,which resulted in the increase of effective sheet thickness/effective lap width from 2.01/3.70 mm in FSLW to 2.04/4.84 mm in UVeFSLW.Therefore,the ultrasonic vibration improved the tensile shear strength of Mg-to-Al lap joints by 18%.
基金supported by the National Natural Science Foundation of China(Grant Number 52001141).
文摘Pinless friction stir spot welding(P-FSSW)was performed to manufacture Mg/steel lap joints.Orthogonal tests for P-FSSW of Mg/steel were investigated,and the main factors affecting the properties of Mg/steel lap joints were derived.The shear force of the Mg/steel lap joints gradually increased and then decreased as the welding time increased.Maximum shear force was 5.3 kN.Fe-Al intermetallic compound(IMC)was formed at the Mg/steel interface near the steel side,and Mg-Al IMCs were formed at the Mg/steel interface near the Mg alloy side.Mg/steel lap joint was transformed from an initial solid-state welding to fusion-brazing welding as the welding time increased.No hole defects were formed in Mg/steel solid-state welding joints,whereas hole defects appeared in Mg/steel fusion-brazing welding joints.The temperature field of Mg/steel lap joints was simulated to analyze hole defects generated during the welding process.Hole defects can be eliminated by changing the spindle deflection angle,and the shear force decreased.Excessive spindle deflection can also lead to failure to form a stable joint.Hole defects were removed because the spindle deflection angle reduced the interfacial reaction temperature,and a solid-state welding joint was formed,which resulted in an absence of fusion-brazing welding hole formation.
文摘The effects of tungsten inert gas arc-assisted friction stir welding(TIG-FSW)on the microstructure,tensile properties and corrosion resistance of AA6016 and AA2519 alloys lap joints were investigated by means of optical microscope,scanning electron microscope,tensile test at room temperature,corrosion immersion tests and electrochemical measurements.The results show that the introduction of TIG arc during FSW process results in a more uniform microstructure of the joint with no tunnel hole defects.Furthermore,it enhances tensile strength and elongation of the joint with increased rates of 11.5%and 50.0%,respectively;meanwhile,the corrosion current density and largest corrosion depth are decreased with reduction rates of 78.2%and 45.7%,respectively.TIG-FSW can promote flow,contact and diffusion of materials,thus improving microstructure of the joint.Additionally,it reduces the size and number of secondary phase particles.Consequently,these factors contribute to the higher tensile properties and corrosion resistance of the joints.
基金supported by the National Natural Science Foundation of China(Nos.51874201 and 52074184)Natural Science Foundation project of Liaoning Province(2023-MS238)+1 种基金Liaoning Revitalization talents program(XLYC2203009)the Fundamental Research Funds for the Universities of Liaoning Province。
文摘It is common for the rotating pin largely plunging into lower sheet to break up lap interface of Friction Stir Lap Welding(FSLW)joint,but the unavoidable up-bending morphology of hook outside Nugget Zone(NZ)largely reduces the joint bearing ability.Based on the novel Opposite-directions Flowing FSLW(OF-FSLW)by the self-developed rotating tool with an Xshaped right-left thread pin,the 2024 aluminum alloys lap joint was successfully welded in this study.The migration law of lap interface during welding was investigated by the experimental and numerical methods,and then how the rotating pin and its rotating velocity affect the formation and strength of OF-FSLW joint was further analyzed.The results show that the Material Concentrated Zone(MCZ)which formed above the original lap interface made the hook bend downward,the NZ greatly enlarged and the beginning part of cold lap compressed and thickened,thereby heightening the joint bearing ability.For the OF-FSLW joint,its maximum tensile strength was403 MPa,and the corresponding joint efficiency of 90.8%was an incredible and superb value for the 2000 series heat-treatment strengthened aluminum alloys friction stir welded joint.The OF-FSLW technology by the rotating tool with an X-shaped right-left thread pin is proven to be a greatly effective approach for manufacturing the aluminum alloys lap joint with superb strength.
基金support from the Key Project of the National Natural Science Foundation of China (No. 50535020)
文摘CdZnTe wafers were machined by lapping and mechanical polishing processes,and their surface and subsurface damages were investigated.The surface damages are mainly induced by three-body abrasive wear and embedded abrasive wear during lapping process.A new damage type,which is induced by the indentation of embedded abrasives,is found in the subsurface.When a floss pad is used to replace the lapping plate during machining,the surface damage is mainly induced by two-body abrasive and three-body abrasive wear,and the effect of embedded abrasives on the surface is greatly weakened.Moreover,this new damage type nearly disappears on the subsurface.
基金supported by National Natural Science Foundation of China (Grant No.51175468,U1401247)Public Welfare Industry Project of Zhejiang Provincial Science and Technology Department (Grant no.20160069)
文摘Cylindrical rollers are important elements of bearings,and their machining accuracy and consistency affect the bearing quality.Using a GCr15 cylindrical roller ofФ11×12 as the processing object in this study,the effects of loading pressure,abrasive concentration,and speed combination on cylindrical roller machining precision were investigated using the orthogonal experimental design method on a double-side eccentric pendulum lapping and polishing machine.The machining parameters of the lapping stage were optimized,and the lapping optimal process parameters were determined by S/N response analysis and analysis of variance(ANOVA).The results show that when the experiment was optimized using loading pressure of 10 N/roller,abrasive concentrationof 20.0 wt%,and rotational speed combination,the material removal rate(MRR)of cylindrical roller reached 0.0896μm/min;the average roughness of the batch decreased from 0.056μm to 0.027μm,51.8%lower than the original batch average roughness,and the deviation decreased from the initial 0.022μm to 0.014μm;the batch average roundness error decreased from 0.47μm to 0.28μm,40.4%lower than the original batch average roundness error,and the deviation decreased from the initial 0.19μm to 0.038μm;and the batch average diameter variation decreased from 4.5μm to about 3.6μm,20%lower than the original batch average diameter variation.The double-side eccentric lapping of cylinder rollers does not only lead to improvement in the surface quality and shape accuracy of rollers,but also improvement in the batch consistency.
基金supported by the Science Foundation of Aviation(No.2014ZE52055)the National Science Foundation of China(No.51675276)+1 种基金the Funding of Jiangsu Innovation Program for Graduate Education(No.KYLX_0231)the Fundamental Research Funds for the Central Universities
文摘The prediction of indentation depth of abrasive grain in hydrophilic fixed-abrasive(FA)lapping is crucial for controlling material removal rate and surface quality of the work-piece being machined.By applying the theory of contact mechanics,a theoretical model of the indentation depth of abrasive grain was developed and the relationships between indentation depth and properties of contact pairs and abrasive back-off were studied.Also,the average surface roughness(Ra)of lapped wafer was approximately calculated according to the obtained indentation depth.To verify the rationality of the proposed model,a series of lapping experiments on lithium niobate(LN)wafers were carried out,whose average surface roughness Ra was measured by atomic force microscope(AFM).The experimental results were coincided with the theoretical predictions,verifying the rationality of the proposed model.It is concluded that the indentation depth of the fixed abrasive was primarily affected by the applied load,wafer micro hardness and pad Young′s modulus and so on.Moreover,the larger the applied load,the more significant the back-off of the abrasive grain.The model established in this paper is helpful to the design of FA pad and its machining parameters,and the prediction of Ra as well.
基金National Natural Science Foundation of China(No. 50675037)Plan of Science and Technology of Guangdong Province,China (No. 2003B12002)
文摘A minitype precise spindle system which can machine precisely and stably in the process of diamond lapping and polishing is designed. In such minitype spindle system, the brushless DC spindle motor is used to drive the lapping finish table, which is built with fluid dynamic bearings. Some measures have been taken to make the lapping system dynamic balance, and a servo controller which can adjust the speed of motor from 1200 r/min to 5400 r/min is designed. Experiments show that the spindle system is reliable and stable for diamond polishing, and the detection results by atomic force microscope（AFM） show that the surfaces of diamond edge＇s Ra is 6.725 nm and whole diamond average Ra is 3.25 nm.
文摘An experimental investigation is carried out to machine SiC ceramic material through the method of high speed plane lapping with solid(fixed) abrasives after the critical condition of brittle-ductile transition is theoretically analyzed. The results show that the material removal mechanism and the surface roughness are chiefly related to the granularity of abrasives for brittle materials such as SiC ceramic. It is easily realized to machine SiC ceramic in the ductile mode using W3.5 grit and a high efficiency, low cost and smooth surface with a surface roughness of R_a 2.4?nm can be achieved.
基金supported by the National Natural Science Foundation of China(No.51375237)the Postdoctoral Science Foundation of China(No.2015T80547)
文摘The subsurface damage(SSD)layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology.Three ways such as ice-fixed abrasive,thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline germanium wafers.The SSD depth was measured by a nanoindenter,and the morphology of SSD layer was observed by an atomic force microscopy(AFM).The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer.Compared with thermosetting fixed abrasive and free abrasive lappings,the SSD depth lapped with ice-fixed abrasive is shallower.Moreover,the SSD morphology of monocrystalline germanium wafer lapped with ice-fixed abrasive is superior to those of two other processing ways.
基金National Key Research and Development Program of China(Grant No.2018YFA0702900)Science Challenge Project of China(Grant No.TZ2016006)National Natural Science Foundation of China(Grant No.51975096)。
文摘Double-sided lapping is an precision machining method capable of obtaining high-precision surface.However,during the lapping process of thin pure copper substrate,the workpiece will be warped due to the influence of residual stress,including the machining stress and initial residual stress,which will deteriorate the flatness of the workpiece and ultimately affect the performance of components.In this study,finite element method(FEM)was adopted to study the effect of residual stress-related on the deformation of pure copper substrate during double-sided lapping.Considering the initial residual stress of the workpiece,the stress caused by the lapping and their distribution characteristics,a prediction model was proposed for simulating workpiece machining deformation in lapping process by measuring the material removal rate of the upper and lower surfaces of the workpiece under the corresponding parameters.The results showed that the primary cause of the warping deformation of the workpiece in the doublesided lapping is the redistribution of initial residual stress caused by uneven material removal on the both surfaces.The finite element simulation results were in good agreement with the experimental results.
基金supported by the National Nature Science Foundation of China(No.51275230)NUAA Research Funding(No.kfjj20150507)+2 种基金Six Talent Peak of Jiangsu(No.ZBZZ-002)the Funding of Jiangsu Innovation Program for Graduate Education(No.KYLX_0227)the Fundamental Research Funds for the Central Universities
文摘Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapping time on material removal rate(MRR)and surface roughness was investigated.The results showed that the best process parameters were 3N,100r/min and 15 min.The surface quality of sapphire improved significantly after lapping.The coating after lapping adhered well and did not show any peeling.The innovative micro-diamond coated tool was feasible and suitable for the lapping of the single crystal sapphire wafer.
文摘Silicon wafers are the most widely used substrates for semiconductors. The falling price of silicon wafers has created tremendous pressure on silicon wafer manufacturers to develop cost-effective manufacturing processes. A critical issue in wafer production is the waviness induced by wire sawing. If this waviness is not removed, it will affect wafer flatness and semiconductor performance. In practice, both lapping and grinding have been used to flatten wire-sawn wafers. Although grinding is not as effective as lapping in removing waviness, it has many other advantages over lapping (such as higher throughput, fully automatic, and more benign to environment) and has great potential to reduce manufacturing cost of silicon wafers. This paper presents a finite element analysis (FEA) study on grinding and lapping of wire-sawn silicon wafers. An FEA model is first developed to simulate the waviness deformation of wire-sawn wafers in grinding and lapping processes. It is then used to explain how the waviness is removed or reduced by lapping and grinding and why the effectiveness of grinding in removing waviness is different from that of lapping. Furthermore, the model is used to study the effects of various parameters including active-grinding-zone orientation, grinding force, waviness wavelength, and waviness height on the reduction and elimination of waviness. Finally, the results of pilot experiments to verify the model are discussed.
基金supported by the National Natural Science Foundation of China(Nos.52305436 and 51975553)the Program for Guangdong Basic and Applied Basic Research Foundation,China(No.2021A151511006)+4 种基金Guangxi Science and Technology Major Program,China(No.AA23023029)Liaoning Natural Science Foundation of China(No.2021-MS-007)the Youth Innovation Promotion Association of the Chinese Academy of Sciences(No.Y2021061)the Bintech-IMR R&D Program(No.GYYJSBU-2022-002)the Institute of Metal Research Innovation Found,China(No.2022-PY11).
文摘During aircraft,ship,and automobile manufacturing,lap structures are frequently produced among Al alloy skins,wall panels,and stiffeners.The occurrence of welding defects severely decreases mechanical properties during friction stir lap welding(FSLW).This study focuses on investigating the effects of rotation rate,multipass welding,and cooling methods on lap defect formation,microstructural evolution,and mechanical properties.Hook defects were eliminated by decreasing welding speed,applying two-pass FLSW with a small welding tool,and introducing additional water cooling,thus leading to a remarkable increase in effective sheet thickness and lap width.This above strategy yielded defect-free joints with an ultrafine-grained microstructure and increased tensile shear force from 298 to 551 N/mm.The fracture behavior of FSLW joints was systematically studied,and a fracture factor of lap joints was proposed to predict their fracture mode.By reducing the rotation rate,using two-pass welding,and employing additional water cooling strategies,an enlarged,strengthened,and defect-free lap zone with refined ultrafine grains was achieved with a quality comparable to that of lap welds based on 7xxx Al alloys.Importantly,this study provides a valuable FSLW method for eliminating hook defects and improving joint performance.
文摘The contact model of lapping and polishing for magnetic disk substrate is presented. Based on elastic contact theory, pressure distribution for this model are analyzed. Further, the effects of various parameters, such as the material properties of the PVA(polyvinyl acetate),grinding stone, the polishing pad and the base plate, the thickness of the pad or the stone on the pressure distribution have been discussed.
