In integrated circuit(IC)manufacturing,fast,nondestructive,and precise detection of defects in patterned wafers,realized by bright-field microscopy,is one of the critical factors for ensuring the final performance and...In integrated circuit(IC)manufacturing,fast,nondestructive,and precise detection of defects in patterned wafers,realized by bright-field microscopy,is one of the critical factors for ensuring the final performance and yields of chips.With the critical dimensions of IC nanostructures continuing to shrink,directly imaging or classifying deep-subwavelength defects by bright-field microscopy is challenging due to the well-known diffraction barrier,the weak scattering effect,and the faint correlation between the scattering cross-section and the defect morphology.Herein,we propose an optical far-field inspection method based on the form-birefringence scattering imaging of the defective nanostructure,which can identify and classify various defects without requiring optical super-resolution.The technique is built upon the principle of breaking the optical form birefringence of the original periodic nanostructures by the defect perturbation under the anisotropic illumination modes,such as the orthogonally polarized plane waves,then combined with the high-order difference of far-field images.We validated the feasibility and effectiveness of the proposed method in detecting deep subwavelength defects through rigid vector imaging modeling and optical detection experiments of various defective nanostructures based on polarization microscopy.On this basis,an intelligent classification algorithm for typical patterned defects based on a dual-channel AlexNet neural network has been proposed,stabilizing the classification accuracy ofλ/16-sized defects with highly similar features at more than 90%.The strong classification capability of the two-channel network on typical patterned defects can be attributed to the high-order difference image and its transverse gradient being used as the network’s input,which highlights the polarization modulation difference between different patterned defects more significantly than conventional bright-field microscopy results.This work will provide a new but easy-to-operate method for detecting and classifying deep-subwavelength defects in patterned wafers or photomasks,which thus endows current online inspection equipment with more missions in advanced IC manufacturing.展开更多
The characteristics of the flow field associated with a multi-hole combined external rotary bit have been studied by means of numerical simulation in the framework of an RNG k-εturbulence model,and compared with the ...The characteristics of the flow field associated with a multi-hole combined external rotary bit have been studied by means of numerical simulation in the framework of an RNG k-εturbulence model,and compared with the results of dedicated rock breaking drilling experiments.The numerical results show that the nozzle velocity and dynamic pressure of the nozzle decrease with an increase in the jet distance,and the axial velocity of the nozzle decays regularly with an increase in the dimensionless jet distance.Moreover,the axial velocity related to the nozzle with inclination angle 20°and 30°can produce a higher hole depth,while the radial velocity of the nozzle with 60°inclination can enlarge the hole diameter.The outcomes of the CFD simulations are consistent with the actual dynamic rock breaking and pore forming process,which lends credence to the present results and indicates that they could be used as a reference for the future optimization of systems based on the multi-hole combined external rotary bit technology.展开更多
A new load surface based approach to the reliability analysis of caisson-type breakwater is proposed. Uncertainties of the horizontal and vertical wave loads acting on breakwater are considered by using the so-called ...A new load surface based approach to the reliability analysis of caisson-type breakwater is proposed. Uncertainties of the horizontal and vertical wave loads acting on breakwater are considered by using the so-called load surfaces, which can be estimated as functions of wave height, water level, and so on. Then, the first-order reliability method（FORM） can be applied to determine the probability of failure under the wave action. In this way, the reliability analysis of breakwaters with uncertainties both in wave height and in water level is possible. Moreover, the uncertainty in wave breaking can be taken into account by considering a random variable for wave height ratio which relates the significant wave height to the maximum wave height. The proposed approach is applied numerically to the reliability analysis of caisson breakwater under wave attack that may undergo partial or full wave breaking.展开更多
基金funded by National Natural Science Foundation of China(Grant Nos.52130504,52305577,and 52175509)the Key Research and Development Plan of Hubei Province(Grant No.2022BAA013)+4 种基金the Major Program(JD)of Hubei Province(Grant No.2023BAA008-2)the Interdisciplinary Research Program of Huazhong University of Science and Technology(2023JCYJ047)the Innovation Project of Optics Valley Laboratory(Grant No.OVL2023PY003)the Postdoctoral Fellowship Program(Grade B)of China Postdoctoral Science Foundation(Grant No.GZB20230244)the fellowship from the China Postdoctoral Science Foundation(2024M750995)。
文摘In integrated circuit(IC)manufacturing,fast,nondestructive,and precise detection of defects in patterned wafers,realized by bright-field microscopy,is one of the critical factors for ensuring the final performance and yields of chips.With the critical dimensions of IC nanostructures continuing to shrink,directly imaging or classifying deep-subwavelength defects by bright-field microscopy is challenging due to the well-known diffraction barrier,the weak scattering effect,and the faint correlation between the scattering cross-section and the defect morphology.Herein,we propose an optical far-field inspection method based on the form-birefringence scattering imaging of the defective nanostructure,which can identify and classify various defects without requiring optical super-resolution.The technique is built upon the principle of breaking the optical form birefringence of the original periodic nanostructures by the defect perturbation under the anisotropic illumination modes,such as the orthogonally polarized plane waves,then combined with the high-order difference of far-field images.We validated the feasibility and effectiveness of the proposed method in detecting deep subwavelength defects through rigid vector imaging modeling and optical detection experiments of various defective nanostructures based on polarization microscopy.On this basis,an intelligent classification algorithm for typical patterned defects based on a dual-channel AlexNet neural network has been proposed,stabilizing the classification accuracy ofλ/16-sized defects with highly similar features at more than 90%.The strong classification capability of the two-channel network on typical patterned defects can be attributed to the high-order difference image and its transverse gradient being used as the network’s input,which highlights the polarization modulation difference between different patterned defects more significantly than conventional bright-field microscopy results.This work will provide a new but easy-to-operate method for detecting and classifying deep-subwavelength defects in patterned wafers or photomasks,which thus endows current online inspection equipment with more missions in advanced IC manufacturing.
基金the Science and Technology Innovation and Entrepreneurship Fund of China Coal Technology Engineering Group(2019-TD-QN038,2019-TDQN017)Enterprise Independent Innovation Guidance Project(2018ZDXM05,2019YBXM30).
文摘The characteristics of the flow field associated with a multi-hole combined external rotary bit have been studied by means of numerical simulation in the framework of an RNG k-εturbulence model,and compared with the results of dedicated rock breaking drilling experiments.The numerical results show that the nozzle velocity and dynamic pressure of the nozzle decrease with an increase in the jet distance,and the axial velocity of the nozzle decays regularly with an increase in the dimensionless jet distance.Moreover,the axial velocity related to the nozzle with inclination angle 20°and 30°can produce a higher hole depth,while the radial velocity of the nozzle with 60°inclination can enlarge the hole diameter.The outcomes of the CFD simulations are consistent with the actual dynamic rock breaking and pore forming process,which lends credence to the present results and indicates that they could be used as a reference for the future optimization of systems based on the multi-hole combined external rotary bit technology.
基金supported by Basic Science Research Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Education,Science and Technology(Grant No.NRF-2012R1A1A4A01010830)
文摘A new load surface based approach to the reliability analysis of caisson-type breakwater is proposed. Uncertainties of the horizontal and vertical wave loads acting on breakwater are considered by using the so-called load surfaces, which can be estimated as functions of wave height, water level, and so on. Then, the first-order reliability method（FORM） can be applied to determine the probability of failure under the wave action. In this way, the reliability analysis of breakwaters with uncertainties both in wave height and in water level is possible. Moreover, the uncertainty in wave breaking can be taken into account by considering a random variable for wave height ratio which relates the significant wave height to the maximum wave height. The proposed approach is applied numerically to the reliability analysis of caisson breakwater under wave attack that may undergo partial or full wave breaking.
