The State University of New York at Albany ion scanning microprobe has been used for materials characterization. Focused proton and helium ion beams have been used. Rutherford backscattering spectroscopy (RBS) and par...The State University of New York at Albany ion scanning microprobe has been used for materials characterization. Focused proton and helium ion beams have been used. Rutherford backscattering spectroscopy (RBS) and particle - induced X - ray emission (PIXE) analysis have been performed on microelectronic circuits with a spatial resolution of approximately 2 μm. Studies on thin films of superconductors will be presented. Several examples of chemical and microstructural analysis will be given.展开更多
文摘The State University of New York at Albany ion scanning microprobe has been used for materials characterization. Focused proton and helium ion beams have been used. Rutherford backscattering spectroscopy (RBS) and particle - induced X - ray emission (PIXE) analysis have been performed on microelectronic circuits with a spatial resolution of approximately 2 μm. Studies on thin films of superconductors will be presented. Several examples of chemical and microstructural analysis will be given.
