One of the major advantages of utilizing atmospheric pressure plasma processing （APPP） technology to fabricate ultra-precision optics is that there is no subsurface damage during the process. In APPP, the removal fo...One of the major advantages of utilizing atmospheric pressure plasma processing （APPP） technology to fabricate ultra-precision optics is that there is no subsurface damage during the process. In APPP, the removal footprint and removal rate are critical to the capability and efficiency of the figuring of the optical surface. In this paper, an atmospheric plasma torch, which can work in both remote mode and contact mode, is presented. The footprints and the removal rates of both modes are compared by profilometer measurements. The influences of process recipes and substrate thickness for both modes are investigated through a series of experiments. When the substrate is thinner than 12 mm, the removal rate in contact mode is higher. However, the removal rate and width of the footprint decrease dramatically as the substrate thickness increases in contact mode.展开更多
In order to get ultra-smooth fused silica surface without subsurface damage efficiently, the atmospheric pressure plasma processing( APPP) method has been developed. It is based on chemical reaction between active rad...In order to get ultra-smooth fused silica surface without subsurface damage efficiently, the atmospheric pressure plasma processing( APPP) method has been developed. It is based on chemical reaction between active radicals excited by plasma and workpiece surface atoms,so the subsurface damage caused by contact stress can be avoided and atomic-level precision can be ensured. In this paper,based on the spectral quantitative analysis theory,the influence laws on material removal rate by the key factors of APPP including the flow rate of reaction gases,the input power,the processing distance and time are discussed. In addition,the results that APPP can remove the damaged surface layer and do not introduce secondary damage are proved via the nanoindentation technology.展开更多
This paper is aimed to show the influence of initial chemical pretreatment prior to subsequent plasma activation of aluminum surfaces.The results of our study showed that the state of the topmost surface layer（i.e.th...This paper is aimed to show the influence of initial chemical pretreatment prior to subsequent plasma activation of aluminum surfaces.The results of our study showed that the state of the topmost surface layer（i.e.the surface morphology and chemical groups）of plasma modified aluminum significantly depends on the chemical precleaning.Commonly used chemicals（isopropanol,trichlorethane,solution of Na OH in deionized water）were used as precleaning agents.The plasma treatments were done using a radio frequency driven atmospheric pressure plasma pencil developed at Masaryk University,which operates in Ar,Ar/O_2 gas mixtures.The effectiveness of the plasma treatment was estimated by the wettability measurements,showing high wettability improvement already after 0.3 s treatment.The effects of surface cleaning（hydrocarbon removal）,surface oxidation and activation（generation of OH groups）were estimated using infrared spectroscopy.The changes in the surface morphology were measured using scanning electron microscopy.Optical emission spectroscopy measurements in the near-to-surface region with temperature calculations showed that plasma itself depends on the sample precleaning procedure.展开更多
基金supported by National Natural Science Foundation of China(Nos.51175123 and 51105112)National Science and Technology Major Project of China(No.2013ZX04006011-205)
文摘One of the major advantages of utilizing atmospheric pressure plasma processing （APPP） technology to fabricate ultra-precision optics is that there is no subsurface damage during the process. In APPP, the removal footprint and removal rate are critical to the capability and efficiency of the figuring of the optical surface. In this paper, an atmospheric plasma torch, which can work in both remote mode and contact mode, is presented. The footprints and the removal rates of both modes are compared by profilometer measurements. The influences of process recipes and substrate thickness for both modes are investigated through a series of experiments. When the substrate is thinner than 12 mm, the removal rate in contact mode is higher. However, the removal rate and width of the footprint decrease dramatically as the substrate thickness increases in contact mode.
基金Sponsored by the National Natural Science Foundation of China(Grant No.51175123 and 51105112)
文摘In order to get ultra-smooth fused silica surface without subsurface damage efficiently, the atmospheric pressure plasma processing( APPP) method has been developed. It is based on chemical reaction between active radicals excited by plasma and workpiece surface atoms,so the subsurface damage caused by contact stress can be avoided and atomic-level precision can be ensured. In this paper,based on the spectral quantitative analysis theory,the influence laws on material removal rate by the key factors of APPP including the flow rate of reaction gases,the input power,the processing distance and time are discussed. In addition,the results that APPP can remove the damaged surface layer and do not introduce secondary damage are proved via the nanoindentation technology.
基金the Czech Science Foundation(Project No.104/08/02290)the Czech Ministry of Industry and Trade(Project CZ.1.03/5.1.00/12.00010)the Czech Ministry of Education(Project MSM0021622411)
文摘This paper is aimed to show the influence of initial chemical pretreatment prior to subsequent plasma activation of aluminum surfaces.The results of our study showed that the state of the topmost surface layer（i.e.the surface morphology and chemical groups）of plasma modified aluminum significantly depends on the chemical precleaning.Commonly used chemicals（isopropanol,trichlorethane,solution of Na OH in deionized water）were used as precleaning agents.The plasma treatments were done using a radio frequency driven atmospheric pressure plasma pencil developed at Masaryk University,which operates in Ar,Ar/O_2 gas mixtures.The effectiveness of the plasma treatment was estimated by the wettability measurements,showing high wettability improvement already after 0.3 s treatment.The effects of surface cleaning（hydrocarbon removal）,surface oxidation and activation（generation of OH groups）were estimated using infrared spectroscopy.The changes in the surface morphology were measured using scanning electron microscopy.Optical emission spectroscopy measurements in the near-to-surface region with temperature calculations showed that plasma itself depends on the sample precleaning procedure.
