A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The...A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The stress distribution and effective refractive index of waveguide fabricated by this approach are calculated using finite element and finite difference beam propagation method,respectively.The results of these studies indicate that the stress of silica on silicon optical waveguide can be matched in parallel and vertical direction and AWG polarization dependent wavelength (PDλ) can be reduced effectively due to side-silicon layer.展开更多
A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channe...A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channel AWGs with200 GHz spacing and a Mach-Zehnder interferometer(MZI)with 200 GHz free spectral range.The 16 channels of one silicon AWG are interleaved with those of the other AWG in spectrum,but with an identical spacing of 200 GHz.For the composed wavelength division multiplexer,the experiment results reveal 32 wavelength channels in C-band,a wavelength spacing of 100 GHz,and a channel crosstalk lower than-15 dB.展开更多
We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometr...We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.展开更多
The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring ar...The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring arrayed waveguide distance ΔL, the channel frequency interval Δf, and the free spectral range. The structure of 4×4 AWG is designed and the result of stimulated test is also given. Analysis shows that the 4×4 AWG is characterized by a wide dynamic range, low crosstalk, better spectrum properties, and a compact structure.展开更多
A 16-channel arrayed waveguide grating(AWG)with an 800 GHz channel spacing in the O-band has been developed and fabricated based on silica planar lightwave circuit(PLC)technology.By extending the wave⁃length allocatio...A 16-channel arrayed waveguide grating(AWG)with an 800 GHz channel spacing in the O-band has been developed and fabricated based on silica planar lightwave circuit(PLC)technology.By extending the wave⁃length allocation from 8 channels to 16 channels as specified in IEEE 802.3bs,we increased the number of chan⁃nels and boosted transmission capacity to meet the 1.6 Tbps and higher-speed signal transmission requirements for future data centers.Through optimizing the AWG structure,it has achieved insertion loss(IL)better than-1.61 dB,loss uniformity below 0.35 dB,polarization-dependent loss(PDL)below 0.35 dB,adjacent channel cross⁃talk under-20.05 dB,ripple less than 0.75 dB,center wavelength offset under 0.22 nm and 1 dB bandwidth ex⁃ceeding 2.88 nm.The AWG has been successfully measured to transmit 53 Gbaud 4-level pulse amplitude modu⁃lation(PAM4)signal per channel and the total transmission speed can reach over 1.6 Tbps.展开更多
The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication proce...The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication process on the AWG is achieved by the design of bi-level tapers. The wavelength tuning of the AWG is achieved according to the thermo-optic effect of silicon, and uniform heating of the silicon waveguide layer is achieved by optimizing the heater design. The fabricated AWG shows a minimum crosstalk of 16 dB, a maximum insertion loss of 3.91 dB and a wavelength tuning efficiency of 8.92 nm/W, exhibiting a ～8 dB improvement of crosstalk, ～2.1 dB improvement of insertion loss and ～5 nm/W improvement of wavelength tuning efficiency, compared to our previous reported results.展开更多
A 13-channel, InP-based arrayed waveguide grating （AWG） is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum ...A 13-channel, InP-based arrayed waveguide grating （AWG） is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail.展开更多
A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fab...A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results.展开更多
A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared ab...A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared absorption spectrum show that the materials have high thermal stability and high optical transparency in the infrared communication region. The refractive index of FPEEK can be controlled easily by changing the fluorine content of the materials. The 32-channel AWG multiplexer is fabricated using the FPEEK and oxygen reactive ion etching technology. The AWG multiplexer exhibits that the insertion loss is from 12.8 to 17.8 dB and the channel crosstalk is less than-20 dB. The wavelength channel spacing and the center wavelength are 0.8nm and 1548nm, respectively.展开更多
The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the rando...The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the random distributions of optical path phase errors in twomultiplexers with channel numbers of 10 and 160. It is shown that the crosstalk must be less than―28 dB for a power penalty below 1 dB at a bit error rate of 1X10^(-9). It is found that when N =100, crosstalk power value is ? 20 dB with compensation power of 2―3 dB, so the compensation poweris not ignored.展开更多
Triplexers are designed based on SOl flattop arrayed waveguide gratings （AWGs）. Three wavelengths （1310, 1490,and 1550nm） operate at three diffraction orders of AWGs. Simulation shows that the 3dB bandwidth,crosst...Triplexers are designed based on SOl flattop arrayed waveguide gratings （AWGs）. Three wavelengths （1310, 1490,and 1550nm） operate at three diffraction orders of AWGs. Simulation shows that the 3dB bandwidth,crosstalk, and loss are 6nm,less than -40dB, and 5dB, respectively. The output optical fields of the device fabricated in our laboratory are clear and show a good triplexing function.展开更多
The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cro...The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cross section,any small process error will cause a large phase deviation in other AWGs,resulting in an increasing cross talk.In this paper,an ultralow cross talk AWG via a tunable microring resonator(MRR)filter is demonstrated on the SOI platform.The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and-45.1 d B,respectively.Compared with conventional AWG,its cross talk is greatly reduced.展开更多
文摘A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The stress distribution and effective refractive index of waveguide fabricated by this approach are calculated using finite element and finite difference beam propagation method,respectively.The results of these studies indicate that the stress of silica on silicon optical waveguide can be matched in parallel and vertical direction and AWG polarization dependent wavelength (PDλ) can be reduced effectively due to side-silicon layer.
基金Project supported by the National Key Research and Development Program of China(Grant No.2019YFB2203600)。
文摘A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channel AWGs with200 GHz spacing and a Mach-Zehnder interferometer(MZI)with 200 GHz free spectral range.The 16 channels of one silicon AWG are interleaved with those of the other AWG in spectrum,but with an identical spacing of 200 GHz.For the composed wavelength division multiplexer,the experiment results reveal 32 wavelength channels in C-band,a wavelength spacing of 100 GHz,and a channel crosstalk lower than-15 dB.
基金Project supported by the National High Technology Research and Development Program of China(Grant Nos.2013AA031401,2015AA016902,and 2015AA016904)the National Natural Science Foundation of China(Grant Nos.61176053,61274069,and 61435002)the National Basic Research Program of China(Grant Nos.2012CB933503 and 2013CB932904)
文摘We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.
文摘The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring arrayed waveguide distance ΔL, the channel frequency interval Δf, and the free spectral range. The structure of 4×4 AWG is designed and the result of stimulated test is also given. Analysis shows that the 4×4 AWG is characterized by a wide dynamic range, low crosstalk, better spectrum properties, and a compact structure.
基金Supported by the National Key Research and Development Program of China(2021YFB2800201)the Strategic Priority Research Program of Chinese Academy of Sciences(XDB43000000)。
文摘A 16-channel arrayed waveguide grating(AWG)with an 800 GHz channel spacing in the O-band has been developed and fabricated based on silica planar lightwave circuit(PLC)technology.By extending the wave⁃length allocation from 8 channels to 16 channels as specified in IEEE 802.3bs,we increased the number of chan⁃nels and boosted transmission capacity to meet the 1.6 Tbps and higher-speed signal transmission requirements for future data centers.Through optimizing the AWG structure,it has achieved insertion loss(IL)better than-1.61 dB,loss uniformity below 0.35 dB,polarization-dependent loss(PDL)below 0.35 dB,adjacent channel cross⁃talk under-20.05 dB,ripple less than 0.75 dB,center wavelength offset under 0.22 nm and 1 dB bandwidth ex⁃ceeding 2.88 nm.The AWG has been successfully measured to transmit 53 Gbaud 4-level pulse amplitude modu⁃lation(PAM4)signal per channel and the total transmission speed can reach over 1.6 Tbps.
基金Supported by the National Key R&D Program of China under Grant No 2016YFB0402504
文摘The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication process on the AWG is achieved by the design of bi-level tapers. The wavelength tuning of the AWG is achieved according to the thermo-optic effect of silicon, and uniform heating of the silicon waveguide layer is achieved by optimizing the heater design. The fabricated AWG shows a minimum crosstalk of 16 dB, a maximum insertion loss of 3.91 dB and a wavelength tuning efficiency of 8.92 nm/W, exhibiting a ～8 dB improvement of crosstalk, ～2.1 dB improvement of insertion loss and ～5 nm/W improvement of wavelength tuning efficiency, compared to our previous reported results.
基金Project supported by the National High Technology Research and Development Program of China(Grant Nos.2011AA010303 and 2013AA031401)the National Natural Science Foundation of China(Grant No.61090390)
文摘A 13-channel, InP-based arrayed waveguide grating （AWG） is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail.
基金Supported by the National Natural Science Foundation of China under Grant Nos 61274046,61201103,61335009 and61320106013the National Basic Research Program of China under Grant No 2013AA014202
文摘A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results.
文摘A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared absorption spectrum show that the materials have high thermal stability and high optical transparency in the infrared communication region. The refractive index of FPEEK can be controlled easily by changing the fluorine content of the materials. The 32-channel AWG multiplexer is fabricated using the FPEEK and oxygen reactive ion etching technology. The AWG multiplexer exhibits that the insertion loss is from 12.8 to 17.8 dB and the channel crosstalk is less than-20 dB. The wavelength channel spacing and the center wavelength are 0.8nm and 1548nm, respectively.
文摘The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the random distributions of optical path phase errors in twomultiplexers with channel numbers of 10 and 160. It is shown that the crosstalk must be less than―28 dB for a power penalty below 1 dB at a bit error rate of 1X10^(-9). It is found that when N =100, crosstalk power value is ? 20 dB with compensation power of 2―3 dB, so the compensation poweris not ignored.
文摘Triplexers are designed based on SOl flattop arrayed waveguide gratings （AWGs）. Three wavelengths （1310, 1490,and 1550nm） operate at three diffraction orders of AWGs. Simulation shows that the 3dB bandwidth,crosstalk, and loss are 6nm,less than -40dB, and 5dB, respectively. The output optical fields of the device fabricated in our laboratory are clear and show a good triplexing function.
基金supported by the National Key Research and Development Program of China(No.2018YFB2200500)the Yunnan Provincial Foundation Program(No.202201AT070202)the National Natural Science Foundation of China(No.62065010)。
文摘The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cross section,any small process error will cause a large phase deviation in other AWGs,resulting in an increasing cross talk.In this paper,an ultralow cross talk AWG via a tunable microring resonator(MRR)filter is demonstrated on the SOI platform.The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and-45.1 d B,respectively.Compared with conventional AWG,its cross talk is greatly reduced.
