A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fab...A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results.展开更多
The effects of different masks and patterns on the top stripping of GaAs microwire arrays fabricated by inductively coupled plasma etching for 20min and 40min are investigated. The results show that the mask layer is ...The effects of different masks and patterns on the top stripping of GaAs microwire arrays fabricated by inductively coupled plasma etching for 20min and 40min are investigated. The results show that the mask layer is the main affect of the top stripping of the GaAs microwires in 40min. Increasing the mask layers and reducing the photoresist layers can prevent top stripping and result in a suitable GaAs microwire array.展开更多
A rapid and cost-effective method for fabricating mini lens arrays is proposed. The lenses are made of silicone oil droplets and filled inside a polydimethylsiloxane(PDMS) elastomer. The lens arrays of different initi...A rapid and cost-effective method for fabricating mini lens arrays is proposed. The lenses are made of silicone oil droplets and filled inside a polydimethylsiloxane(PDMS) elastomer. The lens arrays of different initial focal lengths and apertures can be fabricated by using the droplets of different volumes. Due to good elastic behavior of PDMS, the droplet lenses can be flexibly deformed, and the focal length and numerical aperture can be tuned by applying an external force on the PDMS elastomer. Furthermore, an apparatus for focal length tuning is designed and employed in the imaging system.展开更多
A novel fabrication method for lensed fiber array has been proposed utilizing UV-curable fluorinated polymer, whose refractive index is matched to fused silica. The structure is composed of three segments; single mode...A novel fabrication method for lensed fiber array has been proposed utilizing UV-curable fluorinated polymer, whose refractive index is matched to fused silica. The structure is composed of three segments; single mode fiber, coreless silica fiber and UV-curable polymer lens-tip. Flexible control of the curvature of lens-tip was realized by control of deposited volume of the liquid polymer and free-space interconnection performances are characterized.展开更多
基金Supported by the National Natural Science Foundation of China under Grant Nos 61274046,61201103,61335009 and61320106013the National Basic Research Program of China under Grant No 2013AA014202
文摘A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results.
基金Supported by the National Natural Science Foundation of China under Grant Nos 61261009 and 61067001the Key Program of Science and Technology Research of the Ministry of Education of China under Grant No 212090+1 种基金the Natural Science Foundation of Jiangxi Province under Grant No 20133ACB20005the Foundation of Training Academic and Technical Leaders for Main Majors of Jiangxi Province under Grant No 20142BCB22006
文摘The effects of different masks and patterns on the top stripping of GaAs microwire arrays fabricated by inductively coupled plasma etching for 20min and 40min are investigated. The results show that the mask layer is the main affect of the top stripping of the GaAs microwires in 40min. Increasing the mask layers and reducing the photoresist layers can prevent top stripping and result in a suitable GaAs microwire array.
基金supported by the National Key Research and Development Program of China(No.2016YFD0500603)the National Natural Science Foundation of China(Nos.61601292 and 61775140)the Shanghai Science and Technology Commission(Nos.17060502500 and 17JC1400601)
文摘A rapid and cost-effective method for fabricating mini lens arrays is proposed. The lenses are made of silicone oil droplets and filled inside a polydimethylsiloxane(PDMS) elastomer. The lens arrays of different initial focal lengths and apertures can be fabricated by using the droplets of different volumes. Due to good elastic behavior of PDMS, the droplet lenses can be flexibly deformed, and the focal length and numerical aperture can be tuned by applying an external force on the PDMS elastomer. Furthermore, an apparatus for focal length tuning is designed and employed in the imaging system.
文摘A novel fabrication method for lensed fiber array has been proposed utilizing UV-curable fluorinated polymer, whose refractive index is matched to fused silica. The structure is composed of three segments; single mode fiber, coreless silica fiber and UV-curable polymer lens-tip. Flexible control of the curvature of lens-tip was realized by control of deposited volume of the liquid polymer and free-space interconnection performances are characterized.
