Micro-gyroscopes using micro-electro-mechanical system(MEMS)and micro-optoelectro-mechanical system(MOEMS)are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional g...Micro-gyroscopes using micro-electro-mechanical system(MEMS)and micro-optoelectro-mechanical system(MOEMS)are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies.According to the working principle and used materials,the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope,hemispherical resonant gyroscope,piezoelectric vibratory gyroscope,suspended rotor gyroscope,microfluidic gyroscope,optical gyroscope,and atomic gyroscope.According to different sensitive structures,the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type,tuning fork type,vibrating ring type,and nested ring type.For those micro-gyroscopes,in recent years,many emerging techniques are proposed and developed to enhance different aspects of performances,such as the sensitivity,angle random walk(ARW),bias instability(BI),and bandwidth.Therefore,this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes,then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above,and finally discuss the future development trends of MEMS/MOEMS gyroscopes.展开更多
核磁共振陀螺(Nuclear Magnetic Resonance Gyroscope,NMRG)具有小体积、轻质化、低功耗等潜在优势,是当前惯性技术领域的热点研究方向之一。然而,目前其灵敏度与光学陀螺相比还有一定差距。为了分析核磁共振陀螺灵敏度(这里指角随机游...核磁共振陀螺(Nuclear Magnetic Resonance Gyroscope,NMRG)具有小体积、轻质化、低功耗等潜在优势,是当前惯性技术领域的热点研究方向之一。然而,目前其灵敏度与光学陀螺相比还有一定差距。为了分析核磁共振陀螺灵敏度(这里指角随机游走)的实际限制,基于Rb-Xe自旋交换光泵浦系统建立了相关模型。在此基础上,获得了NMRG灵敏度的影响因素,并推导了一个可以用来估计其实际灵敏度的公式。然后,分别以内腔体积8mm^(3)和1000mm^(3)的两个原子气室为例,研究了系统参数的影响,优化了NMRG的灵敏度。前者给出的理论灵敏度约为7.3×10^(-4)(°)/h^(1/2) ,而后者给出的理论灵敏度约为3.1×10^(-5)(°)/h^(1/2) ,表明NMRG具有很大的潜力。展开更多
基金This work was supported in part by the National Natural Science Foundation of China(Grant Nos.U2230206,12074058,62371106,and 61971113)the National Key Research and Development Program for Young Scientists(Grant No.2022YFA1405900)+2 种基金the Joint Fund of Ministry of Education(Grant No.8091B022126)the Fundamental Enhancement Program Technology Area Fund(Grant No.2021-JCJQ-JJ-0667)Sichuan Provincial Science and Technology Planning Program of China(Grant Nos.2021YJ0089,2022YFG0230,and 2023YFG0040).
文摘Micro-gyroscopes using micro-electro-mechanical system(MEMS)and micro-optoelectro-mechanical system(MOEMS)are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies.According to the working principle and used materials,the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope,hemispherical resonant gyroscope,piezoelectric vibratory gyroscope,suspended rotor gyroscope,microfluidic gyroscope,optical gyroscope,and atomic gyroscope.According to different sensitive structures,the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type,tuning fork type,vibrating ring type,and nested ring type.For those micro-gyroscopes,in recent years,many emerging techniques are proposed and developed to enhance different aspects of performances,such as the sensitivity,angle random walk(ARW),bias instability(BI),and bandwidth.Therefore,this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes,then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above,and finally discuss the future development trends of MEMS/MOEMS gyroscopes.
