A high pattern resolution is critical for fabricating roll-to-roll printed electronics(R2RPE)products.For enhanced overlay alignment accuracy,position errors between the printer and the substrate web must be eliminate...A high pattern resolution is critical for fabricating roll-to-roll printed electronics(R2RPE)products.For enhanced overlay alignment accuracy,position errors between the printer and the substrate web must be eliminated,particularly in inkjet printing applications.This paper proposes a novel five-degree-of-freedom(5-DOF)flexure-based alignment stage to adjust the posture of an inkjet printer head.The stage effectively compensates for positioning errors between the actuation mechanism and manipulated objects through a series-parallel combination of compliant substructures.Voice coil motors(VCMs)and linear motors serve as actuators to achieve the required motion.Theoretical models were established using a pseudo-rigid-body model(PRBM)methodology and were validated through finite element analysis(FEA).Finally,an alignment stage prototype was fabricated for an experiment.The prototype test results showed that the developed positioning platform attains 5-DOF motion capabilities with 335.1μm×418.9μm×408.1μm×3.4 mrad×3.29 mrad,with cross-axis coupling errors below 0.11%along y-and z-axes.This paper pro-poses a novel 5-DOF flexure-based alignment stage that can be used for error compensation in R2RPE and effectively improves the interlayer alignment accuracy of multi-layer printing.展开更多
基金Supported by Natural Science Research Project of Anhui Educational Committee(Grant No.2024AH040010).
文摘A high pattern resolution is critical for fabricating roll-to-roll printed electronics(R2RPE)products.For enhanced overlay alignment accuracy,position errors between the printer and the substrate web must be eliminated,particularly in inkjet printing applications.This paper proposes a novel five-degree-of-freedom(5-DOF)flexure-based alignment stage to adjust the posture of an inkjet printer head.The stage effectively compensates for positioning errors between the actuation mechanism and manipulated objects through a series-parallel combination of compliant substructures.Voice coil motors(VCMs)and linear motors serve as actuators to achieve the required motion.Theoretical models were established using a pseudo-rigid-body model(PRBM)methodology and were validated through finite element analysis(FEA).Finally,an alignment stage prototype was fabricated for an experiment.The prototype test results showed that the developed positioning platform attains 5-DOF motion capabilities with 335.1μm×418.9μm×408.1μm×3.4 mrad×3.29 mrad,with cross-axis coupling errors below 0.11%along y-and z-axes.This paper pro-poses a novel 5-DOF flexure-based alignment stage that can be used for error compensation in R2RPE and effectively improves the interlayer alignment accuracy of multi-layer printing.
