Polycrystalline titanium oxide films are fabricated on silicon by thermally oxidizing titanium.The current- voltage and capacitance- voltage characteristics of the Ag/Ti Ox/Si/Ag capacitors are m easured.The thicknes...Polycrystalline titanium oxide films are fabricated on silicon by thermally oxidizing titanium.The current- voltage and capacitance- voltage characteristics of the Ag/Ti Ox/Si/Ag capacitors are m easured.The thickness of the titanium oxide films arranges from15 0 nm to2 5 0 nm,and their dielectric constants are within40～ 87.As the oxida- tion tim e is shortened,the fixed charges of the titanium oxide films become less and the leakage current characteris- tics becom e better.展开更多
文摘Polycrystalline titanium oxide films are fabricated on silicon by thermally oxidizing titanium.The current- voltage and capacitance- voltage characteristics of the Ag/Ti Ox/Si/Ag capacitors are m easured.The thickness of the titanium oxide films arranges from15 0 nm to2 5 0 nm,and their dielectric constants are within40～ 87.As the oxida- tion tim e is shortened,the fixed charges of the titanium oxide films become less and the leakage current characteris- tics becom e better.
