In an ultraprecision turning process for small-diameter optical aspheric workpieces,tool-profile errors induce mid-frequency errors in the workpiece profile,limiting further improvements in precision.In this study,an ...In an ultraprecision turning process for small-diameter optical aspheric workpieces,tool-profile errors induce mid-frequency errors in the workpiece profile,limiting further improvements in precision.In this study,an XZB three-axis linkage ultraprecision machining method is proposed,and the effects of tool-center errors are analyzed.To address residual errors in Z-direction profile-error compensation,a workpiece normal-profile-error compensation method is proposed.After XZB three-axis linkage turning and compensation,the workpiece profile error(PV)reaches 0.086μm,surpassing the precision of XZ two-axis machining,and mid-frequency errors are reduced.Compared with Z-direction profile-error compensation,which results in a profile error of 0.092μm,normal-profile-error compensation reduces PV to 0.047μm,considerably improving aspheric accuracy.Experimental results demonstrate that XZB three-axis linkage machining significantly improves the aspheric workpiece profile,enhancing both its accuracy and surface quality.This method reduces mid-frequency errors,and the subsequent application of normal-profile-error compensation further refines the profile,achieving higher overall accuracy.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.52130503)the Science and Technology Innovation Program of Hunan Province(Grants Nos.2023RC1046 and 2023GK2008)+2 种基金the Hunan Provincial Science and Technology Department(Grant No.2021JC0005)the Postgraduate Scientific Research Innovation Project of Hunan Province(Grant No.QL20220088)the Shenzhen Undertakes Major National Science and Technology Projects(Grant No.CJGJZD20220517142406015).
文摘In an ultraprecision turning process for small-diameter optical aspheric workpieces,tool-profile errors induce mid-frequency errors in the workpiece profile,limiting further improvements in precision.In this study,an XZB three-axis linkage ultraprecision machining method is proposed,and the effects of tool-center errors are analyzed.To address residual errors in Z-direction profile-error compensation,a workpiece normal-profile-error compensation method is proposed.After XZB three-axis linkage turning and compensation,the workpiece profile error(PV)reaches 0.086μm,surpassing the precision of XZ two-axis machining,and mid-frequency errors are reduced.Compared with Z-direction profile-error compensation,which results in a profile error of 0.092μm,normal-profile-error compensation reduces PV to 0.047μm,considerably improving aspheric accuracy.Experimental results demonstrate that XZB three-axis linkage machining significantly improves the aspheric workpiece profile,enhancing both its accuracy and surface quality.This method reduces mid-frequency errors,and the subsequent application of normal-profile-error compensation further refines the profile,achieving higher overall accuracy.