In photolithography,shortening the exposure wavelength from ultraviolet to extreme ultraviolet(EUV,13.5 nm)and soft X-ray region in terms of beyond EUV(BEUV,6.X nm)and water window X-ray(WWX,2.2–4.4 nm)is expected to...In photolithography,shortening the exposure wavelength from ultraviolet to extreme ultraviolet(EUV,13.5 nm)and soft X-ray region in terms of beyond EUV(BEUV,6.X nm)and water window X-ray(WWX,2.2–4.4 nm)is expected to further miniaturize the technology node down to sub-5 nm level.However,the absorption ability of molecules in these ranges,especially WWX region,is unknown,which should be very important for the utilization of energy.Herein,the molar absorption cross sections of different elements at 2.4 nm of WWX were firstly calculated and compared with the wavelengths of 13.5 nm and 6.7 nm.Based on the absorption cross sections in these ranges and density estimation results from the density-functional theory calculation,the linear absorption coefficients of typical resist materials,including metal-oxy clusters,organic small molecules,polymers,and photoacid generators(PAGs),are evaluated.The analysis suggests that the Zn cluster has higher absorption in BEUV,whereas the Sn cluster has higher absorption in WWX.Doping PAGs with high EUV absorption atoms improves chemically amplified photoresist(CAR)polymer absorption performance.However,for WWX,it is necessary to introduce an absorption layer containing high WWX absorption elements such as Zr,Sn,and Hf to increase the WWX absorption.展开更多
For many water quality studies,a data analyst,or modeler, may need to know the spatio-temproal patterns of the data sets and their relationships in both pre-processing and post-processing. Geographic Information Syste...For many water quality studies,a data analyst,or modeler, may need to know the spatio-temproal patterns of the data sets and their relationships in both pre-processing and post-processing. Geographic Information System(GIS) can provide an exploratory spat展开更多
目的:探讨双能CT(DECT)重建图量化缺血脑组织净水摄取值(NWU)在评估急性缺血性卒中(AIS)患者组织窗的价值。方法:回顾性收集2016年12月至2022年5月期间接受DECT和CT灌注(CTP)的122例AIS患者资料,根据CTP将其分为获益组(n=83)及非获益组(...目的:探讨双能CT(DECT)重建图量化缺血脑组织净水摄取值(NWU)在评估急性缺血性卒中(AIS)患者组织窗的价值。方法:回顾性收集2016年12月至2022年5月期间接受DECT和CT灌注(CTP)的122例AIS患者资料,根据CTP将其分为获益组(n=83)及非获益组(n=39)。通过DECT重建虚拟非对比(VNC)和虚拟单能(VM)图像计算NWU。采用受试者工作特征(ROC)曲线分析诊断效能。将NWU与组织窗体积进行相关性分析。结果:获益组患者入院时美国国立卫生研究院卒中量表(NHISS)评分低于非获益组(14 vs 16,P=0.003)。NWU可有效识别有组织窗的患者,VM图像(60 keV)的NWU表现最佳,ROC曲线下面积(AUC)为0.812,准确度82.79%,灵敏度80.46%,特异度88.57%。NWU与组织窗体积呈负相关(rs=-0.57,P<0.001)。结论:DECT重建图对缺血脑组织NWU量化分析,有助于识别可能从溶栓治疗中获益的AIS患者,VM(60 keV)图像诊断效能最优。展开更多
基金supported by the National Natural Science Foundation of China(22090011,22378052)the Fundamental Research Funds for China Central Universities(DUT22LAB608 and DUT20RC(3)030)+1 种基金Liaoning Binhai Laboratory(LBLB-2023-03)Key R&D Program of Shandong Province(2021CXGC010308).
文摘In photolithography,shortening the exposure wavelength from ultraviolet to extreme ultraviolet(EUV,13.5 nm)and soft X-ray region in terms of beyond EUV(BEUV,6.X nm)and water window X-ray(WWX,2.2–4.4 nm)is expected to further miniaturize the technology node down to sub-5 nm level.However,the absorption ability of molecules in these ranges,especially WWX region,is unknown,which should be very important for the utilization of energy.Herein,the molar absorption cross sections of different elements at 2.4 nm of WWX were firstly calculated and compared with the wavelengths of 13.5 nm and 6.7 nm.Based on the absorption cross sections in these ranges and density estimation results from the density-functional theory calculation,the linear absorption coefficients of typical resist materials,including metal-oxy clusters,organic small molecules,polymers,and photoacid generators(PAGs),are evaluated.The analysis suggests that the Zn cluster has higher absorption in BEUV,whereas the Sn cluster has higher absorption in WWX.Doping PAGs with high EUV absorption atoms improves chemically amplified photoresist(CAR)polymer absorption performance.However,for WWX,it is necessary to introduce an absorption layer containing high WWX absorption elements such as Zr,Sn,and Hf to increase the WWX absorption.
文摘For many water quality studies,a data analyst,or modeler, may need to know the spatio-temproal patterns of the data sets and their relationships in both pre-processing and post-processing. Geographic Information System(GIS) can provide an exploratory spat
文摘目的:探讨双能CT(DECT)重建图量化缺血脑组织净水摄取值(NWU)在评估急性缺血性卒中(AIS)患者组织窗的价值。方法:回顾性收集2016年12月至2022年5月期间接受DECT和CT灌注(CTP)的122例AIS患者资料,根据CTP将其分为获益组(n=83)及非获益组(n=39)。通过DECT重建虚拟非对比(VNC)和虚拟单能(VM)图像计算NWU。采用受试者工作特征(ROC)曲线分析诊断效能。将NWU与组织窗体积进行相关性分析。结果:获益组患者入院时美国国立卫生研究院卒中量表(NHISS)评分低于非获益组(14 vs 16,P=0.003)。NWU可有效识别有组织窗的患者,VM图像(60 keV)的NWU表现最佳,ROC曲线下面积(AUC)为0.812,准确度82.79%,灵敏度80.46%,特异度88.57%。NWU与组织窗体积呈负相关(rs=-0.57,P<0.001)。结论:DECT重建图对缺血脑组织NWU量化分析,有助于识别可能从溶栓治疗中获益的AIS患者,VM(60 keV)图像诊断效能最优。
