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Generalized semi-analytical modeling of three-dimensional contact responses in piezoelectric semiconductors with conductive indenters
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作者 Ling WANG Huoming SHEN Yuxing WANG 《Applied Mathematics and Mechanics(English Edition)》 2026年第3期555-572,共18页
Piezoelectric semiconductor(PSC)materials exhibit strong electromechanical coupling affected by free carriers,which makes their contact behavior essential for sensors,actuators,and electronic devices.Analytical models... Piezoelectric semiconductor(PSC)materials exhibit strong electromechanical coupling affected by free carriers,which makes their contact behavior essential for sensors,actuators,and electronic devices.Analytical models for three-dimensional(3D)PSC contact problems are still scarce,especially for conductive indenters.This work develops a semi-analytical framework to study the 3D frictionless contact between a conductive indenter and a PSC half-space.Fundamental solutions under a unit force and a unit electric charge are derived,and the corresponding frequency response functions are combined with a discrete convolution-fast Fourier transform(DC-FFT)algorithm to achieve an efficient semi-analytical contact model.The numerical results demonstrate that an increase in the surface charge density reduces the indentation pressure and modifies the electric potential distribution.A higher steady carrier concentration enhances the screening effect,suppresses the electromechanical coupling,and shifts the system response toward purely elastic behaviors.The sensitivity analysis shows that the indentation depth is dominated by the elastic constants,while the electric potential is mainly affected by the piezoelectric coefficient.Although the analysis is carried out with spherical indenters,the model is not limited to a specific indenter shape.It provides an effective tool for investigating complex 3D PSC contact problems and offers useful insights into the design of PSC materials-based devices. 展开更多
关键词 contact mechanics semi-analytical method piezoelectric semiconductor(PSC) conductive indenter electromechanical response
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Direct Tunneling Effect in Metal-Semiconductor Contacts Simulated with Monte Carlo Method 被引量:2
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作者 孙雷 杜刚 +1 位作者 刘晓彦 韩汝琦 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第11期1364-1368,共5页
Considering the tunneling effect and the Schottky effect,the metal semiconductor contact is simulated by using self consistent ensemble Monte Carlo method.Under different biases or at different barrier heights,the i... Considering the tunneling effect and the Schottky effect,the metal semiconductor contact is simulated by using self consistent ensemble Monte Carlo method.Under different biases or at different barrier heights,the investigation into the tunneling current indicates that the tunneling effect is of great importance under reverse biases.The Schottky barrier diode current due to Schottky effect is in agreement with the theoretical one.The barrier lowering is found a profound effect on the current transport at the metal semiconductor interface. 展开更多
关键词 Monte Carlo device simulation metal semiconductor contact direct tunneling Schottky effect
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Formation of the intermediate semiconductor layer for the Ohmic contact to silicon carbide using Germanium implantation
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作者 郭辉 王悦湖 +2 位作者 张玉明 乔大勇 张义门 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第10期4470-4473,共4页
By formation of an intermediate semiconductor layer (ISL) with a narrow band gap at the metallic contact/SiC interface, this paper realises a new method to fabricate the low-resistance Ohmic contacts for SiC. An arr... By formation of an intermediate semiconductor layer (ISL) with a narrow band gap at the metallic contact/SiC interface, this paper realises a new method to fabricate the low-resistance Ohmic contacts for SiC. An array of transfer length method (TLM) test patterns is formed on N-wells created by P+ ion implantation into Si-faced p-type 4H- SiC epilayer. The ISL of nickel-metal Ohmic contacts to n-type 4H-SiC could be formed by using Germanium ion implantation into SiC. The specific contact resistance pc as low as 4.23×10-5Ω·cm2 is achieved after annealing in N2 at 800 ℃ for 3 min, which is much lower than that (〉 900℃) in the typical SiC metallisation process. The sheet resistance Rsh of the implanted layers is 1.5 kΩ/□. The technique for converting photoresist into nanocrystalline graphite is used to protect the SiC surface in the annealing after Ge+ ion implantations. 展开更多
关键词 SiC Ohmic contact Ge ion implantation intermediate semiconductor layer
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Ohmic contacts for atomically-thin transition metal dichalcogenide semiconductors
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作者 Ning Wang 《Journal of Semiconductors》 EI CAS CSCD 2020年第7期1-3,共3页
Motivated by the success of graphene research,atomically-thin transition metal dichalcogenide(TMDC)semiconductors are considered as promising field-effect transistor(FET)channel materials for fundamental research and ... Motivated by the success of graphene research,atomically-thin transition metal dichalcogenide(TMDC)semiconductors are considered as promising field-effect transistor(FET)channel materials for fundamental research and potential applications.Bridging atomically-thin TMDC channels to external circuitry using metallic leads is one of the most critical steps towards high-performance devices and cutting-edge materials physics research. 展开更多
关键词 Ohmic contacts atomically-thin transition metal semiconductorS
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Study of electrophysical properties of metal–semiconductor contact by the theory of complex systems
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作者 Sh.G.Askerov L.K.Abdullayeva M.G.Hasanov 《Journal of Semiconductors》 EI CAS CSCD 2020年第10期17-20,共4页
The purpose of this work is to analyze the electrical properties of the metal–semiconductor contact(MSC)in the framework of the theory of complex systems.The effect of inhomogeneity of the different microstructures:p... The purpose of this work is to analyze the electrical properties of the metal–semiconductor contact(MSC)in the framework of the theory of complex systems.The effect of inhomogeneity of the different microstructures:polycrystalline,monocrystalline,amorphous metal–semiconductor contact surface is investigated,considering a Schottky diode(SD)as a parallel connection of numerous subdiodes.It has been shown that the polycrystallinity of the metal translates a homogeneous contact into a complex system,which consists of parallel connected numerous elementary contacts having different properties and parameters. 展开更多
关键词 Schottky diode metal–semiconductor contact current–voltage characteristics interfaces HETEROGENEITY complex systems
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Realization of robust Ohmic contact for semiconducting black arsenic by coupling with graphene
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作者 Xinjuan Cheng Xuechao Zhai 《Chinese Physics B》 2025年第2期425-429,共5页
Ohmic contacts are fundamental components in semiconductor technology,facilitating efficient electrical connection and excellent device performance.We employ first-principles calculations to show that semimetallic gra... Ohmic contacts are fundamental components in semiconductor technology,facilitating efficient electrical connection and excellent device performance.We employ first-principles calculations to show that semimetallic graphene is a natural Ohmic contact partner of monolayer semiconducting black arsenic(BAs),for which the top of the valence band is below the Fermi energy of the order of 10~2 meV.The Ohmic contact arises from the giant Stark effect induced by van der Waals electron transfer from BAs to graphene,which does not destroy their respective band features.Remarkably,we show that this intrinsic Ohmic contact remains robust across a wide range of interlayer distances(adjustable by strain)or vertical electric fields,whereas the weak spin splitting of the order of 1 meV induced by symmetry breaking plays little part in Ohmic contact.These findings reveal the potential applications of graphene–BAs in ultralow dissipation transistors. 展开更多
关键词 semiconductor technology Ohmic contact heterobilayer Stark effect
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Contact planarization and passivation lift tungsten diselenide PMOS performance
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作者 Haoyu Peng Ping-Heng Tan Jiangbin Wu 《Journal of Semiconductors》 2025年第11期2-5,共4页
Two-dimensional(2D)transition metal dichalcogenides(TMDs),which allow atomic-scale manipulation,have supe-rior electrical and optical properties that challenge the limits of traditional bulk semiconductors like silico... Two-dimensional(2D)transition metal dichalcogenides(TMDs),which allow atomic-scale manipulation,have supe-rior electrical and optical properties that challenge the limits of traditional bulk semiconductors like silicon^([1,2]).As a repre-sentative TMD and a promising 2D channel material for high-performance,scalable p-type transistors,tungsten diselenide(WSe_(2))has attracted considerable academic and industrial interest for its potential in advanced complementary metal−oxide−semiconductor(CMOS)logic technology and in extending Moore’s Law^([3−7]). 展开更多
关键词 contact planarization metal dichalcogenides tmds which PASSIVATION pmos performance advanced complementary metal oxide semiconductor cmos logic tungsten diselenide two dimensional materials transition metal dichalcogenides
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Analysis of the abnormal resistance in AlGaN/GaN heterostructure's ohmic contact tests
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作者 XU Chuan WANG Jinyan JIN Haiyan ZHOU Jin WEN Cheng P 《Rare Metals》 SCIE EI CAS CSCD 2007年第5期463-469,共7页
Ti/Al/Ti/Au and Ti/Al/Ni/Au ohmic contacts were fabricated on AlGaN/GaN heterostructure under different temperatures of rapid thermal processing (RTP). Since abnormal resistance values were observed during the conta... Ti/Al/Ti/Au and Ti/Al/Ni/Au ohmic contacts were fabricated on AlGaN/GaN heterostructure under different temperatures of rapid thermal processing (RTP). Since abnormal resistance values were observed during the contact resistance testing,the surface morphology and contact borders of the samples were analyzed to determine the physical mechanism. Such abnormal phenomenon is found to originate from cracking of the AlGaN layer during RTP,flowing of Ti/Al metallic liquid along the crevices,and continuous reaction of the metallic liquid with AlGaN/GaN. Such processes result in abnormal conduction channels. The possible mechanism of the crevice formation was discussed,and the possible solutions to avoid the crevices were proposed. 展开更多
关键词 semiconductor technology abnormal resistance EDX ALGAN/GAN ohmic contact crevices
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A generalized Norde plot for reverse biased Schottky contacts
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作者 Chin-Min Hsiung Chuen-Shii Chou Ting-Lung Chiang 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2012年第1期54-58,共5页
When a metal makes intimate contact with a semiconductor material, a Schottky barrier may be created. The Schottky contact has many important applications in the integrated circuit (IC) electronics field. The parame... When a metal makes intimate contact with a semiconductor material, a Schottky barrier may be created. The Schottky contact has many important applications in the integrated circuit (IC) electronics field. The parameters of such contacts can be determined from their current-voltage (I-V) characteristics. The literature contains many proposals for extracting the contact parameters using graphical methods. However, such methods are generally applicable only to contacts with a forward bias, whereas many Schottky contacts actually operate un- der a reverse bias. Accordingly, the present study proposed a generalized reverse current-voltage (I-V) plot which enables the series resis- tance, barrier height, and ideality factor of a reverse biased Schottky contact to be extracted from a single set of I-V measurements. A theo- retical derivation of the proposed approach was presented and a series of validation tests were then performed. The results show that the pro- posed method is capable of extracting reliable estimates of the contact parameters even in the presence of experimental noise. 展开更多
关键词 semiconductor materials integrated circuits electric contacts reverse bias Schottky barriers
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Drain-induced barrier lowering effect for short channel dual material gate 4H silicon carbide metal-semiconductor field-effect transistor
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作者 张现军 杨银堂 +3 位作者 段宝兴 柴常春 宋坤 陈斌 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第9期455-459,共5页
Sub-threshold characteristics of the dual material gate 4H-SiC MESFET (DMGFET) are investigated and the analytical models to describe the drain-induced barrier lowering (DIBL) effect are derived by solving one- an... Sub-threshold characteristics of the dual material gate 4H-SiC MESFET (DMGFET) are investigated and the analytical models to describe the drain-induced barrier lowering (DIBL) effect are derived by solving one- and two- dimensional Poisson's equations. Using these models, we calculate the bottom potential of the channel and the threshold voltage shift, which characterize the drain-induced barrier lowering (DIBL) effect. The calculated results reveal that the dual material gate (DMG) structure alleviates the deterioration of the threshold voltage and thus suppresses the DIBL effect due to the introduced step function, which originates from the work function difference of the two gate materials when compared with the conventional single material gate metal-semiconductor field-effect transistor (SMGFET). 展开更多
关键词 silicon carbide metal-semiconductor contact dual material gate
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Electronic properties of the SnSe–metal contacts:First-principles study
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作者 戴宪起 王小龙 +1 位作者 李伟 王天兴 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第11期473-477,共5页
The geometries and electronic properties of SnSe/metal contact have been investigated using first-principles calcula- tion. It is found that the geometries of monolayer SnSe were affected slightly when SnSe adsorbs on... The geometries and electronic properties of SnSe/metal contact have been investigated using first-principles calcula- tion. It is found that the geometries of monolayer SnSe were affected slightly when SnSe adsorbs on M (M = Ag,Au,Ta) substrate. Compared with the corresponding free-standing monolayer SnSe, the adsorbed SnSe undergoes a semiconductor- to-metal transition. The potential difference AV indicates that SnSefra contact is the best candidate for the Schottky contact of the three SnSe/M contacts. Two types of current-in-plane (CIP) structure, where a freestanding monolayer SnSe is con- nected to SnSe/M, are identified as the n-type CIP structure in SnSe/Ag contact and p-type CIP structure in SnSe/Au and SnSe/Ta contact. The results can stimulate further investigation for the multifunctional SnSe/metal contact. 展开更多
关键词 FIRST-PRINCIPLES monolayer SnSe metal-semiconductor contact current-in-plane structure
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Bonding at the atomic limit:redefining contacts in two-dimensional semiconductors
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作者 Bei Zhao Xidong Duan 《Journal of Semiconductors》 2026年第4期1-4,共4页
Two-dimensional transition metal dichalcogenides(TMDs)have emerged as promising candidate materials for next-generation electronic and optoelectronic devices due to their exceptional carrier mobility,strong light-matt... Two-dimensional transition metal dichalcogenides(TMDs)have emerged as promising candidate materials for next-generation electronic and optoelectronic devices due to their exceptional carrier mobility,strong light-matter interactions,and remarkable mechanical flexibility[1].However,their transition from laboratory prototypes to industrial-scale manufacturing is fundamentally limited by van der Waals(vd W)contacts,which,in stark contrast to covalent bonding in silicon technologies,exhibit weak interfacial band coupling and low bonding strength,resulting in unacceptably high contact resistance(RC)and poor thermomechanical stability[2]. 展开更多
关键词 transition metal dichalcogenides tmds optoelectronic devices bonding van der waals contacts atomic limit interfacial band covalent bonding two dimensional semiconductors
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贵金属在GaN、SiC欧姆接触中的研究进展
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作者 李靖宇 李鑫 +2 位作者 闻明 李思勰 王传军 《贵金属》 北大核心 2025年第2期72-82,共11页
氮化镓(Ga N)和碳化硅(SiC)是第三代宽禁带半导体的两种核心材料,具有优异的热稳定性、耐高温性能以及高热导率,在高频功率器件、光电子器件等领域具有广阔的应用前景。欧姆接触是实现半导体器件应用的基础,在提高器件性能、减小电阻损... 氮化镓(Ga N)和碳化硅(SiC)是第三代宽禁带半导体的两种核心材料,具有优异的热稳定性、耐高温性能以及高热导率,在高频功率器件、光电子器件等领域具有广阔的应用前景。欧姆接触是实现半导体器件应用的基础,在提高器件性能、减小电阻损耗、增强稳定性和可靠性等方面发挥着重要作用。本文综述了贵金属在GaN和SiC欧姆接触中的研究进展,讨论了贵金属在欧姆接触中的制备工艺、性能优化方法以及电学、热学等性质间的关系,详细介绍了几种典型贵金属如金、银、铂等在Ga N和SiC欧姆接触中的应用和前景。 展开更多
关键词 宽禁带半导体 欧姆接触 贵金属 微观结构 接触电阻
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铁电异质结T-NbTe_(2)/Ga_(2)S_(3)的接触性质及调控
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作者 孙智玄 赵长松 程芳 《物理学报》 北大核心 2025年第10期230-239,共10页
单层的铁电半导体Ga_(2)S_(3)因具有卓越的延展性,极高的载流子迁移率以及独特的面外非对称极化特性而备受关注.利用铁电半导体Ga_(2)S_(3)面外非对称极化特性,本研究构建了T-NbTte_(2)/Ga_(2)S_(3)铁电异质结,并选用了两个能量最稳定且... 单层的铁电半导体Ga_(2)S_(3)因具有卓越的延展性,极高的载流子迁移率以及独特的面外非对称极化特性而备受关注.利用铁电半导体Ga_(2)S_(3)面外非对称极化特性,本研究构建了T-NbTte_(2)/Ga_(2)S_(3)铁电异质结,并选用了两个能量最稳定且Ga_(2)S_(3)极化强度方向不同的异质结PD1(P_(↓))和PU2(P_(↑)),对其结构稳定性和电接触性质进行相关研究.结果表明,由于Ga_(2)S_(3)极化强度方向的不同,本征态下的异质结PD1和PU2分别形成了N型肖特基接触和P型肖特基接触.改变铁电半导体Ga_(2)S_(3)的极化特性,能改变铁电异质结T-NbTe_(2)/Ga_(2)S_(3)肖特基势垒的接触类型,这为设计多功能的肖特基器件提供了一种实用的方法.对于异质结PD1和PU2,施加外加正电场或者双轴应变拉伸,都能够有效地实现肖特基接触至欧姆接触的转变.这些结果为高性能电接触界面的二维铁电纳米器件提供了理论参考. 展开更多
关键词 金属-半导体异质结 肖特基接触 欧姆接触 电接触
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金-银合金的制备及其热电子注入效率研究
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作者 张震 尹鹏飞 +1 位作者 菅傲群 桑胜波 《太原理工大学学报》 北大核心 2025年第6期1234-1239,共6页
【目的】负载贵金属(Au、Ag等)拓宽了半导体材料的光吸收范围,但单一贵金属存在稳定性差、热电子注入效率低等问题,限制了其应用范围及效能。制备Au-Ag合金能够结合Au和Ag的优势,并且可以通过改变成分来调控性能,具有简单、灵活、高性... 【目的】负载贵金属(Au、Ag等)拓宽了半导体材料的光吸收范围,但单一贵金属存在稳定性差、热电子注入效率低等问题,限制了其应用范围及效能。制备Au-Ag合金能够结合Au和Ag的优势,并且可以通过改变成分来调控性能,具有简单、灵活、高性能的特点。了解Au-Ag合金的成分对其光学特性及热电子注入效率的影响在光催化、光电化学传感等方面具有重要作用。【方法】通过高温退火的方法在TiO_(2)薄膜表面制备了Au-Ag合金纳米颗粒,通过改变磁控溅射镀膜的厚度来控制合金中各元素的含量。制备了三种不同比例的Au-Ag/TiO_(2)/Au复合结构,这种三明治夹层结构能够有效增强光吸收。通过UV-Vis以及开尔文探针力显微镜研究了薄膜的光学吸收特性及热电子注入效率。【结果】结果表明合金中Ag元素含量增大会使其吸收峰蓝移并且会提高热电子注入效率。验证了Au-Ag合金的制备及可控调节,为高性能光催化材料及高灵敏度可调控光电化学传感电极的制备提供了参考。 展开更多
关键词 Au-Ag合金 局域表面等离子体共振 金半接触电势差 开尔文探针力显微镜
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快速退火工艺中辐射测温系统的光学设计研究
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作者 孙硕实 许吉禅 凌必利 《佳木斯大学学报(自然科学版)》 2025年第4期76-79,共4页
为解决辐射测温系统因晶圆传输和发射率变化导致的测量精度不足问题,针对晶圆在氮气和固定气流环境下从400℃快速升温至1000℃-1150℃并迅速降温至600℃的快速退火过程,采用光学设计原理设计温度测控系统。通过蓝宝石导光棒收集晶圆辐... 为解决辐射测温系统因晶圆传输和发射率变化导致的测量精度不足问题,针对晶圆在氮气和固定气流环境下从400℃快速升温至1000℃-1150℃并迅速降温至600℃的快速退火过程,采用光学设计原理设计温度测控系统。通过蓝宝石导光棒收集晶圆辐射信号,优化光路设计以减少光学损失并提高探测器接收效率,成功研发了适用于半导体退火工艺的非接触式测温装置。实验结果表明,系统优化光路后显著提升了晶圆温度测量的精度和可靠性,能够有效支持快速退火过程中的温度控制。得出结论,该系统为半导体制造工艺的优化提供了可靠的技术保障,并为提高生产效率和产品质量奠定了基础。 展开更多
关键词 快速热处理 非接触式测温 蓝宝石导光棒 半导体退火工艺 晶圆温度测量
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Unveiling transition metal dinitrides for high-efficiency information devices through systematic first-principles calculations
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作者 Jun-Fei Ding Qiu-Shi Yao +4 位作者 Yun-Peng Qu Farid Man-shaii Shao-Lei Wang Xiao-Si Qi Yao Liu 《Rare Metals》 2025年第7期4789-4800,共12页
Currently,the development of high-efficiency two-dimensional(2D)transistors is still hindered by the limited availability of suitable semiconductors and the contact resistance between the metal contact and the 2D semi... Currently,the development of high-efficiency two-dimensional(2D)transistors is still hindered by the limited availability of suitable semiconductors and the contact resistance between the metal contact and the 2D semiconductors.Endeavors to address these challenges are highly desired.In this study,we conducted a comprehensive exploration of the potential 2D transition metal dinitrides(TMN_(2)s,TM=all the 3d,4d and 5d transition metals)with hexagonal(h-)and trigonal(t-)phases through systematic first-principles calculations.Among all h-TMN_(2)s and t-TMN_(2)s structures,we identified 8 TMN_(2)s that exhibit dynamical and thermal stability at room temperature.Of these,the h-TiN_(2),h-ZrN_(2)and h-HfN_(2)arefound to be semiconductors,and their direct bang gap,calculated at the HSE06 level,are 1.48,1.96 and 2.64 eV,respectively.The electron and hole mobility(μ_(e)andμ_(h))of these three structures exceed 1×10^(4)and1×10^(3)cm^(2)·V^(-1)·s^(-1),respectively.Especially,theμeof h-TiN_(2)amounts to 2.5×10^(4)cm^(2)·V^(-1)·s^(-1),and theμhof h-ZrN_(2)reaches to 7.7×10^(3)cm^(2)·V^(-1)·s^(-1).Importantly,unlike the MoS_(2)system,h-TMN_(2)forms Ohm contacts with both transition metals(e.g.,Cu)and 2D metals(e.g.,graphene),with tunneling possibilities exceeding 50%in the Cu system.These outstanding intrinsic semiconductor properties and contact characteristics exhibited by h-TMN_(2)highlight the immense potential of transition metal dinitrides in driving the advancement of next-generation information devices.Our findings significantly broaden the range of 2D materials and provide valuable insights for the development of high-eficiency 2D information devices. 展开更多
关键词 Two-dimensional(2D)materials Metal semiconductor contact Transition metal dinitrides 2D semiconductors First-principles calculations
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Lighting the way:precision doping in organic semiconductors
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作者 Niansheng Xu Feng Gao 《Science China Materials》 2026年第3期1797-1798,共2页
Doping is essential for modulating semiconductor conductivity,forming p-n junctions,and reducing contact resistance[1].Notably,as organic semiconductors(OSCs)advance toward high performance,flexibility,and miniaturiza... Doping is essential for modulating semiconductor conductivity,forming p-n junctions,and reducing contact resistance[1].Notably,as organic semiconductors(OSCs)advance toward high performance,flexibility,and miniaturization,achieving precise regionally selective doping becomes critical for building complex,highly integrated devices[2].In inorganic semiconductors(e.g.,silicon),sub-100-nanometer regional doping is achievable through photolithography and ion implantation—techniques foundational to modern complementary metaloxide-semiconductor(CMOS)technology[3]. 展开更多
关键词 reducing contact resistance notablyas organic semiconductors oscs advance precision ion implantation techniques inorganic semiconductors egsilicon sub nanometer regionally selective doping LIGHTING modulating semiconductor conductivityforming
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p型GaAs欧姆接触性能研究 被引量:5
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作者 刘梦涵 崔碧峰 +3 位作者 何新 孔真真 黄欣竹 李莎 《激光与红外》 CAS CSCD 北大核心 2016年第5期578-582,共5页
为了研究半导体光电器件p-GaAs欧姆接触的特性,利用磁控溅射在p-GaAs上生长Ti厚度在10-50 nm范围、Pt厚度在30-60 nm范围的Ti/Pt/200 nm Au电极结构。利用传输线模型测量了具有不同的Ti、Pt厚度的Ti/Pt/200 nm Au电极结构接触电阻率,研... 为了研究半导体光电器件p-GaAs欧姆接触的特性,利用磁控溅射在p-GaAs上生长Ti厚度在10-50 nm范围、Pt厚度在30-60 nm范围的Ti/Pt/200 nm Au电极结构。利用传输线模型测量了具有不同的Ti、Pt厚度的Ti/Pt/200 nm Au电极结构接触电阻率,研究了退火参数对欧姆接触性能的影响,同时分析了过高温度导致电极金属从边缘向内部皱缩的机理。结果表明,Ti厚度为30 nm左右时接触电阻率最低,接触电阻率随着Pt厚度的增加而增加;欧姆接触质量对退火温度更敏感,退火温度达到510℃时电极金属从边缘向内部皱缩。采用40nm Ti/40 nm Pt/200 nm Au作为半导体光电器件p-GaAs电极结构,合金条件为420℃,30 s可以形成更好的欧姆接触。 展开更多
关键词 半导体器件 欧姆接触 接触电阻率 合金
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Au/AuGeNi/n-GaAs欧姆接触失效机理的研究 被引量:3
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作者 李志国 李静 +5 位作者 孙英华 郭伟玲 吉元 程尧海 严永鑫 李学信 《微电子学》 CAS CSCD 1996年第4期226-229,共4页
对Au/AuGeNi/n-GaAs欧姆接触进行了三种不同的应力试验:(1)高温存储(HTS),(2)常温大电流(HC),(3)高温适当电流。试验结果表明,三种试验均造成了试验后期欧姆接触电阻增大,最后导致欧姆接触失效... 对Au/AuGeNi/n-GaAs欧姆接触进行了三种不同的应力试验:(1)高温存储(HTS),(2)常温大电流(HC),(3)高温适当电流。试验结果表明,三种试验均造成了试验后期欧姆接触电阻增大,最后导致欧姆接触失效。AES分析表明,试验后的样品发生了Ni、An和GaAs的互扩散。 展开更多
关键词 半导体器件 Ⅲ-Ⅴ族 化合物半导体 欧姆接触
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