期刊文献+
共找到2,709篇文章
< 1 2 136 >
每页显示 20 50 100
Data-Driven Parametric Design of Additively Manufactured Hybrid Lattice Structure for Stiffness and Wide-Band Damping Performance
1
作者 Chenyang Li Shangqin Yuan +3 位作者 Han Zhang Shaoying Li Xinyue Li Jihong Zhu 《Additive Manufacturing Frontiers》 2025年第2期30-39,共10页
The outstanding comprehensive mechanical properties of newly developed hybrid lattice structures make them useful in engineering applications for bearing multiple mechanical loads.Additive-manufacturing technologies m... The outstanding comprehensive mechanical properties of newly developed hybrid lattice structures make them useful in engineering applications for bearing multiple mechanical loads.Additive-manufacturing technologies make it possible to fabricate these highly spatially programmable structures and greatly enhance the freedom in their design.However,traditional analytical methods do not sufficiently reflect the actual vibration-damping mechanism of lattice structures and are limited by their high computational cost.In this study,a hybrid lattice structure consisting of various cells was designed based on quasi-static and vibration experiments.Subsequently,a novel parametric design method based on a data-driven approach was developed for hybrid lattices with engineered properties.The response surface method was adopted to define the sensitive optimization target.A prediction model for the lattice geometric parameters and vibration properties was established using a backpropagation neural network.Then,it was integrated into the genetic algorithm to create the optimal hybrid lattice with varying geometric features and the required wide-band vibration-damping characteristics.Validation experiments were conducted,demonstrating that the optimized hybrid lattice can achieve the target properties.In addition,the data-driven parametric design method can reduce computation time and be widely applied to complex structural designs when analytical and empirical solutions are unavailable. 展开更多
关键词 Hybrid lattice structure DATA-DRIVEN wide-band damping Machine-learning method
在线阅读 下载PDF
Facilitating wide-band oscillation analysis in wind farms with a novel linearization analysis framework based on the average-value model
2
作者 Qiufang Zhang Yin Xu Jinghan He 《iEnergy》 2025年第2期132-148,共17页
Wide-band oscillations have become a significant issue limiting the development of wind power.Both large-signal and small-signal analyses require extensive model derivation.Moreover,the large number and high order of ... Wide-band oscillations have become a significant issue limiting the development of wind power.Both large-signal and small-signal analyses require extensive model derivation.Moreover,the large number and high order of wind turbines have driven the development of simplified models,whose applicability remains controversial.In this paper,a wide-band oscillation analysis method based on the average-value model(AVM)is proposed for wind farms(WFs).A novel linearization analysis framework is developed,leveraging the continuous-time characteristics of the AVM and MATLAB/Simulink’s built-in linearization tools.This significantly reduces modeling complexity and computational costs while maintaining model fidelity.Additionally,an object-based initial value estimation method of state variables is introduced,which,when combined with steady-state point-solving tools,greatly reduces the computational effort required for equilibrium point solving in batch linearization analysis.The proposed method is validated in both doubly fed induction generator(DFIG)-based and permanent magnet synchronous generator(PMSG)-based WFs.Furthermore,a comprehensive analysis is conducted for the first time to examine the impact of the machine-side system on the system stability of the nonfully controlled PMSG-based WF. 展开更多
关键词 wide-band oscillation analysis average-value model(AVM) doubly fed induction generator(DFIG) permanent magnet synchronous generator(PMSG) eigenvalue analysis impedance analysis
在线阅读 下载PDF
Effect of Y_2O_3 Content on Microstructure of Gradient Bioceramic Composite Coating Produced by Wide-Band Laser Cladding 被引量:14
3
作者 刘其斌 邹江龙 +1 位作者 郑敏 董闯 《Journal of Rare Earths》 SCIE EI CAS CSCD 2005年第4期446-450,共5页
To eliminate thermal stress and cracks in the process of laser cladding, a kind of bioceramic coating with gradient compositional design was prepared on the surface of Ti alloy by using wide-band laser cladding. And e... To eliminate thermal stress and cracks in the process of laser cladding, a kind of bioceramic coating with gradient compositional design was prepared on the surface of Ti alloy by using wide-band laser cladding. And effect of Y2O3 content on gradient bioceramic composite coating was studied. The experimental results indicate that adding rare earth can refine grain. Different rare earth contents affect formation of HA and β-TCP in bioceramic coating. When the content of rare earth ranges from 0.4% to 0.6%, the active extent of rare earth in synthesizing HA and β-TCP is the best, which indicates that “monosodium glutamate” effect of rare earth plays a dominant role. However, when rare earth content is up to 0.8%, the amount of synthesizing HA and β-TCP in coating conversely goes down, which demonstrates that rare earth gradually losts its catalysis in manufacturing HA and β-TCP. 展开更多
关键词 Y2O3 content wide-band laser cladding gradient bioceramic coating micmstructure rare earths
在线阅读 下载PDF
Digital Coarse Tuning Loop for Wide-Band Fast-Settling Dual-Loop Frequency Synthesizers
4
作者 刘军华 廖怀林 +2 位作者 殷俊 黄如 张兴 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第11期1911-1917,共7页
A new coarse tuning loop for a wide-band dual-loop frequency synthesizer is presented. The coarse tuning structure is composed of two digital modules, including a successive approximation register and a frequency comp... A new coarse tuning loop for a wide-band dual-loop frequency synthesizer is presented. The coarse tuning structure is composed of two digital modules, including a successive approximation register and a frequency comparator with a novel structure. The frequency comparator counts the prescaler cycles within a certain reference time and compares the number with preset data to estimate the VCO frequency. The frequency comparison error is analyzed in detail. Within a given coarse tuning time,our proposed structure shows a comparison error 20 times smaller than that of other reported structures. This structure also reuses the programmable divider as a part of the coarse tuning loop so that the circuit is greatly simplified. 展开更多
关键词 wide-band coarse tuning loop frequency synthesizer voltage-controlled oscillator
在线阅读 下载PDF
STOCHASTIC OPTIMAL CONTROL OF STRONGLY NONLINEAR SYSTEMS UNDER WIDE-BAND RANDOM EXCITATION WITH ACTUATOR SATURATION 被引量:3
5
作者 Changshui Feng Weiqiu Zhu 《Acta Mechanica Solida Sinica》 SCIE EI 2008年第2期116-126,共11页
A bounded optimal control strategy for strongly non-linear systems under non-white wide-band random excitation with actuator saturation is proposed. First, the stochastic averaging method is introduced for controlled ... A bounded optimal control strategy for strongly non-linear systems under non-white wide-band random excitation with actuator saturation is proposed. First, the stochastic averaging method is introduced for controlled strongly non-linear systems under wide-band random excitation using generalized harmonic functions. Then, the dynamical programming equation for the saturated control problem is formulated from the partially averaged Itō equation based on the dynamical programming principle. The optimal control consisting of the unbounded optimal control and the bounded bang-bang control is determined by solving the dynamical programming equation. Finally, the response of the optimally controlled system is predicted by solving the reduced Fokker-Planck-Kolmogorov (FPK) equation associated with the completed averaged Itō equation. An example is given to illustrate the proposed control strategy. Numerical results show that the proposed control strategy has high control effectiveness and efficiency and the chattering is reduced significantly comparing with the bang-bang control strategy. 展开更多
关键词 nonlinear system optimal control actuator saturation stochastic averaging wide-band random excitation
在线阅读 下载PDF
An ultrathin wide-band planar metamaterial absorber based on a fractal frequency selective surface and resistive film 被引量:2
6
作者 范跃农 程用志 +2 位作者 聂彦 王鲜 龚荣洲 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第6期570-575,共6页
We propose an ultrathin wide-band metamaterial absorber (MA) based on a Minkowski (MIK) fractal frequency selective surface and resistive film. This absorber consists of a periodic arrangement of dielectric substr... We propose an ultrathin wide-band metamaterial absorber (MA) based on a Minkowski (MIK) fractal frequency selective surface and resistive film. This absorber consists of a periodic arrangement of dielectric substrates sandwiched with an MIK fractal loop structure electric resonator and a resistive film. The finite element method is used to simulate and analyze the absorption of the MA. Compared with the MA-backed copper film, the designed MA-backed resistive film exhibits an absorption of 90% at a frequency region of 2 GHz-20 GHz. The power loss density distribution of the MA is further illustrated to explain the mechanism of the proposed MA. Simulated absorptions at different incidence cases indicate that this absorber is polarization-insensitive and wide-angled. Finally, further simulated results indicate that the surface resistance of the resistive film and the dielectric constant of the substrate can affect the absorbing property of the MA. This absorber may be used in many military fields. 展开更多
关键词 wide-band metamaterial absorber fractal frequency selective surface resistive films
原文传递
Wide-Band Multi-spectral Space for Color Representation 被引量:2
7
作者 Kurt Muenger 《Geo-Spatial Information Science》 2003年第2期69-74,共6页
This paper develops a wide-band multi-spectral space for color representationwith Aitken PCA algorithm. This novel mathematical space using the broad-band spectra matchingmethod aims at improving the accuracy of color... This paper develops a wide-band multi-spectral space for color representationwith Aitken PCA algorithm. This novel mathematical space using the broad-band spectra matchingmethod aims at improving the accuracy of color representation as well as reducing costs forprocessing and storing multi-spectral images. The results show that the space can present ourexperimental original spectral spaces (i. e. Munsell color matt and DIN-6164 color chips) with highefficiency, and that the spanning space with three eigenvectors can present the original space atmore than 98% CSCR, and when 5 eigenvectors are used it can cover almost the whole o-riginal spaces. 展开更多
关键词 color representation METAMERISM wide-band multispectral space PCA(principal component analysis)
在线阅读 下载PDF
Adaptive blind gain correction of time-interleaved ADCs forwide-band communication applications 被引量:1
8
作者 Behnaz Papari Davud Asemani Ali Khakpour 《Journal of Measurement Science and Instrumentation》 CAS 2012年第2期157-162,共6页
High spectral efficiency is essential in design of multimedia communication systems such as L-band mobile in addition to various requirements of transmission quality. Time-interleaved A/D converter (TI-ADC) is an ef... High spectral efficiency is essential in design of multimedia communication systems such as L-band mobile in addition to various requirements of transmission quality. Time-interleaved A/D converter (TI-ADC) is an effective candidate to implement wide-band ADC with relatively slow circuits accounting for digital spectrum management. However, practical performance of TI-ADC is largely limited because of mismatches between different channels originated from manufacturing process variations. In this paper, a blind adaptive method is proposed to correct gain mismatch errors in TI-ADC, and it is verified through simulations on a two-channel TI-ADC. In proposed method, gain mismatch error is estimated and corrected in an adaptive scheme. Proposed compensated T1-ADC architecture is structurally very simple and hence suitable for realiza- tion in integrated circuits. Besides, proposed digital compensation algorithm not only is computationally efficient but also provides an improvement of 32.7 dB in the performance of two-channel TI ADC. 展开更多
关键词 time-interleaved A/D converter(TI-ADC) wide-band communications time-division multiple access(TDMA)
在线阅读 下载PDF
High-Efficiency Wide-Band Cross-Polarization Conversion Using Bi-layered Metal Hole Pairs 被引量:1
9
作者 Yong Zhang Xian-Ke Li Cheng-Ping Huang 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第10期40-43,共4页
We present a polarization converter composed of bi-layered metal films perforated with rectangle hole pairs in each film. The proposed converter can convert the polarization of an incident linearly-polarized electroma... We present a polarization converter composed of bi-layered metal films perforated with rectangle hole pairs in each film. The proposed converter can convert the polarization of an incident linearly-polarized electromagnetic wave to its orthogonal direction with high efficiency and large bandwidth in the infrared or microwave regions.To make sure of the mechanism of polarization conversion, the current and electric-field distributions at different resonant frequencies are analyzed. It is found that the cross-polarized transmission is due to the near-field coupling between hole pairs in neighboring metal films. Finally, a prototype of the proposed converter is fabricated and measured in the microwave region. Good agreement between the experimental and simulated results is obtained. 展开更多
关键词 High-Efficiency wide-band Cross-Polarization Conversion Using Bi-layered Metal Hole Pairs
原文传递
Dynamics of Gradient Bioceramic Composite Coating on Surface of Titanium Alloy by Wide-Band Laser Cladding
10
作者 LIUQi-bin ZOULong-jiang +2 位作者 ZHUWei-dong LIHai-tao DONGChuang 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2004年第6期57-62,共6页
The gradient bioceramic coating was prepared on the surface of titanium alloy using wide-band laser cladding.The dynamics of gradient bioceramic composite coating containing hydroxyapatite(HA)prepared with mixture of ... The gradient bioceramic coating was prepared on the surface of titanium alloy using wide-band laser cladding.The dynamics of gradient bioceramic composite coating containing hydroxyapatite(HA)prepared with mixture of CaHPO4·2H2O and CaCO3 under the condition of wide-band laser was studied theoretically.The corresponding mathematical model and its numerical solution were presented.The examination experiment showed that HA bioceramic composite coatings can be obtained by appropriately choosing wide-band laser cladding parameters.The microstructure and surface morphology of HA bioceramic coating were observed by SEM and X-ray diffraction.The experimental results showed that the bioceramic coating is composed of HA,β-TCP,CaO,CaTiO3 and TiO2.The surface of bioceramic coating takes coral-shaped structure or short-rod piled structure,which helps osteoblast grow into bioceramic and improves the biocompatibility. 展开更多
关键词 wide-band laser cladding BIOCERAMIC composite coating DYNAMICS
在线阅读 下载PDF
2-D SPATIAL-SPECTRUM ESTIMATION FORWIDE-BAND SOURCES BASED ON INTERPOLATED CIRCULAR ARRAYS
11
作者 Li Ping’an Yu Bianzhang Sun Jincai(Department of Electronic Engineering, Northwestern Polytechnicaj University, Xi’an 710072) 《Journal of Electronics(China)》 1996年第4期319-324,共6页
In array signal processing, 2-D spatial-spectrum estimation is required to determine DOA of multiple signals. The circular array of sensors is found to possess several nice properties for DOA estimation of wide-band s... In array signal processing, 2-D spatial-spectrum estimation is required to determine DOA of multiple signals. The circular array of sensors is found to possess several nice properties for DOA estimation of wide-band sources. C. U. Padmini, et al.(1994) had suggested that the frequency-direction ambiguity in azimuth estimation of wide-baud signals received by a uniform linear array (ULA) can be avoided by using a circular array, even without the use of any delay elements. In 2-D spatial-spectrum estimation for wide-band signals, the authors find that it is impossible to avoid the ambiguity in source frequency-elevation angle pairs using a circular array. In this paper, interpolated circular arrays are used to perform 2-D spatial-spectrum estimation for wide-band sources. In the estimation, a large aperture circular array (Υ】λmin/2) is found to possess superior resolution capability and robustness. 展开更多
关键词 ARRAY SIGNAL processing 2-D spatial-spectrum estimation wide-band SIGNAL Interpolated CIRCULAR ARRAY
在线阅读 下载PDF
AN EFFICIENT IMPLEMENTATION ARCHITECTURE FOR WIDE-BAND DIGITAL DOWNCONVERSION
12
作者 Gao Zhicheng Xiao Xianci (University of Electronic Science and Technology of China, Chengdu 610054) 《Journal of Electronics(China)》 2001年第1期38-45,共8页
The wide-band digital receiving systems require digital downconversion(DDC) with high data rate and short tuning time in order to intercept the narrow-band signals within broad tuning bandwidth. But these requirements... The wide-band digital receiving systems require digital downconversion(DDC) with high data rate and short tuning time in order to intercept the narrow-band signals within broad tuning bandwidth. But these requirements can not be met by the commercial DDC. In this paper an efficient implementation architecture is presented. It combines the flexibility of DFT tuning with the efficiency of the polyphase filter bank decomposition. By first decimating the data prior to filtering and mixing, this architecture gives a better solution to the mismatch between the lower hardware speed and high data rate. The computer simulations show the feasibility of this processing architecture. 展开更多
关键词 DIGITAL DOWNCONVERSION wide-band DIGITAL receiving POLYPHASE FILTER
在线阅读 下载PDF
Genetic algorithm-based wide-band deterministic maximum likelihood direction finding algorithm
13
作者 李福昌 赵春晖 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2005年第3期510-514,共5页
The wide-band direction finding is one of hit and difficult task in array signal processing. This paper generalizes narrow-band deterministic maximum likelihood direction finding algorithm to the wideband case, and so... The wide-band direction finding is one of hit and difficult task in array signal processing. This paper generalizes narrow-band deterministic maximum likelihood direction finding algorithm to the wideband case, and so constructions an object function, then utilizes genetic algorithm for nonlinear global optimization. Direction of arrival is estimated without preprocessing of array data and so the algorithm eliminates the effect of pre-estimate on the final estimation. The algorithm is applied on uniform linear array and extensive simulation results prove the efficacy of the algorithm. In the process of simulation, we obtain the relation between estimation error and parameters of genetic algorithm. 展开更多
关键词 wide-band direction finding deterministic maximum likelihood genetic algorithm.
在线阅读 下载PDF
Performance of multi-band orthogonal frequency division multiplexing ultra wide-band system on IEEE UWB channels
14
作者 王纯 《Journal of Chongqing University》 CAS 2007年第1期63-66,共4页
Multiband orthogonal frequency division multiplexing (MB-OFDM) ultra wide-band (UWB) is a novel wireless communication technology. It has many advantages and is being actively researhed. In this study, we constructed ... Multiband orthogonal frequency division multiplexing (MB-OFDM) ultra wide-band (UWB) is a novel wireless communication technology. It has many advantages and is being actively researhed. In this study, we constructed and implemented a simulation model of UWB communication systems in Simulink. We found the MB-OFDM UWB system has the best performance in distance between 4 m to 10 m without the line-of-sight requirement. 展开更多
关键词 ultra wide-band (UWB) multiband (MB) orthogonal frequency division multiplexing (OFDM)
在线阅读 下载PDF
Research on the Formation of Metal-Ceramic Surface Composite Coating by Wide-Band Laser Cladding 被引量:1
15
作者 LIUShuo ZHANGWei-ping MAYu-tao 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期1025-1028,共4页
Large-area in-situ synthesized TiB2(TiB, Fe2B)—Fe metal-ceramic composite coating has been fabricated on medium carbon steel by laser cladding with the optimal laser parameters and overlapping coefficient. The bondin... Large-area in-situ synthesized TiB2(TiB, Fe2B)—Fe metal-ceramic composite coating has been fabricated on medium carbon steel by laser cladding with the optimal laser parameters and overlapping coefficient. The bonding interfaces between the cladding layer and the matrix and among different tracks are excellent. Microanalysis on the cladding layer shows that the morphology is a little different from each other and the element distribution and the mechanical properties are unanimous in each track while the mechanical property of the cladding layer shows a gradual change from the surface to the matrix. The in-situ separating out thin ceramic phases in the coating contribute to the improving of its properties greatly. 展开更多
关键词 宽带激光包覆 金属陶瓷 显微结构 机械性质
在线阅读 下载PDF
STUDY ON THE WIDE-BAND AND HIGH-GAIN MICROSTRIP ANTENNA ELEMENT
16
作者 Yao Demiao Cai Jianming Jiang Mingzhi(Department of Electronic Technology, National University of Defense Technology of China, Changsha 410073) 《Journal of Electronics(China)》 1997年第1期68-74,共7页
A novel three layers microstrip antenna element that has the advantages of wideband and high-gain is proposed. The eigenvalue equation and the frequency characteristic formulas of the input Voltage Stand Wave Ratio ( ... A novel three layers microstrip antenna element that has the advantages of wideband and high-gain is proposed. The eigenvalue equation and the frequency characteristic formulas of the input Voltage Stand Wave Ratio ( VSWR ) are obtained by using the spectral domain method and equivalent circuit method, respectively. With the aid of the numerical results, a C-band microstrip antenna element with bandwidth of 16% (VSWR【1.5) or 25% (VSWR【2) and gain of 10.2-11.3 dB is developed, which are much larger than the bandwidth of 5-6% and the gain of 6-7 dB of the common microstrip antenna element. 展开更多
关键词 MICROSTRIP antenna WIDE BAND High GAIN
在线阅读 下载PDF
A novel algorithm of channel resource allocation in wide-band WLAN
17
作者 刘加伶 《重庆邮电大学学报(自然科学版)》 2008年第4期413-417,共5页
With the development of Wide-band wireless communications,MAC protocol in IEEE 802.11 can't satisfy user-individual quality of service(QoS) guarantees effectively and can't support high-speed mobility.A novel ... With the development of Wide-band wireless communications,MAC protocol in IEEE 802.11 can't satisfy user-individual quality of service(QoS) guarantees effectively and can't support high-speed mobility.A novel algorithm for channel allocation in Wide-band WLAN and an improved resource reservation mechanism applied into IEEE 802.11 MAC protocol are proposed in this article.The simulated results indicate that the advanced protocol makes the system throughput improved and delay decrease.Moreover,the improved system shows an excellent performance in the environment with high-speed mobility. 展开更多
关键词 无线交流 服务质量 射流元件 渠道传输
在线阅读 下载PDF
UWB/INS紧组合变分贝叶斯自适应滤波算法 被引量:1
18
作者 徐天河 王森 代培培 《导航定位学报》 北大核心 2025年第2期1-8,共8页
针对超宽带(UWB)与惯性导航系统(INS)紧组合在实际环境中面临非线性误差和噪声干扰的问题,提出一种变分贝叶斯自适应卡尔曼滤波(VBAKF)的UWB/INS紧组合导航算法:通过引入变分贝叶斯方法,自适应调整系统噪声统计特性未知情况下的滤波精度... 针对超宽带(UWB)与惯性导航系统(INS)紧组合在实际环境中面临非线性误差和噪声干扰的问题,提出一种变分贝叶斯自适应卡尔曼滤波(VBAKF)的UWB/INS紧组合导航算法:通过引入变分贝叶斯方法,自适应调整系统噪声统计特性未知情况下的滤波精度,提升滤波性能,并引入高程约束模型,增强高程方向的定位精度;建立UWB/INS紧组合模型,给出VBAKF滤波算法,对比分析VBAKF与传统自适应卡尔曼滤波(AKF)的状态估计性能差异。实验结果显示,VBAKF方法在东、北、天方向的定位精度相比于传统方法可分别提高16.13%、21.43%和6.25%,表明VBAKF方法能显著提高系统状态估计的准确性和可靠性,有效提高UWB/INS组合导航系统在实测环境下的适应能力。 展开更多
关键词 变分贝叶斯 超宽带(UWB) 惯性导航系统(INS) 紧组合 组合导航
在线阅读 下载PDF
基于卫星/UWB的鲁棒车载协同定位方法 被引量:1
19
作者 孙伟 张晓彤 刘经洲 《传感技术学报》 北大核心 2025年第5期841-847,共7页
相对位置感知作为协同导航的核心也是车辆智能驾驶的关键技术,在车辆自组网(Vehicular Ad Hoc Networks,VANET)协同定位算法中具有重要作用。然而限于系统非线性及有色噪声干扰,相同硬件平台下的相对位置后验信息获取通常局限于一定精... 相对位置感知作为协同导航的核心也是车辆智能驾驶的关键技术,在车辆自组网(Vehicular Ad Hoc Networks,VANET)协同定位算法中具有重要作用。然而限于系统非线性及有色噪声干扰,相同硬件平台下的相对位置后验信息获取通常局限于一定精度。针对上述问题,基于抗差理论提出一种Huber M估计的鲁棒容积滤波(Robust Cubature Kalman Filtering,RCKF)车辆相对位置估计算法。该算法通过结合容积法则进行非线性更新,将量测方程转换为观测量和状态预测的线性回归问题后利用M估计实现求解,通过Huber损失函数降低受干扰量测值权重实现估计性能调整。紧组合车辆相对位置估计的实验表明,与容积滤波(Cubature Kalman Filter,CKF)相比,RCKF估计结果在均方根上改善23.59%,在准确度上改善21.81%,在精度上改善27.39%,有效提高了相对位置估计精确性和鲁棒性,为车辆协同定位解决方案提供一种可供参考的系统质量控制策略。 展开更多
关键词 协同导航 鲁棒容积滤波 M估计 有色噪声 紧组合 超宽带技术
在线阅读 下载PDF
基于光栅+傅里叶光谱的宽波段大角度光谱椭偏技术研究
20
作者 张瑞 白沁 +4 位作者 徐承雨 王赛飞 孔泉慧子 薛鹏 王志斌 《光谱学与光谱分析》 北大核心 2025年第10期2930-2934,共5页
随着半导体、光电子技术的快速发展,紫外到中红外不同波段的薄膜材料被广泛应用,而薄膜厚度、折射率、消光系数等参数的高精度测量是上述器件质量和性能提高的关键。而光谱椭偏技术是其检测的最佳手段。但现有光谱椭偏测量技术无法同时... 随着半导体、光电子技术的快速发展,紫外到中红外不同波段的薄膜材料被广泛应用,而薄膜厚度、折射率、消光系数等参数的高精度测量是上述器件质量和性能提高的关键。而光谱椭偏技术是其检测的最佳手段。但现有光谱椭偏测量技术无法同时实现紫外-可见-短波红外宽波段透反射多角度测量,为此提出一种基于光栅+傅里叶光谱的宽波段大角度光谱椭偏测量技术。紫外-短波红外波段UV-SWIR(192~2100 nm)采用光栅光谱椭偏技术,短波红外-中红外波段SWIR-MIR(2000~3200 nm)采用傅里叶光谱椭偏技术,两个波段核心是探测光谱方式和位置不同,UV-SWIR波段的光栅光谱测量在检偏臂后端,SWIR-MIR波段的傅里叶干涉在起偏臂前端。为实现大角度测量,整个系统采用卧式旋转方式,两个波段起偏固定不动,检偏臂和样品台可大角度旋转,实现192~3200 nm宽波段、15°~90°大角度光谱椭偏系统集成。搭建原理样机,对Si基底上不同薄膜材料、不同厚度、不同膜层样片进行测量,其中用SiO_(2)-Si(薄膜为电介质)、ZnO-Si(薄膜为半导体)、PI-Si(薄膜为聚合物)、Si_(3)N_(4)-Al_(2)O_(3)-Si(电介质双层膜)、Au-SiO_(2)-Si(金属电介质双层膜)进行实验验证,并分别对样片穆勒矩阵M_(S)中的N=cos2Ψ、C=sin2ΨcosΔ和S=sin2ΨsinΔ与波长的关系进行测量,进而获得光谱椭偏参数Ψ和Δ,结合光谱椭偏理论拟合反演得到样片薄膜厚度。为验证该方法和系统的重复测量精度,对上述样片各进行30次重复测量实验。实验结果表明,该宽波段光谱椭偏系统的薄膜厚度测量精度优于0.7 nm,厚度重复性测量精度可达0.04 nm。该光谱椭偏测量技术可根据不同材料选择最优的光谱波段,进而提高其对更广泛材料类参数的测量精度,因此在高精度、宽波段、大角度薄膜椭偏测量领域具有重要的应用前景。 展开更多
关键词 光谱椭偏 宽波段 大视场 光栅及傅里叶光谱
在线阅读 下载PDF
上一页 1 2 136 下一页 到第
使用帮助 返回顶部