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ACOUSTICAL TRANSMISSION LINE MODEL FOR ULTRASONIC TRANSDUCERS FOR WIDE-BANDWIDTH APPLICATION 被引量:1
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作者 Yeongchin Chen 《Acta Mechanica Solida Sinica》 SCIE EI 2010年第2期124-134,共11页
An improved model for ultrasonic transducers is proposed. By considering only the first symmetric mode, each layer is represented as an acoustical transmission line in modeling of bulk wave transducers. In imaging app... An improved model for ultrasonic transducers is proposed. By considering only the first symmetric mode, each layer is represented as an acoustical transmission line in modeling of bulk wave transducers. In imaging applications, wide bandwidth and short time duration are required. The approach we have used consists of impedance matching the front face of the piezoelectric transducer to the propagating medium with a quarter wavelength impedance matching layer and inserting an nnmatching quarter wavelength acoustical layer between the rear face and backing material. A heavy backing would degrade the wide-band phenomena, but show a time duration shorter than 0.5 μs for imaging applications. PSPICE code of the controlled source model is implemented to precisely predict the performance of the matched transducers such as impedance, insertion loss, bandwidth and duration of the impulse response. Good agreement between the simulation and experimental results has been achieved. 展开更多
关键词 acoustical transmission line ultrasonic transducer wide-bandwidth PSPICE controlled source
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The application of laser reflective tomography in near-field measurements of ultrasonic transducers 被引量:4
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作者 WANG Yuebing WANG Shiquan 《Chinese Journal of Acoustics》 2014年第3期257-266,共10页
With Laser Reflective Tomography(LRT),the near fields of ultrasonic transducers were measured and analyzed.The principle of LRT measurement of ultrasonic field distribution was introduced and an experimental system ... With Laser Reflective Tomography(LRT),the near fields of ultrasonic transducers were measured and analyzed.The principle of LRT measurement of ultrasonic field distribution was introduced and an experimental system was set up.Acoustic pressure of a multiple element piston transducer was measured by using of a laser vibrometer.Its distribution in amplitude and phase was obtained.The acoustic pressure in the same region was measured with a needle hydrophone to validate the LRT method.Furthermore,through reconstruction of acoustic fields,it indicated that LRT method is suitable for predicting the distribution on transducers'surface and conditions of active elements. 展开更多
关键词 The application of laser reflective tomography in near-field measurements of ultrasonic transducers LRT
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Lead-free piezoelectric materials and ultrasonic transducers for medical imaging
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作者 Elaheh Taghaddos Mehdi Hejazi Ahmad Safari 《Journal of Advanced Dielectrics》 CAS 2015年第2期14-28,共15页
Piezoelectric materials have been vastly used in ultrasonic transducers for medical imaging.In this paper,firstly,the most promising lead-free compositions with perovskite structure for medical imaging applications ha... Piezoelectric materials have been vastly used in ultrasonic transducers for medical imaging.In this paper,firstly,the most promising lead-free compositions with perovskite structure for medical imaging applications have been reviewed.The electromechanical properties of various lead-free ceramics,composites,and single crystals based on barium titanate,bismuth sodium titanate,potassium sodium niobate,and lithium niobate are presented.Then,fundamental principles and design considerations of ultrasonic transducers are briefly described.Finally,recent developments in lead-free ultrasonic probes are discussed and their acoustic performance is compared to lead-based transducers.Focused transducers with different beam focusing methods such as lens focusing and mechanical shaping are explained.Additionally,acoustic characteristics of lead-free probes including the pulse-echo results as well as their imaging capabilities for various applications such as phantom imaging,in vitro intravascular ultrasound imaging of swine aorta,and in vivo or ex vivo imaging of human eyes and skin are reviewed. 展开更多
关键词 LEAD-FREE PIEZOELECTRIC ultrasonic transducers medical imaging.
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A fast implementation for computing spatial impulse response of ultrasonic transducers
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作者 DONG Ming MA Hongwei +2 位作者 ZHANG Guangming CHEN Yuan YANG Ping 《Chinese Journal of Acoustics》 CSCD 2016年第3期212-219,共8页
The spatial impulse response(SIR) method is often used as the 'gold standard5 in simulation of transient acoustic wave fields due to its high accuracy in the linear domain.However, a high sampling frequency is ofte... The spatial impulse response(SIR) method is often used as the 'gold standard5 in simulation of transient acoustic wave fields due to its high accuracy in the linear domain.However, a high sampling frequency is often required in order to achieve the high accuracy. As a result, a large amount of data has to be processed. In this paper a fast approach for computing spatial impulse response is proposed to reduce the computation burden. The proposed approach is developed by employing the relationship of SIRs at observed points and SIRs of the projection points on the transducer surface. Two critical parameters used in the proposed approach, the calculation sampling frequency and the interpolation sampling frequency, are then analyzed.Results show that for a 2.25 MHz rectangular transducer with the size of 5 mm×10 mm,a calculation sampling frequency of 1000 MHz and an interpolation sampling frequency of500 MHz can achieve superior performance while improving the computation efficiency 18 times than the direct solving. 展开更多
关键词 A fast implementation for computing spatial impulse response of ultrasonic transducers
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Delamination damage detection of laminated composite beams using air-coupled ultrasonic transducers 被引量:16
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作者 LIU ZengHua YU HongTao +1 位作者 HE CunFu WU Bin 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2013年第7期1269-1279,共11页
Air-coupled ultrasonic transducers are used to generate and receive Lamb waves in quasi-isotropic laminated composite beams for delamination detection. The influence of incident angle on the excited mode is studied. N... Air-coupled ultrasonic transducers are used to generate and receive Lamb waves in quasi-isotropic laminated composite beams for delamination detection. The influence of incident angle on the excited mode is studied. Numerical calculation and experimental results show that a pure Lamb wave mode can be generated if the transmitting transducer is oriented at a specific angle, and the receiving transducer can either be oriented to detect the same mode as that generated by the transmitter or to detect another mode generated by mode conversion at a defect. A three-dimensional finite element model is created to predict the interaction of Lamb waves with delamination, and some unique mechanisms of interaction between A0 mode Lamb waves and delamination are revealed in detail. The experimental results obtained on laminated composite beam using air-coupled ultrasonic transducers are well in accordance with finite element simulation results. Research results show that air-coupled ultrasonic guided waves can be used for delamination damage detection effectively in laminated composite beams. 展开更多
关键词 delamination detection composite beam Lamb wave mode air-coupled ultrasonic transducer three-dimensional finite element simulation
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A theoretical model of electrostatic ultrasonic transducers with micro air-gap structure
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作者 GE Lifeng(GE Li-Feng) 《Chinese Science Bulletin》 SCIE EI CAS 1998年第9期728-731,共4页
A new plate-on-air-spring model(or called short tube or DK model)for modelling the behaviour of electrostatic air-coupled ultrasonic transducers is developed and verified by accurate predictions of natural frequencies... A new plate-on-air-spring model(or called short tube or DK model)for modelling the behaviour of electrostatic air-coupled ultrasonic transducers is developed and verified by accurate predictions of natural frequencies of a typical transducer with V-grooved backplate. 展开更多
关键词 electrostatic ultrasonic transducer micro air-gap structure MODELLING
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CONTROL OF ROBOT DRIVEN BY MULTIPLE ULTRASONIC MOTORS BASED ON ROBUST PARAMETER DESIGN 被引量:3
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作者 孙志峻 帅双辉 黄卫清 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2009年第4期243-250,共8页
An ultrasonic motor (USM) is difficlt to be mathematically described because of its complex energy conversion and nonlinear parameters from increasing temperature and changing operating conditions. To achieve good p... An ultrasonic motor (USM) is difficlt to be mathematically described because of its complex energy conversion and nonlinear parameters from increasing temperature and changing operating conditions. To achieve good performance of a three-joint robot directly driven by USM, according to the operating characteristics of USM, a new position-velocity feedback control strategy is proposed. In the control strategy, there are a total of 18 controller gains to he tuned. Through a series of "Design of Experiments" by the robust parameter design, an optimal and robust set of proportional integral derivative (PID) controller gains is obtained. Results show that the control strategy can achieve the best performance of the robot and the robust parameter design is effective and convenient to USMs. 展开更多
关键词 ultrasonic transducers robust control proportional integral derivative (PID) control position-veloci-ty feedback
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Design and micromanufacturing technologies of focused piezoelectric ultrasound transducers for biomedical applications
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作者 Xingyu Bai Daixu Wang +5 位作者 Liyun Zhen Meng Cui Jingquan Liu Ning Zhao Chengkuo Lee Bin Yang 《International Journal of Extreme Manufacturing》 CSCD 2024年第6期24-48,共25页
Piezoelectric ultrasonic transducers have shown great potential in biomedical applications due to their high acoustic-to-electric conversion efficiency and large power capacity.The focusing technique enables the trans... Piezoelectric ultrasonic transducers have shown great potential in biomedical applications due to their high acoustic-to-electric conversion efficiency and large power capacity.The focusing technique enables the transducer to produce an extremely narrow beam,greatly improving the resolution and sensitivity.In this work,we summarize the fundamental properties and biological effects of the ultrasound field,aiming to establish a correlation between device design and application.Focusing techniques for piezoelectric transducers are highlighted,including material selection and fabrication methods,which determine the final performance of piezoelectric transducers.Numerous examples,from ultrasound imaging,neuromodulation,tumor ablation to ultrasonic wireless energy transfer,are summarized to highlight the great promise of biomedical applications.Finally,the challenges and opportunities of focused ultrasound transducers are presented.The aim of this review is to bridge the gap between focused ultrasound systems and biomedical applications. 展开更多
关键词 piezoelectric ultrasonic transducers focusing techniques preparation method biomedical applications
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Design of a hexagonal air-coupled capacitive micromachined ultrasonic transducer for air parametric array 被引量:5
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作者 Xiaoli Zhang Hui Zhang Dachao Li 《Nanotechnology and Precision Engineering》 CAS CSCD 2021年第1期26-35,共10页
An air parametric array can generate a highly directional beam of audible sound in air,which has a wide range of applications in targeted audio delivery.Capacitive micromachined ultrasonic transducer(CMUTs)have great ... An air parametric array can generate a highly directional beam of audible sound in air,which has a wide range of applications in targeted audio delivery.Capacitive micromachined ultrasonic transducer(CMUTs)have great potential for air-coupled applications,mainly because of their low acoustic impedance.In this study,an air-coupled CMUT array is designed as an air parametric array.A hexagonal array is proposed to improve the directivity of the sound generated.A finite element model of the CMUT is established in COMSOL software to facilitate the choice of appropriate structural parameters of the CMUT cell.The CMUT array is then fabricated by a wafer bonding process with high consistency.The performances of the CMUT are tested to verify the accuracy of the finite element analysis.By optimizing the component parameters of the bias-T circuit used for driving the CMUT,DC and AC voltages can be effectively applied to the top and bottom electrodes of the CMUT to provide efficient ultrasound transmission.Finally,the prepared hexagonal array is successfully used to conduct preliminary experiments on its application as an air parametric array. 展开更多
关键词 Capacitive micromachined ultrasonic transducer Air–coupled Wafer bonding process Bias-T circuit optimization Parametric array
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Concurrent photoacoustic and ultrasound microscopy with a coaxial dual-element ultrasonic transducer 被引量:2
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作者 Yuqi Tang Wei Liu +2 位作者 Yang Li Qifa Zhou Junjie Yao 《Visual Computing for Industry,Biomedicine,and Art》 2018年第1期18-23,共6页
Simultaneous photoacoustic and ultrasound(PAUS)imaging has attracted increasing attention in biomedical research to probe the optical and mechanical properties of tissue.However,the resolution for majority of the exis... Simultaneous photoacoustic and ultrasound(PAUS)imaging has attracted increasing attention in biomedical research to probe the optical and mechanical properties of tissue.However,the resolution for majority of the existing PAUS systems is on the order of 1 mm as the majority are designed for clinical use with low-frequency US detection.Here we developed a concurrent PAUS microscopy that consists of optical-resolution photoacoustic microscopy(OR-PAM)and high-frequency US pulse-echo imaging.This dual-modality system utilizes a novel coaxial dual-element ultrasonic transducer(DE-UST)and provides anatomical and functional information with complementary contrast mechanisms,achieving a spatial resolution of 7μm for PA imaging and 106μm for US imaging.We performed phantom studies to validate the system’s performance.The vasculature of a mouse’s hind paw was imaged to demonstrate the potential of this hybrid system for biomedical applications. 展开更多
关键词 Photoacoustic microscopy Ultrasound microscopy Concurrent imaging Coaxial dual-element ultrasonic transducer
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Structure of Pb(Zr,Ti)O3(PZT)for Power Ultrasonic Transducer 被引量:1
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作者 邢秀琴 祝锡晶 LI Jing 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2018年第4期884-887,共4页
To improve the performance of ultrasonic transducer, the samples of PZT were improved by doping. The doped PZT was observed and analyzed from the following aspects: the crystal phase structures, the surface morpholog... To improve the performance of ultrasonic transducer, the samples of PZT were improved by doping. The doped PZT was observed and analyzed from the following aspects: the crystal phase structures, the surface morphologies and the dielectric constant. According to the transducer parameter requirements for ultrasonic machining, there are also requirements for the parameters of piezoelectric ceramics. The high performance PZT was prepared by doping the elements of Ga, Ba, Nb, Sn, and Sr in PZT. The doped PZT is suitable for power ultrasonic machining at 20 kHz through analysis using X-ray diffraction(XPD), a scanning electron microscope(SEM) and LCR meter. Therefore, the excellent performance of transducer for power ultrasonic machining is guaranteed. 展开更多
关键词 piezoelectric ceramic ultrasonic transducer PZT
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Modification of Pb(Zr,Ti)O3 by Doping Mo based on High Power Ultrasonic Transducer
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作者 XING Xiuqin ZHU Xijing 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2020年第6期1038-1042,共5页
In view of the special requirements of transducers for power ultrasonic processing,the piezoelectric ceramic material Pb(Zr,Ti)O3 was modified by adding other effective elements.The piezoelectric ceramic piece has a g... In view of the special requirements of transducers for power ultrasonic processing,the piezoelectric ceramic material Pb(Zr,Ti)O3 was modified by adding other effective elements.The piezoelectric ceramic piece has a good crystal phase structure,a stable piezoelectric constant,a higher dielectric constant,and a lower dielectric loss by adding a small amount of Sr^2+,Ba^2+,Ga^2+,Sn^4+,Nb^5+,etc.These properties are well suited to requirements of power ultrasonic transducer more than 1 000 W.The crystal phase structure and surface morphology of the modified piezoelectric ceramic chips were analyzed by X-ray and scanning electron microscopy (SEM) to prove that the piezoelectric ceramic chips have good crystal structure and density.The dielectric constant of the polarized piezoelectric ceramic chips was measured using an LCR meter.Finally,the piezoelectric ceramic chips were used to design the ultrasonic transducer,and the transducer was analyzed and measured by the impedance analyzer.The measurement results show that the performance of the piezoelectric ceramic chips is reasonable and feasible. 展开更多
关键词 piezoelectric ceramic power ultrasonic transducer doping modification surface morphology
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The experimental study of the calibration of the focus ultrasonic transducer on its picture
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作者 侯珍秀 赵永平 +4 位作者 黄乃华 陈新亮 张丽莉 罗建伟 金长善 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2005年第2期139-142,共4页
The shape and size of the energy transducer’s focus decide the constitution of the cure project using HIFU (High intensity focused ultrasound). The parameter of the focus will be different when the structure of the t... The shape and size of the energy transducer’s focus decide the constitution of the cure project using HIFU (High intensity focused ultrasound). The parameter of the focus will be different when the structure of the transducer is different, so we must calibrate each of them. This paper represents calibration principle and method of focal territory in a high-power ultrasonic focus transducer. The experiment is performed on our designed multiple wafer concave focus probe and HIFU apparatus, using 1010 nylon and pork as the target range. It can be seen that the geometric center and focal territory acoustic field center cannot match together. When using nylon as the target, the distributed curves and theoretical curves are a better match. Therefore, the method and principle of calibration here is constructive for the calibration on pictures of other types of HIFU apparatus. 展开更多
关键词 ultrasonic wave the focus ultrasonic transducer FOCUS CALIBRATION HIFU
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Error Control Strategy in Ultrasonic Body Area Networks
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作者 Wenbin Liu Yongjian Yang +1 位作者 Fan Wang En Wang 《China Communications》 SCIE CSCD 2016年第11期244-259,共16页
Recently,ultrasonic waves had been introduced as the transmission medium in Body Area Networks(BANs) to reduce the incalculable damage caused by radio waves. However,the communications based on ultrasonic waves suffer... Recently,ultrasonic waves had been introduced as the transmission medium in Body Area Networks(BANs) to reduce the incalculable damage caused by radio waves. However,the communications based on ultrasonic waves suffer from poor propagation of signals in air and consume too much energy. To address these limitations,firstly,we make the theoretical analysis to ensure ultrasonic waves could be used in BANs(UBANs). Then,we propose an error control strategy in UBANs to dynamically adjust the error control scheme and the Max-Retries based on the current channel state,which is called UECS. The UECS is based on IEEE 802.15.6 standards and considering the characteristics of ultrasonic waves in BANs. Simulation results show that UECS achieves better performance in terms of packet delivery ratio and energy consumption compared with the traditional strategies. 展开更多
关键词 body area networks ultrasonic error control ultrasonic transducer
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Design and Magnetic Field Uniformity of Giant Magnetostrictive Ultrasonic Transducer for Progressive Sheet Forming
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作者 LI Pengyang LIU Qiang +2 位作者 ZHOU Xuan LI Wei WANG Limeng 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2020年第3期393-402,共10页
Design of a giant magnetostrictive ultrasonic transducer for progressive sheet forming was presented.A dynamic analysis of the theoretically designed ultrasonic vibration system was carried out using the finite elemen... Design of a giant magnetostrictive ultrasonic transducer for progressive sheet forming was presented.A dynamic analysis of the theoretically designed ultrasonic vibration system was carried out using the finite element method(FEM).In addition,simulations were performed to verify the theoretical design.Then,a magnetically conductive material was added between the giant magnetostrictive rod and the permanent magnet.Besides,magnetic field simulations of the transducer were performed.The influence of the material thickness of the magnetically conductive material on uniformity of the induced magnetic field was studied.Furthermore,the impedance analysis and amplitude measurement were performed to compare the performance of transducers with and without the magnetically conductive material.The experimental results show that the magnetic field uniformity is the highest when the magnetically conductive material has a thickness of about 1.6 mm.The output amplitude of the giant magnetostrictive transducer is improved by adding the magnetically conductive material.Moreover,the mechanical quality factor and impedance are reduced,while the transducer operates more stably. 展开更多
关键词 giant magnetostrictive material(GMM) ultrasonic transducer magnetic field uniformity finite element analysis
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Theoretical and computational feasibility of femtosecond laser multifilament transverse structures reconstruction via circular-scanning-based photoacoustic tomography
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作者 Qingwei Zeng Lei Liu +1 位作者 Shuai Hu Shulei Li 《Chinese Physics B》 2025年第9期240-248,共9页
We theoretically investigate the feasibility of reconstructing the transverse structures of femtosecond laser filaments in air by photoacoustic tomography.To simulate the emission and transmission of filament-induced ... We theoretically investigate the feasibility of reconstructing the transverse structures of femtosecond laser filaments in air by photoacoustic tomography.To simulate the emission and transmission of filament-induced ultrasonic signals more truly,a series of experimentally recorded cross-sectional images are used to simulate the initial pressure rise from multiple filaments(MFs).The aperture size and sensitivity of the detector was incorporated into the reconstruction algorithm.The results show that frequency of acoustic signals induced by MFs with maximum volumetric energy density~100 k J/m^(3)is about 2 MHz below.The initial spatial distribution of optical filaments can be clearly reconstructed with the back projection based algorithm.We recommend a PAT system with transducers of a lower central frequency and a stronger apodization working at a longer scanning radius can be used in photoacoustic image reconstruction of femtosecond laser multifilaments.This study demonstrates the feasibility of using photoacoustic tomography to reconstruct femtosecond multifilament images,which is helpful for studying the complex dynamic processes of multifilament and multifilament manipulation and is also valuable for the remote applications of laser filaments. 展开更多
关键词 femtosecond laser laments transverse structures energy deposition photoacoustic tomography ultrasonic transducer back projection
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Photoacoustic Doppler flowmetry of carbon particles flow using an autocorrelation method 被引量:2
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作者 卢涛 《Optoelectronics Letters》 EI 2014年第6期467-469,共3页
In order to measure the axial flowing velocity of carbon particle suspension with particle diameter of tens of micrometers, the photoacoustic Doppler(PAD) frequency shift is calculated based on a series of individual ... In order to measure the axial flowing velocity of carbon particle suspension with particle diameter of tens of micrometers, the photoacoustic Doppler(PAD) frequency shift is calculated based on a series of individual A scans using an autocorrelation method. A 532 nm pulsed laser with repetition rate of 20 Hz is used as a pumping source to generate photoacoustic signal. The photoacoustic signals are detected using a focused piezoelectric(PZT) ultrasound transducer with central frequency of 5 MHz. The suspension of carbon particles is driven by a syringe pump. The complex photoacoustic signal is calculated by the Hilbert transformation from time-domain photoacoustic signal, and then it is autocorrelated to calculate the Doppler frequency shift. The photoacoustic Doppler frequency shift is calculated by averaging the autocorrelation results of some individual A scans. The advantage of the autocorrelation method is that the time delay in autocorrelation can be defined by user, and the requirement of high pulse repetition rate is avoided. The feasibility of the proposed autocorrelation method is preliminarily demonstrated by quantifying the motion of a carbon particle suspension with flow velocity from 5 mm/s to 60 mm/s. The experimental results show that there is an approximately linear relation between the autocorrelation result and the setting velocity. 展开更多
关键词 AUTOCORRELATION CARBON Doppler effect Flow velocity Frequency shift keying Mathematical transformations Optical pumping Pulse repetition rate Time delay Time domain analysis ultrasonic transducers
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Transverse flowmetry of carbon particles based on photoacoustic Doppler standard deviation using an auto-correlation method
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作者 卢涛 孙丽君 《Optoelectronics Letters》 EI 2015年第3期226-228,共3页
In order to measure the flow velocity of carbon particle suspension perpendicular to the receiving axis of ultrasound transducer, the standard deviation of photoacoustic Doppler frequency spectrum is used to estimate ... In order to measure the flow velocity of carbon particle suspension perpendicular to the receiving axis of ultrasound transducer, the standard deviation of photoacoustic Doppler frequency spectrum is used to estimate the bandwidth broadening, and the spectrum standard deviation is calculated by an auto-correlation method. A 532 nm pulsed laser with the repetition rate of 20 Hz is used as a pumping source to generate photoacoustic signal. The photoacoustic signals are detected using a focused PZT ultrasound transducer with the central frequency of 10 MHz. The suspension of carbon particles is driven by a syringe pump. The complex photoacoustic signal is calculated by Hilbert transformation from time domain signal before auto-correlation. The standard deviation of the Doppler bandwidth broadening is calculated by averaging the auto-correlation results of several individual A scans. The feasibility of the proposed method is demonstrated by measuring the spectrum standard deviation of the transversal carbon particle flow from 5.0 mm/s to 8.4 mrn/s. The experimental results show that the auto-correlation result is approximately linearly distributed within the measuring range. 展开更多
关键词 BANDWIDTH Carbon Correlation methods Flow velocity Mathematical transformations Optical pumping Pumping (laser) STATISTICS Time domain analysis transducers ultrasonic propagation ultrasonic scattering ultrasonic transducers
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Development of an Integrated CMUTs-Based Resonant Biosensor for Label-Free Detection of DNA with Improved Selectivity by Ethylene-Glycol Alkanethiols
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作者 Zhikang Li Yihe Zhao +7 位作者 Gian Luca Barbruni Jie Li Zixuan Li Jiawei Yuan Ping Yang Libo Zhao Zhuangde Jiang Sandro Carrara 《Engineering》 SCIE EI CAS CSCD 2024年第10期231-241,共11页
Gravimetric resonant-inspired biosensors have attracted increasing attention in industrial and point-ofcare applications,enabling label-free detection of biomarkers such as DNA and antibodies.Capacitive micromachined ... Gravimetric resonant-inspired biosensors have attracted increasing attention in industrial and point-ofcare applications,enabling label-free detection of biomarkers such as DNA and antibodies.Capacitive micromachined ultrasonic transducers(CMUTs)are promising tools for developing miniaturized highperformance biosensing complementary metal–oxide–silicon(CMOS)platforms.However,their operability is limited by inefficient functionalization,aggregation,crosstalk in the buffer,and the requirement for an external high-voltage(HV)power supply.In this study,we aimed to propose a CMUTs-based resonant biosensor integrated with a CMOS front–end interface coupled with ethylene–glycol alkanethiols to detect single-stranded DNA oligonucleotides with large specificity.The topography of the functionalized surface was characterized by energy-dispersive X-ray microanalysis.Improved selectivity for onchip hybridization was demonstrated by comparing complementary and non-complementary singlestranded DNA oligonucleotides using fluorescence imaging technology.The sensor array was further characterized using a five-element lumped equivalent model.The 4 mm^(2) application-specific integrated circuit chip was designed and developed through 0.18 lm HV bipolar-CMOS-double diffused metal–oxide–silicon(DMOS)technology(BCD)to generate on-chip 20 V HV boosting and to track feedback frequency under a standard 1.8 V supply,with a total power consumption of 3.8 mW in a continuous mode.The measured results indicated a detection sensitivity of 7.943×10^(-3) lmol·L^(-1)·Hz^(-1) over a concentration range of 1 to 100 lmol·L^(-1).In conclusion,the label-free biosensing of DNA under dry conditions was successfully demonstrated using a microfabricated CMUT array with a 2 MHz frequency on CMOS electronics with an internal HV supplier.Moreover,ethylene–glycol alkanethiols successfully deposited self-assembled monolayers on aluminum electrodes,which has never been attempted thus far on CMUTs,to enhance the selectivity of bio-functionalization.The findings of this study indicate the possibility of full-on-chip DNA biosensing with CMUTs. 展开更多
关键词 Capacitive micromachined ultrasonic transducers(CMUTs) DNA detection Self-assembled monolayer(SAM) Ethylene-glycol alkanethiols Application-specific integrated circuit(ASIC)
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Simulation Study of CMUT for Pressure Sensing Applications
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作者 Yan Zhou Jie Liu +1 位作者 Xin Lu Quanfang Chen 《Journal of Harbin Institute of Technology(New Series)》 CAS 2023年第3期22-31,共10页
Capacitive micromechanical ultrasonic transducers(CMUTs)have been widely studied because they can be used as substitutes for piezoelectric ultrasonic transducers in imaging applications.However,it is unclear whether a... Capacitive micromechanical ultrasonic transducers(CMUTs)have been widely studied because they can be used as substitutes for piezoelectric ultrasonic transducers in imaging applications.However,it is unclear whether and how CMUTs can be developed for sensors incorporating other functions.For instance,researchers have proposed the use of CMUTs for pressure sensing,but fundamental and practical application issues remain unsolved.This study explored ways in which a pressure sensor can be properly developed based on a CMUT prototype using a simulation approach.A three-dimensional finite element model of CMUTs was designed using the COMSOL Multiphysics software by combining the working principle of CMUTs with pressure sensing characteristics in which the resonance frequency of the CMUT cell shifts accordingly when it is subjected to an external pressure.Simultaneously,when subjected to pressure,the CMUT membrane deforms,thus the pressure can be reflected by the change in the capacitance. 展开更多
关键词 capacitive micromechanical ultrasonic transducers(CMUTs) pressure sensor collapsing voltage resonance frequency CAPACITANCE finite element multi-physics simulation
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