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Effects of Different Titanium Sub-oxide on the Properties of Titanium Dioxide Thin Films Prepared by E-beam Evaporation Deposition with Ion Auxiliary
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作者 郭爱云 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2006年第2期101-104,共4页
TiO2 thin films were prepared with Ti2O3, Ti3O5 and TiO2 as raw materials, by electron-beam evaporation deposition, using O^2- ion beam ( O2 purity up to 99.99% ) as auxiliary means. The crystal structures of the sa... TiO2 thin films were prepared with Ti2O3, Ti3O5 and TiO2 as raw materials, by electron-beam evaporation deposition, using O^2- ion beam ( O2 purity up to 99.99% ) as auxiliary means. The crystal structures of the samples were inspected by the X-ray diffraction (XRD) method, and the evaporation character of warious raw materials was analyzed. Transmittance spectra were measured through a U-3310 spectrophotometer ( wavelength ranging from 200 nm to 900 nm). The refractive index n and the thickness of films were determined from transmission spectra. The experimental results show that the thin films taking Ti2O3 as their raw material have a strong absorption, when taking Ti3O5 and TiO2 as raw materials, the thin films would have good optical properties. The experiments also show that, the crystal structure of all thin films is amorphous before post-annealing and the Ti3O5 is a congruent evaporation phase in the Ti-O system. 展开更多
关键词 titanium sub-oxide thin film E-beam evaporation IAD
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Surface Energy and Work of Adhesion of Titanium Oxide Related Materials 被引量:1
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作者 Lin Zeng Zhao Jikui +4 位作者 Du Guangyu Wang Qing Ba Dechun Han Jing Liu Chunming 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2012年第S1期350-354,共5页
Surface energy and work of adhesion of titanium oxide related materials were investigated.Titanium oxide(TiOx) films were deposited by electron-beam evaporation system using TiO2 as a source material.The films deposit... Surface energy and work of adhesion of titanium oxide related materials were investigated.Titanium oxide(TiOx) films were deposited by electron-beam evaporation system using TiO2 as a source material.The films deposited by various thickness and growth rate were etched subsequently by different plasma using various gases like Ar and O2.TiOx films were further modified by self-assembled monolayer(SAM)of silanes and ultraviolet(UV)irradiation.The surface modified TiOx films showed a wide range of water contact angles from 6.9°to 75.2°.The surface energies of Titania-related films and their work of adhesion with human blood were varied with different surface modification process.X-ray photoelectron spectroscopy(XPS)revealed that hydroxyl group present on the surface explains the hydrophilicity of the surface modified TiOx films.We also suggest that some surface modified samples can provide an excellent hemocompatible surface from the estimated work of adhesion between the surface modified TiOx samples and human blood. 展开更多
关键词 titanium oxide RELATED film E-BEAM evaporation SURFACE energy work of ADHESION SURFACE modification
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电子束蒸发沉积TiO_2薄膜结构及光学性能的研究 被引量:11
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作者 王学华 薛亦渝 +1 位作者 赵利 张幼陵 《武汉理工大学学报》 CAS CSCD 2002年第11期11-14,共4页
研究了工艺条件对电子束蒸发沉积在 K9玻璃上 Ti O2 薄膜的结构和光学性能的影响。正交试验结果表明 ,基片温度是影响薄膜光学常数的主要因素 ,制备 Ti O2 薄膜的最佳工艺参数为 :基片温度 30 0℃ ,工作真空 2× 10 - 2 Pa,沉积速率... 研究了工艺条件对电子束蒸发沉积在 K9玻璃上 Ti O2 薄膜的结构和光学性能的影响。正交试验结果表明 ,基片温度是影响薄膜光学常数的主要因素 ,制备 Ti O2 薄膜的最佳工艺参数为 :基片温度 30 0℃ ,工作真空 2× 10 - 2 Pa,沉积速率 0 .2 nm/ s。采用最佳工艺沉积在透明基片上的 Ti O2 薄膜在可见光区具有良好的透过特性 ,同时也得出了薄膜的光学带隙能 Eg=3.77e V。 SEM观察结果表明薄膜为柱状纤维结构 ,柱状纤维的直径在 10 0~ 15 0 展开更多
关键词 电子束蒸发沉积 薄膜结构 光学性能 TIO2薄膜 光学薄膜 二氧化钛薄膜
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电子束蒸发制备二氧化钛薄膜应力测量 被引量:10
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作者 陈焘 罗崇泰 +1 位作者 王多书 金扬利 《真空科学与技术学报》 EI CAS CSCD 北大核心 2007年第2期168-171,共4页
在圆形硅基底上采用电子束加热蒸发制备了二氧化钛薄膜。薄膜应力测试结果表明,二氧化钛薄膜的内应力分布是不均匀的;二氧化钛薄膜的内应力集中主要出现在薄膜的边缘区域,有正应力的集中也有负应力的集中。原子力显微镜(AFM)结果显示,... 在圆形硅基底上采用电子束加热蒸发制备了二氧化钛薄膜。薄膜应力测试结果表明,二氧化钛薄膜的内应力分布是不均匀的;二氧化钛薄膜的内应力集中主要出现在薄膜的边缘区域,有正应力的集中也有负应力的集中。原子力显微镜(AFM)结果显示,不同的沉积速率和沉积温度下制备的二氧化钛薄膜具有不同的晶体结构和应力分布;沉积速率和沉积温度对二氧化钛薄膜内应力的影响是明显的,可以通过选择合适的沉积参数使内应力降低或达到最小。 展开更多
关键词 二氧化钛薄膜 电子束蒸发 内应力 热应力
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纳米晶体TiO_2多孔膜的制备 被引量:3
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作者 唐洁影 张旭苹 孟莉莉 《光电子技术》 CAS 2003年第4期215-217,共3页
采用电子束蒸发方法成功制备了用于光电变色器件的纳晶多孔结构 Ti O2 薄膜 ,借助于俄歇仪 (AES)和原子力显微镜 (AFM)分析了制备条件对薄膜的表面形貌、粒径大小及化学计量比的影响。最终给出了制备光电变色器件用纳晶多孔结构 Ti O2
关键词 纳米晶体 TiO2多孔膜 电子束蒸发 光电变色
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