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Dehydroxylation action on surface of TiO_2 films restrained by nitrogen carrier gas during atomic layer deposition process
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作者 Zhi-Peng Rao Bang-Wu Liu +2 位作者 Chao-Bo Li Yang Xia Jun Wan 《Rare Metals》 SCIE EI CAS CSCD 2014年第5期583-586,共4页
A strong influence of nitrogen gas on the content of surface hydroxyl groups of TiO2 films by atomic layer deposition(ALD) was investigated by X-ray photoelectron spectroscopy(XPS), contact angle measuring system,... A strong influence of nitrogen gas on the content of surface hydroxyl groups of TiO2 films by atomic layer deposition(ALD) was investigated by X-ray photoelectron spectroscopy(XPS), contact angle measuring system, and UV–Vis spectrophotometer. XPS spectra of O 1s indicate that the content of surface hydroxyl groups is varied when using N2 as carrier gas. The results of water contact angles and optical reflection spectra show that the content variation of surface hydroxyl groups influences the wetting properties and optical reflectivity of TiO2 films. A surface reaction model is suggested to explain the ALD reaction process using N2 as carrier gas. 展开更多
关键词 Atomic layer deposition tio2 N2 surface hydroxyl groups XPS Reaction model
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Preparation of defect free ceramic/Ti composite membranes by surface modification and in situ oxidation 被引量:1
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作者 ZHANG Dong-qiang YANG Ping +2 位作者 WU Jian-yang ZHAO Jing CHEN Yan-an 《Journal of Central South University》 SCIE EI CAS CSCD 2019年第12期3295-3304,共10页
Al2O3 ceramic powder was applied to modify the large pores defects on the surface of the porous metal Ti support,in situ oxidation method was a convenient method to prepare defect free ceramic/Ti composite membranes o... Al2O3 ceramic powder was applied to modify the large pores defects on the surface of the porous metal Ti support,in situ oxidation method was a convenient method to prepare defect free ceramic/Ti composite membranes on this basis.In situ oxidation conditions experimental results show that the best condition for preparing the TiO2-Al2O3/Ti composite membrane is under 800°C for 2 h,and the microstructure and pore sizes of the TiO2-Al2O3/Ti composite membranes are affected obviously.The thickness and composition of the TiO2/Ti composite membranes are determined by SEM and XRD completely.The pore size distribution of the composite membrane is measured by bubble pressure method,the most probable aperture is about 3.12μm,while the average pore size of defect free TiO2-Al2O3/Ti is about 3.23μm.After ultrasonic treatment,the slight weight change of membranes reveals no observable change,which indicates that TiO2-Al2O3/Ti composite membranes maintain a good stability. 展开更多
关键词 porous Ti CERAMIC tio2 layer in situ oxidation composite membrane surface modification
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