For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering ta...For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.展开更多
基金financially supported by the National Natural Science Foundation of China (No.51301212)the Major National Science and Technology Projects of China (No.2011ZX02705)+1 种基金the Chongqing Science and Technology Commission in China (No.2012jj A50023)the Fundamental Research Funds for the Central Universities of China (No.CDJZR11130010)
文摘For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.
