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Fabrication of nano-grained negative temperature coefficient thermistors with high electrical stability 被引量:2
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作者 Miao-Miao Cui Xiao Zhang +3 位作者 Kuan-Guan Liu Hai-Bo Li Mang-Mang Gao Sen Liang 《Rare Metals》 SCIE EI CAS CSCD 2021年第4期1014-1019,共6页
Dense nano-grained Ni_(0.7)Mn_(2.3O4) negative temperature coefficient(NTC) thermistors were fabricated by a novel two-step sintering approach that combines rapid sintering and principle of conventional two-step sinte... Dense nano-grained Ni_(0.7)Mn_(2.3O4) negative temperature coefficient(NTC) thermistors were fabricated by a novel two-step sintering approach that combines rapid sintering and principle of conventional two-step sintering technique.Samples were sintered at 1042℃ for 30 s in the first rapid step and then at 850-950℃ for 20 h in the second soaking step.Crystal phase,microstructure and electrical properties of sintered samples were studied by X-ray diffraction(XRD),scanning electron microscopy(SEM),resistance temperature relationship and aging performance.Sintered samples show a single-phase cubic spinel structure and indicate a high relative density ranging from 84% to 91% of the theoretical density.Moreover,average grain sizes of sintered samples under SEM are distributed between 254 and 570 nm.Meanwhile,the resistivity and the aging coefficient significantly decrease when soaking sintering temperature rises.In addition,the obtained material constant(B) ranges from 3931 to 3981 K.Ni_(0.7)Mn_(2.3)O_(4)-3(soaking at 900℃) and Ni_(0.7)Mn_(2.3O4)-4(soaking at 950℃) present little aging behavior,implying great electrical stability. 展开更多
关键词 Negative temperature coefficient thermistor SINTERING Nano-grain AGING
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A novel(Sm_(0.2)Eu_(0.2)Gd_(0.2)Ho_(0.2)Yb_(0.2))CrO_(3)high-entropy ceramic nanofiber as a negative temperature coefficient thermistor
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作者 Weijun Zhao Meng Zhang +4 位作者 Liyan Xue Kaixian Wang Fan Yang Jiuping Zhong Heng Chen 《Journal of Rare Earths》 SCIE EI CAS CSCD 2024年第10期1937-1942,共6页
The electrical properties of high-entropy ceramics(HECs)have been extensively studied in recent years due to their unique structural characteristics and fascinating functional properties induced by entropy engineering... The electrical properties of high-entropy ceramics(HECs)have been extensively studied in recent years due to their unique structural characteristics and fascinating functional properties induced by entropy engineering.Novel high-entropy(Sm_(0.2)Eu_(0.2)Gd_(0.2)Ho_(0.2)Yb_(0.2))CrO_(3)(HE-RECrO_(3))nanofibers were prepared by electro spinning.This work demonstrates that HE-RECrO_(3)nanofibe rs were successfully synthesized at a low temperature(800℃),which is approximately 400℃lower than the temperatures at which chromate ceramics were synthesized via the sol-gel method and the solid-state reaction method.The resistivity of HE-RECrO_(3)nanofibers decreases exponentially with increasing temperature from 25 to600℃.The logarithm of the resistivity is linearly related to the inverse of the temperature,confirming the negative temperature coefficient property of HE-RECrO_(3)nanofibers.The B_(25/50)value of the HERECrO_(3)nanofibers reaches 4072 K.In conclusion,HE-RECrO_(3)nanofibers are expected to be potential candidates for negative-temperature-coefficient(NTC)thermistors. 展开更多
关键词 Rare earths High-entropy ceramics Ceramic fiber materials Negative temperature coefficient thermistors
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Modified Function Transformation Method for Linearizing Thermistor Characteristics
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作者 洪文学 傅景峰 +1 位作者 黄大勉 周少敏 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 1994年第2期37-40,共4页
A mathematical method called Modifled Function Transformation Method(MFTM) for linearizing thermistors is proposed.Theoretically,the method has unified many schemes of linearizing thermistors into a mathematical ratio... A mathematical method called Modifled Function Transformation Method(MFTM) for linearizing thermistors is proposed.Theoretically,the method has unified many schemes of linearizing thermistors into a mathematical rational frame,and explained the reason of different circuits having the same capabilities for linearizing the thermistor characteristics. 展开更多
关键词 ss:thermistor NONLINEARITY CALIBRATION LINEARIZATION
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Characteristics of a Type of NTC Thermistors for Cryogenic Applications
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作者 Yuqi Lan Shenyin Yang +1 位作者 Guangming Chen Sifeng Yang 《Advances in Materials Physics and Chemistry》 2020年第8期167-177,共11页
A new type of miniature negative temperature coefficient (NTC) thermistors has been developed and manufactured with Mn-Ni-Cu-Fe oxides. The prepared NTC thermistors were calibrated in the temperature range from 77 K t... A new type of miniature negative temperature coefficient (NTC) thermistors has been developed and manufactured with Mn-Ni-Cu-Fe oxides. The prepared NTC thermistors were calibrated in the temperature range from 77 K to 300 K with 1 μA exciting currents. The automatic calibration apparatus as well as thermometric characteristics, stability, calibration equations and interchangeability of the manufactured thermistors were investigated. A mean fit equation was obtained: 1/<em>T</em> = 8.60 × 10<sup><span style="white-space:nowrap;">&#8722;</span>4</sup> + 6.54 × 10<sup><span style="white-space:nowrap;">&#8722;</span>4</sup> ln(<em>R/R</em><sub>ref</sub>) + 2.46 × 10<sup><span style="white-space:nowrap;">&#8722;</span>5</sup> ln(<em style="white-space:normal;">R/R</em><sub style="white-space:normal;">ref</sub>)<sup>2</sup> + 9.48 × 10<sup><span style="white-space:nowrap;">&#8722;</span>7</sup> ln(<em style="white-space:normal;">R/R</em><sub style="white-space:normal;">ref</sub>)<sup>3</sup> <span style="white-space:nowrap;">&#8722;</span> 2.16 × 10<sup><span style="white-space:nowrap;">&#8722;</span>8</sup> ln(<em style="white-space:normal;">R/R</em><sub style="white-space:normal;">ref</sub>)<sup>4</sup>. All the prepared NTC thermistors agreed with this fit with an error of 1.5 K. If the greater accuracy is required, a calibration is necessary, and the calibration accuracy is estimated to be ±10 mK. 展开更多
关键词 THERMOMETER Cryogenics thermistorS CALIBRATION CRYOSTAT
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Bleeding from thermistor connector indicates entrapment of pulmonary artery catheter
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作者 雷迁 曾庆诗 +3 位作者 罗沙 张晓慎 谢斌 郭惠明 《South China Journal of Cardiology》 2012年第2期111-114,共4页
Several complications of insertion and use of pulmonary artery catheter (PAC), including catheter entrapment, are recognized during or after cardiac surgery. Early detection is very important. We report a case of PA... Several complications of insertion and use of pulmonary artery catheter (PAC), including catheter entrapment, are recognized during or after cardiac surgery. Early detection is very important. We report a case of PAC entrapment because the the catheter was accidentally su- tured to the superior vena cava. Bleeding from the thermistor connector was initially detected after surgery because the needle punctured the lumen of thermistor connector. The PAC was removed through re-exploration. Therefore, bleeding from the thermistor connector could early indicate the PAC entrapment. We suggest that abnormal bleeding from the non-injectate lumen ports of PAC should be checked before sternal closure. 展开更多
关键词 PAC Bleeding from thermistor connector indicates entrapment of pulmonary artery catheter
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Synthesis, Characterization and Fabrication of NTC Thick Film Thermistor Using Lead Free Glass Frit
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作者 Shweta Jagtap Sunit Rane Suresh Gosavi 《材料科学与工程(中英文A版)》 2016年第6期301-309,共9页
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SUPERCONVERGENCE ERROR ESTIMATES OF THE LOWEST-ORDER RAVIART-THOMAS GALERKIN MIXED FINITE ELEMENT METHOD FOR NONLINEAR THERMISTOR EQUATIONS
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作者 Huaijun Yang Dongyang Shi 《Journal of Computational Mathematics》 2025年第6期1548-1574,共27页
This paper is concerned with the superconvergence error estimates of a classical mixed finite element method for a nonlinear parabolic/elliptic coupled thermistor equations.The method is based on a popular combination... This paper is concerned with the superconvergence error estimates of a classical mixed finite element method for a nonlinear parabolic/elliptic coupled thermistor equations.The method is based on a popular combination of the lowest-order rectangular Raviart-Thomas mixed approximation for the electric potential/field(φ,θ)and the bilinear Lagrange approximation for temperature u.In terms of the special properties of these elements above,the superclose error estimates with order O(h^(2))are obtained firstly for all three components in such a strongly coupled system.Subsequently,the global superconvergence error estimates with order O(h^(2))are derived through a simple and effective interpolation post-processing technique.As by a product,optimal error estimates are acquired for potential/field and temperature in the order of O(h)and O(h^(2)),respectively.Finally,some numerical results are provided to confirm the theoretical analysis. 展开更多
关键词 Nonlinear thermistor equations Galerkin mixed finite element method Interpolation post-processing technique Superclose and superconvergence error estimates
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面向军用包装的高精度宽温域Fe掺杂锰基热敏传感器研究
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作者 田源灏 吴俣 +7 位作者 陈东 秦旭峰 刘帅 朱晨颢 白焘 徐淑权 赵耀辉 林栎阳 《包装工程》 北大核心 2026年第1期232-239,共8页
目的传统的锰基热敏传感器的测温区间在室温以上,无法满足军用包装在宽温域环境下温度精确监测的需求,开发面向军用包装的高精度宽温域热敏传感器,助力军用包装智能化。方法采取经针对性改进后的固相法,引入Fe元素对Mn-Co-Ni三元体系NT... 目的传统的锰基热敏传感器的测温区间在室温以上,无法满足军用包装在宽温域环境下温度精确监测的需求,开发面向军用包装的高精度宽温域热敏传感器,助力军用包装智能化。方法采取经针对性改进后的固相法,引入Fe元素对Mn-Co-Ni三元体系NTC热敏传感器进行掺杂,制备4组灵敏度高与稳定性优的热敏传感器。结果4组组分物相准确,且均在特定中低温范围(-20~60℃)呈现出良好的NTC效应。其中编号为A2的Fe0.6Ni0.3CO0.9Mn1.2O4组分在温度区间内具有高精度的使用优势,且温域适应性好,其在反应灵敏度的关键指标热敏常数B25-50值上高达到3839.59K,还具有室温电阻低(4.961kΩ)的低能耗优势。结论成功制备出了综合电性能较好的热敏传感器,Fe元素对Mn-Co-Ni三元体系的掺入对电性能带来较高的提升,器件在特定温度区间具有较好的灵敏度和稳定性,在军用包装环境智能监测领域具有极大的应用前景。 展开更多
关键词 热敏电阻 军用包装 负温度系数 FE掺杂 B值 传感器
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Enhanced time response and temperature sensing behavior of thermistor using Zn-doped CaTiO_3 nanoparticles 被引量:2
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作者 Subhanarayan SAHOO 《Journal of Advanced Ceramics》 SCIE CSCD 2018年第2期99-108,共10页
In the present study, Zn-doped CaTiO_3 nanocrystalline was synthesized to study the thermistor behavior with temperature. The X-ray powder diffraction analysis showed the formation of a single-phase orthorhombic struc... In the present study, Zn-doped CaTiO_3 nanocrystalline was synthesized to study the thermistor behavior with temperature. The X-ray powder diffraction analysis showed the formation of a single-phase orthorhombic structure at room temperature. The electrical resistance of the Zn-doped CaTiO_3 increased with increasing doping concentration and decreased at higher measuring temperature, showing a negative temperature coefficient of resistance(NTCR) behavior. Different thermistor parameters were calculated using Steinhart–Hart equations, whilst time domain analysis confirmed faster response towards applied voltage. 展开更多
关键词 MULTIFERROIC X-ray diffraction (XRD) electrical properties CONDUCTIVITY impedance spectroscopy NTCR thermistor
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CaTiO_(3) nano ceramic for NTCR thermistor based sensor application 被引量:3
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作者 Subhanarayan SAHOO S.K.S.PARASHAR S.M.ALI 《Journal of Advanced Ceramics》 SCIE CAS 2014年第2期117-124,共8页
It is possible to fabricate highly sensitive NTCR(negative temperature coefficient of resistance)thermistor using nano crystalline CaTiO_(3) synthesized by high energy ball milling.Disc shaped green pellets were prepa... It is possible to fabricate highly sensitive NTCR(negative temperature coefficient of resistance)thermistor using nano crystalline CaTiO_(3) synthesized by high energy ball milling.Disc shaped green pellets were prepared and effects of sintering on the disc pellets were studied as thermistor by sintering the samples at 1000℃,1100℃and 1200℃.The as-prepared samples were characterized by X-ray diffraction(XRD),impedance analysis and electrical measurement.The resistivity of the prepared samples varies predictably with temperature:this makes them promising material for temperature sensor.The experimental results prove that nano crystalline CaTiO_(3) ceramic is one kind of thermistor with exponential negative temperature coefficient of resistance in the temperature range of 300-500℃.The samples have the advantages of rapid response,high sensitivity and capability to withstand thermal surges over the temperature range of 300-500℃.Resistance-temperature characteristics are described by thermistor equation with thermistor constant around 4003 K to 10795 K and thermal coefficient of resistanceαaround-1%/℃to-13%/℃.The activation energy is in the range of 0.34-0.93 eV.The observed thermistor parameters are found to be comparable with many of the known thermistor materials.This suggests that the electrical properties can be adjusted to desirable values by controlling the temperature parameter.The influence of fabrication process of disc thermistor and electrical properties are discussed.The study shows the potential of nano crystalline CaTiO_(3) to act as an NTCR material for thermistor applications. 展开更多
关键词 CaTiO_(3) thermistor sensitivity index temperature coefficient
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NUMERICAL ANALYSIS OF NONSTATIONARY THERMISTOR PROBLEM 被引量:2
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作者 Yue Xingye(Suzhou University, Suzhou, Jiangsu, China) 《Journal of Computational Mathematics》 SCIE CSCD 1994年第3期213-223,共11页
The thermistor problem is a coupled system of nonlinear PDEs which consists of the heat equation with the Joule heating as a source, and the current conservation equation with temperature dependent electrical conducti... The thermistor problem is a coupled system of nonlinear PDEs which consists of the heat equation with the Joule heating as a source, and the current conservation equation with temperature dependent electrical conductivity. In this paper we make a numerical analysis of the nonsteady thermistor problem. L(infinity)(OMEGA), W1,infinity(OMEGA) stability and error bounds for a piecewise linear finite element approximation are given. 展开更多
关键词 QT NUMERICAL ANALYSIS OF NONSTATIONARY thermistor PROBLEM MATH
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PTC Effect and Its Mechanism in a Novel Thermistor Material —— Hot-pressed SiC/SiO_2 Multiphase Ceramic
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作者 杜伟坊 杜海清 《Chinese Science Bulletin》 SCIE EI CAS 1994年第15期1270-1273,共4页
As functional materials, PTC thermistor ceramics characterized by a drastic increase in resistivity at its transition temperature have been widely used in high-technology areas such as temperature measurement and indi... As functional materials, PTC thermistor ceramics characterized by a drastic increase in resistivity at its transition temperature have been widely used in high-technology areas such as temperature measurement and indication, temperature control, protective switches and so on. At present, the PTC thermistors are fabricated by means of doping BaTiO<sub>3</sub> and their PTC effects result from the existence of acceptor state or electronic trap on grain boundary. But the fabrication process 展开更多
关键词 thermistor MATERIAL PTC CERAMIC CRISTOBALITE silicon carbide.
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Enhanced thermal constant B of diamond films for ultrahigh sensitivity negative temperature coefficient thermistors
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作者 Qiao Chen Yimeng Zhao +4 位作者 Jiawei Li Xiyuan Liu Xinyue Wang Wenxi Zhang Hongwei Zhu 《Science China Materials》 SCIE EI CAS CSCD 2024年第10期3321-3329,共9页
Negative temperature coefficient(NTC)thermistor plays a crucial role in science research and engineering applications for precise temperature monitoring.Although great progress has been achieved in NTC materials,enhan... Negative temperature coefficient(NTC)thermistor plays a crucial role in science research and engineering applications for precise temperature monitoring.Although great progress has been achieved in NTC materials,enhancing sensitivity and maintaining this high sensitivity along with linearity across extensive temperature ranges remain a significant challenge.In this study,we introduce a diamondbased thermistor(DT)characterized by its outstanding sensitivity,swift response time,and broad temperature monitoring capabilities.The temperature constant B for this DT,measured from 30 to 300°C(B30/300),achieves an exceptional value of 8012 K,which notably exceeds the temperature sensing capabilities of previously reported NTC thermistors within this extensive range.Moreover,diamond’s unique thermal conductivity and stability significantly boost the response speed and durability of the DT,offering substantial advantages over traditional ceramic thermistors.The enhanced temperature-sensitive properties of the DT are attributed to the presence of impurity elements in polycrystalline diamond.Impedance analysis indicates a hopping conduction mechanism,likely involving C-H or C-N dipoles at the diamond grain boundaries.This study marks a significant leap forward in diamond thermistor technology and sheds light on the mechanisms of thermal active conduction in diamond materials. 展开更多
关键词 polycrystalline diamond thermistorS negative temperature coefficient hopping conduction grain boundary
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Correlation of Spherical Thermistor for the Measurement of Low Velocity Air Flow
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作者 Xin-GangLiang Ying-PingZhang 《Journal of Thermal Science》 SCIE EI CAS CSCD 1998年第4期231-237,共7页
A spherical thermistor, an accurate temperature sensor, is employed as an air velocity sensor in this work. The measuring principle is derived and the effects of the insulation layer, air temperature, natural convecti... A spherical thermistor, an accurate temperature sensor, is employed as an air velocity sensor in this work. The measuring principle is derived and the effects of the insulation layer, air temperature, natural convection and thermal radiation are discussed. Two different correlation relations for velocity measurements are proposed based on theoretical analyses and experimental calibrations. Experiments have shown that spherical thermistor is a good velocity sensor for speed between 0.1-2.5 m/s at room temperature and the insulation layer hardly influences the accuracy of the thermistor used in the present work. Modification on correlation can even further improve measurement accuracy. Since the thermistor is small and cheap, it is possible to apply this method to multi-point velocity measurement with a low disturbance to the flow field. 展开更多
关键词 air velocity measurement thermoglobe thermistor
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Characterization of new negative temperature coefficient thermistors based on Zn-Ni-O system
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作者 Xiang SUN Hong ZHANG +2 位作者 Ya LIU Jia GUO Zhicheng LI 《Journal of Advanced Ceramics》 CSCD 2016年第4期329-336,共8页
Y2O3-doped Zn1-xNixO (x=0,0.3,0.4,0.5,0.6,0.7,and 0.9) powders were prepared by a wet chemical synthesis method,and the related ceramics were obtained by the traditional ceramic sintering technology.The phases and rel... Y2O3-doped Zn1-xNixO (x=0,0.3,0.4,0.5,0.6,0.7,and 0.9) powders were prepared by a wet chemical synthesis method,and the related ceramics were obtained by the traditional ceramic sintering technology.The phases and related electrical properties of the ceramics were investigated.The analysis of X-ray diffraction (XRD) indicates that the prepared ceramics with Ni substitution have a cubic crystalline structure.The resistance-temperature feature indicates that all the ceramics show a typical effect of negative temperature coefficient (NTC) of resistivity with the thermal constants between 3998 and 5464 K,and have high cyclical stability in a temperature range from 25 to 300 ℃.The impedance analysis reveals that both grain effect and grain boundary effect contribute collectively to the NTC effect.The electron hopping and band conduction models are proposed for the grain (bulk) conduction,and the thermally activated charge carrier transport overcoming the energy barrier is suggested for the grain boundary conduction. 展开更多
关键词 Zn1-xNixO thermistorS MICROSTRUCTURE electrical properties conduction mechanism
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Effects of La_2O_3 Doping on Aging Properties of Mn_(2.38)Ni_(0.5)Cu_(0.12)O_4 Type NTC Thermistor Materials
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作者 WEN Jiantong WANG Zhongbing 《Journal of the Chinese Ceramic Society》 2016年第3期140-144,共5页
The effects of La_2O_3 doping on the phase structure.electric properties and aging properties of the samples were researched using XRD,SEM and electric property measurements.The results suggest that the aging value of... The effects of La_2O_3 doping on the phase structure.electric properties and aging properties of the samples were researched using XRD,SEM and electric property measurements.The results suggest that the aging value of Mn_(2.38)Ni_(0.5)Cu_(0.12)O_4 thermistor ceramic samples decreases from 10%to about 6%by only doping La_2O_3.The electrical stability of the sample has improved as well.Such doped material will broaden the production and application scope of Cu contained negative temperature coefficient thermal ceramics. 展开更多
关键词 La2O3 doping negative temperature coefficient thermistor aging properties
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亚毫开级NTC热敏电阻温度计研制及校准方法研究
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作者 孙建平 李婷 +4 位作者 王光耀 刁福广 陈玲玲 李嘉豪 刘智斌 《计量学报》 北大核心 2025年第11期1553-1560,共8页
为突破高精度负温度系数(NTC)热敏电阻温度计的技术壁垒,研制了高稳定性NTC热敏电阻温度计并开展校准及稳定性评价技术研究。通过对比4~7校准点校准偏差及不确定度传播规律,提出5点(0.01,15,29.7646,45,60℃)校准方案结合Hoge-4方程为... 为突破高精度负温度系数(NTC)热敏电阻温度计的技术壁垒,研制了高稳定性NTC热敏电阻温度计并开展校准及稳定性评价技术研究。通过对比4~7校准点校准偏差及不确定度传播规律,提出5点(0.01,15,29.7646,45,60℃)校准方案结合Hoge-4方程为最优方法,在0~60℃全温区实现校准不确定度优于0.8 mK(k=2)水平,在22℃关键区不确定度不超过0.6 mK(k=2)。基于固定点及比较法开展自研NTC热敏电阻温度计长期稳定性测试,结果表明,自研温度传感器稳定性可实现优于0.4 mK水平。自热效应与激励电流和环境温度强相关,为保障NTC热敏电阻温度计亚毫开尔文级测温精度,推荐工作电流不超过0.01 mA。该研究为国产高精度NTC热敏电阻温度计的工程化应用及标准器开发提供了关键技术支撑。 展开更多
关键词 温度计量 负温度系数热敏电阻温度计 校准方程 自热效应
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校准点数量分布对CTD(温度)校准结果的影响研究
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作者 牛兴军 李婷 +4 位作者 陈钊 孙淑慧 刁新源 王光耀 魏传杰 《计量学报》 北大核心 2025年第4期542-547,共6页
针对8点(0~35℃)温盐深测量仪CTD(测量精度±2 mK)校准周期长、成本高的现状,基于高精度海水恒温槽校准装置统计了30台CTD校准结果,初步探索了CTD校准点数量(4、6、8)分布对其校准结果影响。4点分布校准结果基本可以满足其测量精度&... 针对8点(0~35℃)温盐深测量仪CTD(测量精度±2 mK)校准周期长、成本高的现状,基于高精度海水恒温槽校准装置统计了30台CTD校准结果,初步探索了CTD校准点数量(4、6、8)分布对其校准结果影响。4点分布校准结果基本可以满足其测量精度±2 mK,但约占1/3的CTD总有部分温度点拟合残差超出测量精度,无法满足高精度的CTD校准。6点(35、25、15、10、5、0℃)校准结果全部在其测量精度±2 mK范围内,满足测量精度±2mK的CTD校准。选择CTD(№11858)评估其校准重复性和校准偏差,6点和8点的校准重复性分别为0.8、0.5 mK,校准偏差都在0.5 mK内。实验结果表明6点校准替代8点校准具有可行性。CTD校准结果不确定度优于U=1.5 mK(k=2)。研究结果可在保障海洋调查数据质量前提下,缩短CTD校准周期,提高海洋调查效率。 展开更多
关键词 温度计量 海洋温度 CTD校准 NTC热敏电阻 拟合残差 不确定度
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一种红外探测器低频噪声影响因素辨识与分析
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作者 王国军 李志宇 +2 位作者 禹颂耕 韩强 尹涛 《激光与红外》 北大核心 2025年第10期1570-1576,共7页
针对负温度系数(NTC)热敏电阻型红外探测器低频噪声问题,本文通过有限元仿真与试验验证相结合,深入辨识并分析了关键影响因素及其影响规律。揭示了探测器浸没工艺中热敏电阻薄片倾斜导致局部温升的关键作用机制,利用ANSYSWorkbench建立... 针对负温度系数(NTC)热敏电阻型红外探测器低频噪声问题,本文通过有限元仿真与试验验证相结合,深入辨识并分析了关键影响因素及其影响规律。揭示了探测器浸没工艺中热敏电阻薄片倾斜导致局部温升的关键作用机制,利用ANSYSWorkbench建立精确模型,仿真发现薄片浸没倾斜会引发显著温差(最高达10℃),使局部温度叠加工作温升后接近或超过介质层(AsSe)玻璃转变温度(约60℃)。在温度循环中,介质层反复固化产生的热应力会损伤薄片微观结构,显著增大载流子起伏噪声。提出关键工艺改进措施:细化浸没操作规范(中心均匀施压)并增加镜检与台阶仪测试环节(控制倾斜≤4μm)。实践表明,该方法可提前识别并优化约5的潜在缺陷探测器,有效降低后期噪声筛选成本。本研究为提升红外探测器可靠性及优化生产工艺提供了理论依据和实用方法。 展开更多
关键词 红外探测器 低频噪声 热敏电阻薄片倾斜 介质层热应力 浸没工艺优化
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