Laser interferometry with higher resolution,faster update rate,and larger dynamic range is highly anticipated in the exploration of physics frontiers,advanced manufacturing,and precision sensing.Real-time dispersive s...Laser interferometry with higher resolution,faster update rate,and larger dynamic range is highly anticipated in the exploration of physics frontiers,advanced manufacturing,and precision sensing.Real-time dispersive spectral interferometry(DSI)shows promise for high-speed precision measurements,whereas the resolution of subnanometers has not yet been achieved.We present a comprehensive theoretical framework to analyze the limitations of real-time DSI based on the signal-to-noise ratio and data volume.A real-time orthogonal polarization spectral interferometry technique is proposed,which utilizes a pair of interferograms with the pi-phase shift to effectively mitigate the phase noise embedded in real-time spectral envelopes,thereby enabling the precise measurements with subnanometer resolution at megahertz frame rates.The recorded time series data are processed through interpolation,segmentation,time–frequency mapping,and de-enveloping to regain the typical cosine-shaped spectral evolution,followed by a fitting-based phase retrieval method to extract the interference phase.The phase resolution of 1.1 mrad(0.91 as for time delay and 0.3 nm for distance)is obtained at the update rate of 22.2 MHz even under the detection bandwidth of 500 MHz,and can be further enhanced to 0.29 mrad(0.24 as for time delay)after 500 times averaging(∼0.5 MHz).Our approach is validated through periodic phase modulations and applied to measure the rapid damped oscillations of a piezo stage,yielding results consistent with those obtained from a commercial picometer interferometer.展开更多
A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitte...A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors.Adding a transparent medium also increases the equivalent thickness.The simulation results showthat the equivalent thickness has a significant effect on thin film thickness measurements.Therefore,it is necessary to perform wavelength correction to provide a constant equivalent thickness for beamsplitters.In the experiments,some pieces of cover glasses as the transparent medium were added to the measured beam and then a standard thin film thickness of 1052.2±0.9 nm was tested through the transparent medium.The results demonstrate that our system has a nanometer-level accuracy for thin film thickness measurement through transparent medium with optical path compensation.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.61705193)the Natural Science Foundation of Zhejiang Province(Grant No.LGG20F050002)the Jinhua Science and Technology Plan(Project No.2024-1-064).
文摘Laser interferometry with higher resolution,faster update rate,and larger dynamic range is highly anticipated in the exploration of physics frontiers,advanced manufacturing,and precision sensing.Real-time dispersive spectral interferometry(DSI)shows promise for high-speed precision measurements,whereas the resolution of subnanometers has not yet been achieved.We present a comprehensive theoretical framework to analyze the limitations of real-time DSI based on the signal-to-noise ratio and data volume.A real-time orthogonal polarization spectral interferometry technique is proposed,which utilizes a pair of interferograms with the pi-phase shift to effectively mitigate the phase noise embedded in real-time spectral envelopes,thereby enabling the precise measurements with subnanometer resolution at megahertz frame rates.The recorded time series data are processed through interpolation,segmentation,time–frequency mapping,and de-enveloping to regain the typical cosine-shaped spectral evolution,followed by a fitting-based phase retrieval method to extract the interference phase.The phase resolution of 1.1 mrad(0.91 as for time delay and 0.3 nm for distance)is obtained at the update rate of 22.2 MHz even under the detection bandwidth of 500 MHz,and can be further enhanced to 0.29 mrad(0.24 as for time delay)after 500 times averaging(∼0.5 MHz).Our approach is validated through periodic phase modulations and applied to measure the rapid damped oscillations of a piezo stage,yielding results consistent with those obtained from a commercial picometer interferometer.
基金the support of The National Key Research and Development Program of China(Grant No.2017YFF0107001)the 111 Project fund(Grant No.B07014)
文摘A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors.Adding a transparent medium also increases the equivalent thickness.The simulation results showthat the equivalent thickness has a significant effect on thin film thickness measurements.Therefore,it is necessary to perform wavelength correction to provide a constant equivalent thickness for beamsplitters.In the experiments,some pieces of cover glasses as the transparent medium were added to the measured beam and then a standard thin film thickness of 1052.2±0.9 nm was tested through the transparent medium.The results demonstrate that our system has a nanometer-level accuracy for thin film thickness measurement through transparent medium with optical path compensation.
