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Fe掺杂钛基SnO2/Sb电催化电极的制备及表征 被引量:3
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作者 张翼 刘蕾 +2 位作者 孙晓东 张荣庆 王磊 《材料保护》 CAS CSCD 北大核心 2008年第3期31-33,70,共4页
为了改进钛基SnO2/Sb电极的电催化性能,采用高温热氧化法制备了Fe掺杂钛基SnO2/Sb电极。采用SEM、EDX以及XRD等方法对所制备电极的表面形貌、元素组成及结构进行分析,并以苯酚为目标有机物,研究了所制备电极对有机污染物的电催化降解能... 为了改进钛基SnO2/Sb电极的电催化性能,采用高温热氧化法制备了Fe掺杂钛基SnO2/Sb电极。采用SEM、EDX以及XRD等方法对所制备电极的表面形貌、元素组成及结构进行分析,并以苯酚为目标有机物,研究了所制备电极对有机污染物的电催化降解能力。结果表明,适量Fe的掺杂有利于晶粒细化和导电性的提高;但过量Fe的掺杂可能导致SnO2晶格的混乱程度增大,甚至使晶格破坏,从而使电极性能降低;掺杂0.5%Fe的SnO2/Sb电极对苯酚的降解效果优于未掺杂Fe的电极;电解3 h后,苯酚去除率和化学需氧量(COD)去除率分别达到100.0%和92.0%。 展开更多
关键词 sno2/sb电极 Fe 电催化 苯酚
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SnO2纳米颗粒制备及其对溶胶-凝胶Sb:SnO2薄膜性能的影响
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作者 王黎 周嶅 毕文跃 《功能材料》 EI CAS CSCD 北大核心 2004年第z1期3209-3212,共4页
以Sn(OEt)2为起始原料,采用水热晶化法合成了分散性良好的金红石结构的SnO2纳米颗粒.采用X射线衍射对其进行了表征,表明SnO2纳米颗粒的结晶性良好,颗粒尺寸小于10nm.将合成的SnO2纳米颗粒均匀分散到Sb:SnO2镀膜液中,经陈化后制成镀膜溶... 以Sn(OEt)2为起始原料,采用水热晶化法合成了分散性良好的金红石结构的SnO2纳米颗粒.采用X射线衍射对其进行了表征,表明SnO2纳米颗粒的结晶性良好,颗粒尺寸小于10nm.将合成的SnO2纳米颗粒均匀分散到Sb:SnO2镀膜液中,经陈化后制成镀膜溶胶,以溶胶-凝胶浸渍镀膜工艺制备纳米颗粒掺杂Sb:SnO2薄膜.分别采用范德堡(Van Der Pauw)法、UV/VIS分光光度计和FTIR中红外分析仪测量并分析膜层的导电性能、光学性能及结构特征,研究了导电纳米颗粒添加对Sb:SnO2薄膜电性能、光学性能和结构的影响. 展开更多
关键词 水热合成 sno2纳米颗粒 sb:sno2薄膜 溶胶-凝胶
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喷雾热解法制备SnO2:Sb+F透明导电薄膜
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作者 赵高扬 魏征 +1 位作者 郅晓 张卫华 《中国材料科技与设备》 2006年第5期83-85,共3页
采用溶胶-凝胶与喷雾热解相结合的方法,在大面积浮法玻璃基板上制备出了SnO2:Sb+F透明导电薄膜,研究了F/Sn比例、基板温度与SnO2薄膜的结构、形貌、光电性能的关系。实验结果表明:在溶胶的Sn:Sb:F比例为1:0.04:0.5和基板温度... 采用溶胶-凝胶与喷雾热解相结合的方法,在大面积浮法玻璃基板上制备出了SnO2:Sb+F透明导电薄膜,研究了F/Sn比例、基板温度与SnO2薄膜的结构、形貌、光电性能的关系。实验结果表明:在溶胶的Sn:Sb:F比例为1:0.04:0.5和基板温度550℃的条件下,制备的SnO2:Sb+F薄膜具有最佳的导电性能及较高的透光率,薄膜方阻达25Ω/□,电阻率为7.5×10^-4Ω·cm,平均可见光透过率为77.4%,辐射率e=0.208,表现出了较好的低辐射性。 展开更多
关键词 透明导电薄膜 sno2:sb+F 喷雾热解 光电性能 大面积
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SiO2缓冲层对溶胶-凝胶法制备的SnO2:Sb薄膜光电性能的影响 被引量:3
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作者 陈帅 赵小如 +4 位作者 段利兵 白晓军 刘金铭 谢海燕 关蒙萌 《材料导报》 EI CAS CSCD 北大核心 2012年第10期27-29,38,共4页
以SnCl2·2H2O和SbCl3为原料,利用溶胶-凝胶法制备了SnO2∶Sb薄膜。利用XRD观察了薄膜的结构特点,利用紫外可见分光光度计测量了薄膜的透过率,利用四探针测试系统表征了薄膜的电学性能。讨论了掺杂浓度以及SiO2缓冲层厚度对薄膜光... 以SnCl2·2H2O和SbCl3为原料,利用溶胶-凝胶法制备了SnO2∶Sb薄膜。利用XRD观察了薄膜的结构特点,利用紫外可见分光光度计测量了薄膜的透过率,利用四探针测试系统表征了薄膜的电学性能。讨论了掺杂浓度以及SiO2缓冲层厚度对薄膜光电性能的影响。结果表明,随着掺杂浓度的增大,薄膜的电阻率先降低而后略有升高,当掺杂浓度为5%时,薄膜电阻率达到最小,为8.7×10-3Ω·cm;并深入研究了缓冲层对薄膜性能的改善作用:当掺杂浓度为5%时,随着缓冲层数的增加,薄膜方块电阻呈下降趋势,最小可达到95Ω/□,电阻率达到1.1×10-3Ω·cm。 展开更多
关键词 溶胶-凝胶法 透明导电氧化物 sb掺杂sno2 缓冲层
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Preparation and Characterization of CeO_2-TiO_2/SnO_2:Sb Films Deposited on Glass Substrates by R.F.Sputtering 被引量:6
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作者 ZHAO Qingnan DONG Yuhong NI Jiamiao WANG Peng ZHAO Xiujian 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2008年第4期443-447,共5页
CeO2-TiO2 films and CeO2-TiO/SnO2:Sb (6 mol%) double films were deposited on glass substrates by radio-frequency magnetron sputtering (R.F. Sputtering), using SnO2:Sb(6 mol%) target, and CeO2- TiO2 targets wit... CeO2-TiO2 films and CeO2-TiO/SnO2:Sb (6 mol%) double films were deposited on glass substrates by radio-frequency magnetron sputtering (R.F. Sputtering), using SnO2:Sb(6 mol%) target, and CeO2- TiO2 targets with different molar ratio of CeO2 to TiO2 (CeO2:TiO2-0:1.0; 0.1:0.9; 0.2:0.8; 0.3:0.7; 0.4:0.6; 0.5:0.5; 0.6:0.4; 0.7:0.3; 0.8:0.2; 0.9:0.1; 1.0:0). The films are characterized by UV-visible transmission and infrared reflection spectra, scanning electron microscopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The obtained results show that the amorphous phases composed of CeO2-TiO2 play an important role in absorbing UV, there are Ce^3-, Ce^4- and Ti^4- on the surface of the films; the glass substrates coated with CeO2-TiO2 (Ce/Ti=0.5:0.5; 0.6:0.4)/SnO2:Sb(6 mol%) double films show high absorbing UV(〉99), high visible light transmission (75%) and good infrared reflection (〉70%). The sheet resistance of the films is 30-50 Ω/□. The glass substrates coated with the double functional films can be used as window glass of buildings, automobile and so on. 展开更多
关键词 coating glass CeO2-TiO/sno2sb double thin films absorbing UV IR reflection R.F. sputterin
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Anodic oxidation of formic acid on PdAuIr /C-Sb2O5·SnO2 electrocatalysts prepared by borohydride reduction 被引量:2
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作者 A. O. Neto J. Nandenha R. F. B. De Souza G. S Buzzo J. C. M . Silva E. V. Spinacé M . H. M . T. Assumpo 《燃料化学学报》 EI CAS CSCD 北大核心 2014年第7期851-857,共7页
PdAuIr/C-Sb2O5·SnO2electrocatalysts with Pd∶Au∶Ir molar ratios of 90∶5∶5,70∶20∶10 and 50∶45∶5 were prepared by borohydride reduction method.These electrocatalysts were characterized by EDX,X-ray diffracti... PdAuIr/C-Sb2O5·SnO2electrocatalysts with Pd∶Au∶Ir molar ratios of 90∶5∶5,70∶20∶10 and 50∶45∶5 were prepared by borohydride reduction method.These electrocatalysts were characterized by EDX,X-ray diffraction,transmission electron microscopy and the catalytic activity toward formic acid electro-oxidation in acid medium investigated by cyclic voltammetry(CV),chroamperometry(CA)and tests on direct formic acid fuel cell(DFAFC)at 100℃.X-ray diffractograms of PdAuIr/C-Sb2O5·SnO2electrocatalysts showed the presence of Pd fcc phase,Pd-Au fcc alloys,carbon and ATO phases,while Ir phases were not observed.TEM micrographs and histograms indicated that the nanoparticles were not well dispersed on the support and some agglomerates.The cyclic voltammetry and chroamperometry studies showed that PdAuIr/C-Sb2O5·SnO2(50∶45∶5)had superior performance toward formic acid electro-oxidation at 25℃compared to PdAuIr/C-Sb2O5·SnO2(70∶20∶10),PdAuIr/C-Sb2O5·SnO2(90∶5∶5)and Pd/C-Sb2O5·SnO2electrocatalysts.The experiments in a single DFAFC also showed that all PdAuIr/C-Sb2O5·SnO2electrocatalysts exhibited higher performance for formic acid oxidation in comparison with Pd/C-Sb2O5·SnO2electrocatalysts,however PdAuIr/C-Sb2O5·SnO2(90∶5∶5)had superior performance.These results indicated that the addition of Au and Ir to Pd favor the electro-oxidation of formic acid,which could be attributed to the bifunctional mechanism(the presence of ATO,Au and Ir oxides species)associated to the electronic effect(Pd-Au fcc alloys). 展开更多
关键词 PdAuIr/C—sb2O5·sno2 甲酸氧化 燃料电池 电力
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Optoelectronic properties of SnO2 thin films sprayed at different deposition times 被引量:1
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作者 Allag Abdelkrim Saad Rahmane +2 位作者 Ouahab Abdelouahab Attouche Hafida Kouidri Nabila 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第4期296-302,共7页
This article presents the elaboration of tin oxide (SnO2) thin films on glass substrates by using a home-made spray pyrolysis system. Effects of film thickness on the structural, optical, and electrical film propert... This article presents the elaboration of tin oxide (SnO2) thin films on glass substrates by using a home-made spray pyrolysis system. Effects of film thickness on the structural, optical, and electrical film properties are investigated. The films are characterized by several techniques such as x-ray diffraction (XRD), atomic force microscopy (AFM), ultraviolet- visible (UV-Vis) transmission, and four-probe point measurements, and the results suggest that the prepared films are uniform and well adherent to the substrates. X-ray diffraction (XRD) patterns show that SnO2 film is of polycrystal with cassiterite tetragonal crystal structure and a preferential orientation along the (110) plane. The calculated grain sizes are in a range from 32.93 nm to 56.88 nm. Optical transmittance spectra of the films show that their high transparency average transmittances are greater than 65% in the visible region. The optical gaps of SnO2 thin films are found to be in a range of 3.64 eV-3.94 eV. Figures of merit for SnO2 thin films reveal that their maximum value is about 1.15 x 10-4 Ω-1 at λ = 550 nm. Moreover, the measured electrical resistivity at room temperature is on the order of 10^-2 Ω.cm. 展开更多
关键词 thin film sno2 spray pyrolysis thickness PROPERTIES
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Multiple-State Storage Capability of Stacked Chalcogenide Films (Si16Sb33Te51/Si4Sb45Te51/Si11Sb39Te50) for Phase Change Memory 被引量:1
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作者 赖云锋 冯洁 +6 位作者 乔保卫 黄晓刚 蔡燕飞 林殷茵 汤庭鳌 蔡炳初 陈邦明 《Chinese Physics Letters》 SCIE CAS CSCD 2006年第9期2516-2518,共3页
The multiple-state storage capability of phase change memory (PCM) is confirmed by using stacked chalcogenide films as the storage medium. The current-voltage characteristics and the resistance-current characteristi... The multiple-state storage capability of phase change memory (PCM) is confirmed by using stacked chalcogenide films as the storage medium. The current-voltage characteristics and the resistance-current characteristics of the PCM clearly indicate that four states can be stored in this stacked film structure. Qualitative analysis indicates that the multiple-state storage capability of this stacked film structure is due to successive crystallizations in different Si-Sb-Te layers triggered by different amplitude currents. 展开更多
关键词 RANDOM-ACCESS MEMORY DOPED GE2sb2TE5 filmS OPTICAL DISK CRYSTALLIZATION
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Structural Evolution and Phase Change Properties of C-Doped Ge_2Sb_2Te_5 Films During Heating in Air 被引量:1
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作者 郑龙 杨幸明 +4 位作者 胡益丰 翟良君 薛建忠 朱小芹 宋志棠 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第12期41-44,共4页
We elucidate the importance of a capping layer on the structural evolution and phase change properties of carbondoped Ge2 Sb2 Te5(C-GST) films during heating in air. Both the C-GST films without and with a thin SiO2... We elucidate the importance of a capping layer on the structural evolution and phase change properties of carbondoped Ge2 Sb2 Te5(C-GST) films during heating in air. Both the C-GST films without and with a thin SiO2 capping layer(C-GST and C-GST/SiO2) are deposited for comparison. Large differences are observed between C-GST and C-GST/SiO2 films in resistance-temperature, x-ray diffraction, x-ray photoelectron spectroscopy,Raman spectra, data retention capability and optical band gap measurements. In the C-GST film, resistancetemperature measurement reveals an unusual smooth decrease in resistance above 110℃ during heating. Xray diffraction result has excluded the possibility of phase change in the C-GST film below 170℃. The x-ray photoelectron spectroscopy experimental result reveals the evolution of Te chemical valence because of the carbon oxidation during heating. Raman spectra further demonstrate that phase changes from an amorphous state to the hexagonal state occur directly during heating in the C-GST film. The quite smooth decrease in resistance is believed to be related with the formation of Te-rich GeTe4-n Gen(n = 0, 1) units above 110℃ in the C-GST film. The oxidation of carbon is harmful to the C-GST phase change properties. 展开更多
关键词 GST Structural Evolution and Phase Change Properties of C-Doped Ge2sb2Te5 films During Heating in Air sb
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Study of Ge_2Sb_2Te_5 Film for Nonvolatile Memory Medium
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作者 BaoweiQIA YunfengLAI +5 位作者 JieFENG YunLING YinyinLIN Ting'aoTANG BingchuCAI BomyCHEN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第1期95-99,共5页
The amorphous Ge2Sb2Te5 film with stoichiometric compositions was deposited by co-sputtering of separate Ge, Sb, and Te targets on SiO2/Si (100) wafer in ultrahigh vacuum magnetron sputtering apparatus. The crystalliz... The amorphous Ge2Sb2Te5 film with stoichiometric compositions was deposited by co-sputtering of separate Ge, Sb, and Te targets on SiO2/Si (100) wafer in ultrahigh vacuum magnetron sputtering apparatus. The crystallization behavior of amorphous Ge2Sb2Te5 film was investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and differential scanning calorimetry (DSC). With an increase of annealing temperature, the amorphous Ge2Sb2Te5 film undergoes a two-step crystallization process that it first crystallizes in face-centered-cubic (fcc) crystal structure and finally fcc structure changes to hexagonal (hex) structure. Activation energy values of 3.636±0.137 and 1.579±0.005 eV correspond to the crystallization and structural transformation processes, respectively. From annealing temperature dependence of the film resistivity, it is determined that the first steep decrease of the resistivity corresponds to crystallization while the second one is primarily caused by structural transformation from 'fcc' to 'hex' and growth of the crystal grains. Current-voltage (Ⅰ-Ⅴ) characteristics of the device with 40 nm-thick Ge2Sb2Te5 film show that the Ge2Sb2Te5 film with nanometer order thickness is still applicable for memory medium of nonvolatile phase change memory. 展开更多
关键词 Co-sputtering Ge2sb2Te5 film Activation energy RESISTIVITY Memory medium
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Determination and Analysis of Optical Constant of Annealed Sn_2Sb_2S_5 Thin Films
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作者 Yousra Fadhli Adel Rabhi Mounir Kanzari 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2015年第5期656-662,共7页
The effects of annealing on structural, optical and electrical properties of Sn2Sb2S5 thin films were studied. Sn2Sb2S5 thin films were deposited on no-heated glass substrates by single source vacuum evaporation metho... The effects of annealing on structural, optical and electrical properties of Sn2Sb2S5 thin films were studied. Sn2Sb2S5 thin films were deposited on no-heated glass substrates by single source vacuum evaporation method. The as- deposited films were annealed in air for 1 h at 100, 200 and 300 ℃. XRD study shows that annealed films are crystallized according to the preferential orientation (602). Optical measurements show that the thin films have relatively high absorption coefficients in the range of 10s-106 cm-1 in the energy range of 2-3.25 eV. It is also found that Sn2Sb2S5 exhibit two optical direct transitions. The models of Wemple-DiDomenico and Spitzer-Fan were applied for the analysis of the dispersion of the refractive index and the determination of the optical and dielectric constants. The electrical resistivity measurements are recorded, and two activation energy values are determined. The layers annealed at 200 and 300 ℃ exhibit a resistive hysteresis behavior. The properties reported here offer perspective to Sn2SbES5 for its application in many advanced technologies. 展开更多
关键词 Sn2sb2S5 thin films Optical constants Electrical properties
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Crystallization Process of Superlattice-Like Sb/SiO_2 Thin Films for Phase Change Memory Application
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作者 Xiao-Qin Zhu Rui Zhang +4 位作者 Yi-Feng Hu Tian-Shu Lai Jian-Hao Zhang Hua Zou Zhi-Tang Song 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第5期99-103,共5页
After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature(~240°C), larger crystallization activation energy(6.22 e V), and better data... After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature(~240°C), larger crystallization activation energy(6.22 e V), and better data retention ability(189°C for 10 y). The crystallization of Sb in superlattice-like Sb/SiO_2 thin films is restrained by the multilayer interfaces. The reversible resistance transition can be achieved by an electric pulse as short as 8 ns for the Sb(3 nm)/SiO_2(7 nm)-based phase change memory cell. A lower operation power consumption of 0.09 m W and a good endurance of 3.0 × 10~6 cycles are achieved. In addition, the superlattice-like Sb(3 nm)/SiO_2(7 nm) thin film shows a low thermal conductivity of 0.13 W/(m·K). 展开更多
关键词 sb Crystallization Process of Superlattice-Like sb/SiO2 Thin films for Phase Change Memory Application SiO
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Characteristics of Sb6Te4/VO2 Multilayer Thin Films for Good Stability and Ultrafast Speed Applied in Phase Change Memory
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作者 Yi-Feng Hu Xuan Guo +1 位作者 Qing-Qian Qin Tian-Shu Lai 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第9期53-56,共4页
The Sb6 Te4/VO2 multilayer thin films are prepared by magnetron sputtering and the potential application in phase change memory is investigated in detail. Compared with Sb6 Te4, Sb6 Te4/VO2 multilayer composite thin f... The Sb6 Te4/VO2 multilayer thin films are prepared by magnetron sputtering and the potential application in phase change memory is investigated in detail. Compared with Sb6 Te4, Sb6 Te4/VO2 multilayer composite thin films have higher phase change temperature and crystallization resistance, indicating better thermal stability and less power consumption. Also, Sb6 Te4/VO2 has a broader energy band of 1.58 eV and better data retention (125℃ for 103/). The crystallization is suppressed by the multilayer interfaces in Sbf Te4/VO2 thin film with a smaller rms surface roughness for Sbf Te4/VO2 than monolayer Sb4Te6. The picosecond laser technology is applied to study the phase change speed. A short crystallization time of 5.21 ns is realized for the Sb6Te4 (2nm)/VO2 (8nm) thin film. The Sb6 Te4/VO2 multilayer thin film is a potential and competitive phase change material for its good thermal stability and fast phase change speed. 展开更多
关键词 VO Te Characteristics of sb6Te4/VO2 Multilayer Thin films for Good Stability and Ultrafast Speed Applied in Phase Change Memory sb
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Quantum spin Hall insulators in chemically functionalized As(110)and Sb(110)films
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作者 Xiahong Wang Ping Li +1 位作者 Zhao Ran Weidong Luo 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第8期487-491,共5页
We propose a new type of quantum spin Hall (QSH) insulator in chemically functionalized As (110) and Sb (110) film. According to first-principles calculations, we find that metallic As (110) and Sb (110) fil... We propose a new type of quantum spin Hall (QSH) insulator in chemically functionalized As (110) and Sb (110) film. According to first-principles calculations, we find that metallic As (110) and Sb (110) films become QSH insulators after being chemically functionalized by hydrogen (H) or halogen (C1 and Br) atoms. The energy gaps of the functionalized films range from 0.121 eV to 0.304 eV, which are sufficiently large for practical applications at room temperature. The energy gaps originate from the spin-orbit coupling (SOC). The energy gap increases linearly with the increase of the SOC strength λ/λ0. The Z2 invariant and the penetration depth of the edge states are also calculated and studied for the functionalized films. 展开更多
关键词 quantum spin Hall insulators density functional theory (DFT) chemical functionalization As (110) and sb (110) film Z2 topological invariants
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XPS Study of Electroless Deposited Sb2Se3 Thin Films for Solar Cell Absorber Material
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作者 Towhid Adnan Chowdhury 《Energy and Power Engineering》 2023年第11期363-371,共9页
As a thin film solar cell absorber material, antimony selenide (Sb<sub>2</sub>Se<sub>3</sub>) has become a potential candidate recently because of its unique optical and electrical properties a... As a thin film solar cell absorber material, antimony selenide (Sb<sub>2</sub>Se<sub>3</sub>) has become a potential candidate recently because of its unique optical and electrical properties and easy fabrication method. X-ray photoelectron spectroscopy (XPS) was used to determine the stoichiometry and composition of electroless Sb<sub>2</sub>Se<sub>3</sub> thin films using depth profile studies. The surface layers were analyzed nearly stoichiometric. But the abundant amount of antimony makes the inner layer electrically more conductive. 展开更多
关键词 sb2Se3 ELECTROLESS Depth Profiling Thin film X-Ray Photoelectron Spectroscopy
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Depth Profile Study of Electroless Deposited Sb2S3 Thin Films Using XPS for Photovoltaic Applications
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作者 Towhid Adnan Chowdhury 《Materials Sciences and Applications》 2023年第7期397-406,共10页
Sb<sub>2</sub>S<sub>3</sub> has gained tremendous research recently for thin film solar cell absorber material because of their easy synthesis, unique electrical and optical properties. The sto... Sb<sub>2</sub>S<sub>3</sub> has gained tremendous research recently for thin film solar cell absorber material because of their easy synthesis, unique electrical and optical properties. The stoichiometry and composition of electroless Sb<sub>2</sub>S<sub>3</sub> thin films were analyzed using XPS depth profile studies. The surface layers were found nearly stoichiometric. On the other hand, the inner layer was rich in antimony composition making it more conductive electrically. 展开更多
关键词 sb2S3 Depth Profiling X-Ray Photoelectron Spectroscopy Thin film ELECTROLESS
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退火处理对SnO_2:Sb薄膜结构和光致发光性质的影响 被引量:6
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作者 王玉恒 马瑾 +2 位作者 计峰 余旭浒 马洪磊 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2005年第11期1747-1750,共4页
用射频磁控溅射法在玻璃衬底上制备出SnO2:Sb薄膜,研究了不同掺杂和退火对薄膜结构的影响。制备薄膜是具有纯氧化锡四方金红石结构的多晶膜薄,晶粒生长的择优取向为(110)。室温下光致发光测量首次观测到392nm附近存在紫外-紫光发射,并对... 用射频磁控溅射法在玻璃衬底上制备出SnO2:Sb薄膜,研究了不同掺杂和退火对薄膜结构的影响。制备薄膜是具有纯氧化锡四方金红石结构的多晶膜薄,晶粒生长的择优取向为(110)。室温下光致发光测量首次观测到392nm附近存在紫外-紫光发射,并对SnO2:Sb的光致发光机制进行了探索性研究。 展开更多
关键词 射频磁控溅射法 sno2:sb薄膜 光致发光
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CVD法制备Sb掺杂SnO_2薄膜的结构与性能研究 被引量:7
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作者 谢莲革 沃银花 +4 位作者 汪建勋 沈鸽 翁文剑 刘起英 韩高荣 《浙江大学学报(工学版)》 EI CAS CSCD 北大核心 2005年第11期1824-1828,共5页
采用化学气相沉积法(CVD)制备了Sb掺杂SnO2薄膜(ATO),研究了Sb掺杂量对ATO薄膜结构和性能的影响.利用X射线衍射(XRD)、扫描电镜(SEM)、X射线光电子能谱(XPS)等分析手段对所制得薄膜的结构、形貌、成分等进行了表征,XRD结果表明在基板温... 采用化学气相沉积法(CVD)制备了Sb掺杂SnO2薄膜(ATO),研究了Sb掺杂量对ATO薄膜结构和性能的影响.利用X射线衍射(XRD)、扫描电镜(SEM)、X射线光电子能谱(XPS)等分析手段对所制得薄膜的结构、形貌、成分等进行了表征,XRD结果表明在基板温度为665℃时能够制得结晶性能较好的多晶薄膜,XPS分析确定掺杂后的Sb以Sb5+离子形式存在.讨论了Sb掺杂量对方块电阻、透射率和反射率等薄膜性质的影响,结果表明,当Sb掺杂量为2%时取得最小方块电阻为7.8Ω/□,在可见光区薄膜的透射率和反射率随着Sb掺杂量的增加呈下降趋势.最后探讨了Sb掺杂SnO2薄膜的显色特性,认为Sb5+离子的本征吸收是薄膜显色的主要原因. 展开更多
关键词 化学气相沉积(CVD) sb掺杂sno2薄膜 掺杂量
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SnO_2:Sb薄膜的制备和光致发光性质 被引量:4
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作者 王玉恒 马瑾 +3 位作者 计峰 余旭浒 张锡健 马洪磊 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第5期922-926,共5页
用射频磁控溅射法在玻璃衬底上制备出SnO2∶Sb薄膜.制备样品为多晶薄膜,具有纯氧化锡的四方金红石结构和(110)择优取向,Sb离子以替位式掺杂的形式存在于SnO2 晶格中.室温条件下对样品进行光致发光测量,在392nm附近观测到强的紫外紫光发... 用射频磁控溅射法在玻璃衬底上制备出SnO2∶Sb薄膜.制备样品为多晶薄膜,具有纯氧化锡的四方金红石结构和(110)择优取向,Sb离子以替位式掺杂的形式存在于SnO2 晶格中.室温条件下对样品进行光致发光测量,在392nm附近观测到强的紫外紫光发射,发射强度随制备功率的增加而增强,且样品退火后发射强度也明显增强.紫外紫光发射的起源被归于由Sb形成的施主能级和受主能级之间的电子跃迁. 展开更多
关键词 sno2:sb薄膜 射频磁控溅射 光致发光
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SnO_2∶Sb/SiO_2复合薄膜的制备与光学性能 被引量:3
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作者 王贺 魏长平 +2 位作者 彭春佳 程果 李丛昱 《硅酸盐通报》 CAS CSCD 北大核心 2012年第3期683-687,共5页
采用溶胶-凝胶结合旋涂技术在玻璃基底上制备了SnO2∶Sb/SiO2复合薄膜,利用XRD、FT-IR、SEM、椭偏仪、分光光度计等方法对薄膜样品进行了系统地表征。结果表明:经过热处理后样品生成了SnO2∶Sb和SiO2;薄膜具有双层结构,上层SiO2厚度约10... 采用溶胶-凝胶结合旋涂技术在玻璃基底上制备了SnO2∶Sb/SiO2复合薄膜,利用XRD、FT-IR、SEM、椭偏仪、分光光度计等方法对薄膜样品进行了系统地表征。结果表明:经过热处理后样品生成了SnO2∶Sb和SiO2;薄膜具有双层结构,上层SiO2厚度约105 nm,折射率为1.352,底层SnO2∶Sb厚度约1200 nm,折射率为1.91;优化工艺条件下SnO2∶Sb/SiO2复合薄膜的性能优于SnO2∶Sb薄膜,在相同情况下SnO2∶Sb/SiO2复合薄膜对可见光的透过率大于SnO2∶Sb薄膜,这是因为上层SiO2薄膜折射率较低,与底层高折射率SnO2∶Sb薄膜共同构成减反射膜系,提高了膜系的可见光透过率。相比于单层SnO2∶Sb膜,在可见光部分增透率大于4.5%,近红外波段的增透率小于1.0%,基本保持原有导电膜的低红外辐射特性,并提高了可见光透过率。 展开更多
关键词 溶胶-凝胶 sno2sb SIO2 复合薄膜 透过率
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