Ultra-precision machining technology received relatively little attention in the machining of key components for semiconductor equipment,such as the seal surfaces of mass flow controller(MFC).The machining quality of ...Ultra-precision machining technology received relatively little attention in the machining of key components for semiconductor equipment,such as the seal surfaces of mass flow controller(MFC).The machining quality of these features is vital to the corrosion resistance of MFC valve body.Currently,the processing of these features still relies on conventional manual polishing,which will lead to uncertainty in surface quality.Therefore,this article employs a special fabricated sinter pouring polyurethane(SPPU)grind-polishing tool to conduct two-dimensional ultrasonic vibration-assisted polishing experiments,with a focus on the tool's performance.The machining mechanism of the tool was analyzed.Taking into account the ultrasonic cavitation effect,the penetration depth of a single grain was calculated,and established a surface roughness model.Through experiments,it was found that as the amplitude increased,the surface roughness showed a decreasing trend,reaching as low as 0.003μm,but the change in polishing force exhibited an opposite trend.Additionally,the material removal efficiency significantly improves with the increase of amplitude.The processed surface had a reduced carbon content and no oxygen element,indicating the stable machining performance of the tool.This article provides effective reference for the automated processing of MFC valve body features.展开更多
基金supported by the Key Research and Development Projects of Shenyang City(grant No.2021020900047)Huanqi Technology(Shenyang)Co.,Ltd,China,and Dongguan Senyong Diamond Technology Co.,Ltd,China.
文摘Ultra-precision machining technology received relatively little attention in the machining of key components for semiconductor equipment,such as the seal surfaces of mass flow controller(MFC).The machining quality of these features is vital to the corrosion resistance of MFC valve body.Currently,the processing of these features still relies on conventional manual polishing,which will lead to uncertainty in surface quality.Therefore,this article employs a special fabricated sinter pouring polyurethane(SPPU)grind-polishing tool to conduct two-dimensional ultrasonic vibration-assisted polishing experiments,with a focus on the tool's performance.The machining mechanism of the tool was analyzed.Taking into account the ultrasonic cavitation effect,the penetration depth of a single grain was calculated,and established a surface roughness model.Through experiments,it was found that as the amplitude increased,the surface roughness showed a decreasing trend,reaching as low as 0.003μm,but the change in polishing force exhibited an opposite trend.Additionally,the material removal efficiency significantly improves with the increase of amplitude.The processed surface had a reduced carbon content and no oxygen element,indicating the stable machining performance of the tool.This article provides effective reference for the automated processing of MFC valve body features.
