Autism, also known as autism, is a kind of brain developmental disorder characterized by social communication disorder, communication disorder and repetitive interest behavior. Autism begins before the age of three an...Autism, also known as autism, is a kind of brain developmental disorder characterized by social communication disorder, communication disorder and repetitive interest behavior. Autism begins before the age of three and manifests itself after the age of three. Most children need long-term rehabilitation training and special education support. In the behavioral function analysis of special children, screaming has not been systematically studied separately from other problematic behaviors such as aggressive behaviors. This functional analysis can help to identify the variables that may maintain screaming, and has certain reference value for children with such problematic behaviors.展开更多
Trench sidewall passivation is a key step in the SCREAM (single crystal reactive etching and metallization) process for releasing suspended MEMS structures. In this paper, the parylene thin film is reported to serve a...Trench sidewall passivation is a key step in the SCREAM (single crystal reactive etching and metallization) process for releasing suspended MEMS structures. In this paper, the parylene thin film is reported to serve as the passivation layer owing to its excellent conformality, chemical inertness, mechanical performance, and especially, low growth temperature. The deposited parylene films are characterized and the test structures are released through SCREAM process utilizing the parylene films as a passivation layer. The results show that as a passivation layer the parylene has more merits than the PECVD SiO2 film.展开更多
文摘Autism, also known as autism, is a kind of brain developmental disorder characterized by social communication disorder, communication disorder and repetitive interest behavior. Autism begins before the age of three and manifests itself after the age of three. Most children need long-term rehabilitation training and special education support. In the behavioral function analysis of special children, screaming has not been systematically studied separately from other problematic behaviors such as aggressive behaviors. This functional analysis can help to identify the variables that may maintain screaming, and has certain reference value for children with such problematic behaviors.
基金Supported by the National Natural Science Foundation of China (Grant No.9060704)National Basic Research Program of China (Grant No.2006AA04Z315)
文摘Trench sidewall passivation is a key step in the SCREAM (single crystal reactive etching and metallization) process for releasing suspended MEMS structures. In this paper, the parylene thin film is reported to serve as the passivation layer owing to its excellent conformality, chemical inertness, mechanical performance, and especially, low growth temperature. The deposited parylene films are characterized and the test structures are released through SCREAM process utilizing the parylene films as a passivation layer. The results show that as a passivation layer the parylene has more merits than the PECVD SiO2 film.
