The transition to 65 nm beyond and 300 mm wafers posed many challenges on etch depth and critical dimension (CD) uniformity within wafer. In this paper, we introduce a radical distribution con- trol (RDC) system for a...The transition to 65 nm beyond and 300 mm wafers posed many challenges on etch depth and critical dimension (CD) uniformity within wafer. In this paper, we introduce a radical distribution con- trol (RDC) system for an excellent uniformity control. Etch depth and CD uniformity within wafer are well controlled by adding RDC function to SCCMTM. For increasing productivity, an all-in-one process, that is, etch/ash at the same chamber continuously is proposed here. By utilizing the advantage of inde- pendent dual frequency, a bias-controlled two-step ash “hybrid ash” is combined in the all-in-one process. Hybrid ash uses bias control and low pres- sure to minimize liner loss and the damage of low-k materials, which is targeting 65nm and beyond.展开更多
Work study is an area of construction production rationalization in which with scientific, logical, holistic and system analysis methods of the process we gain optimum in way of work and time of work. Chronometry meth...Work study is an area of construction production rationalization in which with scientific, logical, holistic and system analysis methods of the process we gain optimum in way of work and time of work. Chronometry method is one of the work study methods which is appropriate for recording shorter cyclic processes and is based on statistical sampling theory. Determination of cyclic times and work performances of standard cyclic construction machines （SCCM） is one of key assumptions of dynamic planning of machine work on every construction site. Calculation methods of SCCM work performances arc one of basic research objects in the field of construction organization and technology. Study shows applied chronometry method in work of standard cyclic construction machine. Goal of this study is to accomplish regulation through measured time cycle and compare measured effects with effects obtained with standard methodology of calculating hydraulic excavator practical achievement for gaining regulation in order to determine main reasons which effect work performance on site.展开更多
1.北美自由贸易协定 NAFTA(The North American Free Trade Agreement)成员国:美国、加拿大、墨西哥人口:3.68亿国民生产总值:6.5万亿美元人均产值:17,700美元2. 南锥体共同市场 SCCM(The Southern Cone Common Market)成员国:阿根廷、...1.北美自由贸易协定 NAFTA(The North American Free Trade Agreement)成员国:美国、加拿大、墨西哥人口:3.68亿国民生产总值:6.5万亿美元人均产值:17,700美元2. 南锥体共同市场 SCCM(The Southern Cone Common Market)成员国:阿根廷、巴西、巴拉圭、乌拉圭人口:1.94亿国民生产总值:4,760亿美元人均产值:2。展开更多
文摘The transition to 65 nm beyond and 300 mm wafers posed many challenges on etch depth and critical dimension (CD) uniformity within wafer. In this paper, we introduce a radical distribution con- trol (RDC) system for an excellent uniformity control. Etch depth and CD uniformity within wafer are well controlled by adding RDC function to SCCMTM. For increasing productivity, an all-in-one process, that is, etch/ash at the same chamber continuously is proposed here. By utilizing the advantage of inde- pendent dual frequency, a bias-controlled two-step ash “hybrid ash” is combined in the all-in-one process. Hybrid ash uses bias control and low pres- sure to minimize liner loss and the damage of low-k materials, which is targeting 65nm and beyond.
文摘Work study is an area of construction production rationalization in which with scientific, logical, holistic and system analysis methods of the process we gain optimum in way of work and time of work. Chronometry method is one of the work study methods which is appropriate for recording shorter cyclic processes and is based on statistical sampling theory. Determination of cyclic times and work performances of standard cyclic construction machines （SCCM） is one of key assumptions of dynamic planning of machine work on every construction site. Calculation methods of SCCM work performances arc one of basic research objects in the field of construction organization and technology. Study shows applied chronometry method in work of standard cyclic construction machine. Goal of this study is to accomplish regulation through measured time cycle and compare measured effects with effects obtained with standard methodology of calculating hydraulic excavator practical achievement for gaining regulation in order to determine main reasons which effect work performance on site.
文摘1.北美自由贸易协定 NAFTA(The North American Free Trade Agreement)成员国:美国、加拿大、墨西哥人口:3.68亿国民生产总值:6.5万亿美元人均产值:17,700美元2. 南锥体共同市场 SCCM(The Southern Cone Common Market)成员国:阿根廷、巴西、巴拉圭、乌拉圭人口:1.94亿国民生产总值:4,760亿美元人均产值:2。
