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Key Technologies and Development Trends in Advanced Intelligent Sawing Equipments 被引量:3
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作者 Yangyu Wang Yongle Zhang +1 位作者 Dapeng Tan Yongchao Zhang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2021年第3期175-194,共20页
As a starting point in equipment manufacturing,sawing plays an important role in industrial production.Intelligent manufacturing equipment is an important carrier of intelligent manufacturing technologies.Due to the b... As a starting point in equipment manufacturing,sawing plays an important role in industrial production.Intelligent manufacturing equipment is an important carrier of intelligent manufacturing technologies.Due to the backwardness of intelligent technology,the comprehensive performance of sawing equipments in China is obviously different from that in foreign countries.State of the art of advanced sawing equipments is investigated along with the technical bottleneck of sawing machine tool manufacturing,and a new industrial scheme of replacing turning-milling by sawing is described.The key technologies of processing-measuring integrated control,multi-body dynamic optimization,the collaborative sawing network framework,the distributed cloud sawing platform,and the self-adapting service method are analyzed;with consideration of the problems of poor processing control stableness,low single machine intelligence level,no on-line processing data service and active flutter suppression of sawing with wide-width and heavy-load working conditions.Suggested directions for further research,industry implementation,and industry-research collaboration are provided. 展开更多
关键词 sawing equipments Processing-measuring integrated control Collaborative sawing framework Intelligent network middleware sawing cloud service platform
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Sawing Performance Comparison of Brazed and Sintered Diamond Wires 被引量:4
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作者 HUANG Guoqin XU Xipeng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2013年第2期393-399,共7页
Great attention has been paid on fabricating diamond wire by using the brazing diamond because of its strong chemical bonding strength and controllability of grits distribution. Although several serving performances o... Great attention has been paid on fabricating diamond wire by using the brazing diamond because of its strong chemical bonding strength and controllability of grits distribution. Although several serving performances of brazed diamond wire have been reported, seldom do these studies refer to its process characteristics. Sawing performances of a brazed diamond wire are investigated and compared with those of a sintered diamond wire on a wire saw machine. The surface topographies of beads selected from the two wires are micro observed before sawing. The sawing tests are carried out in constant feed rate feeding(CFF) and constant normal force feeding(CNFF). In CFF test, sawing force, power, and the cut depths of positions on contact curve are measured. Then, coupled with the observations of beads topographies, sawing force and its ratio, relations of power against material removal rate, and contact curve linearity are compared and discussed. In CNFF test, the sawing rates of the two wires are investigated. The results indicate that the brazed wire performs with lower sawing force(less 16% of tangential force and 28% of normal force), more energy efficiency(nearly one-fifth of sawing power is saved), at a higher sawing rate (the rate is doubled) and with better contact curve linearity as compared with the sintered wire. This proposed research experimentally evaluates the sawing performances of brazed diamond wire from the aspect of process parameters, which can provide a basis for popularizing the brazed diamond wire. 展开更多
关键词 diamond wire BRAZE SINTER sawing force power contact curve
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Quantitative Analysis of the Loads Acting on the Abrasive Grits in the Diamond Sawing of Granites 被引量:2
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作者 XU Xi-peng, LI Yuan, ZENG Wei-ming, LI Liang-bin (Province Key Lab of Stone Machining, Huaqiao University, Quanzhou 362 011, China) 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期121-122,共2页
An experimental study was carried out to quantitati ve ly evaluate the loads acting on the diamond grits during circular sawing of two kinds of typical granite with diamond segmented saw blade. Measurements were mad e... An experimental study was carried out to quantitati ve ly evaluate the loads acting on the diamond grits during circular sawing of two kinds of typical granite with diamond segmented saw blade. Measurements were mad e of the horizontal and vertical force components and the consumed power in order to obtain the tangential and the normal force components. The temperatures at the diamond-granite contact zone were measured using a foil thermocouple. T he measurement, together with the net sawing power, was subsequently used to est imate the energy partition to the granite by a temperature matching technique. B ased on the energy partition values, the temperatures at individual cutting poin ts were estimated using an analytical model. SEM was used to follow the topograp hies of worn diamond segments. The average force acting on each diamond grit was found to be only 4% of the diamond compressive strength measured by a static me thod. The strength disparity of diamond grits and the random protrusion of grits beyond bond matrix should be significant factors in accounting for the wear of diamond grits. The wear of diamond grits was also found to be closely related to the high temperatures generated at individual cutting points and the pop-outs of diamonds from the bond matrix might be mainly attributed to the heat conducte d to the segments. 展开更多
关键词 force temperature diamond sawing GRANITE dis parity
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Preparation and Optimization of High-Purity Silicon Carbide Magnetic Abrasives for the Magnetic Induction-Wire Sawing Process 被引量:2
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作者 Wei Zhang Tengwei Qiu Chunyan Yao 《Fluid Dynamics & Materials Processing》 EI 2020年第4期709-721,共13页
In this study,magnetic abrasives were obtained by crushing and sieving sintered iron-silicon carbide(Fe-SiC)composites.Fe and SiC powders with different mesh numbers were pre-compacted using different pressures and th... In this study,magnetic abrasives were obtained by crushing and sieving sintered iron-silicon carbide(Fe-SiC)composites.Fe and SiC powders with different mesh numbers were pre-compacted using different pressures and then sintered at various temperatures and with different holding times.The dispersion uniformity of the SiC powder was improved through surface modification using polyethylene glycol(PEG)300.The resulting magnetic abrasives were characterized in terms of phase composition,density,relative permeability,and microstructure;this was followed by a comprehensive analysis to reveal the optimal processing parameters.The ideal combination of process parameters for preparing SiC magnetic-abrasive grains for the magnetic induction-wire sawing process was obtained,which are preparation load of 60 kN,a SiC mesh number of 1,500,a sintering temperature of 1100℃,and a holding time of 4 h. 展开更多
关键词 Wire sawing magnetic abrasives SINTERING phase compositions
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Polycrystalline diamond mini-cubes for sawing applications 被引量:1
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作者 Sung James C. Chang Kuen-liang +2 位作者 Tso Pei-lum Hsu Kai-hung Sung Michael 《金刚石与磨料磨具工程》 CAS 北大核心 2008年第S1期83-87,共5页
Diamond grits are indispensable for sawing granite or concrete.Each year about 1 000 tons of diamond grits are consumed for such purposes.In all cases,mono crystalline diamond is used.However, polycrystalline grits(po... Diamond grits are indispensable for sawing granite or concrete.Each year about 1 000 tons of diamond grits are consumed for such purposes.In all cases,mono crystalline diamond is used.However, polycrystalline grits(polygrits) are generally better performed than mono grits as abrasives.For example,poly grits of cubic boron nitride(e.g.Borazon(?) CBN-550 of Diamond Innovations) can cut faster and they last longer than mono grits(e.g.Borazon(?) CBN-500). Polygrits of alumina(e.g.Cubitron(?) of 3M) also out perform by far glassy grits(e.g.white alumina).For diamond superabrasives,micron polygrits formed by shock waves may polish as fast as mono grits of the same size,but without causing as much scratches due to the presence of smaller sintered grains.The improved performance of poly grits is attributed to their ability to micro chipping that renews the sharp cutting corners from time to time.By contrast,mono grits tend to round off at low cutting force or macro fracture at high cutting force,so they may lose the cutting ability rapidly. For sawing granite with mesh sizes 40/50 or coarser,poly grits of diamond have not been available until recently.In this research,we have made polygrits in mini cube with sizes of 18/20,20/25,and 30/40.Turbo grinders and wire saws were made by brazing both mono grits and polygrits on steel substrates.Cutting performance on granite demonstrated that grinding speed was faster with turbo grinder,and the surface finish was smoother with wire saw for poly grits than mono ones. Polygrits and mono grits of diamond were mixed for comparison(upper left).Polygrits of mini cubes were brazed on the pearl of a wire saw(upper right).Mono diamond grits were brazed on a turbo grinder(bottom diagrams ). 展开更多
关键词 GRANITE sawing diamond grits polygrits TURBO GRINDER wire saw
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Study on swarf when sawing granite with diamond wire 被引量:1
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作者 WU Hairong GUO Hua +1 位作者 ZHAO Ruyi HUANG Hui 《金刚石与磨料磨具工程》 CAS 北大核心 2018年第2期71-77,共7页
The diamond wire-sawing process was developed to cut granite in both quarries and block processing plants.In this paper,swarf was collected from different areas along the sawing arc when sawing three granites.The part... The diamond wire-sawing process was developed to cut granite in both quarries and block processing plants.In this paper,swarf was collected from different areas along the sawing arc when sawing three granites.The particle size distribution and the morphology of the swarf were investigated systematically,along with the swarf formation mechanism in sawing.Granite swarf formation was dominated by transgranular fractures based on the morphology of sawn granite chips and the analysis of sawn chip size.A long cutting arc increased the movement among the swarf,tool,and workpiece,thereby inducing a secondary fracture in the sawn chip. 展开更多
关键词 DIAMOND WIRE sawing GRANITE swarf
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NUMERICAL SIMULATION OF HOT SAWING PROCESS
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作者 X. Hong and K.G. Wu Shanghai University, Shanghai 200072, China 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2000年第2期692-696,共5页
The present paper gives a numerical simulation of hot sawing process by using elastic- plastic finite element method. The simulation is carried out for the moment from the beginning of deformation to the local yield i... The present paper gives a numerical simulation of hot sawing process by using elastic- plastic finite element method. The simulation is carried out for the moment from the beginning of deformation to the local yield in work piece. In order to treat the work hardening on deformation resistance, a correction of stress based on deformation rate is taken into consideration. The calculation results shows, there are two stress peaks both on the lower and upper sides ahead of the tooth tip during the elastic press stage, in which the displacement of tooth is below 0.735*10-6 cm. Following the push of saw tooth and rise of saw load, metal at the corner of filing reaches the yield point and a local plastic area appears,where metal shapes new filing part towards the free surface under the extrusion forces. Meanwhile the stress peaks ahead of tooth tip initial also yield regions. The displacement of saw tooth is between 0.735*10-6cm and 1.274*10-6cm in this stage. With the further push of the saw tooth, metal bounded to tooth tip is torn under the combination of tensile and sheer stress. The slide of metal and its local plastic flow form the extension of filing. Then the saw load rises no longer and static sawing procedure continues. 展开更多
关键词 numerical simulation hot sawing elastic-plastic finite element method
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Characterization of Band Sawing Dusts Generated in Cutting of Multi-crystalline Silicon Ingots 被引量:1
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作者 尹传强 周浪 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2010年第6期948-951,共4页
Physical-chemical characteristics of the band sawing dusts regarding to recovery of pure silicon from them were investigated.The experimental results show 50vol%-60vol% amorphous phases exist in the dusts,which is mos... Physical-chemical characteristics of the band sawing dusts regarding to recovery of pure silicon from them were investigated.The experimental results show 50vol%-60vol% amorphous phases exist in the dusts,which is mostly amorphous silica.The as-received saw dusts are found to form hard agglomerates of larger than 50 microns in diameter.The iron-based inclusions collected by magnets are found to match well with the band saw material in XRD patterns.Weight loss in heating was observed by thermal gravity tests,up to 900 ℃,presumably due to reaction of the amorphous silica with carbon contaminant in the dusts.The saw dusts were variously treated to examine their physical-chemical responses,and the results were also presented. 展开更多
关键词 silicon saw dust kerf loss PICKLING solar energy
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THE WEAR MODES AND MECHANISMS OFDIAMONDS IN SAWING HARD STONE 被引量:1
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作者 Wang Dianjiang(Department of Geology, Central South University of Technology,Changsha 410083, China) 《Journal of Central South University》 SCIE EI CAS 1996年第1期98-100,共3页
Four wear modes and four wear mechanisms of diamonds in sawblades are identified in a study of varied segments damaged in field operation of sawing hard stone. The four wear mechanisms are impactshearing, fatiguing, p... Four wear modes and four wear mechanisms of diamonds in sawblades are identified in a study of varied segments damaged in field operation of sawing hard stone. The four wear mechanisms are impactshearing, fatiguing, pullingout and thermal effects. Surface erosion is the result of thermal effects, while impactshearing and fatiguing lead to macro and microfracture, and pullingout results in wholesale dislodgement of diamonds provided the inequality Fn>M/(μλδ) is satisfied. 展开更多
关键词 diamond WEAR SAW BLADE WEAR mechanism〖J
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Effect of Cutting Speed on Surface Quality by Bandsawing
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作者 于建国 LiangkaiTING 《Journal of Forestry Research》 SCIE CAS CSCD 1997年第4期246-249,共4页
The surface profile behavior of workpieces sawn has been investigated. Six species were sawn under the condi-tion of four different kinds of cutting speed by the band saw. The real surface profile of a sawn workpiecc ... The surface profile behavior of workpieces sawn has been investigated. Six species were sawn under the condi-tion of four different kinds of cutting speed by the band saw. The real surface profile of a sawn workpiecc is composed of twosections, which arc the additivity of the waviness of filtered wave and roughness curve. The roughness of center line avernge aswell as amplitude decrease with the increasing of cutting speed for different kinds of species used in the experiment. 展开更多
关键词 Band saw. CUTTING speed. Profile curve. WAVINESS or filtered wave. ROUGHNESS CURVE ROUGHNESS of center line AVERAGE
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Experimental study of free abrasive wire sawing by using multi-strands wire
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作者 Yao Chunyan Wang Jinsheng +2 位作者 Peng Wei Jin Xin Chen Shijie 《Engineering Sciences》 EI 2013年第6期80-84,共5页
Grains in the slurry can be brought into cutting zone by steel wire with a certain speed to achieve the purpose of removing the workpiece material in the free abrasive wire sawing machining. Because its own of multi- ... Grains in the slurry can be brought into cutting zone by steel wire with a certain speed to achieve the purpose of removing the workpiece material in the free abrasive wire sawing machining. Because its own of multi- strands characteristics, we use it to replace the steel wire to do slicing experiment. In this paper, multi-strands wire is made by seven metal wires and has many grooves on its surface. Compared with steel wire, it can carry more grains into cutting zone which is conducive to improving the slicing efficiency. We do some comparative slic- ing experimcnts by applying multi-strands wire (~b0.25 mm) and steel wire (~b0.25 mm) to cut optical glass (K9). The results show that slicing efficiency and the surface roughness of the workpiece sliced by using multi-strands wire are better than that by using steel wire. but the kerf width of the former is wider than that of the latter in the same experimental conditions. 展开更多
关键词 wire saw free abrasive machining slicing efficiency
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基于压电复合单晶薄膜衬底的B25 SAW双工器性能研究
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作者 陆川 褚梦群 +3 位作者 杜雪松 蒋小龙 潘祺 肖强 《压电与声光》 北大核心 2025年第4期688-692,共5页
针对B25 SAW双工器设计需求,基于压电复合单晶薄膜(POI)衬底开展了仿真、实测与性能对比研究。首先通过有限元仿真和实测对比了42°LT-POI与50°LT-POI谐振器的主模和远端杂波特性;然后对B25双工器的发射端(TX)和接收端(RX)分... 针对B25 SAW双工器设计需求,基于压电复合单晶薄膜(POI)衬底开展了仿真、实测与性能对比研究。首先通过有限元仿真和实测对比了42°LT-POI与50°LT-POI谐振器的主模和远端杂波特性;然后对B25双工器的发射端(TX)和接收端(RX)分别进行了拓扑结构设计;最后通过实测对比了两种不同切型POI衬底的B25双工器电性能参数。结果显示,在其他指标相当的情况下,相较于50°LT-POI,采用42°LT-POI衬底的B25双工器具有更优的远端抑制性能。 展开更多
关键词 POI衬底 B25 SAW双工器
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电化学充氢对不同焊接工艺下管线钢焊接接头氢脆敏感性研究
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作者 王磊 赵红波 +4 位作者 刘斌 毕宗岳 张锦刚 张敏 马宏伟 《焊管》 2025年第5期18-26,共9页
以X52为母材的埋弧焊(SAW)、高频电阻焊(HFW)、钨极氩弧焊(TIG)3种不同焊接工艺的焊缝为研究对象,通过对不同焊接接头进行电化学预充氢、微观组织表征、力学性能测试,结合力学性能下降程度与微观组织分析,探究预充氢时间15 h对焊接接头... 以X52为母材的埋弧焊(SAW)、高频电阻焊(HFW)、钨极氩弧焊(TIG)3种不同焊接工艺的焊缝为研究对象,通过对不同焊接接头进行电化学预充氢、微观组织表征、力学性能测试,结合力学性能下降程度与微观组织分析,探究预充氢时间15 h对焊接接头的氢脆敏感性的影响。结果表明,充氢时间15 h,焊接接头的力学性能均有下降,其氢脆敏感性由小到大依次为HFW焊缝(12.8%)、SAW内焊缝(13.6%)、母材(26.2%)、SAW外焊缝(29.8%)、TIG焊缝(36.5%)。进一步分析表明,未充氢前3种焊缝断口断裂为微孔聚集机制的韧性断裂,而充氢后表现为脆性断裂,且断口断裂源在充氢后出现氧化铝、氧化锰等大尺寸的夹杂物颗粒。SAW内焊缝中的多边形铁素体阻碍了裂纹萌生扩展,可以有效降低敏感性,SAW内焊缝中的小尺寸夹杂物界面在一定程度上也可为氢提供附着点位。HFW焊缝的多边形铁素体组织同样可钝化裂纹尖端防止其进一步扩展,避免局部氢聚集而引发氢压过大,延缓裂纹扩展,有效缓解氢脆。SAW外焊缝、TIG焊缝中主要包含针状铁素体,这种组织结构通常具有较高的强度和韧性,但对氢的扩散和聚集更为敏感。 展开更多
关键词 X52 SAW HFW TIG 氢脆敏感性 氢损伤
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小锤结构对SMR SAW谐振器的杂散抑制研究
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作者 韩捷 帅垚 +2 位作者 罗文博 吴传贵 张万里 《压电与声光》 北大核心 2025年第4期693-697,共5页
为了适应5G新频段的发展,研究了SMR SAW谐振器中小锤结构对谐振器性能的影响。通过二维和三维有限元仿真,研究了谐振器结构参数对性能的影响,并通过流片验证了仿真结果。仿真结果表明,在三小锤结构下,当小锤长度为1.6倍半周期时,谐振器... 为了适应5G新频段的发展,研究了SMR SAW谐振器中小锤结构对谐振器性能的影响。通过二维和三维有限元仿真,研究了谐振器结构参数对性能的影响,并通过流片验证了仿真结果。仿真结果表明,在三小锤结构下,当小锤长度为1.6倍半周期时,谐振器的横向模态杂散较弱。提出一种新型的双小锤加权结构,通过在谐振器的上、下半部分分别设置不同长度的小锤,进一步抑制了带内杂散,提高了谐振器的性能。实验结果表明,双小锤加权结构在抑制带内杂散方面效果明显,谐振器的机电耦合系数和阻抗比得到提升。 展开更多
关键词 SMR SAW 小锤结构 双小锤加权结构 阻抗比 横向模态杂散
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P波段窄带高抑制选频组件性能优化的研究
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作者 龚旭 杨桃均 +2 位作者 李亚飞 蒲志勇 张伟 《压电与声光》 北大核心 2025年第2期268-272,共5页
直插封装(SC04-06)滤波器装配工艺复杂,引脚修剪长度和装配过孔等影响端口阻抗,导致产品一致性差,不利于选频组件批量生产。表面贴装封装(SMD0705B)滤波器的体积小,装配工艺简单,但存在阻带抑制不佳问题。利用三维电磁软件对选频组件的... 直插封装(SC04-06)滤波器装配工艺复杂,引脚修剪长度和装配过孔等影响端口阻抗,导致产品一致性差,不利于选频组件批量生产。表面贴装封装(SMD0705B)滤波器的体积小,装配工艺简单,但存在阻带抑制不佳问题。利用三维电磁软件对选频组件的核心声表面波(SAW)滤波器进行仿真,通过仿真结果和实物对比,验证了滤波器封装对阻带抑制的影响。提出对SMD0705B封装滤波器增加屏蔽罩的方法,实现了P波段窄带选频组件的高阻带抑制。结果表明,选频组件阻带抑制大于40 dBc,带内波纹小于1 dB,幅度一致性小于1 dB,可批量生产。 展开更多
关键词 选频组件 SAW滤波器 阻带抑制 屏蔽罩 窄带
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Thermoelectric properties of silicon and recycled silicon sawing waste 被引量:4
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作者 Ran He Wieland Heyn +11 位作者 Felix Thiel Nicolas Perez Christine Damm Darius Pohl Bernd Rellinghaus Christian Reimann Maximilian Beier Jochen Friedrich Hangtian Zhu Zhifeng Ren Kornelius Nielsch Gabi Schierning 《Journal of Materiomics》 SCIE EI 2019年第1期15-33,共19页
Large-scale-applicable thermoelectric materials should be both self-sustaining,in order to survive longterm duty cycles,and nonpolluting.Among all classes of known thermoelectric materials,these criteria reduce the av... Large-scale-applicable thermoelectric materials should be both self-sustaining,in order to survive longterm duty cycles,and nonpolluting.Among all classes of known thermoelectric materials,these criteria reduce the available candidate pool,leaving silicon as one of the remaining options.Here we first review the thermoelectric properties of various silicon-related materials with respect to their morphologies and microstructures.We then report the thermoelectric properties of silicon sawing wastes recycled from silicon wafer manufacturing.We obtain a high power factor of~32 mWcm1 K2 at 1273 K with 6%phosphorus substitution in the Si crystal,a value comparable to that of phosphorus-doped silicongermanium alloys.Our work suggests the large-scale thermoelectric applicability of recycled silicon that would otherwise contribute to the millions of tons of industrial waste produced by the semiconductor industry. 展开更多
关键词 SILICON THERMOELECTRIC NANOSTRUCTURE Power factor sawing waste
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核电低压20Cr2NiMo焊接转子窄间隙多层焊局部组织与性能研究
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作者 白嘉瑜 王志英 +3 位作者 张敏 董志伟 李代龙 张建勋 《焊管》 2025年第8期98-105,共8页
针对20Cr2NiMo材料采用窄间隙钨极氩弧焊(NG-TIG)打底和窄间隙埋弧焊(NG-SAW)填充的多层多道焊接技术制造的核电低压焊接转子的大厚度焊接接头,通过分层显微组织、显微硬度、微压剪和拉伸试验方法对焊接接头的局部组织性能进行了研究。... 针对20Cr2NiMo材料采用窄间隙钨极氩弧焊(NG-TIG)打底和窄间隙埋弧焊(NG-SAW)填充的多层多道焊接技术制造的核电低压焊接转子的大厚度焊接接头,通过分层显微组织、显微硬度、微压剪和拉伸试验方法对焊接接头的局部组织性能进行了研究。结果表明,转子焊接接头显微组织不均匀,TIG打底焊的焊缝主要由粒状贝氏体、回火马氏体和铁素体组成,HAZ的显微组织主要为马氏体、上贝氏体和较小尺寸的铁素体,SAW填充焊的焊缝主要由针状马氏体、粒状贝氏体以及少量的铁素体构成,HAZ的组织主要由上贝氏体、马氏体和铁素体,以及亚晶界弥散分布的碳化物组成;沿焊接接头厚度方向,各分层的显微硬度和压剪强度分布特征基本一致,在热影响区呈梯度分布,熔合线附近强度、硬度最大,焊缝区平均硬度为262HV_(0.2);整体接头焊缝的平均压剪强度为495 MPa、热影响区为590 MPa;TIG打底焊拉伸性能较差,SAW填充焊的拉伸性能相对均匀,整体焊接接头的平均屈服强度为665 MPa、抗拉强度为751 MPa、伸长率为12.8%、断面收缩率为49.5%,整体焊接接头呈现低强度匹配,匹配系数为0.91。 展开更多
关键词 窄间隙多层焊 TIG SAW 焊接接头 显微组织 局部力学性能
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42°Y-cut LiTaO_(3)/SiO_(2)/α-Si/Si衬底上的具有倾斜电极的无杂散声表面波谐振器
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作者 李世佳 吴宗霖 +1 位作者 钱航宇 杨国敏 《上海航天(中英文)》 2025年第4期53-58,共6页
随着5G技术应用需求的不断增长,迫切需要射频前端模块中声表面波(SAW)滤波器性能的提高。基于压电薄膜的水平剪切(SH)SAW谐振器具有良好的性能。然而,在器件的导纳响应中,可能出现一些横向杂散模态,会导致由SAW谐振器搭建的SAW滤波器出... 随着5G技术应用需求的不断增长,迫切需要射频前端模块中声表面波(SAW)滤波器性能的提高。基于压电薄膜的水平剪切(SH)SAW谐振器具有良好的性能。然而,在器件的导纳响应中,可能出现一些横向杂散模态,会导致由SAW谐振器搭建的SAW滤波器出现严重的带内纹波,不利于器件在5G技术中的应用。本文提出了一种基于42°Y-cut LiTaO_(3)/SiO_(2)/α-Si/Si的多层复合衬底的SH-SAW谐振器,为了研究横模产生,采用有限元法对器件的色散特性以及慢度曲线进行了分析。所制备的具有普通数字间换能器(IDT)的SAW谐振器的机电耦合系数k_(eff)^(2)为11.1%,品质因数Bode-Q_(max)为1317。此外,还制备了一个具有倾斜IDT的SAW谐振器用于抑制横向杂散模式,倾斜角度为6°。实测结果表明:横向杂散模态得到了较好的抑制。 展开更多
关键词 声表面波(SAW)谐振器 多层复合衬底 有限元法(FEM) 横向杂散模态 倾斜叉指换能器
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SAW芯片的质量控制与可靠性测试方法的研究
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作者 艾毅智 杨怡 陈虹羽 《压电与声光》 北大核心 2025年第1期92-97,共6页
随着通信设备向便携化、轻薄化发展,对SAW芯片的小体积、高性能需求逐渐增加,为确保产品交付质量,需要在芯片研发、生产过程中开展有效的质量控制和可靠性测试。通过对SAW芯片故障模式及影响的分析,找出了设计和生产过程存在的风险点,... 随着通信设备向便携化、轻薄化发展,对SAW芯片的小体积、高性能需求逐渐增加,为确保产品交付质量,需要在芯片研发、生产过程中开展有效的质量控制和可靠性测试。通过对SAW芯片故障模式及影响的分析,找出了设计和生产过程存在的风险点,制定质量控制措施并研究可靠性测试方法,提升了芯片合格率,进而验证了质量控制措施和可靠性测试方法的有效性,在业内具有一定的借鉴意义。 展开更多
关键词 SAW芯片 失效模式 质量控制 可靠性
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