A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are...A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are developed as design and mask pattern verification module,database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design and fabrication cycle, workload and cost. With the knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDMS)can be established for monolithic and hybrid device design (not only confined to SAW device).展开更多
Lithium tetraborate(Li_(2)B_(4)O_(7):LBO),as a new piezoelectric crystal,has excellent performance in electro-mechanical voupling coefficient and stability of frequency in cornparison with commercial materials quartz,...Lithium tetraborate(Li_(2)B_(4)O_(7):LBO),as a new piezoelectric crystal,has excellent performance in electro-mechanical voupling coefficient and stability of frequency in cornparison with commercial materials quartz,LiNbO_(3),LiTaO_(3)crystals,so it has become a SAW and BAW devices substrate material with temPerature compensation in the future of wide use.展开更多
文摘A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are developed as design and mask pattern verification module,database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design and fabrication cycle, workload and cost. With the knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDMS)can be established for monolithic and hybrid device design (not only confined to SAW device).
文摘Lithium tetraborate(Li_(2)B_(4)O_(7):LBO),as a new piezoelectric crystal,has excellent performance in electro-mechanical voupling coefficient and stability of frequency in cornparison with commercial materials quartz,LiNbO_(3),LiTaO_(3)crystals,so it has become a SAW and BAW devices substrate material with temPerature compensation in the future of wide use.