Laser etching and laser chemical vapor deposition(LCVD)techniques were proposed for the rapid preparation of high-purity,strongly bonded SiC porous micro-nano-coatings on quartz substrates.The laser serves as an exter...Laser etching and laser chemical vapor deposition(LCVD)techniques were proposed for the rapid preparation of high-purity,strongly bonded SiC porous micro-nano-coatings on quartz substrates.The laser serves as an external driving force for the vertical growth of SiC whiskers,facilitating the formation of a porous nanostructure that resembles coral models found in the macroscopic biological world.The porous nanostructures are beneficial for reducing thermal expansion mismatch and relieving residual stress.It is capable of eliminating the cracks on the surface of SiC coatings as well as enhancing the bonding of SiC coatings with quartz substrates to avoid coating detachment.展开更多
A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-o...A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz substrate, which eliminates the process of depositing the undercladding layer and reduces the power consumption compared with a device fabricated on a silicon substrate. The insertion loss and crosstalk of the integrated device are -5 dB and less than -22 dB, respectively. The power consumption is only 110 mW at the attenuation of 20 dB per channel.展开更多
In order to achieve a high-quality quartz glass substrate and to improve the performance of TiO2 antireflection coating, chemical mechanical polishing （CMP） method was used. During CMP process, some process paramete...In order to achieve a high-quality quartz glass substrate and to improve the performance of TiO2 antireflection coating, chemical mechanical polishing （CMP） method was used. During CMP process, some process parameters including pressure, polishing head speed, platen speed, slurry flow rate, polishing time, and slurry temperature were optimized to obtain lower quartz surface roughness. According to the experiment results, when pressure was 0.75 psi, polishing head speed was 65 rpm, platen speed was 60 rpm, slurry flow rate 150 mL/min, slurry temperature 20℃, and polishing time was 60 s, the material removal rate （MRR） was 56.8 nm/min and the surface roughness （Ra） was 1.93 A （the scanned area was 10 × 10 μm^2）. These results were suitable for the industrial production requirements.展开更多
A simple method for high-yield,chemical vapor deposition(CVD)synthesis of serpentine carbon nanotubes,employing quartz substrates and a molecular cluster catalyst,is described.The growth mechanism is analyzed by contr...A simple method for high-yield,chemical vapor deposition(CVD)synthesis of serpentine carbon nanotubes,employing quartz substrates and a molecular cluster catalyst,is described.The growth mechanism is analyzed by controlled addition of nanoscale barriers,and by mechanical analysis of the curved sections.The serpentine structures are used to study the electrical transport properties of parallel arrays of identical nanotubes,which show three-terminal conductance that scales linearly with the number of nanotube segments.展开更多
The properties of Quasi-longitudinal leaky surface acoustic wave(QLLSAW) on Y-rotated cut quartz substrates were presented. The phase velocity of QLLSAW on the quartz substrate along some orientations can be up from 6...The properties of Quasi-longitudinal leaky surface acoustic wave(QLLSAW) on Y-rotated cut quartz substrates were presented. The phase velocity of QLLSAW on the quartz substrate along some orientations can be up from 6200 m/s to 7100 m/s, circa 100% above that of regular SAW. Both theoretical and experimental results show that QLLSAW propagating along some promising orientations for SAW devices are of small power flow angle and low tem-perature coefficient, for example, along the Euler angle (0°155.25°? 42°?, the measurements of phase velocity and temperature coefficient of delay of QLLSAW are 6201 m/s and 12.9 ppm/℃. The experimental results show that QLLSAW had little absorption by liquid loading on the substrate surface, which proved that the direction of particle motion is the same as wave vector and parallel to the surface of the substrates, i.e., the wave is of the properties of longitudinal wave.展开更多
A Y-band frequency doubler is analyzed and designed with GaAs planar Schottky diode, which is flip-chip solded into a 50 μm thick quartz substrate. Diode embedding impedance is found by full- wave analysis with lumpe...A Y-band frequency doubler is analyzed and designed with GaAs planar Schottky diode, which is flip-chip solded into a 50 μm thick quartz substrate. Diode embedding impedance is found by full- wave analysis with lumped port to model the nonlinear junction for impedance matching without the need of diode equivalent circuit model. All the matching circuit is designed ＂on-chip＂ and the mul- tiplier is self-biasing. To the doubler, a conversion efficiency of 6.1% and output power of 5.4mW are measured at 214GHz with input power of 88mW, and the typical measured efficiency is 4.5% in 200 - 225 GHz.展开更多
To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we emplo...To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we employed a deposition technology with a higher particle kinetic energy,closer substrate adhesion,and denser films,to deposit the coating film on the surface of the quartz capillary glass tube to protect the sensor from corrosion.The sensitivity and accuracy of the Fabry-Perot sensor with carbon film deposition can reach 369 nm/MPa and 0.02%FS,respectively.Meanwhile,the sensor has less hysteresis error and good pressure linearity of more than 0.99999 for repeatable pressure measurement.The downhole practice monitoring data indicated that this fiber-optic sensor exhibited excellent performance and the sputter deposited carbon coating can effectively decrease hydrogen loss.展开更多
基金Funded by the International Science&Technology Cooperation Program of Hubei Province of China(No.2022EHB024)the National Key Research and Development Plan(Nos.2018YFE0103600 and 2021YFB3703100)+1 种基金the National Natural Science Foundation of China(Nos.51872212,51972244,52002075,and 52102066)the 111 Project(No.B13035)。
文摘Laser etching and laser chemical vapor deposition(LCVD)techniques were proposed for the rapid preparation of high-purity,strongly bonded SiC porous micro-nano-coatings on quartz substrates.The laser serves as an external driving force for the vertical growth of SiC whiskers,facilitating the formation of a porous nanostructure that resembles coral models found in the macroscopic biological world.The porous nanostructures are beneficial for reducing thermal expansion mismatch and relieving residual stress.It is capable of eliminating the cracks on the surface of SiC coatings as well as enhancing the bonding of SiC coatings with quartz substrates to avoid coating detachment.
基金Project supported by the National High Technology Research and Development Program of China(Nos.2013AA031402,2011AA010303)the National Natural Science Foundation of China(Nos.61274047,61090390,61275029,61205044,61307034)the Major Science&Technology Specific Project of He’nan Province of China,and the Independent Innovation Foundation of He’nan Province of China
文摘A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz substrate, which eliminates the process of depositing the undercladding layer and reduces the power consumption compared with a device fabricated on a silicon substrate. The insertion loss and crosstalk of the integrated device are -5 dB and less than -22 dB, respectively. The power consumption is only 110 mW at the attenuation of 20 dB per channel.
基金supported by the Natural Science Foundation of Hebei Province(No.E2013202247)the Science and Technology Plan Project of Hebei Province(Nos.Z2010112,10213936)the Hebei Province Department of Education Fund(No.2011128)
文摘In order to achieve a high-quality quartz glass substrate and to improve the performance of TiO2 antireflection coating, chemical mechanical polishing （CMP） method was used. During CMP process, some process parameters including pressure, polishing head speed, platen speed, slurry flow rate, polishing time, and slurry temperature were optimized to obtain lower quartz surface roughness. According to the experiment results, when pressure was 0.75 psi, polishing head speed was 65 rpm, platen speed was 60 rpm, slurry flow rate 150 mL/min, slurry temperature 20℃, and polishing time was 60 s, the material removal rate （MRR） was 56.8 nm/min and the surface roughness （Ra） was 1.93 A （the scanned area was 10 × 10 μm^2）. These results were suitable for the industrial production requirements.
文摘A simple method for high-yield,chemical vapor deposition(CVD)synthesis of serpentine carbon nanotubes,employing quartz substrates and a molecular cluster catalyst,is described.The growth mechanism is analyzed by controlled addition of nanoscale barriers,and by mechanical analysis of the curved sections.The serpentine structures are used to study the electrical transport properties of parallel arrays of identical nanotubes,which show three-terminal conductance that scales linearly with the number of nanotube segments.
文摘The properties of Quasi-longitudinal leaky surface acoustic wave(QLLSAW) on Y-rotated cut quartz substrates were presented. The phase velocity of QLLSAW on the quartz substrate along some orientations can be up from 6200 m/s to 7100 m/s, circa 100% above that of regular SAW. Both theoretical and experimental results show that QLLSAW propagating along some promising orientations for SAW devices are of small power flow angle and low tem-perature coefficient, for example, along the Euler angle (0°155.25°? 42°?, the measurements of phase velocity and temperature coefficient of delay of QLLSAW are 6201 m/s and 12.9 ppm/℃. The experimental results show that QLLSAW had little absorption by liquid loading on the substrate surface, which proved that the direction of particle motion is the same as wave vector and parallel to the surface of the substrates, i.e., the wave is of the properties of longitudinal wave.
基金Supported by the 12th Five-year Defense Pre-research Fund of China(No.51308030509)
文摘A Y-band frequency doubler is analyzed and designed with GaAs planar Schottky diode, which is flip-chip solded into a 50 μm thick quartz substrate. Diode embedding impedance is found by full- wave analysis with lumped port to model the nonlinear junction for impedance matching without the need of diode equivalent circuit model. All the matching circuit is designed ＂on-chip＂ and the mul- tiplier is self-biasing. To the doubler, a conversion efficiency of 6.1% and output power of 5.4mW are measured at 214GHz with input power of 88mW, and the typical measured efficiency is 4.5% in 200 - 225 GHz.
基金by the National Natural Science Foundation of China(No.61605101)the Natural Fund of Shandong Province(Nos.ZR2021MF127 and ZR2020LLZ010)the Peixin Fund of Qilu University of Technology(No.2022PX074)。
文摘To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we employed a deposition technology with a higher particle kinetic energy,closer substrate adhesion,and denser films,to deposit the coating film on the surface of the quartz capillary glass tube to protect the sensor from corrosion.The sensitivity and accuracy of the Fabry-Perot sensor with carbon film deposition can reach 369 nm/MPa and 0.02%FS,respectively.Meanwhile,the sensor has less hysteresis error and good pressure linearity of more than 0.99999 for repeatable pressure measurement.The downhole practice monitoring data indicated that this fiber-optic sensor exhibited excellent performance and the sputter deposited carbon coating can effectively decrease hydrogen loss.
