The effects of three different typical resistivity models（Spitzer, Z＆L and M＆G） on the performance of pulsed inductive acceleration plasma are studied. Numerical results show that their influences decrease with th...The effects of three different typical resistivity models（Spitzer, Z＆L and M＆G） on the performance of pulsed inductive acceleration plasma are studied. Numerical results show that their influences decrease with the increase of the plasma temperature. The significant discriminations among them appear at the plasma temperature lower than 2.5 eV, and the maximum gap of the pulsed inductive plasma accelerated efficiency is approximately 2.5%.Moreover, the pulsed inductive plasma accelerated efficiency is absolutely related to the dynamic impedance parameters, such as voltage, inductance, capacitance and flow rate. However, the distribution of the efficiency as a function of plasma temperature with three resistivity models has nothing to do with the dynamic impedance parameter.展开更多
Pulse inductively coupled plasma has been widely used in the microelectronics industry,but the existence of overshoot phenomenon may affect the uniformity of plasma and generate high-energy ions,which could damage the...Pulse inductively coupled plasma has been widely used in the microelectronics industry,but the existence of overshoot phenomenon may affect the uniformity of plasma and generate high-energy ions,which could damage the chip.The overshoot phenomenon at various spatial locations in pulsed inductively coupled Ar and Ar/CF_(4) discharges is studied in this work.The electron density,effective electron temperature,relative light intensity,and electron energy probability function(EEPF) are measured by using a time-resolved Langmuir probe and an optical probe,as a function of axial and radial locations.At the initial stage of pulse,both electron density and relative light intensity exhibit overshoot phenomenon,i.e.,they first increase to a peak value and then decrease to a convergent value.The overshoot phenomenon gradually decays,when the probe moves away from the coils.Meanwhile,a delay appears in the variation of the electron densities,and the effective electron temperature decreases,which may be related to the reduced strength of electric field at a distance,and the consequent fewer high-energy electrons,inducing limited ionization and excitation rate.The overshoot phenomenon gradually disappears and the electron density decreases,when the probe moves away from reactor centre.In Ar/CF_(4) discharge,the overshoot phenomenon of electron density is weaker than that in the Ar discharge,and the plasma reaches a steady density within a much shorter time,which is probably due to the more ionization channels and lower ionization thresholds in the Ar/CF_(4) plasma.展开更多
A gas injector was designed for the 400 J/pulse prototype of the planar inductive pulsed plasma thruster（IPPT） developed by the National University of Defense Technology（NUDT_IPPTx）.As the gas puff distribution ov...A gas injector was designed for the 400 J/pulse prototype of the planar inductive pulsed plasma thruster（IPPT） developed by the National University of Defense Technology（NUDT_IPPTx）.As the gas puff distribution over the coil surface is critical to the NUDT_IPPTx functioning efficiently, a fast ionization gauge was developed to investigate the neutral gas pressure profiles to seek the critical time when the thruster is ignited. The gauge was calibrated for argon by using a capacitance manometer. Time-resolved pressure profiles have been acquired in the condition of the gas puff mass matching with the discharge energy and the drive coil parameters of the NUDT_IPPTx. It is demonstrated that the gas injector can supply a gas puff with a sufficiently steep（dp/dt？≈？770 kPa s-1） leading and trailing edge, and the gas puff can be compressed against the drive coil as expected. The critical ignition moment is considered to appear at some instant between 525 μs and 650 μs after the valve trigger.展开更多
基金Supported by the Fund of Science and Technology on Vacuum Technology and Physics Laboratory of Lanzhou Institute of Physics under Grant No YSC0715the National Natural Science Foundation of China under Grant No 62601210the Civil Aerospace Technology Research Project under Grant No D010509
文摘The effects of three different typical resistivity models（Spitzer, Z＆L and M＆G） on the performance of pulsed inductive acceleration plasma are studied. Numerical results show that their influences decrease with the increase of the plasma temperature. The significant discriminations among them appear at the plasma temperature lower than 2.5 eV, and the maximum gap of the pulsed inductive plasma accelerated efficiency is approximately 2.5%.Moreover, the pulsed inductive plasma accelerated efficiency is absolutely related to the dynamic impedance parameters, such as voltage, inductance, capacitance and flow rate. However, the distribution of the efficiency as a function of plasma temperature with three resistivity models has nothing to do with the dynamic impedance parameter.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.11675039,11875101,11935005,and 12075049)the Fundamental Research Funds for the Central Universities of China(Grant Nos.DUT18TD06 and DUT20LAB201)。
文摘Pulse inductively coupled plasma has been widely used in the microelectronics industry,but the existence of overshoot phenomenon may affect the uniformity of plasma and generate high-energy ions,which could damage the chip.The overshoot phenomenon at various spatial locations in pulsed inductively coupled Ar and Ar/CF_(4) discharges is studied in this work.The electron density,effective electron temperature,relative light intensity,and electron energy probability function(EEPF) are measured by using a time-resolved Langmuir probe and an optical probe,as a function of axial and radial locations.At the initial stage of pulse,both electron density and relative light intensity exhibit overshoot phenomenon,i.e.,they first increase to a peak value and then decrease to a convergent value.The overshoot phenomenon gradually decays,when the probe moves away from the coils.Meanwhile,a delay appears in the variation of the electron densities,and the effective electron temperature decreases,which may be related to the reduced strength of electric field at a distance,and the consequent fewer high-energy electrons,inducing limited ionization and excitation rate.The overshoot phenomenon gradually disappears and the electron density decreases,when the probe moves away from reactor centre.In Ar/CF_(4) discharge,the overshoot phenomenon of electron density is weaker than that in the Ar discharge,and the plasma reaches a steady density within a much shorter time,which is probably due to the more ionization channels and lower ionization thresholds in the Ar/CF_(4) plasma.
基金supported by National Natural Science Foundation of China(No.51306203)the Natural Science Foundation of Hunan Province(No.2018JJ3592)
文摘A gas injector was designed for the 400 J/pulse prototype of the planar inductive pulsed plasma thruster（IPPT） developed by the National University of Defense Technology（NUDT_IPPTx）.As the gas puff distribution over the coil surface is critical to the NUDT_IPPTx functioning efficiently, a fast ionization gauge was developed to investigate the neutral gas pressure profiles to seek the critical time when the thruster is ignited. The gauge was calibrated for argon by using a capacitance manometer. Time-resolved pressure profiles have been acquired in the condition of the gas puff mass matching with the discharge energy and the drive coil parameters of the NUDT_IPPTx. It is demonstrated that the gas injector can supply a gas puff with a sufficiently steep（dp/dt？≈？770 kPa s-1） leading and trailing edge, and the gas puff can be compressed against the drive coil as expected. The critical ignition moment is considered to appear at some instant between 525 μs and 650 μs after the valve trigger.
