Precision actuation is a foundational technology in high-end equipment domains,where stroke,velocity,and accuracy are critical for processing and/or detection quality,precision in spacecraft flight trajectories,and ac...Precision actuation is a foundational technology in high-end equipment domains,where stroke,velocity,and accuracy are critical for processing and/or detection quality,precision in spacecraft flight trajectories,and accuracy in weapon system strikes.Piezoelectric actuators(PEAs),known for their nanometer-level precision,flexible stroke,resistance to electromagnetic interference,and scalable structure,have been widely adopted across various fields.Therefore,this study focuses on extreme scenarios involving ultra-high precision(micrometer and beyond),minuscule scales,and highly complex operational conditions.It provides a comprehensive overview of the types,working principles,advantages,and disadvantages of PEAs,along with their potential applications in piezo-actuated smart mechatronic systems(PSMSs).To address the demands of extreme scenarios in high-end equipment fields,we have identified five representative application areas:positioning and alignment,biomedical device configuration,advanced manufacturing and processing,vibration mitigation,micro robot system.Each area is further divided into specific subcategories,where we explore the underlying relationships,mechanisms,representative schemes,and characteristics.Finally,we discuss the challenges and future development trends related to PEAs and PSMSs.This work aims to showcase the latest advancements in the application of PEAs and provide valuable guidance for researchers in this field.展开更多
Piezo-actuated stage is a core component in micro-nano manufacturing field.However,the inherent nonlinearity,such as rate-dependent hysteresis,in the piezo-actuated stage severely impacts its tracking accuracy.This st...Piezo-actuated stage is a core component in micro-nano manufacturing field.However,the inherent nonlinearity,such as rate-dependent hysteresis,in the piezo-actuated stage severely impacts its tracking accuracy.This study proposes a direct adaptive control(DAC)method to realize high precision tracking.The proposed controller is designed by a time delay recursive neural network.Compared with those existing DAC methods designed under the general Lipschitz condition,the proposed control method can be easily generalized to the actual systems,which have hysteresis behavior.Then,a hopfield neural network(HNN)estimator is proposed to adjust the parameters of the proposed controller online.Meanwhile,a modular model consisting of linear submodel,hysteresis submodel,and lumped uncertainties is established based on the HNN estimator to describe the piezoactuated stage in this study.Thus,the performance of the HNN estimator can be exhibited visually through the modeling results.The proposed control method eradicates the adverse effects on the control performance arising from the inaccuracy in establishing the offline model and improves the capability to suppress the influence of hysteresis on the tracking accuracy of piezo-actuated stage in comparison with the conventional DAC methods.The stability of the control system is studied.Finally,a series of comparison experiments with a dual neural networks-based data driven adaptive controller are carried out to demonstrate the superiority of the proposed controller.展开更多
V-type ultrasonic linear motor fabricated using a simple punching technique was proposed to utilize as an actuator of small precision machine.The stator of the motor is composed of a thin elastic body and four ceramic...V-type ultrasonic linear motor fabricated using a simple punching technique was proposed to utilize as an actuator of small precision machine.The stator of the motor is composed of a thin elastic body and four ceramics attached to the upper and bottom areas of the body.The ceramics have each direction of polarization.When two harmonic voltages with a 90° phase difference are applied to the ceramics,symmetric and anti-symmetric displacements will generate at the tip to produce an elliptical motion.A finite element analysis(ATILA) was conducted to simulate the motion pattern for the contact tip of the stator.To develop a model that generates the maximum displacement at contact tip,the FEM program was used for various lengths.In addition,an optimal model was chosen by considering the magnitude and shape of the displacement according to changes in frequency.The maximum elliptical displacement is shown by W2L11 model,which has a ratio of ceramic width to length of 1:5.5.However,the displacement of the contact tip is reduced by the bucking phenomenon if the ratio is larger than 1:6.展开更多
基金financially supported by the National Key R&D Program of China(Grant No.2022YFC2204203)the National Natural Science Foundation of China(Grant No.52305107)。
文摘Precision actuation is a foundational technology in high-end equipment domains,where stroke,velocity,and accuracy are critical for processing and/or detection quality,precision in spacecraft flight trajectories,and accuracy in weapon system strikes.Piezoelectric actuators(PEAs),known for their nanometer-level precision,flexible stroke,resistance to electromagnetic interference,and scalable structure,have been widely adopted across various fields.Therefore,this study focuses on extreme scenarios involving ultra-high precision(micrometer and beyond),minuscule scales,and highly complex operational conditions.It provides a comprehensive overview of the types,working principles,advantages,and disadvantages of PEAs,along with their potential applications in piezo-actuated smart mechatronic systems(PSMSs).To address the demands of extreme scenarios in high-end equipment fields,we have identified five representative application areas:positioning and alignment,biomedical device configuration,advanced manufacturing and processing,vibration mitigation,micro robot system.Each area is further divided into specific subcategories,where we explore the underlying relationships,mechanisms,representative schemes,and characteristics.Finally,we discuss the challenges and future development trends related to PEAs and PSMSs.This work aims to showcase the latest advancements in the application of PEAs and provide valuable guidance for researchers in this field.
基金supported by the National Natural Science Foundation of China(Grant Nos.51675228 and 51875237)the Key Project of Science and Technology Development Plan of Jilin Province,China(Grant No.20190303020SF)。
文摘Piezo-actuated stage is a core component in micro-nano manufacturing field.However,the inherent nonlinearity,such as rate-dependent hysteresis,in the piezo-actuated stage severely impacts its tracking accuracy.This study proposes a direct adaptive control(DAC)method to realize high precision tracking.The proposed controller is designed by a time delay recursive neural network.Compared with those existing DAC methods designed under the general Lipschitz condition,the proposed control method can be easily generalized to the actual systems,which have hysteresis behavior.Then,a hopfield neural network(HNN)estimator is proposed to adjust the parameters of the proposed controller online.Meanwhile,a modular model consisting of linear submodel,hysteresis submodel,and lumped uncertainties is established based on the HNN estimator to describe the piezoactuated stage in this study.Thus,the performance of the HNN estimator can be exhibited visually through the modeling results.The proposed control method eradicates the adverse effects on the control performance arising from the inaccuracy in establishing the offline model and improves the capability to suppress the influence of hysteresis on the tracking accuracy of piezo-actuated stage in comparison with the conventional DAC methods.The stability of the control system is studied.Finally,a series of comparison experiments with a dual neural networks-based data driven adaptive controller are carried out to demonstrate the superiority of the proposed controller.
基金Project supported by the Second Stage of Brain Korea 21 ProjectProject(2009-0088570) supported by the National Research Foundation of Korea
文摘V-type ultrasonic linear motor fabricated using a simple punching technique was proposed to utilize as an actuator of small precision machine.The stator of the motor is composed of a thin elastic body and four ceramics attached to the upper and bottom areas of the body.The ceramics have each direction of polarization.When two harmonic voltages with a 90° phase difference are applied to the ceramics,symmetric and anti-symmetric displacements will generate at the tip to produce an elliptical motion.A finite element analysis(ATILA) was conducted to simulate the motion pattern for the contact tip of the stator.To develop a model that generates the maximum displacement at contact tip,the FEM program was used for various lengths.In addition,an optimal model was chosen by considering the magnitude and shape of the displacement according to changes in frequency.The maximum elliptical displacement is shown by W2L11 model,which has a ratio of ceramic width to length of 1:5.5.However,the displacement of the contact tip is reduced by the bucking phenomenon if the ratio is larger than 1:6.
