The method and experimental results of measuring a small vibrating displacement by laser interferometer are introduced in this paper. The dynamic response of a new kind of tiny piezoelectric driver is detected. Result...The method and experimental results of measuring a small vibrating displacement by laser interferometer are introduced in this paper. The dynamic response of a new kind of tiny piezoelectric driver is detected. Results show that this kind of PZN-PZT tiny driver not only has high voltage-displacement sensitivity, but also its frequency response approaches to 1 kHz.Therefore this kind of piezoelectric driver can be used widely in many fields.展开更多
文摘The method and experimental results of measuring a small vibrating displacement by laser interferometer are introduced in this paper. The dynamic response of a new kind of tiny piezoelectric driver is detected. Results show that this kind of PZN-PZT tiny driver not only has high voltage-displacement sensitivity, but also its frequency response approaches to 1 kHz.Therefore this kind of piezoelectric driver can be used widely in many fields.
