A new type of magnetic device was used to replace the conventionalelectro-magnetic field for CZSi (doped with Ge) growth. The device was composed of three permanentmagnetic rings and called PMCZ device. The lines of m...A new type of magnetic device was used to replace the conventionalelectro-magnetic field for CZSi (doped with Ge) growth. The device was composed of three permanentmagnetic rings and called PMCZ device. The lines of magnetic force are horizontally distributed atradial 360℃. Using the ring permanent magnetic field, thermal convection in melt and centrifugalpumping flows due to crystal rotation could be strongly suppressed so that the fluctuations oftemperature and micro-growth rate at solid/liquid interface could be restrained effectively. In thePMCZ condition, the growing environment of SiGe bulk single crystal was similar to the crystalgrowth in space under the condition of micro-gravity. The motion of impurities (Ge, oxygen, etc.)had been controlled by diffusion near the solid/liquid interface. Oxygen concentration became lowerand the distribution of composition became more homogeneous along longitudinal direction and acrossa radial section in the grown SiGe crystal. The mechanism of PMCZ superior to MCZ was alsodiscussed.展开更多
基金This work is financially supported by the National Natural Science Foundation of China (No. 59772037)the Natural Science Foundation of Hebei Province (No. 500016)
文摘A new type of magnetic device was used to replace the conventionalelectro-magnetic field for CZSi (doped with Ge) growth. The device was composed of three permanentmagnetic rings and called PMCZ device. The lines of magnetic force are horizontally distributed atradial 360℃. Using the ring permanent magnetic field, thermal convection in melt and centrifugalpumping flows due to crystal rotation could be strongly suppressed so that the fluctuations oftemperature and micro-growth rate at solid/liquid interface could be restrained effectively. In thePMCZ condition, the growing environment of SiGe bulk single crystal was similar to the crystalgrowth in space under the condition of micro-gravity. The motion of impurities (Ge, oxygen, etc.)had been controlled by diffusion near the solid/liquid interface. Oxygen concentration became lowerand the distribution of composition became more homogeneous along longitudinal direction and acrossa radial section in the grown SiGe crystal. The mechanism of PMCZ superior to MCZ was alsodiscussed.
