In this paper three important characteristics in piezoresistance for the orthotropic material are given and proved theoretically:(1) The piezoresistance on the principal axis of an orthotropic material is independent ...In this paper three important characteristics in piezoresistance for the orthotropic material are given and proved theoretically:(1) The piezoresistance on the principal axis of an orthotropic material is independent of shear strains/stresses, but correlated with the normal strains/stresses only;(2) On the principal axis of material, following relations between piezoconductivity and piezoresistivity exist η iikk =-(γ ii ) -2 ξ iikk =-(ρ ii ) 2ξ iikk λ iikk =-(γ ii ) -2 χ iikk =-(ρ ii ) 2χ iikk (3) A laminate composed of orthotropic laminae in different orientations is orthotropic for its average/effective properties.展开更多
In order to improve the piezoresistance theory of polysilicon, based on the tunneling piezoresistance model, using the mechanisms of approximate valence band equation and shifts of the hole transfer and hole con- duct...In order to improve the piezoresistance theory of polysilicon, based on the tunneling piezoresistance model, using the mechanisms of approximate valence band equation and shifts of the hole transfer and hole con- duction mass by stress, a novel algorithm for the piezoresistance coefficients of p-type polysilicon is presented. It proposes three fundamental piezoresistance coefficients π11,π12 and π44 of the grain neutral and grain boundary regions, separately. With those piezoresistance coefficients, the gauge factors of the p-type polysilicon nanofilm and the p-type common polysilicon film are calculated, and then the plots of the gauge factor as a function of doping concentration are given, which are consistent with the experimental results.展开更多
The ruthenium oxide nanoparticles with size less than 20 nm were fabricated by annealing the metallic ruthenium nanoparticles in air,which were synthesized by using the thermal reduction in the polyol solution.The rut...The ruthenium oxide nanoparticles with size less than 20 nm were fabricated by annealing the metallic ruthenium nanoparticles in air,which were synthesized by using the thermal reduction in the polyol solution.The rutile structure of the ruthenium oxide was proved by using transmission electron microscopy(TEM)and X-ray photoelectron spectroscopy(XPS).The oxide has good electron conductivity. The surface of the ruthenium oxide was modified by a vinyl silane coupling agent.The assembling of the silane to the oxide surface was proved by Infrared(IR)absorption spectroscopy.By mixing the nanoparticles with poly(methylvinylsiloxane)(PMVS)silicone rubber,a composite filled with dispersive conducting phase was fabricated.The temperature dependent conductivity shows that the electron transportation through composite is mainly dominated by tunneling.The measurement of piezoresistance shows that the composite at low strain has high piezoresistance repeatability.The 3D reconstruction images of the composite filled with carbon black or ruthenium oxide show that the aggregation of the nanoparticles differs much for two composites.The narrow distribution range of the particle size was thought to be the main factor for the high piezoresistance recurrence.展开更多
With an experimental method developed for measuring the electrical resistance of met-als in diamond anvil cell (DAC), we measured the pressure dependence of resistance ofmanganin up to 18.5 GPa. The relationship betwe...With an experimental method developed for measuring the electrical resistance of met-als in diamond anvil cell (DAC), we measured the pressure dependence of resistance ofmanganin up to 18.5 GPa. The relationship between the resistance of manganin and thepressure is linear below 13 GPa. Another linear relationship is obtained in the range of 13-18.5 GPa. A 'turning point' of linear relation is formed at 13 GPa. The piezoresistancecoefficient of manganin measured is 0.024 GPa_1 below 13 GPa, which is in good agreementwith those given in literature. A new resistance-pressure relation is obtained in the rangeof 13～18.5 GPa. with the piezoresistance coefficient of 0.020 GPa^(-1).展开更多
A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistance on the sensitive film. ...A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistance on the sensitive film. In the proposed method, we take the Ritz method as an initial theoretical model to calculate the rate of piezoresistance ΔR/R through an integral （the closed area Ω where the surface piezoresistance of the film lies as the integral area and the product of stress σ and piezoresistive coefficient π as the integral object） and compare the theoretical values with the experimental results. Compared with the traditional method, this novel calculation method is more accurate when applied to calculating the value of the silicon piezoresistance on the sensitive film of an SOI pieoresistive pressure sensor.展开更多
A rapidly growing field is piezoresistive sensor for accurate respiration rate monitoring to suppress the worldwide respiratory illness.However,a large neglected issue is the sensing durability and accuracy without in...A rapidly growing field is piezoresistive sensor for accurate respiration rate monitoring to suppress the worldwide respiratory illness.However,a large neglected issue is the sensing durability and accuracy without interference since the expiratory pressure always coupled with external humidity and temperature variations,as well as mechanical motion artifacts.Herein,a robust and biodegradable piezoresistive sensor is reported that consists of heterogeneous MXene/cellulose-gelation sensing layer and Ag-based interdigital electrode,featuring customizable cylindrical interface arrangement and compact hierarchical laminated architecture for collectively regulating the piezoresistive response and mechanical robustness,thereby realizing the long-term breath-induced pressure detection.Notably,molecular dynamics simulations reveal the frequent angle inversion and reorientation of MXene/cellulose in vacuum filtration,driven by shear forces and interfacial interactions,which facilitate the establishment of hydrogen bonds and optimize the architecture design in sensing layer.The resultant sensor delivers unprecedented collection features of superior stability for off-axis deformation(0-120°,~2.8×10^(-3) A)and sensing accuracy without crosstalk(humidity 50%-100%and temperature 30-80).Besides,the sensor-embedded mask together with machine learning models is achieved to train and classify the respiration status for volunteers with different ages(average prediction accuracy~90%).It is envisioned that the customizable architecture design and sensor paradigm will shed light on the advanced stability of sustainable electronics and pave the way for the commercial application in respiratory monitory.展开更多
The development of intrinsically conductive piezoresistive sensors with high strain tolerance has garnered significant interest.While elastomeric polymers exhibit excellent strain capabilities,their utility in sensing...The development of intrinsically conductive piezoresistive sensors with high strain tolerance has garnered significant interest.While elastomeric polymers exhibit excellent strain capabilities,their utility in sensing applications has been limited by inherent challenges such as high electrical resistivity,poor aging resistance,and interfacial incompatibility.To address these limitations,hydroxyl-terminated polybutadiene(HTPB)-based polyurethane was chemically modified with acetylferrocene-polyaniline conductive moieties to enhance charge transport properties.Remarkably,this covalent functionalization endowed the resulting ferrocene-polyaniline hybrid polyurethane(FPHP)with a conductivity of2.33 n A at 1 V bias while preserving piezoresistive functionality.The FPHP demonstrated exceptional mechanical-electrical performance,achieving 254% elongation at break with strain-dependent gauge factors of 7.28(0%-12.5% strain,R^(2)=0.9504)and 19.66(12.5%-35.0% strain,R^(2)=0.9929).Further characterization revealed a rapid 0.60 s response time and stability over 3500 strain-release cycles at compression strain,underscoring its durability under repetitive loading.The FPHP sensor was capable of monitoring various human movements and recognizing writing signals.These advances establish a materials design paradigm for fabricating flexible sensors that synergistically integrate high deformability,tunable sensitivity,and robust operational stability,positioning FPHP as a promising candidate for next-generation wearable electronics and soft robotics.展开更多
The Design and manufacturing of a noble piezoresistive pressure sensor(PS) for subtle pressures(<1 kPa) were presented. Meanwhile, in the studies conducted in the field of pressure sensors, the measurement of subtl...The Design and manufacturing of a noble piezoresistive pressure sensor(PS) for subtle pressures(<1 kPa) were presented. Meanwhile, in the studies conducted in the field of pressure sensors, the measurement of subtle pressures has received less attention. The limitations in the inherent gauge factor in silicon, have led to the development of polymer and composite resistive sensitive elements. However,in the development of resistance sensing elements, the structure of composite elements with reinforcement core has not been used. The proposed PS had a composite sandwich structure consisting of a nanocomposite graphene layer covered by layers of PDMS at the bottom and on the top coupled with a polyimide(PI) core. Various tests were performed to analyze the PS. The primary design target was improved sensitivity, with a finite-element method(FEM) utilized to simulate the stress profile over piezoresistive elements and membrane deflection at various pressures. The PS manufacturing process is based on Laser-engraved graphene(LEG) technology and PDMS casting. Experimental data indicated that the manufactured PS exhibits a sensitivity of 67.28 mV/kPa for a pressure range of 30-300 Pa in ambient temperature.展开更多
Flexible piezoresistive sensors based on biomimetic microstructures are prospective for broad application in motion monitoring.However,the design and preparation processes of most biomimetic microstructures in the exi...Flexible piezoresistive sensors based on biomimetic microstructures are prospective for broad application in motion monitoring.However,the design and preparation processes of most biomimetic microstructures in the existing studies are complicated,and there are few studies on pore size control.Herein,the porous structure of human bones was used as a biomimetic prototype,and optimally designed by creating a theoretical equivalent sensor model and a finite element model.Soluble raw materials such as sugar and salt in different particle sizes were pressed into porous templates.Based on the template method,porous structures in different pore sizes were prepared using polydimethylsiloxane(PDMS)polymer as the substrate.On this basis,graphene oxide conductive coating was prepared with the modified Hummers method and then deposited via dip coating onto the substrate.Finally,a PDMS-based porous structure biomimetic flexible piezoresistive sensor was developed.Mechanically,the deformation of the sensor under the same load increased with the pore size rising from 0.3 to 1.5 mm.Electrically,the resistance rang of the sensor was enlarged as the pore size rose.The resistance variation rates of samples with pore sizes of 0.3,1.0,and 1.5 mm at approximately the 200th cycle were 63%,79%,and 81%,respectively;at the 500th cycle,these values were 63%,77%,and 79%;and at the 1000th cycle,they stabilized at 63%,74%,and 76%.These results indicate that the fabricated sensor exhibits high stability and fatigue resistance.At the pressure of 0–25 kPa,the sensitivity rose from 0.0688 to 0.1260 kPa−1,and the performance was enhanced by 83%.After 1,000 cycles of compression testing,the signal output was stable,and no damage was caused to the substrate.Further application tests showed the biomimetic sensor accurately and effectively identified human joint motions and gestures,and has potential application value in human motion monitoring.展开更多
Flexible polymer-based foam sensors have significant potential for application in wearable electronics and motion monitoring.However,these prospects are hindered by the complex and unenvironmentally friendly manufactu...Flexible polymer-based foam sensors have significant potential for application in wearable electronics and motion monitoring.However,these prospects are hindered by the complex and unenvironmentally friendly manufacturing processes.In this study,we employed melt blending and supercritical carbon dioxide foaming to fabricate an ethylene-vinyl acetate copolymer(EVA)/low-density polyethylene(LDPE)/carbon nanotube(CNT)piezoresistive foam sensor.The cross-linking agent bis(tert-butyldioxyisopropyl)benzene and the conductive filler CNT were incorporated into the EVA/LDPE composite,successfully achieving a chemically cross-linked and physically entangled composite structure that significantly enhanced the storage modulus and complex viscosity.Additionally,the compressive strength of EVA/LDPE/CNT foam with 10 parts per hundred rubber(phr)CNT reached 1.37 MPa at 50%compression,marking a 340%increase compared to the 0.31 MPa of the CNT-free sample.Furthermore,the EVA/LDPE/CNT composite foams,which incorporated 10 phr CNT,were prepared under specific foaming conditions,resulting in an ultra-low density of 0.11 g/cm^(3) and a higher sensitivity,with a gauge factor of–2.3.The piezoresistive foam sensors developed in this work could accurately detect human motion,thereby expanding their applications in the field of piezoresistive foam sensors and providing an effective strategy for the advancement of high-performance piezoresistive foam sensors.展开更多
Flexible piezoresistive sensors based on carbon nanomaterials have attracted significant attention with regard to their application to wearable electronics.The enhanced performance of these sensors is primarily due to...Flexible piezoresistive sensors based on carbon nanomaterials have attracted significant attention with regard to their application to wearable electronics.The enhanced performance of these sensors is primarily due to the integration of microstructures and conductive coatings.In this study,a flexible sandwich-shaped piezoresistive pressure sensor is fabricated by adopting microstructured electrodes and a porous sensing layer of carbon nanocomposite.The microtextured electrodes are obtained from a template by three-dimensional printing using digital light processing(DLP),and the porous structure is obtained by scarification of an NaCl crystal template.Multiwalled carbon nanotubes(MWCNTs)and graphene nanoparticles(GNPs),composited with polydimethylsiloxane and silica(ESSIL 296),are used to fabricate the functional structures,including the upper and lower electrode layers and a sandwiched porous sensing layer.The sensor exhibits a rapid response and recovery speed(-80 ms),a high sensitivity(0.437 kPa^(−1))within a range of 0–1.08 kPa,and excellent stability.In addition,such sensors demonstrate potential applications for finger motion monitoring and information encryption.展开更多
The relaxation oscillation characteristics of a resonant tunneling diode （RTD） with applied pressure are reported. The oscillation circuit is simulated and designed by Pspice 8. 0, and the measured oscillation frequ...The relaxation oscillation characteristics of a resonant tunneling diode （RTD） with applied pressure are reported. The oscillation circuit is simulated and designed by Pspice 8. 0, and the measured oscillation frequency is up to 200kHz. Using molecular beam epitaxy （MBE） ,AIAs/lnx Ga1-x As/GaAs double barrier resonant tunneling structures （DBRTS） are grown on （100） semi-insulated （SI） GaAs substrate,and the RTD is processed by Au/Ge/Ni/Au metallization and an airbridge structure. Because of the piezoresistive effect of RTD,with Raman spectrum to measure the applied pressure, the relaxation oscillation characteristics have been studied, which show that the relaxation oscillation frequency has approxi- mately a - 17.9kHz/MPa change.展开更多
Resonant tunnelling diodes （RTDs） have negative differential resistance effect, and the current-voltage characteristics change as a function of external stress, which is regarded as mesc-piezoresistance effect of RT...Resonant tunnelling diodes （RTDs） have negative differential resistance effect, and the current-voltage characteristics change as a function of external stress, which is regarded as mesc-piezoresistance effect of RTDs. In this paper, a novel micro-accelerometer based on AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs RTDs is designed and fabricated to be a four-beam-mass structure, and an RTD-Wheatstone bridge measurement system is established to test the basic properties of this novel accelerometer. According to the experimental results, the sensitivity of the RTD based micro-accelerometer is adjustable within a range of 3 orders when the bias voltage of the sensor changes. The largest sensitivity of this RTD based miero-accelerometer is 560.2025 mV/g which is about 10 times larger than that of silicon based micro piezoresistive accelerometer, while the smallest one is 1.49135 mV/g.展开更多
It is necessary to study the validation of strength models under planar shock loading in view of the fact that strength models for metals obtained at moderate strain rates are often used in the numerical simulations o...It is necessary to study the validation of strength models under planar shock loading in view of the fact that strength models for metals obtained at moderate strain rates are often used in the numerical simulations of shock wave phenomena. The variations of longitudinal stress, transverse stress and yield strength of oxygen-free high conductance （OFHC） copper with time under planar shock loading are obtained by using the manganin stress gauges and compared with the predicted results by the constructed seven constitutive models based on Y/G=constant and on G/B=constant （Y the yield strength, G the shear modulus, B the bulk modulus）, respectively. It seems that the pressure, density, temperature and plastic strain dependence of the yield strength for OFHC copper under planar shock loading is essential to the constitutive description.展开更多
This paper presents a smart compensation system based on MCA7707 (a kind of signal processor). The li near errors and high order errors of a sensor (especially piezoresistive sensor) can be corrected by using this s...This paper presents a smart compensation system based on MCA7707 (a kind of signal processor). The li near errors and high order errors of a sensor (especially piezoresistive sensor) can be corrected by using this system. It can optimize the process of piezoresi stive sensor calibration and compensation, then, a total error factor within 0.2 % of the sensor′s repeatability errors is obtained. Data are recorded and coeff icients are determined automatically by this system, thus, the sensor compensati on is simplified greatly. For operating easily, a wizard compensation program is designed to correct every error and to get the optimum compensation.展开更多
Magnetron-sputtered MoS_(2) has applications in piezoresistive functional materials research owing to its unique nanostructure.However,the controlled incorporation of sulfur vacancies and realization of en-hanced piez...Magnetron-sputtered MoS_(2) has applications in piezoresistive functional materials research owing to its unique nanostructure.However,the controlled incorporation of sulfur vacancies and realization of en-hanced piezoresistive performance remain significant challenges.In this work,the direct growth of large-area MoS_(2) films with tunable sulfur vacancy concentrations was successfully achieved via magnetron sputtering at various temperatures.Microstructural analysis revealed that the application of strain al-tered the number of conductive channels between the vertical MoS_(2) nanosheets,changing the measured resistance and leading to excellent piezoresistive properties.More importantly,the unsaturated electrons due to the sulfur vacancies increased the in-plane carrier concentration of the MoS_(2)nanosheets.A de-position temperature of 50℃afforded the highest concentrations of sulfur vacancies and carriers.These MoS_(2)films possessed a carrier concentration of 6.58×10^(17)cm^(−3),which was 40.9%higher than that ob-tained at 150°C,and displayed superior piezoresistive performance.The films exhibited high gage factors of 2.66 and 23.22 under tensile and compressive strain of≤0.29%,respectively.These values were 118%and 323%higher,respectively,than those obtained for films deposited at 150°C.This work provides an effective route for modulating and mass producing MoS_(2)-based piezoresistive electronic devices.展开更多
This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus ...This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus effectively optimizing the response frequency bandwidth.Owing to the high stress concentration on the dual-cantilever integrated with a fully sensitive piezoresistive Wheatstone bridge,a high sensitivity to acceleration is achieved.In addition,the dual-cantilever accelerometer is fabricated using a specifically developed low-cost and high-yield(111)-silicon single-side bulk-micromachining process.The test results show that the proposed dualcantilever accelerometer exhibits a sensitivity of 0.086—0.088 mV/g/3.3 V and a nonlinearity of±(0.09%—0.23%)FS(full-scale).Based on dynamic characterization,an adequate frequency bandwidth of 2.64 kHz is verified.Furthermore,a resonant frequency of 4.388 kHz is measured,and a low quality factor(Q)of 7.62 is obtained,which agrees well with the design for air-damping modulation.The achieved high performance renders the proposed dual-cantilever accelerometer promising in applications such as automotive and consumer electronics.展开更多
Nanosensitive mechanical microprobes with CMOS transistors, inverters, inverters cascades and ring oscillators, integrated on the thin silicon cantilevers are presented. Mechanical stress shifts linear, steep switchin...Nanosensitive mechanical microprobes with CMOS transistors, inverters, inverters cascades and ring oscillators, integrated on the thin silicon cantilevers are presented. Mechanical stress shifts linear, steep switching fragment of the inverters’ electrical characteristics. Microprobes were fabricated with use of the standard CMOS technology (3.5 μm design rules, one level polysilicon gate and one level of the metal interconnections) and relief MEMS technique. Control of the silicon cantilever thickness was satisfactory in the range above the few micrometers. Several computer simulations were done to analyze and optimize transistors location on the cantilever, in respect to the mechanical stress distribution. Results of the microprobes electromechanical tests confirm high deflection sensitivity 1.2 - 1.8 mV/nm and force sensitivity 2.0 - 2.4 mV/nN, both in nano ranges. Microprobes, with the ring oscillators revealed sensitivities 5 - 8 Hz/nm. These microprobes seem to be appropriate for applications in precise chemical and biochemical sensing.展开更多
Electronic skin(e-skin) and flexible wearable devices are currently being developed with broad application prospects. Transforming electronic skin(e-skin) into true ¨skin¨is the ultimate goal. Tactile sensin...Electronic skin(e-skin) and flexible wearable devices are currently being developed with broad application prospects. Transforming electronic skin(e-skin) into true ¨skin¨is the ultimate goal. Tactile sensing is a fundamental function of skin and the development of high-performance flexible pressure sensors is necessary to realize thus. Many reports on flexible pressure sensors have been published in recent years,including numerous studies on improving sensor performance, and in particular, sensitivity. In addition,a number of studies have investigated self-healing materials, multifunctional sensing, and so on. Here,we review recent developments in flexible pressure sensors. First, working principles of flexible pressure sensors, including piezoresistivity, capacitance, and piezoelectricity, are introduced, as well as working mechanisms such as triboelectricity. Then studies on improving the performance of piezoresistive and capacitive flexible pressure sensors are discussed, in addition to other important aspects of this intriguing research field. Finally, we summarize future challenges in developing novel flexible pressure sensors.展开更多
Flexible tactile sensors have broad applications in human physiological monitoring,robotic operation and human-machine interaction.However,the research of wearable and flexible tactile sensors with high sensitivity,wi...Flexible tactile sensors have broad applications in human physiological monitoring,robotic operation and human-machine interaction.However,the research of wearable and flexible tactile sensors with high sensitivity,wide sensing range and ability to detect three-dimensional(3D)force is still very challenging.Herein,a flexible tactile electronic skin sensor based on carbon nanotubes(CNTs)/polydimethylsiloxane(PDMS)nanocomposites is presented for 3D contact force detection.The 3D forces were acquired from combination of four specially designed cells in a sensing element.Contributed from the double-sided rough porous structure and specific surface morphology of nanocomposites,the piezoresistive sensor possesses high sensitivity of 12.1 kPa?1 within the range of 600 Pa and 0.68 kPa?1 in the regime exceeding 1 kPa for normal pressure,as well as 59.9 N?1 in the scope of<0.05 N and>2.3 N?1 in the region of<0.6 N for tangential force with ultra-low response time of 3.1 ms.In addition,multi-functional detection in human body monitoring was employed with single sensing cell and the sensor array was integrated into a robotic arm for objects grasping control,indicating the capacities in intelligent robot applications.展开更多
文摘In this paper three important characteristics in piezoresistance for the orthotropic material are given and proved theoretically:(1) The piezoresistance on the principal axis of an orthotropic material is independent of shear strains/stresses, but correlated with the normal strains/stresses only;(2) On the principal axis of material, following relations between piezoconductivity and piezoresistivity exist η iikk =-(γ ii ) -2 ξ iikk =-(ρ ii ) 2ξ iikk λ iikk =-(γ ii ) -2 χ iikk =-(ρ ii ) 2χ iikk (3) A laminate composed of orthotropic laminae in different orientations is orthotropic for its average/effective properties.
基金supported by the National Natural Science Foundation of China(No.61372019)
文摘In order to improve the piezoresistance theory of polysilicon, based on the tunneling piezoresistance model, using the mechanisms of approximate valence band equation and shifts of the hole transfer and hole con- duction mass by stress, a novel algorithm for the piezoresistance coefficients of p-type polysilicon is presented. It proposes three fundamental piezoresistance coefficients π11,π12 and π44 of the grain neutral and grain boundary regions, separately. With those piezoresistance coefficients, the gauge factors of the p-type polysilicon nanofilm and the p-type common polysilicon film are calculated, and then the plots of the gauge factor as a function of doping concentration are given, which are consistent with the experimental results.
基金Supported by the National Natural Science Foundation of China(Grant No.10576008)
文摘The ruthenium oxide nanoparticles with size less than 20 nm were fabricated by annealing the metallic ruthenium nanoparticles in air,which were synthesized by using the thermal reduction in the polyol solution.The rutile structure of the ruthenium oxide was proved by using transmission electron microscopy(TEM)and X-ray photoelectron spectroscopy(XPS).The oxide has good electron conductivity. The surface of the ruthenium oxide was modified by a vinyl silane coupling agent.The assembling of the silane to the oxide surface was proved by Infrared(IR)absorption spectroscopy.By mixing the nanoparticles with poly(methylvinylsiloxane)(PMVS)silicone rubber,a composite filled with dispersive conducting phase was fabricated.The temperature dependent conductivity shows that the electron transportation through composite is mainly dominated by tunneling.The measurement of piezoresistance shows that the composite at low strain has high piezoresistance repeatability.The 3D reconstruction images of the composite filled with carbon black or ruthenium oxide show that the aggregation of the nanoparticles differs much for two composites.The narrow distribution range of the particle size was thought to be the main factor for the high piezoresistance recurrence.
文摘With an experimental method developed for measuring the electrical resistance of met-als in diamond anvil cell (DAC), we measured the pressure dependence of resistance ofmanganin up to 18.5 GPa. The relationship between the resistance of manganin and thepressure is linear below 13 GPa. Another linear relationship is obtained in the range of 13-18.5 GPa. A 'turning point' of linear relation is formed at 13 GPa. The piezoresistancecoefficient of manganin measured is 0.024 GPa_1 below 13 GPa, which is in good agreementwith those given in literature. A new resistance-pressure relation is obtained in the rangeof 13～18.5 GPa. with the piezoresistance coefficient of 0.020 GPa^(-1).
文摘A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistance on the sensitive film. In the proposed method, we take the Ritz method as an initial theoretical model to calculate the rate of piezoresistance ΔR/R through an integral （the closed area Ω where the surface piezoresistance of the film lies as the integral area and the product of stress σ and piezoresistive coefficient π as the integral object） and compare the theoretical values with the experimental results. Compared with the traditional method, this novel calculation method is more accurate when applied to calculating the value of the silicon piezoresistance on the sensitive film of an SOI pieoresistive pressure sensor.
基金supported by the National Natural Science Foundation of China(22074072,22274083,52376199)the Shandong Provincial Natural Science Foundation(ZR2023LZY005)+1 种基金the Exploration Project of the State Key Laboratory of BioFibers and EcoTextiles of Qingdao University(TSKT202101)the Fundamental Research Funds for the Central Universities(2022BLRD13,2023BLRD01).
文摘A rapidly growing field is piezoresistive sensor for accurate respiration rate monitoring to suppress the worldwide respiratory illness.However,a large neglected issue is the sensing durability and accuracy without interference since the expiratory pressure always coupled with external humidity and temperature variations,as well as mechanical motion artifacts.Herein,a robust and biodegradable piezoresistive sensor is reported that consists of heterogeneous MXene/cellulose-gelation sensing layer and Ag-based interdigital electrode,featuring customizable cylindrical interface arrangement and compact hierarchical laminated architecture for collectively regulating the piezoresistive response and mechanical robustness,thereby realizing the long-term breath-induced pressure detection.Notably,molecular dynamics simulations reveal the frequent angle inversion and reorientation of MXene/cellulose in vacuum filtration,driven by shear forces and interfacial interactions,which facilitate the establishment of hydrogen bonds and optimize the architecture design in sensing layer.The resultant sensor delivers unprecedented collection features of superior stability for off-axis deformation(0-120°,~2.8×10^(-3) A)and sensing accuracy without crosstalk(humidity 50%-100%and temperature 30-80).Besides,the sensor-embedded mask together with machine learning models is achieved to train and classify the respiration status for volunteers with different ages(average prediction accuracy~90%).It is envisioned that the customizable architecture design and sensor paradigm will shed light on the advanced stability of sustainable electronics and pave the way for the commercial application in respiratory monitory.
文摘The development of intrinsically conductive piezoresistive sensors with high strain tolerance has garnered significant interest.While elastomeric polymers exhibit excellent strain capabilities,their utility in sensing applications has been limited by inherent challenges such as high electrical resistivity,poor aging resistance,and interfacial incompatibility.To address these limitations,hydroxyl-terminated polybutadiene(HTPB)-based polyurethane was chemically modified with acetylferrocene-polyaniline conductive moieties to enhance charge transport properties.Remarkably,this covalent functionalization endowed the resulting ferrocene-polyaniline hybrid polyurethane(FPHP)with a conductivity of2.33 n A at 1 V bias while preserving piezoresistive functionality.The FPHP demonstrated exceptional mechanical-electrical performance,achieving 254% elongation at break with strain-dependent gauge factors of 7.28(0%-12.5% strain,R^(2)=0.9504)and 19.66(12.5%-35.0% strain,R^(2)=0.9929).Further characterization revealed a rapid 0.60 s response time and stability over 3500 strain-release cycles at compression strain,underscoring its durability under repetitive loading.The FPHP sensor was capable of monitoring various human movements and recognizing writing signals.These advances establish a materials design paradigm for fabricating flexible sensors that synergistically integrate high deformability,tunable sensitivity,and robust operational stability,positioning FPHP as a promising candidate for next-generation wearable electronics and soft robotics.
文摘The Design and manufacturing of a noble piezoresistive pressure sensor(PS) for subtle pressures(<1 kPa) were presented. Meanwhile, in the studies conducted in the field of pressure sensors, the measurement of subtle pressures has received less attention. The limitations in the inherent gauge factor in silicon, have led to the development of polymer and composite resistive sensitive elements. However,in the development of resistance sensing elements, the structure of composite elements with reinforcement core has not been used. The proposed PS had a composite sandwich structure consisting of a nanocomposite graphene layer covered by layers of PDMS at the bottom and on the top coupled with a polyimide(PI) core. Various tests were performed to analyze the PS. The primary design target was improved sensitivity, with a finite-element method(FEM) utilized to simulate the stress profile over piezoresistive elements and membrane deflection at various pressures. The PS manufacturing process is based on Laser-engraved graphene(LEG) technology and PDMS casting. Experimental data indicated that the manufactured PS exhibits a sensitivity of 67.28 mV/kPa for a pressure range of 30-300 Pa in ambient temperature.
基金supported by the National Natural Science Foundation of China(52175270)the Project of Scientifc and Technological Development Plan of Jilin Province(20220508130RC)+3 种基金the Science and Technology Development Program of Jilin Province(YDZJ202501ZYTS370)the Scientific Research Project of Education Department of Jilin Province(JJKH20251196KJ)the Scientific Research Project of Education Department of Jilin Province(JJKH20251195KJ)the Key Project of State Key Laboratory of Changchun City(23GZZ14).
文摘Flexible piezoresistive sensors based on biomimetic microstructures are prospective for broad application in motion monitoring.However,the design and preparation processes of most biomimetic microstructures in the existing studies are complicated,and there are few studies on pore size control.Herein,the porous structure of human bones was used as a biomimetic prototype,and optimally designed by creating a theoretical equivalent sensor model and a finite element model.Soluble raw materials such as sugar and salt in different particle sizes were pressed into porous templates.Based on the template method,porous structures in different pore sizes were prepared using polydimethylsiloxane(PDMS)polymer as the substrate.On this basis,graphene oxide conductive coating was prepared with the modified Hummers method and then deposited via dip coating onto the substrate.Finally,a PDMS-based porous structure biomimetic flexible piezoresistive sensor was developed.Mechanically,the deformation of the sensor under the same load increased with the pore size rising from 0.3 to 1.5 mm.Electrically,the resistance rang of the sensor was enlarged as the pore size rose.The resistance variation rates of samples with pore sizes of 0.3,1.0,and 1.5 mm at approximately the 200th cycle were 63%,79%,and 81%,respectively;at the 500th cycle,these values were 63%,77%,and 79%;and at the 1000th cycle,they stabilized at 63%,74%,and 76%.These results indicate that the fabricated sensor exhibits high stability and fatigue resistance.At the pressure of 0–25 kPa,the sensitivity rose from 0.0688 to 0.1260 kPa−1,and the performance was enhanced by 83%.After 1,000 cycles of compression testing,the signal output was stable,and no damage was caused to the substrate.Further application tests showed the biomimetic sensor accurately and effectively identified human joint motions and gestures,and has potential application value in human motion monitoring.
基金supported by the National Natural Science Foundation of China(No.52473026)。
文摘Flexible polymer-based foam sensors have significant potential for application in wearable electronics and motion monitoring.However,these prospects are hindered by the complex and unenvironmentally friendly manufacturing processes.In this study,we employed melt blending and supercritical carbon dioxide foaming to fabricate an ethylene-vinyl acetate copolymer(EVA)/low-density polyethylene(LDPE)/carbon nanotube(CNT)piezoresistive foam sensor.The cross-linking agent bis(tert-butyldioxyisopropyl)benzene and the conductive filler CNT were incorporated into the EVA/LDPE composite,successfully achieving a chemically cross-linked and physically entangled composite structure that significantly enhanced the storage modulus and complex viscosity.Additionally,the compressive strength of EVA/LDPE/CNT foam with 10 parts per hundred rubber(phr)CNT reached 1.37 MPa at 50%compression,marking a 340%increase compared to the 0.31 MPa of the CNT-free sample.Furthermore,the EVA/LDPE/CNT composite foams,which incorporated 10 phr CNT,were prepared under specific foaming conditions,resulting in an ultra-low density of 0.11 g/cm^(3) and a higher sensitivity,with a gauge factor of–2.3.The piezoresistive foam sensors developed in this work could accurately detect human motion,thereby expanding their applications in the field of piezoresistive foam sensors and providing an effective strategy for the advancement of high-performance piezoresistive foam sensors.
基金supported by the Science and Technology Cooperation and Exchange Special Project of Shanxi Province(Grant No.202204041101006)the Shanxi Provincial Patent Transformation Special Plan Project(Grant No.202403003)+4 种基金a research project supported by the Shanxi Scholarship Council of China(Grant No.2023-130)the Aeronautical Science Foundation of China(Grant No.2023Z0560U0001)the Fundamental Research Program of Shanxi Province(Grant No.202203021222077)the Science and Technology Project of the North University of China(Grant No.20231914)the National Natural Science Foundation of China(Grant Nos.52405633 and 62404208).
文摘Flexible piezoresistive sensors based on carbon nanomaterials have attracted significant attention with regard to their application to wearable electronics.The enhanced performance of these sensors is primarily due to the integration of microstructures and conductive coatings.In this study,a flexible sandwich-shaped piezoresistive pressure sensor is fabricated by adopting microstructured electrodes and a porous sensing layer of carbon nanocomposite.The microtextured electrodes are obtained from a template by three-dimensional printing using digital light processing(DLP),and the porous structure is obtained by scarification of an NaCl crystal template.Multiwalled carbon nanotubes(MWCNTs)and graphene nanoparticles(GNPs),composited with polydimethylsiloxane and silica(ESSIL 296),are used to fabricate the functional structures,including the upper and lower electrode layers and a sandwiched porous sensing layer.The sensor exhibits a rapid response and recovery speed(-80 ms),a high sensitivity(0.437 kPa^(−1))within a range of 0–1.08 kPa,and excellent stability.In addition,such sensors demonstrate potential applications for finger motion monitoring and information encryption.
文摘The relaxation oscillation characteristics of a resonant tunneling diode （RTD） with applied pressure are reported. The oscillation circuit is simulated and designed by Pspice 8. 0, and the measured oscillation frequency is up to 200kHz. Using molecular beam epitaxy （MBE） ,AIAs/lnx Ga1-x As/GaAs double barrier resonant tunneling structures （DBRTS） are grown on （100） semi-insulated （SI） GaAs substrate,and the RTD is processed by Au/Ge/Ni/Au metallization and an airbridge structure. Because of the piezoresistive effect of RTD,with Raman spectrum to measure the applied pressure, the relaxation oscillation characteristics have been studied, which show that the relaxation oscillation frequency has approxi- mately a - 17.9kHz/MPa change.
基金supported in part by the National Natural Science Foundation of China (Grant No 50775209)the Fork Ying Tung Education Foundation (Grant No 101052)Program for Excellent Talents by Ministry of Education of China
文摘Resonant tunnelling diodes （RTDs） have negative differential resistance effect, and the current-voltage characteristics change as a function of external stress, which is regarded as mesc-piezoresistance effect of RTDs. In this paper, a novel micro-accelerometer based on AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs RTDs is designed and fabricated to be a four-beam-mass structure, and an RTD-Wheatstone bridge measurement system is established to test the basic properties of this novel accelerometer. According to the experimental results, the sensitivity of the RTD based micro-accelerometer is adjustable within a range of 3 orders when the bias voltage of the sensor changes. The largest sensitivity of this RTD based miero-accelerometer is 560.2025 mV/g which is about 10 times larger than that of silicon based micro piezoresistive accelerometer, while the smallest one is 1.49135 mV/g.
基金Supported by the National Natural Science Foundation of China under Grant No 10472048, and the Laboratory for Shock Wave and Detonation Physics Research, Institute of Fluid Physics, CAEP, under Grant No 9140C6702020603.
文摘It is necessary to study the validation of strength models under planar shock loading in view of the fact that strength models for metals obtained at moderate strain rates are often used in the numerical simulations of shock wave phenomena. The variations of longitudinal stress, transverse stress and yield strength of oxygen-free high conductance （OFHC） copper with time under planar shock loading are obtained by using the manganin stress gauges and compared with the predicted results by the constructed seven constitutive models based on Y/G=constant and on G/B=constant （Y the yield strength, G the shear modulus, B the bulk modulus）, respectively. It seems that the pressure, density, temperature and plastic strain dependence of the yield strength for OFHC copper under planar shock loading is essential to the constitutive description.
文摘This paper presents a smart compensation system based on MCA7707 (a kind of signal processor). The li near errors and high order errors of a sensor (especially piezoresistive sensor) can be corrected by using this system. It can optimize the process of piezoresi stive sensor calibration and compensation, then, a total error factor within 0.2 % of the sensor′s repeatability errors is obtained. Data are recorded and coeff icients are determined automatically by this system, thus, the sensor compensati on is simplified greatly. For operating easily, a wizard compensation program is designed to correct every error and to get the optimum compensation.
基金supported by the National Natural Science Foundation of China(No.U20A201293)the Ningbo Ma-jor Special Project“Science and Technology Innovation 2025”(No.2020Z023),and the National Key Research and Development Pro-gram(No.2021YFB3201100).
文摘Magnetron-sputtered MoS_(2) has applications in piezoresistive functional materials research owing to its unique nanostructure.However,the controlled incorporation of sulfur vacancies and realization of en-hanced piezoresistive performance remain significant challenges.In this work,the direct growth of large-area MoS_(2) films with tunable sulfur vacancy concentrations was successfully achieved via magnetron sputtering at various temperatures.Microstructural analysis revealed that the application of strain al-tered the number of conductive channels between the vertical MoS_(2) nanosheets,changing the measured resistance and leading to excellent piezoresistive properties.More importantly,the unsaturated electrons due to the sulfur vacancies increased the in-plane carrier concentration of the MoS_(2)nanosheets.A de-position temperature of 50℃afforded the highest concentrations of sulfur vacancies and carriers.These MoS_(2)films possessed a carrier concentration of 6.58×10^(17)cm^(−3),which was 40.9%higher than that ob-tained at 150°C,and displayed superior piezoresistive performance.The films exhibited high gage factors of 2.66 and 23.22 under tensile and compressive strain of≤0.29%,respectively.These values were 118%and 323%higher,respectively,than those obtained for films deposited at 150°C.This work provides an effective route for modulating and mass producing MoS_(2)-based piezoresistive electronic devices.
基金National Key R&D Program of China(Nos.2016YFA0200800 and 2016YFA0200803)National Natural Science Foundation of China(Nos.61674160 and 61834007)。
文摘This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus effectively optimizing the response frequency bandwidth.Owing to the high stress concentration on the dual-cantilever integrated with a fully sensitive piezoresistive Wheatstone bridge,a high sensitivity to acceleration is achieved.In addition,the dual-cantilever accelerometer is fabricated using a specifically developed low-cost and high-yield(111)-silicon single-side bulk-micromachining process.The test results show that the proposed dualcantilever accelerometer exhibits a sensitivity of 0.086—0.088 mV/g/3.3 V and a nonlinearity of±(0.09%—0.23%)FS(full-scale).Based on dynamic characterization,an adequate frequency bandwidth of 2.64 kHz is verified.Furthermore,a resonant frequency of 4.388 kHz is measured,and a low quality factor(Q)of 7.62 is obtained,which agrees well with the design for air-damping modulation.The achieved high performance renders the proposed dual-cantilever accelerometer promising in applications such as automotive and consumer electronics.
基金Research and publication were financed from the Polish national project BIOMOL(Nanoelentronic Devices for the Biological Molecules Detection in Aquaous Solutions),contrach no.N R02 0010 06/2009.
文摘Nanosensitive mechanical microprobes with CMOS transistors, inverters, inverters cascades and ring oscillators, integrated on the thin silicon cantilevers are presented. Mechanical stress shifts linear, steep switching fragment of the inverters’ electrical characteristics. Microprobes were fabricated with use of the standard CMOS technology (3.5 μm design rules, one level polysilicon gate and one level of the metal interconnections) and relief MEMS technique. Control of the silicon cantilever thickness was satisfactory in the range above the few micrometers. Several computer simulations were done to analyze and optimize transistors location on the cantilever, in respect to the mechanical stress distribution. Results of the microprobes electromechanical tests confirm high deflection sensitivity 1.2 - 1.8 mV/nm and force sensitivity 2.0 - 2.4 mV/nN, both in nano ranges. Microprobes, with the ring oscillators revealed sensitivities 5 - 8 Hz/nm. These microprobes seem to be appropriate for applications in precise chemical and biochemical sensing.
基金supported by the National Natural Science Foundation of China(Nos.61775032,61475134 and 11604042)the Fundamental Research Funds for the Central Universities(N170405007,N180406002,N180408018 and N160404009)the 111 Project(B16009)。
文摘Electronic skin(e-skin) and flexible wearable devices are currently being developed with broad application prospects. Transforming electronic skin(e-skin) into true ¨skin¨is the ultimate goal. Tactile sensing is a fundamental function of skin and the development of high-performance flexible pressure sensors is necessary to realize thus. Many reports on flexible pressure sensors have been published in recent years,including numerous studies on improving sensor performance, and in particular, sensitivity. In addition,a number of studies have investigated self-healing materials, multifunctional sensing, and so on. Here,we review recent developments in flexible pressure sensors. First, working principles of flexible pressure sensors, including piezoresistivity, capacitance, and piezoelectricity, are introduced, as well as working mechanisms such as triboelectricity. Then studies on improving the performance of piezoresistive and capacitive flexible pressure sensors are discussed, in addition to other important aspects of this intriguing research field. Finally, we summarize future challenges in developing novel flexible pressure sensors.
基金funding from National Natural Science Foundation of China(NSFC Nos.61774157,81771388,61874121,and 61874012)Beijing Natural Science Foundation(No.4182075)the Capital Science and Technology Conditions Platform Project(Project ID:Z181100009518014).
文摘Flexible tactile sensors have broad applications in human physiological monitoring,robotic operation and human-machine interaction.However,the research of wearable and flexible tactile sensors with high sensitivity,wide sensing range and ability to detect three-dimensional(3D)force is still very challenging.Herein,a flexible tactile electronic skin sensor based on carbon nanotubes(CNTs)/polydimethylsiloxane(PDMS)nanocomposites is presented for 3D contact force detection.The 3D forces were acquired from combination of four specially designed cells in a sensing element.Contributed from the double-sided rough porous structure and specific surface morphology of nanocomposites,the piezoresistive sensor possesses high sensitivity of 12.1 kPa?1 within the range of 600 Pa and 0.68 kPa?1 in the regime exceeding 1 kPa for normal pressure,as well as 59.9 N?1 in the scope of<0.05 N and>2.3 N?1 in the region of<0.6 N for tangential force with ultra-low response time of 3.1 ms.In addition,multi-functional detection in human body monitoring was employed with single sensing cell and the sensor array was integrated into a robotic arm for objects grasping control,indicating the capacities in intelligent robot applications.
