A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant...A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant. In order to measure the projection objective with a numerical aperture of 0.2, we present a joint optimization method of a pinhole and grating based on scalar diffraction and the finite difference time domain method. The grating constant and the film thickness are selected, and the duty cycle of the grating is optimized. The results show that in the grating processing the material chromium is adopted, the thickness is 200 nm, and the grating constant is 15 μm. When the duty cycle is 55%, the interference fringe contrast is the greatest. The feasibility of the design result is further verified by experiment.展开更多
Choosing particular solution source and its position have great influence on accu- racy of sound field prediction in distributed source boundary point method. An optimization method for determining the position of par...Choosing particular solution source and its position have great influence on accu- racy of sound field prediction in distributed source boundary point method. An optimization method for determining the position of particular solution sources is proposed to get high accu- racy prediction result. In this method, tripole is chosen as the particular solution. The upper limit frequency of calculation is predicted by setting 1% volume velocity relative error limit using vibration velocity of structure surface. Then, the optimal position of particular solution sources, in which the relative error of volume velocity is minimum, is determined within the range of upper limit frequency by searching algorithm using volume velocity matching. The transfer matrix between pressure and surface volume velocity is constructed in the optimal position. After that, the sound radiation of structure is calculated by the matrix. The results of numerical simulation show that the calculation error is significantly reduced by the proposed method. When there are vibration velocity measurement errors, the calculation errors can be controlled within 5% by the method.展开更多
基金supported by the Major Scientific Instrument Development Project of the National Natural Science Foundation of China(No.11627808)the National Natural Science Foundation of China(No.61675026)the National Science and Technology
文摘A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant. In order to measure the projection objective with a numerical aperture of 0.2, we present a joint optimization method of a pinhole and grating based on scalar diffraction and the finite difference time domain method. The grating constant and the film thickness are selected, and the duty cycle of the grating is optimized. The results show that in the grating processing the material chromium is adopted, the thickness is 200 nm, and the grating constant is 15 μm. When the duty cycle is 55%, the interference fringe contrast is the greatest. The feasibility of the design result is further verified by experiment.
文摘Choosing particular solution source and its position have great influence on accu- racy of sound field prediction in distributed source boundary point method. An optimization method for determining the position of particular solution sources is proposed to get high accu- racy prediction result. In this method, tripole is chosen as the particular solution. The upper limit frequency of calculation is predicted by setting 1% volume velocity relative error limit using vibration velocity of structure surface. Then, the optimal position of particular solution sources, in which the relative error of volume velocity is minimum, is determined within the range of upper limit frequency by searching algorithm using volume velocity matching. The transfer matrix between pressure and surface volume velocity is constructed in the optimal position. After that, the sound radiation of structure is calculated by the matrix. The results of numerical simulation show that the calculation error is significantly reduced by the proposed method. When there are vibration velocity measurement errors, the calculation errors can be controlled within 5% by the method.
