Corrugated silicon nanocone(SiNC)arrays have been fabricated on a silicon wafer by two polystyrene-sphere-monolayer-masked etching steps in order to create high-performance antireflective coatings.The reflectance was ...Corrugated silicon nanocone(SiNC)arrays have been fabricated on a silicon wafer by two polystyrene-sphere-monolayer-masked etching steps in order to create high-performance antireflective coatings.The reflectance was reduced from above 35%to less than 0.7%in the range 400-1050 nm,and it remained below 0.5%at incidence angles up to 70°at 632.8 nm for both s-and p-polarized light.The fluorinated corrugated SiNC array surface exhibits superhydrophobic properties with a water contact angle of 164°.展开更多
Complementary metal oxide semiconductor(CMOS) image sensors(CIS) are being widely used in digital video cameras, web cameras, digital single lens reflex camera(DSLR), smart phones and so on, owing to their high level ...Complementary metal oxide semiconductor(CMOS) image sensors(CIS) are being widely used in digital video cameras, web cameras, digital single lens reflex camera(DSLR), smart phones and so on, owing to their high level of integration, random accessibility, and low-power operation. It needs to be installed with the cover glass in practical applications to protect the sensor from damage, mechanical issues,and environmental conditions, which, however, limits the accuracy and usability of the sensor due to the reflection in the optical path from air-to-cover glass-to-air. In this work, the flexible 3D nanocone anti-reflection(AR) film with controlled aspect ratio was firstly employed to reduce the light reflection at air/cover glass/air interfaces by directly attaching onto the front and rear sides of the CIS cover glass.As both the front and rear sides of cover glass were coated by the AR film, the output image quality was found to be improved with external quantum efficiency increased by 7%, compared with that without AR film. The mean digital data value, root-mean-square contrast, and dynamic range are increased by45.14%, 38.61% and 57, respectively, for the output image with AR films. These results provide a novel and facile pathway to improve the CIS performance and also could be extended to rational design of other image sensors and optoelectronic devices.展开更多
基金This work was supported by the National Natural Science Foundation of China(No.20373019)the Program for New Century Excellent Talents in University,and the National Basic Research Program(Nos.2007CB808003 and 2009CB939701).
文摘Corrugated silicon nanocone(SiNC)arrays have been fabricated on a silicon wafer by two polystyrene-sphere-monolayer-masked etching steps in order to create high-performance antireflective coatings.The reflectance was reduced from above 35%to less than 0.7%in the range 400-1050 nm,and it remained below 0.5%at incidence angles up to 70°at 632.8 nm for both s-and p-polarized light.The fluorinated corrugated SiNC array surface exhibits superhydrophobic properties with a water contact angle of 164°.
基金financially supported by the National Natural Science Foundation of China(61474128,21503261,61504155and 61404145)Youth Innovation Fund for Interdisciplinary Research of SARI(Y526453233,141004)+2 种基金Science & Technology Commission of Shanghai Municipality(14JC1492900,14511102302,15DZ1100502)Youth Innovation Promotion Association,CAS(2013302)Development Fund for Information communication and integrated circuit technology public service platform(No.2016-14)supported by Zhangjiang Adminstrative Committee
文摘Complementary metal oxide semiconductor(CMOS) image sensors(CIS) are being widely used in digital video cameras, web cameras, digital single lens reflex camera(DSLR), smart phones and so on, owing to their high level of integration, random accessibility, and low-power operation. It needs to be installed with the cover glass in practical applications to protect the sensor from damage, mechanical issues,and environmental conditions, which, however, limits the accuracy and usability of the sensor due to the reflection in the optical path from air-to-cover glass-to-air. In this work, the flexible 3D nanocone anti-reflection(AR) film with controlled aspect ratio was firstly employed to reduce the light reflection at air/cover glass/air interfaces by directly attaching onto the front and rear sides of the CIS cover glass.As both the front and rear sides of cover glass were coated by the AR film, the output image quality was found to be improved with external quantum efficiency increased by 7%, compared with that without AR film. The mean digital data value, root-mean-square contrast, and dynamic range are increased by45.14%, 38.61% and 57, respectively, for the output image with AR films. These results provide a novel and facile pathway to improve the CIS performance and also could be extended to rational design of other image sensors and optoelectronic devices.
