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Fabrication of Sub-20nm Metal Nanogaps from Nanoconnections by the Extended Proximity Effect
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作者 孙艳 陈鑫 戴宁 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第9期1666-1669,共4页
We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography (EBL). The proximity effect is extended to develop a flexible and practical method fo... We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography (EBL). The proximity effect is extended to develop a flexible and practical method for preparing metal (e. g. Au or Ag) nanogaps and arrays in combination with a transfer process (e. g., deposition/lift-off). Different from the direct gap-writing process,the nanogap precursor structures (nanoconnections) were designed by GDSII software and then written by electron beam. Following a deposition and lift-off process, the metal nanogaps were obtained and the nanogap size can be lowered to -10nm by controlling the exposure dose in EBL. 展开更多
关键词 metal nanogap nanofabrication proximity effect electron beam lithography
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Fabricating Nanogaps between Nanoelectrodes using Dielectrophoresis Technique for Molecular Fluorescence Enhancement
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作者 蔡洪冰 林珂 +4 位作者 朱三娥 廖源 张杨 王晓平 董振超 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2016年第3期279-283,I0001,共6页
Here we demonstrate the fabrication of nanometer-sized gaps by assembling single coreshell nanoparticles between metallic nanoelectrodes. Protein coated SiO2@Au coreshell nanopar- tides arc synthesized and positioned ... Here we demonstrate the fabrication of nanometer-sized gaps by assembling single coreshell nanoparticles between metallic nanoelectrodes. Protein coated SiO2@Au coreshell nanopar- tides arc synthesized and positioned between fluorescent molecules-covered electrodes in a controllable way using dielectrophoretic trapping, forming nanogaps sandwiched between nanoparticle and manoelectrodes. Preliminary photoluminescence measurements show that enhanced molecular fluorescence could be detected from the fluorescent molecules inside the nanogaps. These results pave the way for realizing electrically driven molecular fluorescence based on nanogap electrodes. 展开更多
关键词 nanogap NANOELECTRODE Dielectrophoresis Coreshell nanoparticle Fluores-cence enhancement
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Bimetallic nano-mushrooms with DNA-mediated interior nanogaps for high-efficiency SERS signal amplification 被引量:5
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作者 Jianlei Shen Jing Su +9 位作者 Juan Yan Bin Zhao Dongfang Wang Siyi Wang Kun Li Mengmeng Liu Yao He Sanjay Mathur Chunhai Fan Shiping Song 《Nano Research》 SCIE EI CAS CSCD 2015年第3期731-742,共12页
Uniform silver-containing metal nanostructures with well-defined nanogaps hold great promise for ultrasensitive surface-enhanced Raman scattering (SERS) analyses. Nevertheless, the direct synthesis of such nanostruc... Uniform silver-containing metal nanostructures with well-defined nanogaps hold great promise for ultrasensitive surface-enhanced Raman scattering (SERS) analyses. Nevertheless, the direct synthesis of such nanostructures with strong and stable SERS signals remains extremely challenging. Here, we report a DNA-mediated approach for the direct synthesis of gold-silver nano-mushrooms with interior nanogaps. The SERS intensities of these nano-mushrooms were critically dependent on the area of the nanogap between the gold head and the silver cap. We found that the formation of nanogaps was finely tunable by controlling the surface density of 6-carboxy-X-rhodamine (ROX) labeled single-stranded DNA (ssDNA) on the gold nanoparticles. We obtained nano-mushrooms in high yield with a high SERS signal enhancement factor of -1.0×109, much higher than that for Au-Ag nanostructures without nanogaps. Measurements for single nano- mushrooms show that these structures have both sensitive and reproducible SERS signals. 展开更多
关键词 surface-enhanced Ramanscattering biometallic nanostructure nano-mushroom nanogap gold nanoparticle
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Lithography-independent and large scale fabrication of a metal electrode nanogap 被引量:1
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作者 李艳 王晓峰 +3 位作者 张加勇 王晓东 樊中朝 杨富华 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2009年第9期142-145,共4页
A lithography-independent and wafer scale method to fabricate a metal nanogap structure is demonstrated. Polysilicon was first dry etched using photoresist (PR) as the etch mask patterned by photolithography. Then, ... A lithography-independent and wafer scale method to fabricate a metal nanogap structure is demonstrated. Polysilicon was first dry etched using photoresist (PR) as the etch mask patterned by photolithography. Then, by depositing conformal SiO2 on the polysilicon pattern, etching back SiO2 anisotropically in the perpendicular direction and removing the polysilicon with KOH, a sacrificial SiO2 spacer was obtained. Finally, after metal evaporation and lifting-off of the SiO2 spacer, an 82 nm metal-gap structure was achieved. The size of the nanogap is not determined by the photolithography, but by the thickness of the SiO2. The method reported in this paper is compatible with modern semiconductor technology and can be used in mass production. 展开更多
关键词 lithography-independent nanogap conformal deposition anisotropic etching
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Self-generating nanogaps for highly effective surface-enhanced Raman spectroscopy 被引量:1
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作者 Yangkai Chen Huan Li +9 位作者 Jianmei Chen Dong Li Mengyuan Zhang Guanghua Yu Lin Jiang Yi Zong Bin Dong Zhoufang Zeng Yandong Wang Lifeng Chi 《Nano Research》 SCIE EI CSCD 2022年第4期3496-3503,共8页
The fabrication of surface enhanced Raman spectroscopy(SERS)substrates with controlled high density hot spots still remains challenging.Herein,we report highly effective SERS substrates containing the self-generating(... The fabrication of surface enhanced Raman spectroscopy(SERS)substrates with controlled high density hot spots still remains challenging.Herein,we report highly effective SERS substrates containing the self-generating(SG)nanogaps from polystyrene nanosphere monolayer through isotropic plasma etching.The emergence of multimode hot spots,i.e.,metal film over nanosphere(MFON)-like hot spots(closed gaps,0 nm),individual self-aligned hot spots(discrete gaps,>20 nm)and threedimensional(3D)hot spots(nanogaps,1-10 nm),makes the SG SERS substrates superior as compared to the traditional MFON or the well-ordered self-aligned SERS substrates in terms of enhancement,uniformity,and reproducibility.The SG SERS substrates can function as the excellent SERS platforms for trace molecule detection in the practical application fields. 展开更多
关键词 surface-enhanced Raman spectroscopy nanogaps colloidal lithography reactive ion etching
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Improved optical enhancement using double-width plasmonic gratings with nanogaps 被引量:2
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作者 Ahmad A.Darweesh Stephen J.Bauman Joseph B.Herzog 《Photonics Research》 SCIE EI 2016年第5期173-180,共8页
Plasmonic grating structures have been shown effective at increasing near-field optical enhancement. A doublewidth plasmonic grating design is introduced, where each period has two alternating metal widths separated b... Plasmonic grating structures have been shown effective at increasing near-field optical enhancement. A doublewidth plasmonic grating design is introduced, where each period has two alternating metal widths separated by a nanogap. With this new design, analysis has shown that plasmonic resonances couple between each metal section,resulting in even greater optical enhancement compared with single-width gratings. The geometry that gives the greatest optical enhancement has been determined with a computational model. This work demonstrates that the increased enhancement is due to hybridized modes that couple between the two grating segments. 展开更多
关键词 Improved optical enhancement using double-width plasmonic gratings with nanogaps nm
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Chiral plasmonic nanostructure of twistedly stacked nanogaps
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作者 Jian Zhang Rui Tu +4 位作者 Chao Huang Xiaoli Yao Xin Hu Haixiong Ge Xuefeng Zhang 《Chinese Optics Letters》 SCIE EI CAS CSCD 2021年第1期95-99,共5页
Nanogap plasmonic structures with strong coupling between separated components have different responses to orthogonal-polarized light, giving rise to giant optical chirality. Here, we proposed a three-dimensional(3D) ... Nanogap plasmonic structures with strong coupling between separated components have different responses to orthogonal-polarized light, giving rise to giant optical chirality. Here, we proposed a three-dimensional(3D) nanostructure that consists of two vertically and twistedly aligned nanogaps, showing the hybridized charge distribution within 3D structures.It is discovered that the structure twisted by 60° exhibits plasmonic coupling behavior with/without gap modes for different circular-polarized plane waves, showing giant chiral response of 60% at the wavelength of 1550 nm. By controlling the disk radius and the insulator layer, the circular dichroism signal can be further tuned between 1538 and 1626 nm. 展开更多
关键词 metal-insulator-metal structure nanogaps gap mode twisted stacking charge distribution chiral response
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Advanced mechanisms,innovative designs,and optimized simulations of electron transport channels toward enhance performance in Sb_(2)S_(3)solar cells
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作者 ZHANG Yang-ang FANG Long +7 位作者 LI Heng-yue ZHOU Xiao-long LUO Wang HUANG Xin-yi MA Guo-qing JIN Xue YANG Jun-liang MENG Ke-qi-lao 《Journal of Central South University》 2025年第10期3793-3806,共14页
Sb_(2)S_(3)films are susceptible to the formation of nanogap defects during the crystallization process,leading to their experimental power conversion efficiency(PCE)falling significantly short of the theoretical limi... Sb_(2)S_(3)films are susceptible to the formation of nanogap defects during the crystallization process,leading to their experimental power conversion efficiency(PCE)falling significantly short of the theoretical limit.This investigation presents,a groundbreaking Sb_(2)S_(3)photovoltaic device model that integrates perovskite within these nanogaps,and systematically examines the mechanisms for enhancing the PCE.Our findings reveal that incorporating perovskite within the nanogaps yields a 10%enhancement in optical absorption performance.Furthermore,perovskite nanogaps function as effective electron transport channels,significantly reducing the recombination of photogenerated carriers within the highly defective Sb_(2)S_(3).The dimensions and arrangement of the nanochannels play a pivotal role in determining device performance,with optimal measurements of 5 nm in width and 15 nm in spacing.Additionally,this study examines the universality of the nanochannel structure.The projected PCE of this innovative structure is an impressive 25.40%.These findings provide valuable theoretical guidance for designing high-efficiency Sb_(2)S_(3)solar cells. 展开更多
关键词 Sb_(2)S_(3)solar cells PEROVSKITE nanogaps electron transport channels
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真空纳米间隙的脉冲击穿特性
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作者 李伊濛 李南 +5 位作者 夏凌寒 刘佳薇 张鹏 肖冰 成永红 孟国栋 《高电压技术》 北大核心 2025年第1期450-458,共9页
极端强电场下的绝缘可靠性问题是限制微纳电子器件性能提升的主要因素之一,因此认识纳米间隙的击穿特性以及绝缘失效机制极为重要。为此,利用高分辨成像技术与纳米级精密位移技术,基于透射电子显微镜与电学样品杆建立了真空纳米间隙脉... 极端强电场下的绝缘可靠性问题是限制微纳电子器件性能提升的主要因素之一,因此认识纳米间隙的击穿特性以及绝缘失效机制极为重要。为此,利用高分辨成像技术与纳米级精密位移技术,基于透射电子显微镜与电学样品杆建立了真空纳米间隙脉冲击穿测试系统,实现了空间分辨率为1 nm的精准间隙调控,研究了纳米间隙距离(5~25 nm)、外施电压脉冲宽度(100~1000 ns)对球-板真空间隙脉冲击穿阈值的影响,讨论了纳米间隙的脉冲击穿过程。结果表明:脉冲击穿电压与间隙距离呈线性关系即Ub=Ecd,且基本不随脉冲宽度变化,击穿场强阈值基本不变,约为8.8 GV/m;纳米间隙距离越小,径向电场梯度越大,场发射有效区域越小;球-板电极均匀场下的脉冲击穿过程为阳极金板在阴极钨球场发射电流的能量沉积下温度升高至接近熔点,进而发生热失控并诱导击穿;击穿过程的持续时间约为25 ns,与间隙距离以及脉冲宽度无关,且反映了阳极表面蒸发的原子在间隙内形成等离子体通道并导致阴极蒸发的时间。 展开更多
关键词 纳米间隙 脉冲击穿 击穿电压 场发射 温度
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纳米间隙电极的制备及应用 被引量:3
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作者 董晓东 张柏林 夏勇 《微纳电子技术》 CAS 北大核心 2010年第1期50-55,63,共7页
综述了国内外纳米间隙电极的制备方法,其中主要包括扫描隧道显微镜法、Hg滴法、机械断裂法、微加工法、电迁移法、电化学法等,对每种方法的制备过程及原理进行了较详细的介绍;对每种纳米间隙电极在分子电子学方面的应用,特别是对利用纳... 综述了国内外纳米间隙电极的制备方法,其中主要包括扫描隧道显微镜法、Hg滴法、机械断裂法、微加工法、电迁移法、电化学法等,对每种方法的制备过程及原理进行了较详细的介绍;对每种纳米间隙电极在分子电子学方面的应用,特别是对利用纳米间隙电极测定单分子的I-V性质、制作分子整流器和分子晶体管等工作做了简单介绍。突出了纳米间隙电极在分子器件研究中的重要作用;最后讨论了分子电子学所面临的一些问题并对该领域的发展方向作出了展望。 展开更多
关键词 纳米间隙电极 分子电子学 分子器件 制备 应用
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Nanoscale air channel devices-inheritance and breakthrough of vacuum tube 被引量:1
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作者 Baihong Chen Linjie Fan +3 位作者 Jinshun Bi Zhiqiang Li Ziming Xu Sandip Majumdar 《Nano Materials Science》 CSCD 2024年第6期714-725,共12页
The nanoscale air channel device(NACD)has recently gained significant attention as a novel vacuum electronic that can be fabricated through nanofabrication technologies.Here,the research and progress of the NACD since... The nanoscale air channel device(NACD)has recently gained significant attention as a novel vacuum electronic that can be fabricated through nanofabrication technologies.Here,the research and progress of the NACD since it was reviewed,with a focus on working mechanism analysis,nanofabrication technologies,device structure optimization,electrode materials and simulation approach.Furthermore,the application fields and future development of NACD were summarized and prospected.The NACDs are expected to surpass the physical limits of traditional solid transistors due to its advantages such as smaller heat loss,high-speed,resistance to harsh environments. 展开更多
关键词 Vacuum electronics nanogap Simulation Emission mechanism Temperature resistance Radiation endurance
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Molecular-scale electronics: From device fabrication to functionality 被引量:1
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作者 Xu Zhang Tao Li 《Chinese Chemical Letters》 SCIE CAS CSCD 2017年第11期2058-2064,共7页
By wiring molecules into circuits, "molecular electronics" aims at studying electronic properties of single molecules and their ensembles, on this basis exploiting their intrinsic functionalities, and eventually app... By wiring molecules into circuits, "molecular electronics" aims at studying electronic properties of single molecules and their ensembles, on this basis exploiting their intrinsic functionalities, and eventually applying them as building blocks of electronic components for future electronic devices. Herein, fabricating reliable solid-state molecular devices and developing synthetic molecules endowed with desirable electronic properties, have been two major tasks since the dawn of molecular electronics. This review focuses on recent advances and efforts regarding the main challenges in this field, highlighting fabrication of nanogap electrodes for single-molecule junctions, and self-assembled-monolayers (SAMs) for functional devices. The prospect of molecular-scale electronics is also discussed. 展开更多
关键词 Molecular electronics nanogap electrodes Single-molecule junctions Self-assembled monolayers Functional molecular devices
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金属纳米间隙中SPR增强光电化学反应
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作者 吴德印 张檬 +1 位作者 周剑章 田中群 《光谱学与光谱分析》 SCIE EI CAS CSCD 北大核心 2018年第S1期371-372,共2页
研究属电极表面与金属纳米粒子构成纳米间隙的光物理和光化学特征。首先,当可见光激发等离激元共振(SPR)效应,分析了电极电位与纳米间隙结构的光吸收和光发射过程耦合作用。然后,我们考虑当分子存在纳米间隙的情况下,SPR对分子拉曼光谱... 研究属电极表面与金属纳米粒子构成纳米间隙的光物理和光化学特征。首先,当可见光激发等离激元共振(SPR)效应,分析了电极电位与纳米间隙结构的光吸收和光发射过程耦合作用。然后,我们考虑当分子存在纳米间隙的情况下,SPR对分子拉曼光谱信号的增强效应。最后,我们也考虑了激发SPR弛豫以及其与分子化学反应的关系。在上述的理论计算中,我们将界面电场和光电场耦合,考虑了纳米间隙结构中嵌入分子的光电化学反应。 展开更多
关键词 纳米间隙 光电化学反应 表面等离激元共振 表面增强拉曼光谱
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基于碳纳米管的基底构筑及其在灭幼脲检测中的研究
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作者 孙超 丁建军 +2 位作者 朱勇杰 苏通 马俊智 《现代电子技术》 2021年第15期129-134,共6页
研究基于表面增强拉曼光谱对灭幼脲农药的检测,通过理论分析及仿真,发现具有3D结构的碳纳米管基底具有良好的表面增强拉曼光谱现象,利用碳纳米管设计出有规则的阵列和3D结构,以银离子作为基底材料的支撑物,在波数范围为100~3200 cm-1条... 研究基于表面增强拉曼光谱对灭幼脲农药的检测,通过理论分析及仿真,发现具有3D结构的碳纳米管基底具有良好的表面增强拉曼光谱现象,利用碳纳米管设计出有规则的阵列和3D结构,以银离子作为基底材料的支撑物,在波数范围为100~3200 cm-1条件下,可获得灭幼脲的浓度检测范围是3 mg/L~5 g/L。这表明采用单壁碳纳米管这一材料作为检测灭幼脲残留的表面增强拉曼基底满足灭幼脲浓度检测国标精度要求。 展开更多
关键词 基底结构 碳纳米管 灭幼脲 表面增强拉曼光谱 纳米结构 纳米间隙 波数范围
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银纳米片在无纺布纤维上的可控组装及其SERS效应 被引量:5
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作者 李奇 田杜 +3 位作者 陈韶云 钟敏 胡成龙 陈建 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 2021年第3期736-744,共9页
以无纺布(NWF)为支撑基体,采用两步化学合成法在NWF上原位构建了由间隙为20~110 nm Ag纳米片(AgNS)组装成的AgNS@NWF微纳结构.扫描电子显微镜(SEM)分析表明,AgNS@NWF具有特殊的层级结构,该结构可用于表面增强拉曼散射(SERS)研究.实验结... 以无纺布(NWF)为支撑基体,采用两步化学合成法在NWF上原位构建了由间隙为20~110 nm Ag纳米片(AgNS)组装成的AgNS@NWF微纳结构.扫描电子显微镜(SEM)分析表明,AgNS@NWF具有特殊的层级结构,该结构可用于表面增强拉曼散射(SERS)研究.实验结果表明,AgNS@NWF微纳结构具有良好的SERS灵敏度和优异的信号可重现性.将罗丹明6G(R6G)作为SERS探针分子,发现R6G的SERS特征峰强度的对数值与R6G水溶液的浓度对数值呈良好的线性关系,最低检测限可达1×10^(‒10) mol/L,表明AgNS@NWF微纳结构具有良好的SERS灵敏度;当R6G水溶液的浓度为1×10^(‒5),1×10^(‒6)和1×10^(‒7) mol/L时,610 cm^(‒1)处谱带拉曼散射强度的相对标准偏差分别为3.57%,3.67%和8.46%,优于或接近于以往研究,表明AgNS@NWF微纳结构具有优异的信号可重现性.将3-巯基丙酸和三聚氰胺作为SERS的检测分子,最低检测限分别为1×10^(‒5)和1×10^(‒6) mol/L.本文为制备灵敏度高、信号可重现性优异的SERS基底提供了一种简单、快速、成本低廉的方法,在生物检测和环境监测中具有潜在的应用价值. 展开更多
关键词 表面增强拉曼散射 无纺布 银纳米片 纳米间隙 罗丹明6G
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电化学原位紫外可见反射谱用于表面等离激元效应的表征 被引量:1
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作者 王家正 刘佳 +2 位作者 周剑章 吴德印 田中群 《光谱学与光谱分析》 SCIE EI CAS CSCD 北大核心 2018年第S1期373-374,共2页
在锁相放大技术的基础上,搭建了光检测系统与恒电位系统联用的电化学原位紫外-可见电反射光谱测量系统,并将其应用于表面等离激元体系的反射率表征。对光滑银电极和银纳米粒子修饰电极进行了电化学原位反射光谱测量,得到在不同电位下的... 在锁相放大技术的基础上,搭建了光检测系统与恒电位系统联用的电化学原位紫外-可见电反射光谱测量系统,并将其应用于表面等离激元体系的反射率表征。对光滑银电极和银纳米粒子修饰电极进行了电化学原位反射光谱测量,得到在不同电位下的反射光谱变化,发现在纳米粒子修饰电极上,产生强的反射谱峰。推测这种谱峰来自于纳米间隙结构造成的热点效应,电位可显著地调控纳米间隙结构的光散射效应。 展开更多
关键词 紫外-可见光谱 表面等离激元共振 电化学原位光谱 纳米间隙
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纳米电解池制备及应用 被引量:1
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作者 郭华 雷佳妮 +2 位作者 杨鸿辉 徐浩 延卫 《环境工程》 CAS CSCD 北大核心 2019年第8期51-57,共7页
纳米电解池是指将电极间距减小到微纳米级别的电解池装置,是近年逐渐发展起来的新型电解池形式。按照制备方法对纳米电解池进行分类介绍,重点介绍电化学法与光刻法纳米电解池,总结2种主流制备方法的优势与劣势,对机械组装和3D喷墨打印2... 纳米电解池是指将电极间距减小到微纳米级别的电解池装置,是近年逐渐发展起来的新型电解池形式。按照制备方法对纳米电解池进行分类介绍,重点介绍电化学法与光刻法纳米电解池,总结2种主流制备方法的优势与劣势,对机械组装和3D喷墨打印2种形式的纳米电解池进行简要介绍。在此基础上,详细介绍了纳米电解池在电化学分析检测和生物领域的应用,并简述其在废水处理、电解水产氢以及储能材料方面的应用。 展开更多
关键词 纳米电解池 制备方法 电化学检测 电解水
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石墨烯纳米间隙电极对的制备研究进展 被引量:1
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作者 廖志宇 汤庆鑫 《电子元件与材料》 CAS CSCD 北大核心 2011年第8期72-75,共4页
石墨烯的高晶体质量、高电导率、单层结构以及与有机半导体的良好兼容性使其成为纳米器件和分子器件的理想电极材料。纳米间隙电极对是构筑纳米器件的基础,发展了两种制备石墨烯纳米间隙电极对的方法——纳米线和金丝交替掩膜法以及原... 石墨烯的高晶体质量、高电导率、单层结构以及与有机半导体的良好兼容性使其成为纳米器件和分子器件的理想电极材料。纳米间隙电极对是构筑纳米器件的基础,发展了两种制备石墨烯纳米间隙电极对的方法——纳米线和金丝交替掩膜法以及原子力针尖裁剪法,其过程简单,制备的石墨烯间隙为100~200 nm。石墨烯纳米间隙电极对是制备纳米器件、测试微纳材料性能的一个重要工具,在纳米器件和分子电子学方面具有潜在的应用前景。 展开更多
关键词 石墨烯 电极对 综述 纳米间隙 分子器件
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表面等离子体-拉曼散射双模式复合生物芯片
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作者 李文雪 时元振 +2 位作者 蒋之森 苏亚荣 庞霖 《生物化学与生物物理进展》 SCIE CAS CSCD 北大核心 2017年第4期347-356,共10页
本文提出了复合表面等离子体(SPR)无标记检测及表面增强拉曼散射(SERS)的显微成像技术.证明了双模式SPR-SERS生物芯片的可实施性,即在同一芯片上实现了表面等离子共振和表面增强拉曼显微检测.鉴于双模芯片的高保真性,基于显微技术的高... 本文提出了复合表面等离子体(SPR)无标记检测及表面增强拉曼散射(SERS)的显微成像技术.证明了双模式SPR-SERS生物芯片的可实施性,即在同一芯片上实现了表面等离子共振和表面增强拉曼显微检测.鉴于双模芯片的高保真性,基于显微技术的高精准、多通道无标记检测技术有望在临床医学检测中得以广泛应用. 展开更多
关键词 SPR SERS 拉曼散射 双模SPR-SERS 纳米间隙
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宽束离子束刻蚀快速加工金属纳米间隙结构 被引量:8
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作者 曾沛 舒志文 +2 位作者 陈艺勤 段辉高 郑梦洁 《光学精密工程》 EI CAS CSCD 北大核心 2023年第1期109-118,共10页
提出并演示了利用宽束离子束刻蚀方法一次性对多个杠铃形金属纳米结构进行“横向抽减”,形成极小纳米间隙,从而实现多个金属纳米间隙结构的快速加工。利用电子束曝光定义图形化抗蚀剂结构,通过传统的金属沉积和湿法剥离将抗蚀剂图案转... 提出并演示了利用宽束离子束刻蚀方法一次性对多个杠铃形金属纳米结构进行“横向抽减”,形成极小纳米间隙,从而实现多个金属纳米间隙结构的快速加工。利用电子束曝光定义图形化抗蚀剂结构,通过传统的金属沉积和湿法剥离将抗蚀剂图案转移至杠铃形金属纳米结构,最后使用宽束离子束刻蚀进行修剪。实验表明,精确控制刻蚀时间可以使杠铃形结构的两个纳米天线间的间隙距离达到10 nm以下,通过结合基于HSQ负性抗蚀剂的图案化工艺,可在HSQ纳米模板上制得悬空金属纳米间隙结构。利用表面结构形貌表征获得刻蚀过程中纳米结构的形态演变规律,并通过系统的实验和模拟验证了悬空金属间隙结构用于表面增强拉曼散射的优势。该方案为多个极小金属纳米间隙结构的一次成型提供了新的思路,在大面积拉曼传感衬底的低成本高效制备方面具有可观的应用前景。 展开更多
关键词 离子束刻蚀 电子束曝光 金属纳米间隙 亚10 nm 拉曼检测
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