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LiTaO_(3)/SiO_(2)/Poly-Si/Si衬底SAW谐振器高阶模态抑制
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作者 周增毅 帅垚 +3 位作者 吴传贵 彭斌 潘忻强 张万里 《压电与声光》 北大核心 2026年第1期6-11,共6页
通过优化Si的晶体取向,将Si相对于LiTaO_(3)单晶薄膜进行面内旋转,可抑制LiTaO_(3)/SiO_(2)/poly-Si/Si(LTOI)衬底SAW谐振器中高阶模态。通过(110)Si、(100)Si、(111)Si体波声速曲线与主模声速Vmain、高阶模态声速V_(p-h)的对比分析,可... 通过优化Si的晶体取向,将Si相对于LiTaO_(3)单晶薄膜进行面内旋转,可抑制LiTaO_(3)/SiO_(2)/poly-Si/Si(LTOI)衬底SAW谐振器中高阶模态。通过(110)Si、(100)Si、(111)Si体波声速曲线与主模声速Vmain、高阶模态声速V_(p-h)的对比分析,可知当(110)Si面内旋转角度a110=90°/160°/270°/340°时,Si衬底水平剪切体声波声速V_(SH)和垂直剪切体声波声速V_(SV)同时达到较小的值,高阶模态杂波声速V_(p-h)>V_(SH),V_(p-h)>V_(SV),高阶模态杂波的能量辐射到Si衬底中发生泄露,从而达到抑制高阶模态的目的。仿真和流片实验表明,对于使用逆时针旋转270°的(110)Si的LTOI衬底SAW谐振器,其仿真、流片实验的阻抗曲线均未观察到高阶模态杂散响应。 展开更多
关键词 高阶模态抑制 声表面波谐振器 声表面波(saw) LTOI Si的晶体取向
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A Study on a Wire Tension Adaptive Control System of a Multi-wire Saw in Computer Simulation
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作者 LI Wei ZENG Yong-dong 《International Journal of Plant Engineering and Management》 2011年第3期170-177,共8页
Based on the analysis of the mechanism of wire tension control by using torque motors in the multi-wire saw machining process, some mathematical models of a tension control system are studied, and an adaptive algo- ri... Based on the analysis of the mechanism of wire tension control by using torque motors in the multi-wire saw machining process, some mathematical models of a tension control system are studied, and an adaptive algo- rithm is designed for controlling the wire tension. In this algorithm of tension control, the rotation speeds and waving angle of motors are measured and fed back to the controller, and the NLMS( normalized least mean squares) algorithm is used to calculate the adaptive correction value and control the wire tension accurately. The computer simulation results in Matlab software validate the high accuracy for controlling the system of the wire tension with the NLMS algorithm in the multi-wire saw machining process. 展开更多
关键词 multi-wire saw wire tension adaptive control computer simulation
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基于压电复合单晶薄膜衬底的B25 SAW双工器性能研究
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作者 陆川 褚梦群 +3 位作者 杜雪松 蒋小龙 潘祺 肖强 《压电与声光》 北大核心 2025年第4期688-692,共5页
针对B25 SAW双工器设计需求,基于压电复合单晶薄膜(POI)衬底开展了仿真、实测与性能对比研究。首先通过有限元仿真和实测对比了42°LT-POI与50°LT-POI谐振器的主模和远端杂波特性;然后对B25双工器的发射端(TX)和接收端(RX)分... 针对B25 SAW双工器设计需求,基于压电复合单晶薄膜(POI)衬底开展了仿真、实测与性能对比研究。首先通过有限元仿真和实测对比了42°LT-POI与50°LT-POI谐振器的主模和远端杂波特性;然后对B25双工器的发射端(TX)和接收端(RX)分别进行了拓扑结构设计;最后通过实测对比了两种不同切型POI衬底的B25双工器电性能参数。结果显示,在其他指标相当的情况下,相较于50°LT-POI,采用42°LT-POI衬底的B25双工器具有更优的远端抑制性能。 展开更多
关键词 POI衬底 B25 saw双工器
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Sawing Performance Comparison of Brazed and Sintered Diamond Wires 被引量:4
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作者 HUANG Guoqin XU Xipeng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2013年第2期393-399,共7页
Great attention has been paid on fabricating diamond wire by using the brazing diamond because of its strong chemical bonding strength and controllability of grits distribution. Although several serving performances o... Great attention has been paid on fabricating diamond wire by using the brazing diamond because of its strong chemical bonding strength and controllability of grits distribution. Although several serving performances of brazed diamond wire have been reported, seldom do these studies refer to its process characteristics. Sawing performances of a brazed diamond wire are investigated and compared with those of a sintered diamond wire on a wire saw machine. The surface topographies of beads selected from the two wires are micro observed before sawing. The sawing tests are carried out in constant feed rate feeding(CFF) and constant normal force feeding(CNFF). In CFF test, sawing force, power, and the cut depths of positions on contact curve are measured. Then, coupled with the observations of beads topographies, sawing force and its ratio, relations of power against material removal rate, and contact curve linearity are compared and discussed. In CNFF test, the sawing rates of the two wires are investigated. The results indicate that the brazed wire performs with lower sawing force(less 16% of tangential force and 28% of normal force), more energy efficiency(nearly one-fifth of sawing power is saved), at a higher sawing rate (the rate is doubled) and with better contact curve linearity as compared with the sintered wire. This proposed research experimentally evaluates the sawing performances of brazed diamond wire from the aspect of process parameters, which can provide a basis for popularizing the brazed diamond wire. 展开更多
关键词 diamond wire BRAZE SINTER sawing force power contact curve
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Quantitative Analysis of the Loads Acting on the Abrasive Grits in the Diamond Sawing of Granites 被引量:2
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作者 XU Xi-peng, LI Yuan, ZENG Wei-ming, LI Liang-bin (Province Key Lab of Stone Machining, Huaqiao University, Quanzhou 362 011, China) 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期121-122,共2页
An experimental study was carried out to quantitati ve ly evaluate the loads acting on the diamond grits during circular sawing of two kinds of typical granite with diamond segmented saw blade. Measurements were mad e... An experimental study was carried out to quantitati ve ly evaluate the loads acting on the diamond grits during circular sawing of two kinds of typical granite with diamond segmented saw blade. Measurements were mad e of the horizontal and vertical force components and the consumed power in order to obtain the tangential and the normal force components. The temperatures at the diamond-granite contact zone were measured using a foil thermocouple. T he measurement, together with the net sawing power, was subsequently used to est imate the energy partition to the granite by a temperature matching technique. B ased on the energy partition values, the temperatures at individual cutting poin ts were estimated using an analytical model. SEM was used to follow the topograp hies of worn diamond segments. The average force acting on each diamond grit was found to be only 4% of the diamond compressive strength measured by a static me thod. The strength disparity of diamond grits and the random protrusion of grits beyond bond matrix should be significant factors in accounting for the wear of diamond grits. The wear of diamond grits was also found to be closely related to the high temperatures generated at individual cutting points and the pop-outs of diamonds from the bond matrix might be mainly attributed to the heat conducte d to the segments. 展开更多
关键词 force temperature diamond sawing GRANITE dis parity
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Key Technologies and Development Trends in Advanced Intelligent Sawing Equipments 被引量:4
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作者 Yangyu Wang Yongle Zhang +1 位作者 Dapeng Tan Yongchao Zhang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2021年第3期175-194,共20页
As a starting point in equipment manufacturing,sawing plays an important role in industrial production.Intelligent manufacturing equipment is an important carrier of intelligent manufacturing technologies.Due to the b... As a starting point in equipment manufacturing,sawing plays an important role in industrial production.Intelligent manufacturing equipment is an important carrier of intelligent manufacturing technologies.Due to the backwardness of intelligent technology,the comprehensive performance of sawing equipments in China is obviously different from that in foreign countries.State of the art of advanced sawing equipments is investigated along with the technical bottleneck of sawing machine tool manufacturing,and a new industrial scheme of replacing turning-milling by sawing is described.The key technologies of processing-measuring integrated control,multi-body dynamic optimization,the collaborative sawing network framework,the distributed cloud sawing platform,and the self-adapting service method are analyzed;with consideration of the problems of poor processing control stableness,low single machine intelligence level,no on-line processing data service and active flutter suppression of sawing with wide-width and heavy-load working conditions.Suggested directions for further research,industry implementation,and industry-research collaboration are provided. 展开更多
关键词 sawing equipments Processing-measuring integrated control Collaborative sawing framework Intelligent network middleware sawing cloud service platform
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Simulation and prototype testing of multi-wire drift chamber arrays for the CEE 被引量:8
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作者 Li-Ming Lyu Han Yi +2 位作者 Li-Min Duan Zhao Zhang Zhi-Gang Xiao 《Nuclear Science and Techniques》 SCIE CAS CSCD 2020年第1期102-111,共10页
The building of a large-scale external-target experiment, abbreviated as CEE, in the cooling storage ring at the Heavy Ion Research Facility in Lanzhou has been planned. The CEE is a multi-purpose spectrometer that wi... The building of a large-scale external-target experiment, abbreviated as CEE, in the cooling storage ring at the Heavy Ion Research Facility in Lanzhou has been planned. The CEE is a multi-purpose spectrometer that will be used for various studies on heavy-ion collisions. A multi-wire drift chamber(MWDC) array is the forward tracking detector of the CEE. In this work, GEANT4 simulations were performed for the MWDC forward tracking array with a focus on the track reconstruction algorithm. Combined with the time of flight information,particle identification is achieved. The residue is about 30 μm, while the tracking efficiency is higher than 90%with the current redundancy. In addition, a prototype of the forward tracking system using three MWDCs was assembled and tested using a high-energy proton beam. The firing efficiency of the detector and the reconstruction accuracy of the prototype were derived. The track residue for the protons at about 400 MeV/c is better than 300 μm, meeting the requirements of the CEE. Suggestions for improving the performance of the forward tracking system are given. 展开更多
关键词 CEE multi-wire drift chamber array Track finding and reconstruction
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Polycrystalline diamond mini-cubes for sawing applications 被引量:1
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作者 Sung James C. Chang Kuen-liang +2 位作者 Tso Pei-lum Hsu Kai-hung Sung Michael 《金刚石与磨料磨具工程》 CAS 北大核心 2008年第S1期83-87,共5页
Diamond grits are indispensable for sawing granite or concrete.Each year about 1 000 tons of diamond grits are consumed for such purposes.In all cases,mono crystalline diamond is used.However, polycrystalline grits(po... Diamond grits are indispensable for sawing granite or concrete.Each year about 1 000 tons of diamond grits are consumed for such purposes.In all cases,mono crystalline diamond is used.However, polycrystalline grits(polygrits) are generally better performed than mono grits as abrasives.For example,poly grits of cubic boron nitride(e.g.Borazon(?) CBN-550 of Diamond Innovations) can cut faster and they last longer than mono grits(e.g.Borazon(?) CBN-500). Polygrits of alumina(e.g.Cubitron(?) of 3M) also out perform by far glassy grits(e.g.white alumina).For diamond superabrasives,micron polygrits formed by shock waves may polish as fast as mono grits of the same size,but without causing as much scratches due to the presence of smaller sintered grains.The improved performance of poly grits is attributed to their ability to micro chipping that renews the sharp cutting corners from time to time.By contrast,mono grits tend to round off at low cutting force or macro fracture at high cutting force,so they may lose the cutting ability rapidly. For sawing granite with mesh sizes 40/50 or coarser,poly grits of diamond have not been available until recently.In this research,we have made polygrits in mini cube with sizes of 18/20,20/25,and 30/40.Turbo grinders and wire saws were made by brazing both mono grits and polygrits on steel substrates.Cutting performance on granite demonstrated that grinding speed was faster with turbo grinder,and the surface finish was smoother with wire saw for poly grits than mono ones. Polygrits and mono grits of diamond were mixed for comparison(upper left).Polygrits of mini cubes were brazed on the pearl of a wire saw(upper right).Mono diamond grits were brazed on a turbo grinder(bottom diagrams ). 展开更多
关键词 GRANITE sawing diamond grits polygrits TURBO GRINDER wire saw
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Study on swarf when sawing granite with diamond wire 被引量:1
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作者 WU Hairong GUO Hua +1 位作者 ZHAO Ruyi HUANG Hui 《金刚石与磨料磨具工程》 CAS 北大核心 2018年第2期71-77,共7页
The diamond wire-sawing process was developed to cut granite in both quarries and block processing plants.In this paper,swarf was collected from different areas along the sawing arc when sawing three granites.The part... The diamond wire-sawing process was developed to cut granite in both quarries and block processing plants.In this paper,swarf was collected from different areas along the sawing arc when sawing three granites.The particle size distribution and the morphology of the swarf were investigated systematically,along with the swarf formation mechanism in sawing.Granite swarf formation was dominated by transgranular fractures based on the morphology of sawn granite chips and the analysis of sawn chip size.A long cutting arc increased the movement among the swarf,tool,and workpiece,thereby inducing a secondary fracture in the sawn chip. 展开更多
关键词 DIAMOND WIRE sawing GRANITE swarf
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Characterization of Band Sawing Dusts Generated in Cutting of Multi-crystalline Silicon Ingots 被引量:1
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作者 尹传强 周浪 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2010年第6期948-951,共4页
Physical-chemical characteristics of the band sawing dusts regarding to recovery of pure silicon from them were investigated.The experimental results show 50vol%-60vol% amorphous phases exist in the dusts,which is mos... Physical-chemical characteristics of the band sawing dusts regarding to recovery of pure silicon from them were investigated.The experimental results show 50vol%-60vol% amorphous phases exist in the dusts,which is mostly amorphous silica.The as-received saw dusts are found to form hard agglomerates of larger than 50 microns in diameter.The iron-based inclusions collected by magnets are found to match well with the band saw material in XRD patterns.Weight loss in heating was observed by thermal gravity tests,up to 900 ℃,presumably due to reaction of the amorphous silica with carbon contaminant in the dusts.The saw dusts were variously treated to examine their physical-chemical responses,and the results were also presented. 展开更多
关键词 silicon saw dust kerf loss PICKLING solar energy
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THE WEAR MODES AND MECHANISMS OFDIAMONDS IN SAWING HARD STONE 被引量:1
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作者 Wang Dianjiang(Department of Geology, Central South University of Technology,Changsha 410083, China) 《Journal of Central South University》 SCIE EI CAS 1996年第1期98-100,共3页
Four wear modes and four wear mechanisms of diamonds in sawblades are identified in a study of varied segments damaged in field operation of sawing hard stone. The four wear mechanisms are impactshearing, fatiguing, p... Four wear modes and four wear mechanisms of diamonds in sawblades are identified in a study of varied segments damaged in field operation of sawing hard stone. The four wear mechanisms are impactshearing, fatiguing, pullingout and thermal effects. Surface erosion is the result of thermal effects, while impactshearing and fatiguing lead to macro and microfracture, and pullingout results in wholesale dislodgement of diamonds provided the inequality Fn>M/(μλδ) is satisfied. 展开更多
关键词 diamond WEAR saw BLADE WEAR mechanism〖J
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Preparation and Optimization of High-Purity Silicon Carbide Magnetic Abrasives for the Magnetic Induction-Wire Sawing Process 被引量:2
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作者 Wei Zhang Tengwei Qiu Chunyan Yao 《Fluid Dynamics & Materials Processing》 EI 2020年第4期709-721,共13页
In this study,magnetic abrasives were obtained by crushing and sieving sintered iron-silicon carbide(Fe-SiC)composites.Fe and SiC powders with different mesh numbers were pre-compacted using different pressures and th... In this study,magnetic abrasives were obtained by crushing and sieving sintered iron-silicon carbide(Fe-SiC)composites.Fe and SiC powders with different mesh numbers were pre-compacted using different pressures and then sintered at various temperatures and with different holding times.The dispersion uniformity of the SiC powder was improved through surface modification using polyethylene glycol(PEG)300.The resulting magnetic abrasives were characterized in terms of phase composition,density,relative permeability,and microstructure;this was followed by a comprehensive analysis to reveal the optimal processing parameters.The ideal combination of process parameters for preparing SiC magnetic-abrasive grains for the magnetic induction-wire sawing process was obtained,which are preparation load of 60 kN,a SiC mesh number of 1,500,a sintering temperature of 1100℃,and a holding time of 4 h. 展开更多
关键词 Wire sawing magnetic abrasives SINTERING phase compositions
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小锤结构对SMR SAW谐振器的杂散抑制研究
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作者 韩捷 帅垚 +2 位作者 罗文博 吴传贵 张万里 《压电与声光》 北大核心 2025年第4期693-697,共5页
为了适应5G新频段的发展,研究了SMR SAW谐振器中小锤结构对谐振器性能的影响。通过二维和三维有限元仿真,研究了谐振器结构参数对性能的影响,并通过流片验证了仿真结果。仿真结果表明,在三小锤结构下,当小锤长度为1.6倍半周期时,谐振器... 为了适应5G新频段的发展,研究了SMR SAW谐振器中小锤结构对谐振器性能的影响。通过二维和三维有限元仿真,研究了谐振器结构参数对性能的影响,并通过流片验证了仿真结果。仿真结果表明,在三小锤结构下,当小锤长度为1.6倍半周期时,谐振器的横向模态杂散较弱。提出一种新型的双小锤加权结构,通过在谐振器的上、下半部分分别设置不同长度的小锤,进一步抑制了带内杂散,提高了谐振器的性能。实验结果表明,双小锤加权结构在抑制带内杂散方面效果明显,谐振器的机电耦合系数和阻抗比得到提升。 展开更多
关键词 SMR saw 小锤结构 双小锤加权结构 阻抗比 横向模态杂散
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NUMERICAL SIMULATION OF HOT SAWING PROCESS
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作者 X. Hong and K.G. Wu Shanghai University, Shanghai 200072, China 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2000年第2期692-696,共5页
The present paper gives a numerical simulation of hot sawing process by using elastic- plastic finite element method. The simulation is carried out for the moment from the beginning of deformation to the local yield i... The present paper gives a numerical simulation of hot sawing process by using elastic- plastic finite element method. The simulation is carried out for the moment from the beginning of deformation to the local yield in work piece. In order to treat the work hardening on deformation resistance, a correction of stress based on deformation rate is taken into consideration. The calculation results shows, there are two stress peaks both on the lower and upper sides ahead of the tooth tip during the elastic press stage, in which the displacement of tooth is below 0.735*10-6 cm. Following the push of saw tooth and rise of saw load, metal at the corner of filing reaches the yield point and a local plastic area appears,where metal shapes new filing part towards the free surface under the extrusion forces. Meanwhile the stress peaks ahead of tooth tip initial also yield regions. The displacement of saw tooth is between 0.735*10-6cm and 1.274*10-6cm in this stage. With the further push of the saw tooth, metal bounded to tooth tip is torn under the combination of tensile and sheer stress. The slide of metal and its local plastic flow form the extension of filing. Then the saw load rises no longer and static sawing procedure continues. 展开更多
关键词 numerical simulation hot sawing elastic-plastic finite element method
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Effect of Cutting Speed on Surface Quality by Bandsawing
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作者 于建国 LiangkaiTING 《Journal of Forestry Research》 SCIE CAS CSCD 1997年第4期246-249,共4页
The surface profile behavior of workpieces sawn has been investigated. Six species were sawn under the condi-tion of four different kinds of cutting speed by the band saw. The real surface profile of a sawn workpiecc ... The surface profile behavior of workpieces sawn has been investigated. Six species were sawn under the condi-tion of four different kinds of cutting speed by the band saw. The real surface profile of a sawn workpiecc is composed of twosections, which arc the additivity of the waviness of filtered wave and roughness curve. The roughness of center line avernge aswell as amplitude decrease with the increasing of cutting speed for different kinds of species used in the experiment. 展开更多
关键词 Band saw. CUTTING speed. Profile curve. WAVINESS or filtered wave. ROUGHNESS CURVE ROUGHNESS of center line AVERAGE
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Experimental study of free abrasive wire sawing by using multi-strands wire
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作者 Yao Chunyan Wang Jinsheng +2 位作者 Peng Wei Jin Xin Chen Shijie 《Engineering Sciences》 EI 2013年第6期80-84,共5页
Grains in the slurry can be brought into cutting zone by steel wire with a certain speed to achieve the purpose of removing the workpiece material in the free abrasive wire sawing machining. Because its own of multi- ... Grains in the slurry can be brought into cutting zone by steel wire with a certain speed to achieve the purpose of removing the workpiece material in the free abrasive wire sawing machining. Because its own of multi- strands characteristics, we use it to replace the steel wire to do slicing experiment. In this paper, multi-strands wire is made by seven metal wires and has many grooves on its surface. Compared with steel wire, it can carry more grains into cutting zone which is conducive to improving the slicing efficiency. We do some comparative slic- ing experimcnts by applying multi-strands wire (~b0.25 mm) and steel wire (~b0.25 mm) to cut optical glass (K9). The results show that slicing efficiency and the surface roughness of the workpiece sliced by using multi-strands wire are better than that by using steel wire. but the kerf width of the former is wider than that of the latter in the same experimental conditions. 展开更多
关键词 wire saw free abrasive machining slicing efficiency
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TC-SAW SiO_(2)温补层性能研究
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作者 贺贞 李燕 +3 位作者 田本朗 马晋毅 肖强 梁柳洪 《压电与声光》 北大核心 2025年第1期88-91,共4页
为制备高性能的TC-SAW SiO_(2)温补层,分别采用电子束蒸发镀膜和反应磁控溅射制备SiO_(2)薄膜,研究两种制备工艺对SiO_(2)薄膜致密性、表面粗糙度及弹性模量的影响。采用扫描电子显微镜、原子力显微镜、X线衍射仪对SiO_(2)薄膜的形貌和... 为制备高性能的TC-SAW SiO_(2)温补层,分别采用电子束蒸发镀膜和反应磁控溅射制备SiO_(2)薄膜,研究两种制备工艺对SiO_(2)薄膜致密性、表面粗糙度及弹性模量的影响。采用扫描电子显微镜、原子力显微镜、X线衍射仪对SiO_(2)薄膜的形貌和晶体结构进行分析。采用椭偏仪测试薄膜折射率及腐蚀后的膜厚变化量,并通过纳米压痕仪测量计算薄膜的硬度和弹性模量。结果表明,反应磁控溅射制备的SiO_(2)薄膜更致密、薄膜表面粗糙度更小、弹性模量更大。采用反应磁控溅射制备的SiO_(2)薄膜作为TC-SAW温补层,可以获得频率温度系数为-8.6×10^(-6)/℃的TC-SAW器件。 展开更多
关键词 TC-saw SiO_(2)温补层 反应磁控溅射
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SAW芯片的质量控制与可靠性测试方法的研究
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作者 艾毅智 杨怡 陈虹羽 《压电与声光》 北大核心 2025年第1期92-97,共6页
随着通信设备向便携化、轻薄化发展,对SAW芯片的小体积、高性能需求逐渐增加,为确保产品交付质量,需要在芯片研发、生产过程中开展有效的质量控制和可靠性测试。通过对SAW芯片故障模式及影响的分析,找出了设计和生产过程存在的风险点,... 随着通信设备向便携化、轻薄化发展,对SAW芯片的小体积、高性能需求逐渐增加,为确保产品交付质量,需要在芯片研发、生产过程中开展有效的质量控制和可靠性测试。通过对SAW芯片故障模式及影响的分析,找出了设计和生产过程存在的风险点,制定质量控制措施并研究可靠性测试方法,提升了芯片合格率,进而验证了质量控制措施和可靠性测试方法的有效性,在业内具有一定的借鉴意义。 展开更多
关键词 saw芯片 失效模式 质量控制 可靠性
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用于塑封模组的SAW器件封装可靠性研究
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作者 温桎茹 杨桃均 +3 位作者 向星诚 蒲志勇 米佳 唐盘良 《压电与声光》 北大核心 2025年第5期823-827,共5页
针对塑封射频模组中使用不同封装SAW器件的设计方案,采用有限元数值模拟技术计算模组内部器件在温度循环载荷下的应力分布,根据可靠性试验和显微检测分析了模组的电学性能和内部结构状态。研究表明,CSP封装(芯片级封装)SAW器件在塑封模... 针对塑封射频模组中使用不同封装SAW器件的设计方案,采用有限元数值模拟技术计算模组内部器件在温度循环载荷下的应力分布,根据可靠性试验和显微检测分析了模组的电学性能和内部结构状态。研究表明,CSP封装(芯片级封装)SAW器件在塑封模组中承受温度循环载荷下的应力较高,在实际试验中大部分样品出现了电学性能异常、内部键合点断开的现象;WLP封装(晶圆级封装)SAW器件在塑封模组中承受温度循环载荷下的应力较低,该方案模组样品在试验过程中具有很好的稳定性。 展开更多
关键词 saw器件封装 塑封射频模组 可靠性 有限元数值模拟
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双通道协同解耦SAW应变传感器的结构设计与制造
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作者 郑引荣 梁晓瑞 谭秋林 《微纳电子技术》 2025年第7期45-51,共7页
为满足发动机、燃气轮机等高温高旋环境下关键部件的健康监测需求,基于硅酸镓镧(LGS)基底,提出了一种双通道协同解耦的高温稳定型声表面波(SAW)应变传感结构。该传感系统采用独特的90°空间正交布局设计,由两个高性能谐振器构成传... 为满足发动机、燃气轮机等高温高旋环境下关键部件的健康监测需求,基于硅酸镓镧(LGS)基底,提出了一种双通道协同解耦的高温稳定型声表面波(SAW)应变传感结构。该传感系统采用独特的90°空间正交布局设计,由两个高性能谐振器构成传感单元对。通过高温稳定的铂浆料和铂丝引线,实现传感元件在800℃极端环境下的可靠互连。通过优化设计双通道协同解耦算法,可有效消除温度引起的干扰,在25~800℃的宽温域范围内实现0~600με的应变测量,且在全温范围内表现出卓越的稳定性,解耦误差控制在-6.8%~+7.6%之间,为极端环境监测提供了高可靠性的解决方案。 展开更多
关键词 并联声表面波(saw)应变传感器 硅酸镓镧(LGS) 双通道协同解耦 宽应变 耐高温
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