LIGA technique has been developed since 1993 at BSRF, including the fabrication of LIGA mask, deep X ray lithography, electroplating, the pouring molding and the applications in some fields. The LIGA mask with gold ab...LIGA technique has been developed since 1993 at BSRF, including the fabrication of LIGA mask, deep X ray lithography, electroplating, the pouring molding and the applications in some fields. The LIGA mask with gold absorbing structures of 20μm thickness and 5μm width and Kapton membrane of around 5μm thickness has been successfully fabricated and applied to the deep X ray lithography with the PMMA structure of 1mm thickness or above. The beamline from a wiggler is used for the deep X ray lithography of LIGA station and is open to other institutes researching the deep X ray lithography. The normal process of LIGA technique with the exception of molding has been established with the PMMA structures of 500μm thickness at BSRF. The largest aspect ratio of PMMA structures can reach about 50 with the height of 500μm and the lateral size of 10μm. The nickel and copper structures with the thickness of 0.5mm and 1mm have been made by using the electroplating technique. The SU8 as a resist material of deep etch lithography with UV light is also developed in the fabrication of LIGA mask and some devices at BSRF.Electromagnetic stepping micro motor, heat exchange, accelerator, structures used in the EDM (electro discharge machining) are being developed for the future applications.展开更多
Long-term continuous monitoring is essential for the Internet of Things(IoT),with efficient power use and sustainable energy supply as core challenges.This study presents a MEMS-based self-holding acoustic switch desi...Long-term continuous monitoring is essential for the Internet of Things(IoT),with efficient power use and sustainable energy supply as core challenges.This study presents a MEMS-based self-holding acoustic switch designed for uninterrupted monitoring of specific acoustic signals with zero power consumption.Microelectromechanical systems(MEMS)refer to miniaturized devices that integrate mechanical and electrical components on a single microchip.A mathematical model is developed to analyze the switch’s acoustic frequency response.Simulations and experiments demonstrate its acoustic-driven properties.Acoustic switches with different structural parameters are designed,achieving resonant frequencies ranging from 192 Hz to 862 Hz.Electrostatic voltages are applied to enable self-holding functionality,and the acoustic switch exhibits a contact resistance as low as 29.3 U.The acoustic switch successfully performs various functions,including acoustic sensing,frequency identification,on–off control,and self-holding,all without drawing power from an external power supply.By integrating this acoustic switch,a zero-power self-aware microsystem platform is realized,allowing zero-power sleep states without closed-loop circuits while remaining responsive to target acoustic signals.This technology effectively supports long-term,large-scale deployment of unattended IoT terminals.展开更多
In response to the call for zero-carbon energy supply for Internet of Things(IoTs)applications and to get rid of the dependence of traditional distributed IoTs devices on batteries,the invention of nanogenerators that...In response to the call for zero-carbon energy supply for Internet of Things(IoTs)applications and to get rid of the dependence of traditional distributed IoTs devices on batteries,the invention of nanogenerators that can convert wind energy in the surrounding environment into electrical energy have received widespread attention.Herein,a wind energy hybrid harvester(WH-EH)combining a soft-friction and positive-directional triboelectric nanogenerator(SP-TENG)and a hierarchical rotating electromagnetic nanogenerator(HR-EMG)is reported to construct a self-powered forest environment monitoring microsystem.With the design of thin inner wall beams and comb-shaped electrodes,the SP-TENG is able to change the output into positivedirectional,which can be stored directly in the energy storage device,breaking the limitation of the alternating positive and negative output of conventional TENGs.In addition,the HR-EMG embeds coils in the cup lid to make the most of the available space in the external package.In the WH-EH,a layered structure,including the HR-EMG and SP-TENG is adopted to jointly utilize wind energy for both higher output and higher utilization.In order to effectively implement wireless monitoring of the forest environment,the WH-EH is further utilized to develop a self-powered forest environment monitoring microsystem by powering the IoTs sensor nodes,realizing ambient temperature and humidity sampling and wireless transmission,so as to achieve the purpose of preventing forest fires.It is believed that the development of the WH-EH and the self-powered forest environment monitoring microsystem provides diverse options for the practicalization of self-powered IoTs systems and the energy supply problem of IoTs sensor networks.展开更多
文摘LIGA technique has been developed since 1993 at BSRF, including the fabrication of LIGA mask, deep X ray lithography, electroplating, the pouring molding and the applications in some fields. The LIGA mask with gold absorbing structures of 20μm thickness and 5μm width and Kapton membrane of around 5μm thickness has been successfully fabricated and applied to the deep X ray lithography with the PMMA structure of 1mm thickness or above. The beamline from a wiggler is used for the deep X ray lithography of LIGA station and is open to other institutes researching the deep X ray lithography. The normal process of LIGA technique with the exception of molding has been established with the PMMA structures of 500μm thickness at BSRF. The largest aspect ratio of PMMA structures can reach about 50 with the height of 500μm and the lateral size of 10μm. The nickel and copper structures with the thickness of 0.5mm and 1mm have been made by using the electroplating technique. The SU8 as a resist material of deep etch lithography with UV light is also developed in the fabrication of LIGA mask and some devices at BSRF.Electromagnetic stepping micro motor, heat exchange, accelerator, structures used in the EDM (electro discharge machining) are being developed for the future applications.
基金supported in part by the National Key Research and Development Program(Grant No.2023YFB3211200)the National Nature Science Foundation of China(Grant No.U21A6003 and L2324213).
文摘Long-term continuous monitoring is essential for the Internet of Things(IoT),with efficient power use and sustainable energy supply as core challenges.This study presents a MEMS-based self-holding acoustic switch designed for uninterrupted monitoring of specific acoustic signals with zero power consumption.Microelectromechanical systems(MEMS)refer to miniaturized devices that integrate mechanical and electrical components on a single microchip.A mathematical model is developed to analyze the switch’s acoustic frequency response.Simulations and experiments demonstrate its acoustic-driven properties.Acoustic switches with different structural parameters are designed,achieving resonant frequencies ranging from 192 Hz to 862 Hz.Electrostatic voltages are applied to enable self-holding functionality,and the acoustic switch exhibits a contact resistance as low as 29.3 U.The acoustic switch successfully performs various functions,including acoustic sensing,frequency identification,on–off control,and self-holding,all without drawing power from an external power supply.By integrating this acoustic switch,a zero-power self-aware microsystem platform is realized,allowing zero-power sleep states without closed-loop circuits while remaining responsive to target acoustic signals.This technology effectively supports long-term,large-scale deployment of unattended IoT terminals.
基金supported by the National Natural Science Foundation of China (Grant Nos. 62074029, 61804023, and 61971108)the Key R&D Program of Sichuan Province (Grant Nos. 2022JDTD0020 and2020ZHCG0038)+1 种基金the Sichuan Science and Technology Program (Grant Nos. 2020JDJQ0036, 2019YJ0198, and 2020YJ0015)the Fundamental Research Funds for the Central Universities (Grant No. ZYGX2019Z002)
文摘In response to the call for zero-carbon energy supply for Internet of Things(IoTs)applications and to get rid of the dependence of traditional distributed IoTs devices on batteries,the invention of nanogenerators that can convert wind energy in the surrounding environment into electrical energy have received widespread attention.Herein,a wind energy hybrid harvester(WH-EH)combining a soft-friction and positive-directional triboelectric nanogenerator(SP-TENG)and a hierarchical rotating electromagnetic nanogenerator(HR-EMG)is reported to construct a self-powered forest environment monitoring microsystem.With the design of thin inner wall beams and comb-shaped electrodes,the SP-TENG is able to change the output into positivedirectional,which can be stored directly in the energy storage device,breaking the limitation of the alternating positive and negative output of conventional TENGs.In addition,the HR-EMG embeds coils in the cup lid to make the most of the available space in the external package.In the WH-EH,a layered structure,including the HR-EMG and SP-TENG is adopted to jointly utilize wind energy for both higher output and higher utilization.In order to effectively implement wireless monitoring of the forest environment,the WH-EH is further utilized to develop a self-powered forest environment monitoring microsystem by powering the IoTs sensor nodes,realizing ambient temperature and humidity sampling and wireless transmission,so as to achieve the purpose of preventing forest fires.It is believed that the development of the WH-EH and the self-powered forest environment monitoring microsystem provides diverse options for the practicalization of self-powered IoTs systems and the energy supply problem of IoTs sensor networks.
