Three-dimensional(3D) single-layer microcoils have always been a key element for electromagnetic systems;but they lack an easy and accurate method to calculate the inductance value for their complex 3D micro-structure...Three-dimensional(3D) single-layer microcoils have always been a key element for electromagnetic systems;but they lack an easy and accurate method to calculate the inductance value for their complex 3D micro-structures. This paper employed a curve-fitting process to obtain the associated equation for the inductance value and geometric parameters based on the simulation results. The correction factors regarding helical pitch and wire diameter were reviewed,which are used for compensation in the Nagaoka formula. The simulation process numerically simulated the performance of the 3D microcoils using a FEM electro-magnetic-coupled analysis method. Comparison of the simulated inductance value and the Nagaoka formula was undertaken,which shows that the helical pitch and wire diameter contribute a main role in the calculation error. The derived formula was expressed in a concise form to precisely calculate the inductance value of 3D microsolenoids with single-layer coils.展开更多
The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on...The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on the forces, which are result of interaction of the electromagnetic (EM) field components with the parts of motion devices of MEMS. The given analytical formulas open the ability to calculate the self-inductance of the microsolenoids of the different kind, as well as the stored energy of such motion devices, that could be used for the modeling and optimization of parameters of running devices of MEMS such as actuators, sensors etc.展开更多
基金supported by the National Science Foundation of China under the Grant No.61176113 and 51335008the Special-funded program on national key scientific instruments and equipment development of China under the Grant No.2012YQ12004706the Program for Changjiang Scholars and Innovative Research Team in University(IRT1033)。
文摘Three-dimensional(3D) single-layer microcoils have always been a key element for electromagnetic systems;but they lack an easy and accurate method to calculate the inductance value for their complex 3D micro-structures. This paper employed a curve-fitting process to obtain the associated equation for the inductance value and geometric parameters based on the simulation results. The correction factors regarding helical pitch and wire diameter were reviewed,which are used for compensation in the Nagaoka formula. The simulation process numerically simulated the performance of the 3D microcoils using a FEM electro-magnetic-coupled analysis method. Comparison of the simulated inductance value and the Nagaoka formula was undertaken,which shows that the helical pitch and wire diameter contribute a main role in the calculation error. The derived formula was expressed in a concise form to precisely calculate the inductance value of 3D microsolenoids with single-layer coils.
文摘The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on the forces, which are result of interaction of the electromagnetic (EM) field components with the parts of motion devices of MEMS. The given analytical formulas open the ability to calculate the self-inductance of the microsolenoids of the different kind, as well as the stored energy of such motion devices, that could be used for the modeling and optimization of parameters of running devices of MEMS such as actuators, sensors etc.
